Mechanical arm

Abstract

The utility model provides a mechanical arm. The mechanical arm comprises a first arm, a second arm, a first carrier plate and a second carrier plate which are connected with one another. The first arm comprises a first rotating motor, a first belt gear set, a first speed changing module and a first arm part which are connected in sequence. The second arm comprises a second rotating motor, a second belt gear set, a second speed change module and a second arm part which are connected in sequence. The first carrier plate comprises a third rotating motor, a third belt gear set, a third speed change module and a first plate body which are connected in sequence. The second carrying plate comprises a fourth rotating motor, a fourth belt gear set, a fourth speed changing module and a second plate body which are connected with one another. The second rotating motor, the third rotating motor and the fourth rotating motor are respectively arranged in the first arm part. According to the mechanical arm, the overall load bearing capacity is improved through the rigid components at the joints.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of mechanical arms. BACKGROUND

[0002] Whether it is semiconductor process or panel process, it is common automatic technology to transport substrate or wafer by mechanical arm.

[0003] But in the mechanism of existing mechanical arm, the joint between multi-section arm is still driven member with belt. But joint is the force concentration area (or torque generated by force) of mechanical arm, and belt is prone to transmission flexibility due to large load, and thus reduces its service life and affects the positioning stability after action stops.

[0004] Accordingly, how to improve the load tolerance of mechanical arm is a problem that needs to be considered and solved by relevant technical personnel. UTILITY MODEL CONTENT

[0005] The utility model is directed to a kind of mechanical arms, which improves the overall load bearing capacity by rigid member at joint.

[0006] According to the embodiment of the utility model, the mechanical arm includes first arm, second arm, first carrier plate and second carrier plate connected with each other. The first arm includes first rotary motor, first belt gear set, first speed change module and first arm portion connected in sequence, the first rotary motor provides power, and drives the first arm portion to rotate through the first belt gear set and the first speed change module. The second arm includes second rotary motor, second belt gear set, second speed change module and second arm portion connected in sequence, the second rotary motor provides power, and drives the second arm portion to rotate through the second belt gear set and the second speed change module. The first carrier plate includes third rotary motor, third belt gear set, third speed change module and first plate body connected in sequence, the third rotary motor provides power, and drives the first plate body to rotate through the third belt gear set and the third speed change module. The second carrier plate includes fourth rotary motor, fourth belt gear set, fourth speed change module and second plate body connected with each other, the fourth rotary motor provides power, and drives the second plate body through the fourth belt gear set and the fourth speed change module. The second rotary motor, the third rotary motor and the fourth rotary motor are respectively arranged in the first arm portion.

[0007] In the mechanical arm according to the embodiment of the utility model, the first rotary motor drives the first arm portion to rotate along the first shaft through the first belt gear set and the first speed change module.

[0008] In the mechanical arm according to the embodiment of the utility model, the above-mentioned second arm is pivoted to the first arm along the second shaft, the first carrier plate and the second carrier plate are respectively pivoted to the second arm along the third shaft, and the second shaft is parallel to the third shaft.

[0009] In the robotic arm according to an embodiment of the present invention, the above-mentioned first belt gear set includes a first gear, a first belt and a second gear connected in sequence, the first gear is set on the first rotating motor, and the second gear, the first speed change module and the first arm are coaxially arranged.

[0010] In the robotic arm according to an embodiment of the present invention, the second belt gear set includes a third gear, a second belt and a fourth gear connected in sequence, the third gear is arranged on the second rotating motor, and the fourth gear is coaxially arranged with the second speed change module.

[0011] In the robotic arm according to an embodiment of the present invention, the above-mentioned second speed change module is located at the pivot point between the first arm and the second arm, the second arm is fixed on the second speed change module, and the second rotating motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed change module.

[0012] In the robotic arm according to an embodiment of the present invention, the third belt-gear assembly includes a fifth gear, a third belt, and a sixth gear, which are sequentially connected and arranged on the first arm; a first transmission shaft, which extends along the second axis through the first and second arms; and a seventh gear, a fourth belt, and an eighth gear, which are sequentially connected and arranged on the second arm. The fifth gear is mounted on the third rotating motor; the sixth gear, the first transmission shaft, and the seventh gear are coaxially arranged; and the eighth gear is coaxially arranged with the third speed change module.

[0013] In the robotic arm according to an embodiment of the present invention, the above-mentioned first plate is fixed on the third speed change module, and the third rotating motor drives the first plate to rotate relative to the second arm through the third belt gear set, the third belt gear set and the third speed change module.

[0014] In the robotic arm according to an embodiment of the present invention, the fourth belt-gear assembly includes a ninth gear, a fifth belt, and a tenth gear, which are sequentially connected and disposed on the first arm; a second transmission shaft, which passes through the first and second arms; and an eleventh gear, a sixth belt, and a twelfth gear, which are sequentially connected and disposed on the second arm. The ninth gear is disposed on the fourth rotating motor; the tenth gear, the second transmission shaft, and the eleventh gear are coaxially disposed; and the twelfth gear is coaxially disposed with the fourth speed change module.

[0015] In the robotic arm according to an embodiment of the present invention, the fourth belt gear set further includes a third transmission shaft, and the second plate is fixed to the fourth speed change module via the third transmission shaft.

[0016] In the mechanical arm according to the embodiment of the utility model, further include base and lifting mechanism, lifting mechanism set up in base, and lifting mechanism includes fifth rotating motor, fifth belt gear group, screw rod, driven part, lifting platform, sliding block and track connected in turn. Sliding block is movably coupled to track, lifting platform is assembled to sliding block and driven part, fifth rotating motor drives lifting platform to lift relative to base through fifth belt gear group, screw rod, driven part, first arm part is assembled to lifting platform through first speed change module.

[0017] In the mechanical arm according to the embodiment of the utility model, the third belt gear group includes a first transmission shaft, and the fourth belt gear group includes a second transmission shaft, and the first transmission shaft and the second transmission shaft are coaxially arranged.

[0018] In the mechanical arm according to the embodiment of the utility model, the second transmission shaft is connected to the second arm part from the first arm part through the second speed change module, and the first transmission shaft is connected to the second arm part from the first arm part through the second transmission shaft.

[0019] In the mechanical arm according to the embodiment of the utility model, the third speed change module, the first carrier plate and the second carrier plate are arranged on the first side of the second arm part, and the fourth speed change module is arranged on the second side of the second arm part. The first side and the second side are opposite sides of the second arm part.

[0020] In the mechanical arm according to the embodiment of the utility model, the fourth belt gear group includes a third transmission shaft, and the third transmission shaft is connected to the second carrier plate from the fourth speed change module through the second arm part and the first carrier plate.

[0021] Based on the above, the mechanical arm includes four main structural members of the first arm, the second arm, the first carrier plate and the second carrier plate connected to each other, wherein each structural member has an arm part (or a plate body) and a rotating motor, a belt gear group and a speed change module arranged in the arm part (or the plate body). Accordingly, each structural member is an individual that can be independently driven, and the driving mode is not complex and is not easy to control due to the linkage relationship, thereby simplifying the algorithm complexity of the controller required by the mechanical arm. Furthermore, the rotating motors of the second arm, the first carrier plate and the second carrier plate are arranged in the first arm part of the first arm, so that the driving source of the mechanical arm can be concentrated, and assembly, replacement and maintenance are facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a schematic view of a mechanical arm according to an embodiment of the utility model;

[0023] Figure 2A is Figure 1 a partial component schematic view of the mechanical arm;

[0024] Figure 2B isFigure 2A exploded view of components of

[0025] Figure 3A partial component side view of the first arm and the second arm;

[0026] Figure 3B schematic view of a plurality of rotary motors within the first arm portion;

[0027] Figure 4A and Figure 4B are partial cross-sectional views of the robot arm at different locations, respectively;

[0028] Figure 5 show the relevant structural components of the robot arm and their corresponding relationships in a simple block diagram. DETAILED DESCRIPTION

[0029] Reference will now be made in detail to the exemplary embodiments of the present application, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.

[0030] Figure 1 is a schematic view of a robot arm according to an embodiment of the present application. Please refer to Figure 1 The robot arm 100 includes a first arm 110, a second arm 120, a first carrier plate 130, and a second carrier plate 140 connected to each other, wherein the first arm 110 is movably disposed on a base 150, the second arm 120 is pivotally connected to the first arm 110, and the first carrier plate 130 and the second carrier plate 140 are respectively pivotally connected to the second arm 120. Here, the first carrier plate 130 and the second carrier plate 140 are each used to carry and fix a wafer 200 for transportation.

[0031] Figure 2A is a partial component schematic view of the robot arm of Figure 1 Figure 2B is a partial component schematic view of the robot arm of Figure 2A Figure 1 Figure 2A Figure 2B ​​​​In this embodiment, the robot arm 100 further comprises a base 150, and the first arm 110 comprises a first rotary motor 111, a first belt gear set 112, a first gear module 113 and a first arm portion 114 connected in sequence, the first rotary motor 111 provides power and drives the first arm portion 114 to rotate along the first axis AX1 through the first belt gear set 112 and the first gear module 113. Here, the first gear module 113 is, for example, a reduction bearing, a harmonic reducer single module or a module composed of a harmonic reducer core component plus a bearing and a self-made structure. The first belt gear set 112 comprises a first gear 112a, a first belt 112b and a second gear 112c connected in sequence, the first gear 112a is arranged on the first rotary motor 111, the second gear 112c, the first gear module 113 and the first arm portion 114 are coaxially arranged (i.e. along the first axis AX1), and the first belt 112b is connected between the first gear 112a and the second gear 112c to serve as a transmission.

[0032] Furthermore, the robot arm 100 further comprises a lifting mechanism 160, the lifting mechanism 160 comprises a fifth rotary motor 161, a transmission assembly 162, a lifting platform 163, a track 164 and a sliding block 165, wherein the transmission assembly 162 comprises a fifth belt gear set 162a, a screw rod 162b and a driven part 162c. The fifth rotary motor 161 is arranged in the column of the base 150, and the fifth belt gear set 162a located at the top of the base 150 is connected. The fifth belt gear set 162a comprises two gears and a belt connected and transmitting therebetween, wherein one gear is coaxially arranged on the fifth rotary motor 161 to transmit power to the other gear when the fifth rotary motor 161 is actuated. The screw rod 162b is arranged on one side of the base 150, and one end of the screw rod 162b is coaxially connected to the other gear. The driven part 162c is coupled to the screw rod 162b, so that when the screw rod 162b is rotated by the fifth rotary motor 161, the fifth belt gear set 162a, the driven part 162c can be driven to lift relative to the base 150.

[0033] Further, the track 164 is arranged on the other side of the column of the base 150, the sliding block 165 is movably coupled to the track 164, the lifting platform 163 is assembled to the sliding block 165 and the driven part 162c, and the fifth rotary motor 161 drives the lifting platform 163 to lift relative to the base 150 through the fifth belt gear set 162a, the screw rod 162b and the driven part 162c. The first arm portion 114 of the first arm 110 is assembled to the lifting platform 163 through the first gear module 113, and at the same time, the first rotary motor 111 is supported on the base 150 (when the lifting platform 163 is at the lowest position).

[0034] Figure 3AFig. 2 shows a partial component side view of the first arm and the second arm. Figure 3B is a schematic diagram of the plurality of rotary motors within the first arm portion to identify the configuration relationship of the rotary motors through a perspective view. Please refer to Figure 3A and Figure 3B In this embodiment, the second arm 120 comprises a second rotary motor 121, a second belt gear set 122, a second transmission module 123 and a second arm portion 124 connected in sequence, the second rotary motor 121 provides power and drives the second arm portion 124 to rotate relative to the first arm portion 114 along the second axis AX2 through the second belt gear set 122 and the second transmission module 123.

[0035] Further, the second arm 120 is substantially pivoted to the first arm 110 along the second axis AX2, wherein the first axis AX1 is parallel to the second axis AX2. The second belt gear set 122 comprises a third gear 122a, a second belt 122b and a fourth gear 122c connected in sequence, the third gear 122a is arranged at the second rotary motor 121, and the fourth gear 122c is arranged coaxially (along the second axis AX2) with the second transmission module 123. The second transmission module 123 is located at the pivoting position of the first arm 110 and the second arm 120, the second arm portion 124 is fixed on the second transmission module 123, and the second rotary motor 121 drives the second arm portion 124 to rotate relative to the first arm portion 114 along the second axis AX2 through the second belt gear set 122 and the second transmission module 123. Here, the components of the second transmission module 123 are the same as the first transmission module 113 as described above, only the form specifications are adjusted according to the adapted components.

[0036] Figure 4A and Figure 4B are partial cross-sectional views of the robotic arm at different positions. Figure 5 The relevant structural components of the robotic arm and their corresponding relationships are shown in a simple block diagram, wherein Figure 5 The arms and corresponding structural components of this embodiment can be comprehended through a simple diagram. Please refer to Figure 4A , Figure 4B and Figure 5In the present embodiment, the first carrier plate 130 includes a third rotary motor 131, a third belt gear set 132, a third speed change module 133, and a first plate body 134 connected in sequence, the third rotary motor 131 provides power and drives the first plate body 134 to rotate along a third axis AX3 through the third belt gear set 132 and the third speed change module 133. The first axis AX1, the second axis AX2, and the third axis AX3 are parallel to each other. Further, the second carrier plate 140 includes a fourth rotary motor 141, a fourth belt gear set 142, a fourth speed change module 143, and a second plate body 144 connected in sequence, the fourth rotary motor 141 provides power and drives the second plate body 144 to rotate through the fourth belt gear set 142 and the fourth speed change module 143.

[0037] Further, for the first carrier plate 130, the third rotary motor 131 is disposed in the first arm portion 114, the third belt gear set 132 includes a fifth gear 132a, a third belt 132b, and a sixth gear 132c disposed in the first arm portion 114 and connected in sequence, a first transmission shaft 132d penetrating the first arm portion 114 and the second arm portion 124 along the second axis AX2, and a seventh gear 132e, a fourth belt 132f, and an eighth gear 132g disposed in the second arm portion 124 and connected in sequence. The fifth gear 132a is disposed in the third rotary motor 131, the sixth gear 132c, the first transmission shaft 132d, and the seventh gear 132e are coaxially (same along the second axis AX2) disposed, and the eighth gear 132g is coaxially (same along the third axis AX3) disposed with the third speed change module 133. The first plate body 134 is fixed on the third speed change module 133, and the third rotary motor 131 drives the first plate body 134 to rotate relative to the second arm portion 124 through the third belt gear set 132 and the third speed change module 133.

[0038] The fourth belt-gear assembly 142 includes a ninth gear 142a, a fifth belt 142b, and a tenth gear 142c, which are disposed on the first arm 114 and connected in sequence. A second transmission shaft 142d, which passes through the first arm 114 and the second arm 124, and an eleventh gear 142e, a sixth belt 142f, and a twelfth gear 142g, which are disposed on the second arm 124 and connected in sequence. The ninth gear 142a is disposed on the fourth rotary motor 141. The tenth gear 142c, the second transmission shaft 142d, and the eleventh gear 142e are coaxially arranged (along the second axis AX2). The twelfth gear 142g is coaxially arranged (along the third axis AX3) with the fourth speed change module 143. The fourth belt gear assembly 142 also includes a third transmission shaft 142h. The second plate 144 is fixed to the fourth speed-changing module 143 via the third transmission shaft 142h. This allows the fourth rotary motor 141 to drive the second plate 144 to rotate relative to the second arm 124 along the third axis AX3 via the fourth belt gear assembly 142 and the fourth speed-changing module 143. The components of the third speed-changing module 133 and the fourth speed-changing module 143 are similar to those of the first speed-changing module 113 or the second speed-changing module 123 described above, with only the form and specifications being adjusted to suit the corresponding components.

[0039] As Figure 5 As shown, in this embodiment, the third belt gear set 132 includes a first transmission shaft 132d, and the fourth belt gear set 142 includes a second transmission shaft 142d. The first transmission shaft 132d and the second transmission shaft 142d are coaxially arranged (along the second axis AX2). The second transmission shaft 142d extends from the first arm 114 through the second speed change module 123 to connect to the second arm 124, while the first transmission shaft 132d extends from the first arm 114 through the second transmission shaft 142d to connect to the second arm 124. The third speed change module 133, the first carrier plate 130, and the second carrier plate 140 are arranged on a first side of the second arm 124, while the fourth speed change module 143 is arranged on a second side of the second arm 124. The first side and the second side are opposite sides of the second arm 124. The fourth belt gear set 142 includes a third transmission shaft 142h, which extends from the fourth speed change module 143 through the second arm 124 and the first plate 134 to connect to the second plate 144.

[0040] from Figure 5 As can be clearly seen, the robotic arm 100 of this embodiment has the second rotary motor 121, the third rotary motor 131, and the fourth rotary motor 141 respectively disposed within the first arm portion 114. Therefore, each structural component of the robotic arm 100 (i.e., the first arm portion 114, the second arm portion 124, the first plate 134, and the second plate 144) can be independently driven and assembled and disassembled. This avoids design and structural complexity caused by structural linkages and also facilitates assembly, maintenance, and replacement of structural components.

[0041] Furthermore, the two pivotally connected structural members are connected by the speed change modules (the second speed change module 123, the third speed change module 133, and the fourth speed change module 143). This effectively overcomes the negative effects caused by the belt crossing the joint in the prior art. That is, the speed change modules (the second speed change module 123, the third speed change module 133, and the fourth speed change module 143) are used as the joint structure of the robot arm 100, and the rigidity is beneficial to increase the support capacity of the robot arm 100 at the joint. In addition, compared with the prior art in which the belt is used as the transmission at the joint, the speed change modules (the second speed change module 123, the third speed change module 133, and the fourth speed change module 143) can effectively resist the low-frequency vibration generated during operation due to their rigidity. Therefore, overall, the robot arm 100 of the present application is helpful to improve the overall load capacity, stability, and tolerance due to the above-mentioned component arrangement.

[0042] In summary, in the above-mentioned embodiments of the present application, the robot arm includes four main structural members, i.e., the first arm, the second arm, the first carrier plate, and the second carrier plate, which are connected to each other. Each structural member has an arm portion (or a plate body) and a rotary motor, a belt gear set, and a speed change module arranged in the arm portion (or the plate body). Accordingly, each structural member is an individual that can be independently driven, avoiding the complexity of the driving mode caused by the linkage relationship, thereby simplifying the algorithm complexity of the controller required by the robot arm. Furthermore, the rotary motors of the second arm, the first carrier plate, and the second carrier plate are arranged in the first arm portion, thereby concentrating the driving source of the robot arm, which is beneficial to assembly, replacement, and maintenance.

[0043] Meanwhile, each belt gear set of each structural member is arranged inside the arm portion (the plate body) and not arranged at the joint or across the joint, thereby avoiding the situation in the prior art in which the driving member such as the belt crosses at least two structural members. Meanwhile, the speed change modules replace the belts at the joints in the prior art, and the rigidity of the speed change modules can effectively resist the low-frequency vibration during operation, thereby helping to improve the overall load capacity, stability, and tolerance of the robot arm.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent substitutions for part or all of the technical features; and these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A robotic arm, characterized in that: include: The first arm, the second arm, the first carrier plate and the second carrier plate are connected to each other, The first arm includes a first rotating motor, a first belt gear set, a first speed change module and a first arm portion connected in sequence, wherein the first rotating motor provides power and drives the first arm portion to rotate through the first belt gear set and the first speed change module. The second arm includes a second rotary motor, a second belt gear set, a second speed change module and a second arm portion connected in sequence, the second rotary motor provides power and drives the second arm portion to rotate through the second belt gear set and the second speed change module. The first carrier plate includes a third rotating motor, a third belt gear set, a third speed change module and a first plate body connected in sequence. The third rotating motor provides power and drives the first plate body to rotate through the third belt gear set and the third speed change module. The second carrier plate includes a fourth rotating motor, a fourth belt gear set, a fourth speed change module and a second plate body that are interconnected. The fourth rotating motor provides power and drives the second plate body to rotate through the fourth belt gear set and the fourth speed change module, wherein the second rotating motor, the third rotating motor and the fourth rotating motor are respectively arranged in the first arm portion.

2. The robotic arm according to claim 1, characterized in that: The system further includes a base, wherein the first rotating motor drives the first arm to rotate along the first axis through the first belt gear set and the first speed change module.

3. The robotic arm according to claim 1, characterized in that: The second arm is pivotally connected to the first arm along a second axis. The first carrier plate and the second carrier plate are pivotally connected to the second arm along a third axis respectively. The second axis is parallel to the third axis.

4. The robotic arm according to claim 1, wherein: The first belt gear set includes a first gear, a first belt and a second gear connected in sequence. The first gear is disposed on the first rotating motor. The second gear, the first speed change module and the first arm are coaxially disposed.

5. The robotic arm according to claim 1, characterized in that: The second belt gear set includes a third gear, a second belt, and a fourth gear that are disposed in the first arm and are sequentially connected. The third gear is disposed on the second rotating motor, and the fourth gear is coaxially disposed with the second speed change module.

6. The robotic arm according to claim 1, characterized in that: The second speed-changing module is arranged at the pivot point between the first arm and the second arm, the second arm is fixed on the second speed-changing module, and the second rotary motor drives the second arm to rotate relative to the first arm through the second belt gear set and the second speed-changing module.

7. The robotic arm according to claim 1, characterized in that: The third belt gear set includes a fifth gear, a third belt and a sixth gear arranged in the first arm and connected in sequence, a first transmission shaft passing through the first arm and the second arm along the second axis, and a seventh gear, a fourth belt and an eighth gear arranged in the second arm and connected in sequence, the fifth gear is arranged on the third rotating motor, the sixth gear, the first transmission shaft and the seventh gear are coaxially arranged, and the eighth gear is coaxially arranged with the third speed change module.

8. The robotic arm according to claim 1, characterized in that: The third speed change module is arranged at the pivot point between the second arm and the first plate, the first plate is fixed on the third speed change module, and the third rotating motor drives the first plate to rotate relative to the second arm through the third belt gear set and the third speed change module.

9. The robotic arm according to claim 1, characterized in that: The fourth belt gear set includes a ninth gear, a fifth belt and a tenth gear arranged in the first arm and connected in sequence, a second transmission shaft passing through the first arm and the second arm, an eleventh gear, a sixth belt and a twelfth gear arranged in the second arm and connected in sequence, the ninth gear is arranged in the fourth rotating motor, the tenth gear, the second transmission shaft and the eleventh gear are coaxially arranged, and the twelfth gear is coaxially arranged with the fourth speed change module.

10. The robotic arm according to claim 9, characterized in that: The fourth belt gear set further includes a third transmission shaft, and the second plate is fixed to the fourth speed change module via the third transmission shaft.

11. The robotic arm according to claim 1, wherein: It also includes a base and a lifting mechanism, which is arranged on the base. The lifting mechanism includes a fifth rotating motor, a fifth belt gear set, a screw, a driven part, a lifting platform, a sliding block and a track connected in sequence. The sliding block is movably coupled to the track. The lifting platform is assembled to the sliding block and the driven part. The fifth rotating motor drives the lifting platform to rise and fall relative to the base through the fifth belt gear set, the screw and the driven part. The first arm is assembled to the lifting platform through the first speed change module.

12. The robotic arm according to claim 1, wherein: The third belt gear set includes a first transmission shaft, and the fourth belt gear set includes a second transmission shaft. The first transmission shaft and the second transmission shaft are coaxially arranged.

13. The robotic arm according to claim 12, characterized in that: The second transmission shaft is connected from the first arm portion through the second speed change module to the second arm portion, and the first transmission shaft is connected from the first arm portion through the second transmission shaft to the second arm portion.

14. The robotic arm according to claim 1, characterized in that: The third speed-changing module, the first carrier plate and the second carrier plate are arranged on a first side of the second arm portion, and the fourth speed-changing module is arranged on a second side of the second arm portion. The first side and the second side are opposite sides of the second arm portion.

15. The robotic arm according to claim 14, characterized in that: The fourth belt gear set includes a third transmission shaft extending from the fourth speed change module through the second arm portion and the first plate body to be connected to the second plate body.

Images