Optical platform three-dimensional adjusting structure

Abstract

The utility model relates to an optical platform three-dimensional adjusting structure which comprises a base, a bottom plate, an adjusting plate and an adjusting assembly, the bottom plate is installed on the top of the base, the bottom of the adjusting plate is rotationally connected with the bottom plate in any direction, and the adjusting assembly comprises two adjusting pieces and two elastic pieces at the four corners of the adjusting plate. The two adjusting parts and the two elastic parts are sequentially arranged in the circumferential direction of the bottom plate, the bottoms of the two adjusting parts are connected with the bottom plate, the tops of the two adjusting parts are adjusting ends, the adjusting ends are connected with the adjusting plate, the bottoms of the two elastic parts are connected with the bottom plate, and the bottoms of the two elastic parts are connected with the adjusting plate; the height of the corresponding adjusting plate is controlled by adjusting the two adjusting pieces, so that the adjusting plate can be controlled to rotate in any direction relative to the bottom plate until the imaging XY coordinate axis of the white light interference measuring head and the XY axis parallel to the XY motion platform, and the number, thickness and image splicing effect of interference fringes imaged by the white light interference measuring head are effectively controlled.

Description

TECHNICAL FIELD

[0001] The utility model relates to measuring instrument technical field especially relates to an optical platform three -dimensional adjusting structure. BACKGROUND

[0002] White light interferometer will be used in micro 3D topography detection to detect the 3D topography size of product, and the structure of white light interferometer is usually white light interference probe, XY motion platform, Z axis moving piece and instrument support, as shown in the drawing, the white light interference probe is fixed to the Z axis moving piece, the Z axis moving piece and XY motion platform are connected with the instrument support, and the product to be detected is directly placed on the XY motion platform during use. Figure 1

[0003] During the above detection, the perpendicularity of the optical axis of the white light interference probe and the surface of the product to be detected needs to be controlled, that is, the parallelism of the imaging XY coordinate axis of the white light interference probe and the XY axis of the XY motion platform, because the perpendicularity of the optical axis of the white light interference probe and the surface of the product to be detected directly affects the number and thickness of the interference fringes of the white light interferometer imaging, the better the perpendicularity, the fewer the number of interference fringes and the thicker the interference fringes, and the better the scanning image effect of the white light interferometer, and the parallelism of the imaging XY coordinate axis of the white light interference probe and the XY axis of the XY motion platform directly affects the image splicing effect, and the better the parallelism, the smaller the image splicing gap.

[0004] However, it is difficult to control the parallelism of the imaging XY coordinate axis of the white light interference probe and the XY axis of the XY motion platform, that is, it is difficult to control the number, thickness and image splicing effect of the interference fringes of the white light interference probe imaging. SUMMARY

[0005] Therefore, it is necessary to provide an optical platform three-dimensional adjusting structure to solve the problem that it is difficult to control the parallelism of the imaging XY coordinate axis of the white light interference probe and the XY axis of the XY motion platform, that is, it is difficult to control the number, thickness and image splicing effect of the interference fringes of the white light interference probe imaging.

[0006] ​The utility model provides a kind of optical platform three-dimensional adjusting structure, including pedestal, bottom plate, adjusting plate and adjusting assembly, the top of the pedestal is used to fix instrument support, the bottom plate is installed on the top of the pedestal and is staggered arrangement with instrument support, the bottom of the adjusting plate is rotatably connected with the bottom plate along any direction, the top of the adjusting plate is used to install XY motion platform, the adjusting assembly includes two adjusting pieces and two elastic pieces in the four corners of adjusting plate, two the adjusting piece and two the elastic piece are sequentially arranged along the bottom plate circumference, the bottom of two the adjusting piece is connected with the bottom plate, the top of two the adjusting piece is adjusting end, the adjusting end is connected with the adjusting plate, for driving its connecting part with the adjusting plate moves along vertical direction, the bottom of two the elastic piece is connected with the bottom plate, the bottom of two the elastic piece is connected with the adjusting plate, wherein, two the adjusting end is used to control the rotation of the adjusting plate relative to the bottom plate.

[0007] Further, the bottom of the adjusting plate is connected with the bottom plate via a rotating connecting piece, the rotating connecting piece includes a central rotating shaft, the bottom end of the central rotating shaft is fixedly connected with the bottom plate, the top end of the central rotating shaft is in the shape of a spherical block, the bottom of the adjusting plate forms a spherical groove, and the top end of the central rotating shaft is clamped in the spherical groove.

[0008] Further, the rotating connecting piece further includes a rotating shaft cover and a plurality of connecting screws, the rotating shaft cover is arranged on the bottom of the adjusting plate and is connected with the adjusting plate via the plurality of connecting screws, the bottom of the adjusting plate forms the groove, the top of the rotating shaft cover forms a hemispherical groove, and the hemispherical groove and the groove are connected to form the spherical groove.

[0009] Further, the rotating connecting piece further includes a locking nut, the bottom end of the central rotating shaft is arranged through the locking nut and a through hole formed in the bottom plate in sequence, the locking nut is connected with the threads on the central rotating shaft, and the locking nut is fixedly connected with the bottom plate.

[0010] Further, the adjusting piece includes a feed nut and a precision feed screw, the feed nut is fixedly arranged on the adjusting plate, the bottom end of the precision feed screw is rotatably connected with the bottom plate, and the top end of the precision feed screw is arranged through the feed nut, and the rotation of the precision feed screw is used to drive the feed nut to move along the vertical direction.

[0011] Further, the adjusting piece further includes an adjusting hand wheel, the bottom of the adjusting hand wheel is rotatably connected with the bottom plate, a square recess is formed in the top of the adjusting hand wheel, the bottom end of the precision feed screw is a square block, and the square block is clamped in the square recess.

[0012] Further, the bottom of the adjusting hand wheel is provided with a protrusion arranged in a limiting groove opened on the bottom plate, and the bottom of the protrusion is fixedly connected with a ball pin which is rotationally connected with a positioning groove opened on the bottom plate.

[0013] Further, the elastic member is a spring.

[0014] Further, the bottom end of the central rotating shaft extends into the base and is rotationally connected with the base, and a plurality of arc-shaped waist holes are arranged on the base in a circumferential direction of the central rotating shaft, and a plurality of locking screws are arranged through the arc-shaped waist holes and connected with the bottom plate.

[0015] Further, the structure further comprises a connecting block, two adjusting blocks and two top screws, the connecting block is fixedly arranged at the bottom of the bottom plate, the bottom of the connecting block penetrates through the base, the two adjusting blocks are oppositely arranged at the two sides of the connecting block and fixedly connected with the base, and the two top screws are oppositely arranged at the two adjusting blocks and abut against the connecting block.

[0016] Compared with the prior art, by adjusting the two adjusting members, the height of the corresponding adjusting plate can be controlled, so that the adjusting plate can rotate in any direction relative to the bottom plate until the imaging XY coordinate axis of the white light interference measuring head and the XY axis parallel to the XY motion platform, so that the number, thickness and image splicing effect of the interference fringes of the white light interference measuring head can be effectively controlled. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 An application schematic diagram of the whole optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model;

[0018] Figure 2 A structure schematic diagram of the whole optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model;

[0019] Figure 3 An explosion schematic diagram of the whole optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model;

[0020] Figure 4 A connection schematic diagram of the bottom plate and the adjusting plate in the optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model;

[0021] Figure 5 A B-B sectional view of the optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model; Figure 4

[0022] Figure 6 A C-C sectional view of the optical platform three-dimensional adjusting structure is provided for the embodiment of the utility model; Figure 4 ​Middle BB plane cross-sectional view;

[0023] Figure 7 A schematic diagram of the bottom portion of a base in a three-dimensional adjustment structure of an optical platform provided by an embodiment of the present invention;

[0024] Figure 8 The optical platform three-dimensional adjustment structure provided by the embodiment of the utility model Figure 7 Enlarged schematic diagram of part C in the middle. DETAILED DESCRIPTION

[0025] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, and are not used to limit the scope of the present invention.

[0026] First, the application scenario of the optical platform three-dimensional adjustment structure M needs to be explained, such as Figure 1 As shown, when in use, the XY motion platform N and the instrument bracket P1 are installed on the optical platform three-dimensional adjustment structure M, and the white light interferometer probe P is connected to the instrument bracket P1 via the Z-axis moving part P2. At this time, the white light interferometer probe P is located above the XY motion platform N. The parallelism of the imaging XY coordinate axis of the white light interferometer probe P and the XY axis of the XY motion platform N can be adjusted through the optical platform three-dimensional adjustment structure M in this embodiment.

[0027] like Figures 2-3 As shown, the utility model provides a three-dimensional adjustment structure of an optical platform, including a base 100, a bottom plate 200, an adjustment plate 300 and an adjustment assembly 400. The top of the base 100 is used to fix the instrument bracket. The bottom plate 200 is installed on the top of the base 100 and is staggered with the instrument bracket. The bottom of the adjustment plate 300 is rotatably connected to the bottom plate in any direction. The top of the adjustment plate 300 is used to install the XY motion platform. The adjustment assembly 400 includes two adjustment members 410 and two elastic members 420 at the four corners of the adjustment plate 300. The two adjusting members 410 and the two elastic members 420 are arranged in sequence along the circumference of the base plate 200. The bottoms of the two adjusting members 410 are connected to the base plate 200. The tops of the two adjusting members 410 are adjusting ends, which are connected to the adjusting plate 300 and are used to drive the connection parts between them and the adjusting plate 300 to move in the vertical direction. The bottoms of the two elastic members 420 are connected to the base plate 200, and the bottoms of the two elastic members 420 are connected to the adjusting plate 300. The two adjusting ends are used to control the rotation of the adjusting plate 300 relative to the base plate.

[0028] In implementation, the height of the adjusting plate 300 is controlled by adjusting the two adjusting members 410, so that the adjusting plate 300 can be rotated in any direction relative to the base plate 200 until the imaging XY coordinate axis of the white light interference measuring head P is parallel to the XY axis of the XY motion platform N, so as to effectively control the number, thickness and image splicing effect of the interference fringes imaged by the white light interference measuring head P.

[0029] As shown in Figures 4-5 one embodiment, the bottom of the adjusting plate 300 is connected with the base plate 200 via a rotating connecting member 310, the rotating connecting member 310 includes a central rotating shaft 311, the bottom end of the central rotating shaft 311 is fixedly connected with the base plate 200, the top end of the central rotating shaft 311 is in the shape of a spherical block, the bottom of the adjusting plate 300 is formed with a spherical groove 312, and the top end of the central rotating shaft 311 is clamped in the spherical groove 312.

[0030] In order to facilitate the installation of the spherical block portion of the center of gravity rotating shaft into the spherical groove 312, the rotating connecting member 310 further includes a rotating shaft cover 313 and a plurality of connecting screws 314, the rotating shaft cover 313 is arranged at the bottom of the adjusting plate 300 and is connected with the adjusting plate 300 via the plurality of connecting screws 314, the bottom of the adjusting plate 300 is formed with a recess, the top of the rotating shaft cover 313 is formed with a semispherical groove, and the semispherical groove and the recess are connected to form the spherical groove 312.

[0031] In order to facilitate the fixation of the relative positions of the central rotating shaft 311 and the base plate 200, in one embodiment, the rotating connecting member 310 further includes a locking nut 315, the bottom end of the central rotating shaft 311 is arranged through the locking nut 315 and a through hole provided on the base plate 200 in sequence, the locking nut 315 is connected with the threads on the central rotating shaft 311, and the locking nut 315 is fixedly connected with the base plate 200.

[0032] As shown in Figure 2 the top of the adjusting plate 300 is provided with a mounting plate 320 for connecting with the XY motion platform N.

[0033] As shown in Figure 4 and Figure 6 the adjusting member 410 in the embodiment includes a feed nut 411 and a precision feed screw 412, the feed nut 411 is fixedly arranged on the adjusting plate 300, the bottom end of the precision feed screw 412 is rotationally connected with the base plate 200, and the top end of the precision feed screw is arranged through the feed nut 411, and the rotation of the precision feed screw is used to drive the feed nut 411 to move in the vertical direction.

[0034] To facilitate driving the precision feed screw 412 to rotate, in one embodiment, the adjusting member 410 also includes an adjusting handwheel 413. The bottom of the adjusting handwheel 413 is rotatably connected to the base plate 200. A square groove 414 is provided on the top of the adjusting handwheel 413. The bottom end of the precision feed screw 412 is a square block, which is embedded in the square groove 414.

[0035] Among them, a protrusion 415 is provided at the bottom of the adjusting hand wheel 413, and the protrusion 415 is set in a limiting groove opened on the base plate 200. The bottom of the protrusion 415 is fixedly connected with a ball pin 416, and the ball pin 416 is rotatably connected to the positioning groove opened on the base plate 200.

[0036] The elastic member 420 in this embodiment is a spring.

[0037] like Figure 7 As shown, in order to adjust the circumferential angle of the XY motion platform, in one embodiment, the bottom end of the central shaft 311 extends into the base 100 and is rotatably connected to the base 100. The base 100 is provided with a plurality of arc-shaped waist holes 110 evenly arranged along the circumference of the central shaft. The structure also includes a plurality of locking screws 210, and the plurality of locking screws 210 respectively pass through the plurality of arc-shaped waist holes 110 and are connected to the base plate 200.

[0038] Among them, such as Figure 8 As shown, the structure also includes a connecting block 220, two adjusting blocks 230 and a top screw 240. The connecting block 220 is fixedly arranged at the bottom of the base plate 200, and the bottom of the connecting block 220 is set through the base 100. The two adjusting blocks 230 are relatively arranged on both sides of the connecting block 220 and are fixedly connected to the base 100. The opposite ends of the two top screws 240 respectively pass through the two adjusting blocks 230 and both abut against the connecting block 220.

[0039] Compared with the prior art: by adjusting the two adjustment members 410 to control the height of the corresponding adjustment plate 300, the adjustment plate 300 can be controlled to rotate in any direction relative to the base plate 200 until the imaging XY coordinate axis of the white light interferometer probe P is parallel to the XY axis of the XY motion platform N, thereby effectively controlling the number, thickness and image stitching effect of the interference fringes imaged by the white light interferometer probe P.

[0040] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any changes or replacements that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed in the present invention should be covered by the protection scope of the present invention.

Claims

1. A three-dimensional adjustment structure for an optical platform, characterized in that: include: A base, the top of which is used to fix the instrument bracket; A bottom plate, which is mounted on the top of the base and staggered with the instrument bracket; An adjustment plate, the bottom of which is rotatably connected to the base plate in any direction, and the top of the adjustment plate is used to mount an XY motion platform; An adjustment assembly, comprising two adjustment members and two elastic members at the four corners of the adjustment plate, the two adjustment members and the two elastic members being arranged in sequence along the circumference of the base plate, the bottoms of the two adjustment members being connected to the base plate, the tops of the two adjustment members being adjustment ends, the adjustment ends being connected to the adjustment plate and being used to drive the connection portions thereof with the adjustment plate to move in a vertical direction, the bottoms of the two elastic members being connected to the base plate, and the bottoms of the two elastic members being connected to the adjustment plate; Wherein, the two adjustment ends are used to control the rotation of the adjustment plate relative to the base plate.

2. The three-dimensional adjustment structure of the optical platform according to claim 1, characterized in that: The bottom of the adjustment plate is connected to the base plate via a rotating connector, and the rotating connector includes a central shaft. The bottom end of the central shaft is fixedly connected to the base plate, and the top end of the central shaft is spherical. A spherical groove is formed at the bottom of the adjustment plate, and the top end of the central shaft is embedded in the spherical groove.

3. The three-dimensional adjustment structure of the optical platform according to claim 2, characterized in that: The rotating connecting member also includes a shaft cover and multiple connecting screws. The shaft cover is arranged at the bottom of the adjustment plate and is connected to the adjustment plate via multiple connecting screws. A groove is formed at the bottom of the adjustment plate, and a hemispherical groove is formed at the top of the shaft cover. The hemispherical groove is connected to the groove to form the spherical groove.

4. The three-dimensional adjustment structure of the optical platform according to claim 2, characterized in that: The rotating connecting member also includes a locking nut, and the bottom end of the central shaft is sequentially arranged through the locking nut and the through hole opened on the base plate. The locking nut is engaged with the thread on the central shaft, and the locking nut is fixedly connected to the base plate.

5. The three-dimensional adjustment structure of the optical platform according to claim 1, characterized in that: The adjusting member includes a feed nut and a precision feed screw. The feed nut is fixedly arranged on the adjusting plate. The bottom end of the precision feed screw is rotatably connected to the base plate. The top end of the precision feed screw is arranged through the feed nut. The rotation of the precision feed screw is used to drive the feed nut to move in the vertical direction.

6. The three-dimensional adjustment structure of the optical platform according to claim 5, characterized in that: The adjusting member also includes an adjusting handwheel, the bottom of which is rotatably connected to the base plate, the top of which is provided with a square groove, the bottom end of the precision feed screw is a square block, and the square block is embedded in the square groove.

7. The three-dimensional adjustment structure of the optical platform according to claim 6, characterized in that: A protrusion is provided at the bottom of the adjusting hand wheel, and the protrusion is provided in a limiting groove opened on the bottom plate. A ball pin is fixedly connected to the bottom of the protrusion, and the ball pin is rotatably connected to the positioning groove opened on the bottom plate.

8. The three-dimensional adjustment structure of the optical platform according to claim 1, characterized in that: The elastic member is a spring.

9. The three-dimensional adjustment structure of the optical platform according to claim 2, characterized in that: The bottom end of the central rotating shaft extends into the base and is rotatably connected to the base. The base is provided with a plurality of arc-shaped waist holes evenly arranged along the circumference of the central rotating shaft. The structure also includes a plurality of locking screws, which respectively pass through the plurality of arc-shaped waist holes and are connected to the bottom plate.

10. The three-dimensional adjustment structure of the optical platform according to claim 9, characterized in that: It also includes a connecting block, two adjusting blocks and a top screw. The connecting block is fixedly arranged at the bottom of the base plate, and the bottom of the connecting block passes through the base. The two adjusting blocks are relatively arranged on both sides of the connecting block and are fixedly connected to the base. The opposite ends of the two top screws pass through the two adjusting blocks respectively and abut against the connecting block.

Images