Ultra-pure semi-automatic gas switching device

Abstract

The utility model discloses an ultra-pure semi-automatic gas switching device. In the device, each pipeline and each valve body are connected by adopting a metal surface static seal connecting mechanism; the mechanism comprises a first convex spherical surface annular structure located at the end of each pipeline, a second convex spherical surface annular structure located on the bottom end face of each valve body connecting counter bore, and an annular gasket arranged between the first convex spherical surface annular structure and the second convex spherical surface annular structure, and the end of each pipeline is further sleeved with a nut with an external thread. Internal threads are arranged on the inner walls of the valve body connecting counter bores, and external threads of the nuts are connected with the internal threads of the connecting counter bores, so that static sealing of the pipelines and the metal faces of the valve body connecting counter bores is achieved. All-channel static sealing connection of the whole device can be achieved through the metal surface static sealing connection mechanism, the problems that conical threaded connection is prone to leakage and not easy to disassemble and assemble are solved, the service time of the device is prolonged, the gas tightness of the device is prolonged, online maintenance is facilitated, and the requirements for gas tightness and purity of the ultra-pure gas production technology are met.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of ultrapure gas pipeline connection, particularly relates to an ultrapure semi-automatic gas switching device. BACKGROUND

[0002] At present, the semi-automatic gas switching device is widely applied in the fields of semiconductor, solar energy, biological pharmacy, laboratory and the like, and is mainly used for continuously supplying ultrapure gas without interruption. However, the connection between each pipeline and valve body in the existing ordinary semi-automatic switching device still adopts taper thread connection, such as the semi-automatic gas switching system disclosed in the prior art CN208951695U, wherein the left pipeline one and the left pipeline two are connected to the left square five-way through MC joints, the right pipeline one and the right pipeline two are connected to the right square five-way through MC joints, the left inlet gas pressure gauge, the left pressure reducing valve and the left square five-way are threadedly connected, the right inlet gas pressure gauge, the right pressure reducing valve and the right square five-way are threadedly connected, and the low-pressure alarm device is threadedly connected with the left square five-way or the right square five-way. However, the taper thread connection is prone to leakage after long-term use, and cannot guarantee long-lasting air tightness, especially for high-corrosive toxic gas, the air tightness cannot meet the requirements. Therefore, the existing ordinary semi-automatic switching device cannot meet the requirements under the condition that the content calibration of ultrapure gas is more and more strict.

[0003] Therefore, the existing semi-automatic gas switching device still has the above problems, and needs to be further improved. How to create a new ultrapure semi-automatic gas switching device, so that the connection between each pipeline and each valve body in the device is realized through a metal surface static sealing connection mechanism, so as to achieve static sealing of the whole device, prevent leakage, facilitate disassembly and assembly, facilitate online maintenance, meet the air tightness and purity requirements of ultrapure gas, and become the current industry's goal for improvement. CONTENT OF THE UTILITY MODEL

[0004] The utility model solves the technical problem to provide a kind of ultrapure semi-automatic gas switching device, so that the connection between each pipeline and each valve body in the device is realized through a metal surface static sealing connection mechanism, so as to achieve static sealing of the whole device, prevent leakage, facilitate disassembly and assembly, facilitate online maintenance, meet the air tightness and purity requirements of ultrapure gas, and overcome the deficiencies of the existing semi-automatic gas switching device.

[0005] To solve the above technical problems, the utility model provides an ultrapure semi-automatic gas switching device, which comprises a left control valve, a left evacuation valve, a left pressure reducing valve, a right control valve, a right evacuation valve, a right pressure reducing valve and a total output valve, and a pipeline connected with each valve body, and the connection between the pipeline and each valve body adopts a metal surface static sealing connection mechanism.

[0006] The metal surface static sealing connecting mechanism comprises a first convex spherical annular structure at each pipeline end and a second convex spherical annular structure at the bottom end face of each valve body connecting counterbore, and a ring-shaped gasket is arranged between the first convex spherical annular structure and the second convex spherical annular structure, and each pipeline end is further sleeved with a threaded nut, and the inner wall of each valve body connecting counterbore is provided with an internal thread, and the external thread of the nut is connected with the internal thread of the connecting counterbore, so that the first convex spherical annular structure is tightly abutted on one side of the ring-shaped gasket, and the other side of the ring-shaped gasket is tightly abutted on the second convex spherical annular structure, so as to realize the metal surface static sealing of each pipeline and each valve body connecting counterbore.

[0007] Further improvement, the R arc radius of the first convex spherical annular structure and the second convex spherical annular structure is 0.8mm.

[0008] Further improvement, each pipeline end is further provided with an expansion part, the first convex spherical annular structure is arranged on the top end side of the expansion part, and the extending end of the nut is abutted on the bottom end side of the expansion part.

[0009] Further improvement, the outer edge diameter of the expansion part is less than or equal to the hole diameter of the connecting counterbore.

[0010] After the design is adopted, the utility model has at least the following advantages:

[0011] The ultrahigh-purity semi-automatic gas switching device sets the connecting mode between each pipeline and each valve body into a metal surface static sealing connecting mechanism, achieves the static sealing connection of the whole device, overcomes the problems that the existing tapered thread connection is easy to leak and is not easy to disassemble, prolongs the use time and air tightness of the device, is beneficial to online maintenance, meets the air tightness and purity requirements of the ultrahigh-purity gas production process, and is suitable for the continuous supply of high-corrosive toxic gas. BRIEF DESCRIPTION OF DRAWINGS

[0012] The above is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, the utility model will be further described in detail in combination with the drawings and the specific embodiments.

[0013] Figure 1 It is a whole structure schematic view of the ultrahigh-purity semi-automatic gas switching device.

[0014] Figure 2 It is a structure sectional view of an exemplary metal surface static sealing connecting mechanism in the ultrahigh-purity semi-automatic gas switching device.

[0015] Figure 3It is the structure section view of the valve body connecting counterbore of the exemplary metal surface static sealing connecting mechanism in the ultrahigh purity semi-automatic gas switching device. DETAILED DESCRIPTION

[0016] With reference to the drawings Figure 1 The ultrahigh purity semi-automatic gas switching device of the embodiment comprises a mounting plate 10 and left control valves 11, left evacuation valves 12, left pressure reducing valves 13, left pressure gauges 14, right control valves 21, right evacuation valves 22, right pressure reducing valves 23, right pressure gauges 24, low pressure gauges 31, total output valves 32 and pipelines 20 connected with the valve bodies. It should be noted that the left control valves 11, left evacuation valves 12, left pressure reducing valves 13, left pressure gauges 14, right control valves 21, right evacuation valves 22, right pressure reducing valves 23, right pressure gauges 24, low pressure gauges 31 and total output valves 32 have the same functions as the existing semi-automatic gas switching device, and achieve uninterrupted gas supply.

[0017] The improvement of the embodiment lies in that the metal surface static sealing connecting mechanism is used for connecting the pipelines 20 and the valve bodies. Figure 2 and Figure 3 The connecting section view of a pipeline 20 and a connecting counterbore 30 of a control valve is shown. It can be understood that the metal surface static sealing connecting mechanism can be used for connecting all pipelines and valves of the gas switching device. The specific structure of the metal surface static sealing connecting mechanism is as follows.

[0018] With reference to the drawings Figure 2 and Figure 3 The metal surface static sealing connecting mechanism comprises a first convex spherical surface ring structure 201 at the end of each pipeline 20 and a second convex spherical surface ring structure 202 at the bottom end face of each valve body connecting counterbore 30, and a ring-shaped gasket 203 arranged between the first convex spherical surface ring structure 201 and the second convex spherical surface ring structure 202. The end of each pipeline 20 is further sleeved with a threaded nut 204, and the inner wall of each valve body connecting counterbore 30 is provided with an internal thread 205. The external thread of the threaded nut 204 is connected with the internal thread 205 of the connecting counterbore 30, so that the first convex spherical surface ring structure 201 is tightly abutted on one side of the ring-shaped gasket 203, and the other side of the ring-shaped gasket 203 is tightly abutted on the second convex spherical surface ring structure 202, thereby achieving metal surface static sealing of each pipeline 20 and each valve body connecting counterbore 30.

[0019] Preferably, the R arc radius of the first convex spherical surface ring structure 201 and the second convex spherical surface ring structure 202 is 0.8 mm. The pipeline 20 with the R arc characteristic belongs to a new UHCR connecting pipe, which can achieve better metal surface sealing effect.

[0020] And, the end of each pipeline 20 is also provided with an expansion part 206, the first convex spherical annular structure 201 is arranged on the top end side of the expansion part 206, and the extending end of the nut 204 is abutted on the bottom end side of the expansion part 206, so that when the nut 204 is threadedly connected with the connecting counterbore 30, the first convex spherical annular structure 201 and the second convex spherical annular structure 202 can be tightly abutted on both sides of the annular gasket 203, and the sealing effect is ensured.

[0021] The outer edge diameter of the expansion part 206 is equal to the hole diameter of the connecting counterbore 30.

[0022] The semi-automatic gas switching device modifies the connecting mode between each pipeline and each valve body into a metal surface static sealing connecting mechanism, can achieve the static sealing connection of the whole device, effectively overcomes the problems that the existing tapered thread connection is easy to leak and is not easy to disassemble, prolongs the use time and air tightness of the device, is beneficial to online maintenance, is suitable for continuous supply of high corrosive toxic gas, and can meet the air tightness and purity requirements of ultrahigh purity gas production process.

[0023] The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form, and the skilled in the art can make some simple modifications, equivalent changes or modifications by using the disclosed technical content, which falls within the protection scope of the utility model.

Claims

1. An ultrahigh purity semi-automatic gas switching device comprising a left control valve, a left evacuation valve, a left pressure reducing valve, a right control valve, a right evacuation valve, a right pressure reducing valve, and a total output valve, and a pipe connecting each valve, characterized in that, The connection between the pipeline and each valve body is achieved by a metal surface static sealing connection mechanism; The metal surface static sealing connection mechanism comprises a first convex spherical annular structure at the end of each pipeline and a second convex spherical annular structure at the bottom end surface of each valve body connecting counterbore, and a ring-shaped gasket is arranged between the first and second convex spherical annular structures, and a nut with external threads is further sleeved on the end of each pipeline, the inner wall of the connecting counterbore of each valve body is provided with internal threads, the external threads of the nut are connected with the internal threads of the connecting counterbore, so that the first convex spherical annular structure is tightly abutted on one side of the ring-shaped gasket, and the other side of the ring-shaped gasket is tightly abutted on the second convex spherical annular structure, thereby achieving the metal surface static sealing of each pipeline and the connecting counterbore of each valve body.

2. The ultra-high purity semi-automatic gas switching device according to claim 1, wherein, The R arc radius of the first and second convex spherical annular structures is 0.8 mm.

3. The ultrapure semi-automatic gas switching device of claim 2, wherein, The end of each pipeline is further provided with an expansion part, the first convex spherical annular structure is arranged on the top end side of the expansion part, and the inserted end of the nut is abutted on the bottom end side of the expansion part.

4. The ultrahigh purity semi-automatic gas switching device according to claim 3, wherein, The outer edge diameter of the expansion part is less than or equal to the hole diameter of the connecting counterbore.

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