Magnetic field probe station

Abstract

The utility model provides a magnetic field probe station, which comprises a three-dimensional magnetic field generation module, a sample bearing module and a probe module, the three-dimensional magnetic field generation module comprises an in-plane magnetic field generation assembly and a vertical magnetic field generation assembly, and the in-plane magnetic field generation assembly is configured to be capable of generating a magnetic field approximately parallel to the surface of a measured object at a preset position. The vertical magnetic field generation assembly comprises vertical pole heads which are oppositely arranged, and the preset position is located between the vertical pole heads; the two vertical pole heads are arranged on the two sides of the measured position of the measured object, so that the divergence of a vertical magnetic field is reduced, and the magnetic field intensity of the measured position of the measured object is increased; under the requirement of the same vertical magnetic field intensity, a larger space can be reserved above an object to be detected so that the probe can be in contact with the object to be detected, and therefore, the probe can be inserted conveniently; the vertical pole head does not need to reduce the end size for avoiding the probe, can enlarge the range of a vertical magnetic field, and can be used for the detection of large-size wafers.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the physical and semiconductor test technical field, specifically relates to a magnetic field probe station. BACKGROUND

[0002] The probe station test equipment is a kind of widely used non-destructive testing method, can be used in the test of physical and semiconductor field, specifically, can be used to test the electrical characteristics, photoelectric characteristics, high-frequency characteristics and the performance of material sample or device, and the application in the field of physics and semiconductor is very rich.Based on this, the magnetic field probe station test system further provides magnetic field environment, so that the probe station test equipment can further study the performance and characteristics of the measured material or device under magnetic field, and its typical applications include magnetism, spintronics, semiconductor physics and device, quantum device etc.

[0003] Since the magnetic field probe station needs to provide the controllable magnetic field required for testing, electromagnet is widely used as the component for providing magnetic field.In order to make the provided magnetic field meet more detection requirements, electromagnet can usually be set as three-dimensional electromagnet to form three-dimensional magnetic field.Among them, for the vertical magnetic field perpendicular to the measured object, the vertical pole head is usually made close to the measured object, so that the measured object is located in the magnetic field extending outward from the vertical pole head, so that the measured object can be in the vertical magnetic field.However, since the magnetic field extending outward from the pole head is easy to diverge to the external environment, the magnetic field strength is reduced, and it is difficult to meet the detection requirements of high-strength vertical magnetic field.

[0004] The above information disclosed in the background section is only used to enhance the understanding of the background of the utility model, and therefore can contain information that does not constitute prior art known to those skilled in the art. UTILITY MODEL CONTENT

[0005] In view of the problem of low strength of vertical magnetic field existing in the prior art, the utility model provides a magnetic field probe station, which comprises: a three-dimensional magnetic field generating module, including an in-plane magnetic field generating assembly and a vertical magnetic field generating assembly, the in-plane magnetic field generating assembly is configured to generate a magnetic field parallel to the surface of the measured object at a preset position, the vertical magnetic field generating assembly includes oppositely arranged vertical pole heads, and the preset position is located between the vertical pole heads;A sample carrying module is configured to support the measured object in the form of a measured object, and the measured object can be located between the vertical pole heads and close to the preset position under the carrying of the sample carrying module;A probe module includes a probe seat and a probe, the probe is installed on the probe seat, and the detection end of the probe extends to the preset position.

[0006] According to the description of one specific embodiment, the in-plane magnetic field generating assembly comprises two groups of in-plane pole heads arranged along the first axis and the second axis, and each group of the in-plane pole heads is respectively provided with oppositely arranged in-plane pole heads.

[0007] According to the description of one specific embodiment, the first axis and the second axis are respectively parallel to the surface of the measured object.

[0008] According to the description of one specific embodiment, the in-plane magnetic field generating assembly is arranged on one of the two sides of the measured object.

[0009] According to the description of one specific embodiment, the magnetic field probe station further comprises an observation module, and the observation module comprises a microscope configured to observe the form of the preset position.

[0010] According to the description of one specific embodiment, the microscope is arranged on the upper side of the vertical magnetic field generating assembly, and the vertical magnetic field generating assembly is provided with a through observation hole, and the microscope observes the preset position through the observation hole.

[0011] According to the description of one specific embodiment, the observation hole is arranged through the vertical pole head on the upper side of the measured object and the fixing plate on which the vertical pole head is mounted.

[0012] According to the description of one specific embodiment, the three-dimensional magnetic field generating module further comprises an excitation assembly, and the excitation assembly is arranged in the magnetic circuit of the in-plane magnetic field generating assembly and the vertical magnetic field generating assembly.

[0013] According to the description of one specific embodiment, the in-plane magnetic field generating assembly comprises four in-plane pole heads, and at least one excitation assembly is arranged in the magnetic circuit of each in-plane pole head.

[0014] According to the description of one specific embodiment, at least one excitation assembly is arranged in the magnetic circuit of the vertical pole head.

[0015] The magnetic field probe station provided by the utility model has at least the following beneficial effects: the two vertical pole heads are arranged on the two sides of the measured position of the measured object, the divergence of the vertical magnetic field is reduced, the magnetic field intensity at the measured position of the measured object is increased, under the same requirement of the vertical magnetic field intensity, the scheme can leave more space above the measured object for the contact between the probe and the measured object, so that the needle can be easily inserted, the end size of the vertical pole head does not need to be reduced for avoiding the probe, the range of the vertical magnetic field can be increased, and the magnetic field probe station can be used for detecting large-size wafers. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of one embodiment of the magnetic field probe station.

[0017] Figure 2 For Figure 1 Another perspective view of the embodiment shown.

[0018] Figure 3 For Figure 1 A cross-sectional view of the embodiment shown.

[0019] Figure 4 An enlarged view of the vicinity of the measured object of one embodiment of the magnetic field probe station.

[0020] Figure 5 A schematic view of the spatial position of the three-dimensional magnetic field generation module in one embodiment of the magnetic field probe station.

[0021] Figure 6 A schematic view of another embodiment of the magnetic field probe station.

[0022] Figure 7 For Figure 6 A cross-sectional view of the embodiment shown. DETAILED DESCRIPTION

[0023] In order to make the purpose and features of the present application more obvious and easy to understand, the specific embodiments of the present application will be further described below in conjunction with the drawings. It should be noted that the drawings are very simplified and use non-precise ratios, and are only used to facilitate and clearly assist the purpose of describing the embodiments of the present application.

[0024] Please refer to Figures 1 to 3 , Figure 6 , Figure 7 , the present application first provides a magnetic field probe station, including a three-dimensional magnetic field generation module 1, a sample carrying module 2, a probe module 3. The three-dimensional magnetic field generation module 1 is used to provide a magnetic field to a preset position. For the preset position, it can usually be regarded as the to-be-tested position of the measured object 6. Since the to-be-tested structure on the measured object 6 is usually small, the probe 32 of the probe module 3 also needs to be stretched out to the preset position to contact the measured object 6. The sample carrying module 2 is used to support the measured object 6, and the measured object 6 can be close to the preset position under the support of the sample carrying module 2. The probe module 3 is used to input an electrical signal to the measured object 6, and / or receive an electrical signal feedback by the measured object 6, so as to test the measured object.

[0025] Specifically, the three-dimensional magnetic field generating module 1 comprises an in-plane magnetic field generating assembly 11 and a perpendicular magnetic field generating assembly 12, the in-plane magnetic field generating assembly 11 is configured to generate a magnetic field in a preset position in a form substantially parallel to the surface of the measured object 6, and the perpendicular magnetic field generating assembly 12 is configured to generate a magnetic field in a preset position in a form substantially perpendicular to the surface of the measured object 6. In some cases, the in-plane magnetic field generating assembly 11 and the perpendicular magnetic field generating assembly 12 can simultaneously generate magnetic fields as needed to generate a composite magnetic field in a preset position to meet the corresponding detection requirements; of course, the in-plane magnetic field generating assembly 11 can also be used separately to generate an in-plane magnetic field in a preset position, and the perpendicular magnetic field generating assembly 12 can also be used separately to generate a perpendicular magnetic field in a preset position to meet the corresponding detection requirements. That is, the three-dimensional magnetic field generating module 1 can at least generate a one-dimensional magnetic field, a two-dimensional magnetic field, and a three-dimensional magnetic field.

[0026] For the perpendicular magnetic field generating assembly 12, it comprises oppositely arranged perpendicular pole heads 121, and the preset position is located between the perpendicular pole heads 121. Please refer to Figure 3 , which more clearly shows the relative position between the perpendicular pole heads 121 and the measured object 6, wherein one of the perpendicular pole heads 121 is arranged on the upper side of the measured object 6, and the other is arranged on the lower side of the measured object 6, and the end faces of the two perpendicular pole heads 121 are oppositely arranged.

[0027] For the sample carrying module 2, it can be provided with at least a sample stage 21, and a sample carrying plate 211 capable of carrying or fixing the measured object 6 is arranged on the sample stage 21. For the probe module 3, it comprises a probe holder 31 and a probe 32, the probe 32 is mounted on the probe holder 31, and the detection end of the probe 31 extends to the preset position to contact the measured object 6.

[0028] In the case of using the utility model, two vertical pole heads 121 can be arranged on both sides of the measured position of the measured object 6, in the case of generating a vertical magnetic field through the vertical pole head 121, the magnetic field extending outward from one of the vertical pole heads will extend into the other vertical pole head after passing through the measured position of the measured object 6, on the one hand, in the case that the total magnetic flux extending outward from a single vertical pole head 121 does not change, the divergence of the magnetic field is reduced, so that the magnetic field intensity at the measured position of the measured object is increased, on the other hand, the magnetic field between the vertical pole heads 121 can be regulated by controlling the excitation assembly 13 on the magnetic circuit where the two vertical pole heads 121 are located, so that the regulation accuracy of the vertical magnetic field can be improved. In addition, the magnetic field probe station provided by the utility model can generate a stronger vertical magnetic field, under the same vertical magnetic field intensity requirement, the present scheme can form a larger vertical space, so as to leave a larger space above the surface of the measured object 6 for the probe 32 to contact the measured object 6, thereby facilitating the needle insertion, and at the same time, the vertical pole head 121 does not need to reduce the end size to avoid the probe 32, so that the range of the vertical magnetic field can be increased. In addition, please refer to Fig Figure 3 、 Figure 7 The magnetic field probe station provided by the present scheme does not limit the size of the measured object 6 in the measured plane direction, so it can be used for detection of large-size measured objects 6, for example, detection of large-size wafers.

[0029] The in-plane magnetic field generating assembly 11 includes two groups of in-plane pole heads 111 arranged along the first axis L1 and the second axis L2, and each group of in-plane pole heads 111 is provided with oppositely arranged in-plane pole heads 111. Please refer to Figure 5 , which shows a specific embodiment, wherein the two groups of in-plane pole heads 111 are four in total, and the end portions of the four in-plane pole heads 1111, 1112, 1113 and 1114 are close to each other and enclose a region C1, and the preset position is located in the region C1. In the region C1, the in-plane magnetic field in which the measured object is located can be adjusted more conveniently through the magnetic circuit in which the in-plane pole heads 1111, 1112, 1113 and 1114 are located.

[0030] More specifically, please refer to Figure 5 For the relative positions of the in-plane magnetic field generating assembly 11 and the vertical magnetic field generating assembly 12, the region between the oppositely arranged pole heads of the two vertical pole heads 121 is C2, and the projection of the preset position is located at least in the overlapping region of the region C1 and the region C2, so that at the preset position, the vertical magnetic field and the in-plane magnetic field can jointly act to form a composite magnetic field.

[0031] The first axis L1 and the second axis L2 are parallel to the surface of the measured object 6, please refer to Figure 4, which shows a specific embodiment, in which the in-plane pole pieces 111 arranged along the first axis L1 and the second axis L2 are substantially parallel to the surface of the object 6, so that the measured position, i.e. the preset position, of the object 6 is affected by the leakage magnetic field between the in-plane pole pieces 111. It should be noted that in actual use, the object 6 needs to be close to the in-plane pole pieces 111, so that the magnetic field strength at the measured position of the object 6 is strong enough to meet the detection requirements.

[0032] The in-plane magnetic field generating assembly 11 is arranged on one of the two sides of the object 6. Specifically, the in-plane magnetic field generating assembly 11 can be arranged on one side of the object 6, or on the other side of the object 6. Please refer to Figure 1 , which shows a form in which the in-plane magnetic field generating assembly 11 is arranged on the upper side of the object 6; please refer to Figure 6 , which shows a form in which the in-plane magnetic field generating assembly 11 is arranged on the lower side of the object 6. For the embodiment in which the in-plane magnetic field generating assembly 11 is arranged on the upper side of the object 6, please refer to Figure 3 , the in-plane magnetic field generating assembly 11 can be fixed above the object 6 by the upper fixing plate 122; for the embodiment in which the in-plane magnetic field generating assembly 11 is arranged on the lower side of the object 6, please refer to Figure 7 , the in-plane magnetic field generating assembly 11 can be fixed below the object 6 by the lower fixing plate 123. For the upper fixing plate 122 and the lower fixing plate 123, they can be installed at the corresponding positions of the mounting rack module 4 of the magnetic field probe station according to the needs.

[0033] In some embodiments, the magnetic field probe station further comprises an observation module 5 to observe the vicinity of the measured position of the object 6, so as to facilitate the contact between the probe 32 and the corresponding position of the object 6. Specifically, the observation module 5 comprises a microscope 52, which is configured to be able to observe the preset position. Please refer to Figures 1 to 3 、 Figure 6 、 Figure 7 , which shows a specific embodiment of the observation module 5, in which the microscope 52 is arranged towards the object 6, and the observation module 5 further comprises a camera 51, and the camera 51 images the measured position of the object 6 through the microscope 52, so as to output the corresponding image signal. Of course, in some cases, the microscope 52 can be arranged alone, so that the measured position of the object 6 is directly observed by the human eye through the microscope 52.

[0034] As a more feasible embodiment, the microscope 52 is arranged on the upper side of the perpendicular magnetic field generating assembly 12, and the perpendicular magnetic field generating assembly 12 is provided with a through observation hole, and the microscope 52 observes the preset position through the observation hole. Please refer to Figure 3 、 Figure 7The observation hole is provided through the vertical pole 121 on the upper side of the measured object 6, and the fixed plate 122 is installed on the vertical pole 121. Specifically, the vertical pole 121 is installed on the upper fixed plate 122, the vertical pole 121 extends from the upper fixed plate 122 to the measured object 6, the inside of the vertical pole 121 is provided with a pole hole 1211, the position of the upper fixed plate 122 corresponding to the pole hole 1211 is provided with a fixed plate hole 1221, and the pole hole 1211 and the fixed plate hole 1221 together constitute the observation hole; the line between the microscope 52 and the measured position of the measured object 6 passes through the observation hole and is not blocked, so that the measured position of the measured object 6 can be observed through the microscope 52.

[0035] In order to enable the in-plane magnetic field generating assembly 11 and the vertical magnetic field generating assembly 12 to provide magnetic field outwardly, the three-dimensional magnetic field generating module 1 further comprises an excitation assembly 13, which is arranged in the magnetic circuit where the in-plane magnetic field generating assembly 11 and the vertical magnetic field generating assembly 12 are located, so as to generate a magnetic field and extend to the preset position through the in-plane magnetic field generating assembly 11 and the vertical magnetic field generating assembly 12. For the specific implementation of the excitation assembly 13, the excitation coil can be used as the excitation assembly 13.

[0036] In some cases, the excitation assembly 131 arranged in the in-plane magnetic field generating assembly 11 can be arranged in the magnetic circuit where the in-plane pole 111 is located. The excitation assembly 131 can be arranged on and controlled on different in-plane poles 111 as needed, so as to generate corresponding magnetic fields at the end of different in-plane poles 111, so as to adjust at least the in-plane component of the magnetic field environment where the measured position of the measured object 6 is located; or the magnetic circuits where different in-plane poles 111 are located can be connected, and the excitation assembly 131 can be arranged in the magnetic circuit where different in-plane poles 111 are located, so as to control the corresponding magnetic field generated at the end of the in-plane pole 111 in the magnetic circuit, and further adjust at least the in-plane component of the magnetic field environment where the measured position of the measured object 6 is located. As a more feasible implementation, in the case that the in-plane magnetic field generating assembly 11 comprises four in-plane poles 111, at least one excitation assembly 131 is arranged in the magnetic circuit where each in-plane pole 111 is located.

[0037] At least one excitation assembly 132 is arranged in the magnetic circuit of the vertical pole 121. In some cases, the excitation assembly 132 arranged in the vertical magnetic field generating assembly 12 can be arranged on the two vertical poles 121 respectively, so as to enhance the vertical magnetic field intensity of the area between the two vertical poles 121 and facilitate the adjustment of at least the vertical component of the measured position of the measured object 6. Of course, the magnetic circuits of the two vertical poles 121 can also be connected, and at least one excitation assembly 132 is arranged in the connected magnetic circuit, so as to achieve the adjustment of the magnetic field between the two vertical poles 121; or the excitation assembly 132 can be arranged on one vertical pole 121, so as to extend the magnetic field outwardly through at least one vertical pole 121.

[0038] In addition, it can be understood that, referring to Figures 1 to 3 、 Figure 6 、 Figure 7 , the magnetic field probe table can also be provided with a corresponding mounting rack module 4. More specifically, the mounting rack module 4 can include first, second, third and fourth fixed plates 41, 42, 43 and 44 arranged from bottom to top respectively, the first fixed plate 41 can be used for mounting the sample carrying module 2, the second fixed plate 42 can be used for mounting at least the vertical pole 121 arranged on the lower side of the measured object 6, the third fixed plate 43 can be used for mounting at least the probe module 3, and the fourth fixed plate 44 can be used for mounting at least the vertical pole 121 arranged on the upper side of the measured object 6. In some cases, the first, second, third and fourth fixed plates 41, 42, 43 and 44 can be combined or fused as needed to meet the mounting requirements of the corresponding components.

[0039] In addition, when the in-plane magnetic field generating assembly 11 is arranged on the upper side of the measured object 6, the in-plane magnetic field generating assembly 11 can be mounted on the fourth fixed plate 44; when the in-plane magnetic field generating assembly 11 is arranged on the lower side of the measured object 6, the in-plane magnetic field generating assembly 11 can be mounted on the second fixed plate 42.

[0040] According to the needs, the first, second, third and fourth fixed plates 41, 42, 43 and 44 can be provided with corresponding connecting devices to fix the positions of the fixed plates relative to each other.

[0041] For the sample carrying module 2, please refer to Figures 1 to 3 、 Figure 6 、 Figure 7Since the space capable of accommodating the partial components of the three-position magnetic field generating module 1 needs to be arranged on the upper side and the lower side of the measured object 6, as a feasible way, the sample stage 21 can be arranged in a frame type, so that the sample carrying plate 211 spans the partial components of the three-position magnetic field generating module 1 on the lower side of the measured object 6 and allows the sample carrying plate 211 to move. The sample stage 21 can be displaced under the drive of the first displacement table 22 and the second displacement table 23, and further, the displacement directions of the first displacement table 22 and the second displacement table 23 can be arranged to form an included angle, so that the sample stage 21 can move in at least one plane, thereby driving the measured object 6 to translate, so as to detect different positions of the measured object 6.

[0042] The basic principle, main features and advantages of the present application are shown and described above, therefore the above description is only an embodiment of the present application. It should be understood by those skilled in the art that the present application is not limited by the above embodiment, and the above embodiment and description in the specification are only the principle of the present application. Without departing from the spirit and scope of the present application, the present application also includes various equivalent changes and improvements, and these changes and improvements will fall within the scope of the claimed present application.

Claims

1. A magnetic field probe station, characterized by, The application relates to a three-dimensional magnetic field generating module, a sample bearing module and a probe module. The three-dimensional magnetic field generating module comprises an in-plane magnetic field generating assembly and a vertical magnetic field generating assembly, the in-plane magnetic field generating assembly is configured to generate a magnetic field parallel to the surface of a measured object at a preset position, and the vertical magnetic field generating assembly comprises oppositely arranged vertical poles. The sample bearing module is configured to bear the measured object, and the measured object can be located between the vertical poles and close to the preset position under the bearing of the sample bearing module. The probe module comprises a probe base and a probe, the probe is mounted on the probe base, and the detection end of the probe extends to the preset position.

2. A magnetic field probe station as claimed in claim 1, characterised in that: The in-plane magnetic field generating assembly comprises two groups of in-plane poles arranged along a first axis and a second axis, and each group of in-plane poles is provided with oppositely arranged in-plane poles.

3. A magnetic field probe station as claimed in claim 2, characterised in that: The first axis and the second axis are parallel to the surface of the measured object.

4. A magnetic field probe station as claimed in claim 1, characterized in that: The in-plane magnetic field generating assembly is arranged on one side of the measured object.

5. A magnetic field probe station as claimed in claim 1, characterized in that: The magnetic field probe station further comprises an observation module, and the observation module comprises a microscope configured to observe the preset position.

6. A magnetic field probe station as claimed in claim 5, characterised in that: The microscope is arranged on the upper side of the vertical magnetic field generating assembly, the vertical magnetic field generating assembly is provided with a through observation hole, and the microscope observes the preset position through the observation hole.

7. A magnetic field probe station as claimed in claim 6, characterised in that: The observation hole is arranged through the vertical poles on the upper side of the measured object and a fixing plate mounting the vertical poles.

8. A magnetic field probe station as claimed in any of claims 1 to 7, wherein: The three-dimensional magnetic field generating module further comprises an excitation assembly arranged in the magnetic circuit of the in-plane magnetic field generating assembly and the vertical magnetic field generating assembly.

9. A magnetic field probe station as claimed in claim 8, characterised in that: The in-plane magnetic field generating assembly comprises four in-plane poles, and at least one excitation assembly is arranged in the magnetic circuit of each in-plane pole.

10. A magnetic field probe station as claimed in claim 8, characterised in that: At least one excitation assembly is arranged in the magnetic circuit of the vertical poles.

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