Tail gas treatment equipment capable of conveniently drying tail gas

Abstract

The utility model provides tail gas treatment equipment convenient for drying tail gas, which comprises a heating module, a washing module and a drying module, the drying module comprises a condensation pipe section, and the condensation pipe section comprises a first pipe section, a second pipe section and a third pipe section which are sequentially connected from bottom to top; the inner diameter of the first pipe section is gradually increased from bottom to top; the inner diameter of the third pipe section is gradually reduced from bottom to top; a cooling water pipe and a condensation blade are arranged in the second pipe section, the cooling water pipe can effectively reduce the temperature in the pipe section through circulating cold water, and moisture in tail gas is promoted to be condensed; the condensation blades are obliquely arranged around the axis perpendicular to the cooling water pipe, so that the contact area between tail gas and the condensation blades is increased, and the condensation effect is improved; meanwhile, the inclined design of the condensing blades is beneficial to guiding the tail gas to form vortex in the second pipe section, the retention time of the tail gas in the second pipe section is prolonged, the condensing effect is further improved, and moisture in the tail gas is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor exhaust gas treatment equipment technology, and in particular to an exhaust gas treatment equipment that facilitates the drying of exhaust gas. Background Technology

[0002] In semiconductor manufacturing, a large amount of exhaust gas is typically generated. Some processes produce exhaust gas containing significant amounts of flammable gases. Therefore, it's usually necessary to heat and combust the exhaust gas to remove these flammable gases. The temperature of the combusted exhaust gas is very high, necessitating cooling. A common cooling method is water washing, but this results in a high moisture content, which can easily corrode downstream equipment if discharged directly. Therefore, the washed exhaust gas needs to be dried to reduce moisture content and meet emission standards. Utility Model Content

[0003] To address the aforementioned technical problems, this application provides an exhaust gas treatment device for easy drying of exhaust gas, comprising a heating module, a water washing module, and a drying module; the heating module is provided with an air inlet pipe, through which exhaust gas enters and sequentially passes through the heating module, the water washing module, and the drying module; the drying module includes a condenser section, which comprises a first section, a second section, and a third section connected sequentially from bottom to top; the inner diameter of the first section gradually increases from bottom to top; the inner diameter of the third section gradually decreases from bottom to top; the second section is provided with a cooling water pipe and condenser blades, wherein the condenser blades are in multiple sets, and the multiple sets of condenser blades are inclinedly arranged on the circumferential surface of the cooling water pipe around an axis perpendicular to the cooling water pipe.

[0004] In some embodiments of this application, a first condensate return groove is provided on the inner wall of the second pipe section.

[0005] In some embodiments of this application, a second condensate return groove extending along the inclined direction of the condensate blade is provided on the upper and lower surfaces of the condensate blade.

[0006] In some embodiments of this application, a cooling pipe section is sleeved outside the second pipe section, and a cooling space is formed between the cooling pipe section and the second pipe section, in which cooling water flows.

[0007] In some embodiments of this application, the water washing module includes a first water washing module and a second water washing module. Both the first water washing module and the second water washing module are mounted on a water tank, and both the first water washing module and the second water washing module are equipped with spray components.

[0008] In some embodiments of this application, multiple sets of the condenser blades are spirally arranged with the cooling water pipe as the axis of rotation.

[0009] In some embodiments of this application, a porous filter plate is provided between the second pipe segment and the third pipe segment, and the porous filter plate is provided with packing material.

[0010] In some embodiments of this application, an ultrasonic generator is also provided on the outside of the third pipe segment.

[0011] In some embodiments of this application, the heating module further includes a mixing chamber located at the lower part of the air intake pipe, and a heating chamber is provided at the lower part of the mixing chamber.

[0012] In some embodiments of this application, a heating assembly and a temperature sensor are provided inside the heating cavity.

[0013] Compared with the prior art, this utility model has the following advantages and beneficial effects: The exhaust gas treatment equipment for easy drying of exhaust gas in this application includes a condenser section comprising a first section, a second section, and a third section connected sequentially from bottom to top; the inner diameter of the first section gradually increases from bottom to top; the inner diameter of the third section gradually decreases from bottom to top; the second section is equipped with a cooling water pipe and condenser blades, with multiple sets of condenser blades inclined around an axis perpendicular to the cooling water pipe on the circumferential surface of the cooling water pipe. The cooling water pipe, through circulating cold water, can effectively reduce the temperature within the pipe section, promoting the condensation of moisture in the exhaust gas; the condenser blades, inclined around an axis perpendicular to the cooling water pipe, increase the contact area between the exhaust gas and the condenser blades, improving the condensation effect; simultaneously, the inclined design of the condenser blades helps guide the exhaust gas to form a vortex within the second section, increasing the residence time of the exhaust gas within the second section, further improving the condensation effect and reducing the moisture in the exhaust gas.

[0014] It should be understood that the above general description and the following detailed description are merely exemplary and explanatory, and do not limit this document. Attached Figure Description

[0015] The accompanying drawings, which form part of this document, are used to provide a further understanding of the document. The illustrative embodiments and descriptions herein are used to explain the document and do not constitute an undue limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the structure of an exhaust gas treatment device for easy drying of exhaust gas provided in an exemplary embodiment of this application;

[0017] Figure 2 This is a front sectional view of a condenser tube section provided in an exemplary embodiment of this application;

[0018] Figure 3 This is a top sectional view of a condenser tube section provided in an exemplary embodiment of this application.

[0019] In the picture:

[0020] 100. Heating module; 101. Air inlet pipe; 102. Mixing chamber; 103. Heating chamber; 201. First water washing module; 202. Second water washing module; 300. Water tank; 400. Condensation pipe section; 401. First pipe section; 402. Second pipe section; 403. Third pipe section; 404. Cooling water pipe; 405. Condensation blades; 406. Cooling pipe section; 407. Second condensate return channel; 408. Porous filter plate. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be arbitrarily combined with each other.

[0022] In semiconductor manufacturing, a large amount of exhaust gas is typically generated. Some processes produce exhaust gas containing significant amounts of flammable gases. Therefore, it's usually necessary to heat and combust the exhaust gas to remove these flammable gases. The temperature of the combusted exhaust gas is very high, necessitating cooling. A common cooling method is water washing, but this results in a high moisture content, which can easily corrode downstream equipment if discharged directly. Therefore, the washed exhaust gas needs to be dried to reduce moisture content and meet emission standards.

[0023] Based on this, an exemplary embodiment of this application provides an exhaust gas treatment device for easy drying of exhaust gas. The device includes a condenser section comprising a first section, a second section, and a third section connected sequentially from bottom to top. The inner diameter of the first section gradually increases from bottom to top; the inner diameter of the third section gradually decreases from bottom to top. A cooling water pipe and condenser blades are installed within the second section. Multiple sets of condenser blades are inclined around an axis perpendicular to the cooling water pipe on its circumferential surface. The cooling water pipe, through circulating cold water, effectively reduces the temperature within the section, promoting the condensation of moisture in the exhaust gas. The inclined arrangement of the condenser blades around an axis perpendicular to the cooling water pipe increases the contact area between the exhaust gas and the condenser blades, improving the condensation effect. Simultaneously, the inclined design of the condenser blades helps guide the exhaust gas to form a vortex within the second section, increasing the residence time of the exhaust gas within the second section, further improving the condensation effect and reducing the moisture content in the exhaust gas.

[0024] An exemplary embodiment of this application provides an exhaust gas treatment device that facilitates the drying of exhaust gas, such as... Figure 1 As shown, the exhaust gas treatment equipment includes a heating module 100, a water washing module, and a drying module. The heating module 100 is equipped with an intake pipe 101 and a mixing chamber 102 located below the intake pipe 101. A heating chamber 103 is located below the mixing chamber 102. The heating chamber 103 contains a heating element and a temperature sensor. The heating element heats the exhaust gas to ensure combustion, and the temperature sensor detects the temperature within the heating chamber 103 for temperature control. The exhaust gas enters the heating module 100 through the intake pipe 101 and passes sequentially through the heating module 100, the water washing module, and the drying module. The water washing module includes a first water washing module 201 and a second water washing module 202. Both the first and second water washing modules 201 are mounted on a water tank 300 and are interconnected. The exhaust gas passes sequentially through the first water washing module 201 and the water tank 300 before entering the second water washing module 202. Both the first and second water washing modules 201 and 202 are equipped with spray components.

[0025] The drying module includes a condenser section 400, such as Figure 2 As shown, the condenser section 400 includes a first section 401, a second section 402, and a third section 403 connected sequentially from bottom to top. The inner diameter of the first section 401 gradually increases from bottom to top, while the inner diameter of the third section 403 gradually decreases from bottom to top. The combination of the first section 401, the second section 402, and the third section 403 forms a gradually changing inner diameter design, which helps to evenly distribute the exhaust gas within the condenser section 400, increases the contact area between the exhaust gas and the condenser surface, and improves condensation efficiency. The second section 402 is equipped with a cooling water pipe 404 and condenser blades 405. The cooling water pipe 404 is externally connected to a valve and a cooling water circulation system to achieve cooling water circulation. The cooling water pipe 404 can also extend to the second water washing module 202, allowing the water in the cooling water pipe 404 to directly enter the water tank 300. The water tank 300 is connected to the cooling water circulation system to achieve water circulation. The cooling water circulation system may include refrigeration components to cool the water in the cooling water circulation system. The built-in 404 cooling water pipes can effectively reduce the temperature within the pipe section and promote the condensation of moisture in the exhaust gas. For example... Figure 3 As shown, there are multiple sets of condensing blades 405. These sets of condensing blades 405 are inclinedly arranged on the circumferential surface of the cooling water pipe 404 around an axis perpendicular to the cooling water pipe 404. The multiple sets of condensing blades 405 can partially overlap, so that a narrow slit is formed between two adjacent condensing blades 405 to allow the exhaust gas to pass through. The slit is inclined, thus increasing the contact area between the exhaust gas and the condensing blades 405 and improving the condensation effect. At the same time, the inclined design of the condensing blades 405 helps to guide the exhaust gas to form a vortex in the second pipe section 402, increasing the residence time of the exhaust gas in the second pipe section 402, further improving the condensation effect and reducing the moisture in the exhaust gas.

[0026] To facilitate the collection of condensed water droplets into the second water washing module 202, such as Figure 3 As shown, second condensate return channels 407 extending along the inclined direction of the condensate blade 405 are provided on the upper and lower surfaces of the condensate blade 405; multiple sets of first condensate return channels are provided at the positions where the inner wall of the second pipe section 402 contacts the condensate blade 405. Thus, water droplets condensed on the upper and lower surfaces of the condensate blade 405 can fall downwards into the second water washing module 202 through the second condensate return channels 407, or flow into the first condensate return channels and then flow along the first condensate return channels into the second water washing module 202, accelerating the discharge of condensate.

[0027] In one embodiment, multiple sets of condensing blades 405 are spirally arranged around the cooling water pipe 404 as the rotation axis, so that the exhaust gas spirals upward and forms a swirling flow in the second pipe section 402, thereby improving the condensation effect.

[0028] In one embodiment, in order to improve the condensation effect, a cooling pipe section 406 is sleeved on the outside of the second pipe section 402, and a cooling space is formed between the cooling pipe section 406 and the second pipe section 402. The cooling pipe section 406 is connected to a circulation system, and cooling water flows in the cooling space. In this way, the second pipe section 402 can be cooled down, further improving the condensation effect of moisture in the exhaust gas and reducing the moisture content in the exhaust gas.

[0029] In one embodiment, to improve the dryness of the exhaust gas, a porous filter plate 408 is provided between the second pipe section 402 and the third pipe section 403. The porous filter plate 408 is filled with packing material to further enhance the condensation effect. To prevent impurities in the exhaust gas from clogging the porous filter plate 408, an ultrasonic generator is also provided outside the third pipe section 403. The ultrasonic generator can periodically or when the equipment is not in operation vibrate the third pipe section 403 to remove impurities from the porous filter plate.

[0030] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0031] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0032] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if these modifications and variations fall within the scope of the claims of this application and their equivalents, the intent of this application also includes these modifications and variations.

Claims

1. A tail gas treatment device for easy drying of tail gas, characterized in that, It includes a heating module, a water washing module, and a drying module; the heating module is equipped with an air inlet pipe, through which exhaust gas enters and passes sequentially through the heating module, the water washing module, and the drying module; the drying module includes a condenser section, which comprises a first section, a second section, and a third section connected sequentially from bottom to top; the inner diameter of the first section gradually increases from bottom to top; the inner diameter of the third section gradually decreases from bottom to top; the second section is equipped with a cooling water pipe and condenser blades, which are multiple sets, and the multiple sets of condenser blades are inclinedly arranged on the circumferential surface of the cooling water pipe around an axis perpendicular to the cooling water pipe.

2. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, The inner wall of the second pipe section is provided with a first condensate return groove.

3. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, The upper and lower surfaces of the condensing blade are provided with a second condensate return groove extending along the tilting direction of the condensing blade.

4. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, A cooling pipe section is sleeved on the outside of the second pipe section, and a cooling space is formed between the cooling pipe section and the second pipe section, in which cooling water flows.

5. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, The water washing module includes a first water washing module and a second water washing module. Both the first water washing module and the second water washing module are mounted on a water tank, and both the first water washing module and the second water washing module are equipped with spray components.

6. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, The multiple sets of condenser blades are spirally arranged with the cooling water pipe as the axis of rotation.

7. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, A porous filter plate is provided between the second pipe section and the third pipe section, and the porous filter plate is provided with packing material.

8. The exhaust gas treatment device for easy drying of exhaust gas according to claim 7, characterized in that, An ultrasonic generator is also installed on the outside of the third pipe section.

9. The exhaust gas treatment device for easy drying of exhaust gas according to claim 1, characterized in that, The heating module also includes a mixing chamber located at the lower part of the air intake pipe, and a heating chamber is provided at the lower part of the mixing chamber.

10. The exhaust gas treatment device for easy drying of exhaust gas according to claim 9, characterized in that, The heating chamber is equipped with heating components and a temperature sensor.

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