Flexible clamping jaw device

Abstract

The utility model discloses a flexible clamping jaw device which comprises a base, a first movable piece, a second movable piece, a first clamping jaw, a driving part, a second clamping jaw and a detection assembly, the first movable piece and the second movable piece are movably arranged on the base and distributed in the first direction, and a first elastic piece is arranged between the first movable piece and the second movable piece; a clamping block is arranged at the end, facing the second movable piece, of the first movable piece, a clamping groove is formed in the second movable piece, the clamping block is arranged in the clamping groove and can move in the clamping groove, an abutting block and a stop block are arranged on the base, the abutting block is located on the side, facing the first movable piece, of the second movable piece, and the stop block is located on the side, deviating from the first movable piece, of the second movable piece. A second elastic piece is arranged between the second movable piece and the abutting block, the first clamping jaw and the driving part are arranged on the first movable piece, the second clamping jaw is arranged on the driving part, and the detection assembly detects the position of the first movable piece in the first direction. Front-back flexible movement of the clamping jaw carrying mechanism is achieved, abnormal conditions such as jamming can be fed back in time, and the mechanism and materials are prevented from being damaged.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a flexible gripper device. Background Technology

[0002] In the semiconductor industry, grippers are frequently used to handle wafer rings. During handling, unexpected situations such as wear, equipment malfunctions, or human intervention can cause jamming. In these cases, the motor shaft may fail to detect the movement, and continued movement can lead to collisions and material damage. Therefore, new innovations are necessary. Utility Model Content

[0003] The purpose of this invention is to address at least one of the shortcomings of existing technologies. Therefore, a flexible gripper device is proposed to achieve flexibility in the back-and-forth movement of the gripper handling mechanism. This device can provide timely feedback in case of jamming or other abnormalities, preventing damage to the mechanism and the materials being handled. The specific solution is as follows:

[0004] A flexible gripper device includes a base, a first moving member, a second moving member, a first gripper, a driving component, a second gripper, and a detection component. The first moving member and the second moving member are movably disposed on the base. The first moving member and the second moving member are distributed along a first direction and are separated by a first elastic member. A locking block is provided at the end of the first moving member facing the second moving member. A locking groove is provided on the second moving member. The locking block is disposed in the locking groove and can move a set distance within the locking groove. An abutment block and a stop block are provided on the base. The abutment block is located on the side of the second moving member facing the first moving member, and the stop block is located on the side of the second moving member away from the first moving member. A second elastic member is provided between the second moving member and the abutment block. The first gripper and the driving component are disposed on the first moving member, and the second gripper is disposed on the driving component. The detection component is configured to detect the position of the first moving member in the first direction.

[0005] Furthermore, it includes a first slider, a second slider, and a slide rail. The slide rail is disposed on the base, and the length direction of the slide rail is consistent with the first direction. The first slider and the second slider are fitted onto the slide rail. The first moving member is fixedly connected to the first slider, and the second moving member is fixedly connected to the second slider.

[0006] Furthermore, it also includes a second direction perpendicular to the first direction. The card block includes a connecting part and a snap-fit ​​part along the first direction. The size of the snap-fit ​​part in the second direction is larger than the size of the connecting part in the second direction. One side of the card slot penetrates the end face of the second moving member. The card slot has snap protrusions on two inner walls in the second direction. When the card block is placed in the card slot, the connecting part is located between the two snap protrusions. The snap protrusions stop and limit the snap-fit ​​part.

[0007] Furthermore, one end of the first gripper is fixedly connected to the side of the first moving member away from the base, and the other end of the first gripper extends along the first direction in a direction away from the second moving member.

[0008] The driving component is located on the side of the first moving member that is away from the first gripper, and the driving end of the driving component is away from the first gripper.

[0009] The second gripper is located at the drive end, and the drive component drives the second gripper to move closer to or away from the first gripper.

[0010] Furthermore, it also includes a third direction perpendicular to the first direction, one end of the first moving member is connected to the first slider, and the other end of the first moving member extends out of the base in a direction away from the second moving member and bends in a direction away from the first gripper along the third direction to form a bent portion. The driving component includes a driving body and a driving shaft. The driving body is located on the side of the bent portion facing the base and is fixedly connected to the bent portion. The driving shaft is away from the first gripper along the third direction, and the second gripper is fixedly connected to the driving shaft.

[0011] Furthermore, one end of the second gripper is connected to the drive shaft, and the other end of the second gripper is bent along the third direction toward the first gripper and then bent along the first direction toward the direction away from the second moving member.

[0012] Furthermore, it also includes a second direction perpendicular to the first direction, and the first gripper is provided with a material detection component on one side of the second direction.

[0013] Furthermore, the detection component includes a detection sheet, a first position detection component, and a second position detection component. The detection sheet is connected to the first moving member, and the first position detection component and the second position detection component are respectively located on both sides of the detection sheet in the first direction.

[0014] Compared with the prior art, the flexible gripper device of this application has at least one or more of the following beneficial effects:

[0015] The flexible gripper device of this application adopts a dual-moving component design, realizing flexible movement of the device back and forth. This allows for a certain degree of buffering in case of abnormalities such as jamming during the device's forward and backward movement, avoiding rigid contact between the material and the collision point, which could lead to damage to the material or the mechanism. It is equipped with a detection component that can provide timely feedback in case of abnormalities such as jamming, preventing damage to the mechanism and the material, increasing the safety protection of the device and the material, ensuring the reliability of clamping and conveying materials, and reducing the risks that may occur during the conveying process. It is also equipped with a material detection component that can detect whether the gripper is holding material, ensuring the stability of the feeding process. Attached Figure Description

[0016] Figure 1 and Figure 2 These are three-dimensional structural schematic diagrams of the flexible gripper device provided in the embodiments of this application;

[0017] Figure 3 This is a top view of the flexible gripper device provided in the embodiments of this application;

[0018] Figure 4 This is a schematic diagram of the front view structure of the flexible gripper device provided in the embodiments of this application;

[0019] Figure 5 This is a side view of the flexible gripper device provided in the embodiments of this application;

[0020] Figure 6 This is a partial exploded view of the flexible gripper device provided in the embodiments of this application;

[0021] Figure 7 and Figure 8 These are three-dimensional structural diagrams of the flexible gripper device provided in the embodiments of this application under two different states.

[0022] Among them, 1-base, 11-abutting block, 12-stop block, 13-slide rail, 14-fixing plate, 2-first moving member, 21-locking block, 211-connecting part, 212-locking part, 22-bending part, 23-first slider, 3-second moving member, 31-slot, 311-locking protrusion, 32-second slider, 4-first gripper, 41-fixing part, 5-driving component, 51-driving body, 52-driving shaft, 6-second gripper, 7-detection component, 71-detection piece, 72-first position detection component, 73-second position detection component, 8-first elastic element, 9-second elastic element, 10-material detection component, X-first direction, Y-second direction, Z-third direction. Detailed Implementation

[0023] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0024] Example

[0025] This embodiment provides a flexible gripper device, comprising a base 1, a first moving member 2, a second moving member 3, a first gripper 4, a driving component 5, a second gripper 6, and a detection component 7. The first moving member 2 and the second moving member 3 are movably disposed on the base 1. The first moving member 2 and the second moving member 3 are distributed along a first direction X and a first elastic member 8 is disposed between them. A locking block 21 is disposed at the end of the first moving member 2 facing the second moving member 3, and a locking groove 31 is disposed on the second moving member 3. The locking block 21 is disposed in the locking groove 31 and can move a predetermined distance within the locking groove 31. An abutment block 11 and a stop block 12 are disposed on the base 1. The abutment block 11 is located on the side of the second moving member 3 facing the first moving member 2, and the stop block 12 is located on the side of the second moving member 3 away from the first moving member 2. A second elastic member 9 is disposed between the second moving member 3 and the abutment block 11. The first gripper 4 and the driving component 5 are disposed on the first moving member 2, and the second gripper 6 is disposed on the driving component 5. The detection component 7 is configured to detect the position of the first moving member 2 in the first direction X.

[0026] like Figures 1 to 6 As shown in the figure, an embodiment is schematically illustrated, in which the first moving member 2 and the second moving member 3 are slidably connected to the base 1 via sliders. Specifically, the two sliders are defined as a first slider 23 and a second slider 32, with the first moving member 2 fixedly connected to the first slider 23 and the second moving member 3 fixedly connected to the second slider 32. A slide rail 13 is fixedly disposed on the upper side of the base 1, the length direction of the slide rail 13 being consistent with the first direction X. The first slider 23 and the second slider 32 are respectively fitted onto the slide rail 13, as shown in the figure. Figure 1 and Figure 6 As shown.

[0027] To more clearly describe the technical solution, it is now defined as follows: Figure 1 The second direction Y and the third direction Z are shown as being perpendicular to the first direction X, respectively.

[0028] The locking block 21 includes a connecting portion 211 and a locking portion 212 along the first direction X. The dimension of the locking portion 212 in the second direction Y is larger than the dimension of the connecting portion 211 in the second direction Y. That is, the cross-sectional shape of the locking block 21 in the XY plane is "T" shaped. Figure 1 , Figure 3 or Figure 6 As shown. One side of the slot 31 extends through the end face of the second moving member 3. The slot 31 has two protrusions 311 on its inner walls in the second direction Y, as shown. Figure 6 As shown. When the locking block 21 is located in the locking slot 31, the connecting part 211 is located between the two locking protrusions 311, and the locking protrusions 311 form a stop and limit on the locking part 212, as shown. Figure 3 As shown. The size of the slot 31 in the first direction X is larger than the size of the latching part 212 in the first direction X. Therefore, when the latching block 21 is disposed in the slot 31, the latching block 21 can move in the slot 31 along the first direction X. The latching protrusion 311 and the inner wall of the slot 31 opposite to the latching protrusion 311 respectively form a stop and limit on the latching block 21 in two directions.

[0029] The first gripper 4 is preferably elongated, with one end fixedly connected to the side of the first moving member 2 away from the base 1 along its length, and the other end extending along the first direction X in a direction away from the second moving member 3, such as... Figure 1 or Figure 3 As shown.

[0030] The driving component 5 is located on the side of the first moving member 2 away from the first gripper 4, and the driving end of the driving component 5 is away from the first gripper 4. Preferably, the cross-section of the first moving member 2 in the XZ plane is "L"-shaped, one end of the first moving member 2 is connected to the first slider 23, and the other end of the first moving member 2 extends out of the base 1 in a direction away from the second moving member 3 and bends along the third direction Z in a direction away from the first gripper 4, forming a bent portion 22, such as... Figure 1 and Figure 6 As shown. Preferably, the driving component 5 is a cylinder, with its driving body 51 located on the side of the bent portion 22 facing the base 1 and fixedly connected to the bent portion 22, and its driving shaft 52 moving away from the first gripper 4 along the third direction Z. The second gripper 6 is disposed at the driving end, that is, the second gripper 6 is fixedly connected to the driving shaft 52, as shown. Figure 4 As shown. The driving component 5 drives the second gripper 6 to move closer to or away from the first gripper 4.

[0031] More preferably, the cross-section of the second gripper 6 in the XZ plane is Z-shaped. One end of the second gripper 6 is connected to the drive shaft 52, and the other end of the second gripper 6 is bent along the third direction Z toward the first gripper 4 and then bent along the first direction X toward the direction away from the second moving member 3. Figure 1 , Figure 2 or Figure 4 As shown.

[0032] The material gripped by the flexible gripper device is generally wider than the first gripper 4. Therefore, the first gripper 4 is further provided with a material detection component 10 on the side of the second direction Y. Preferably, the material detection component 10 is a fiber optic sensor. Specifically, the first gripper 4 has a fixing part 41 extending outward on the side of the second direction Y, and the fiber optic sensor is embedded in the fixing part 41, and the working direction of the fiber optic sensor is opposite to the second moving member 3, such as... Figure 1 and Figure 2 As shown, it can be used to detect whether a flexible gripper device is holding material.

[0033] In a preferred embodiment, the detection component 7 includes a detection piece 71, a first position detection component 72, and a second position detection component 73. The detection piece 71 is connected to the first moving member 2, and the first position detection component 72 and the second position detection component 73 are respectively located on both sides of the detection piece 71 in the first direction X. For example Figure 1 and Figure 3 In one schematic embodiment, both the first position detection component 72 and the second position detection component 73 are photoelectric sensors and can be fixedly connected to the base 1 via a fixing plate 14. One end of the detection piece 71 is fixedly connected to the first moving member 2, and the other end extends along the second direction Y and bends along the third direction Z toward the base 1. In a specific implementation, Figure 1 The state shown is the normal state of the flexible gripper device. When the gripper of the flexible gripper device is subjected to a rightward force, the first moving member 2 will compress the first elastic member 8 and move it to the right until the first position detection member 72 detects the detection piece 71, as shown. Figure 7 As shown, after receiving the detection signal from the first position detection component 72, the external device controls the flexible gripper device to stop moving; and when the gripper of the flexible gripper device is subjected to a leftward force, the first moving member 2 pulls the second moving member 3 to move to the left and compresses the second elastic member 9 until the second position detection component 73 detects the detection piece 71, as shown. Figure 8 As shown, after receiving the detection signal from the second position detection component 73, the external device controls the flexible gripper to stop moving.

[0034] In one embodiment, the first elastic element 8 and the second elastic element 9 are springs. The two ends of the springs can be fixed by providing grooves at corresponding positions on the first moving element 2, the second moving element 3, or the abutment block 11, such as... Figure 1 As shown. When subjected to pressure, the spring will be compressed, and when the pressure is released, the spring will return to its initial state.

[0035] The flexible gripper device of this application adopts a dual-moving component design, realizing flexible movement of the device back and forth. This allows for a certain degree of buffering in case of abnormal situations such as jamming during the device's forward and backward movement, avoiding rigid contact between the material and the collision point, which could lead to damage to the material or the mechanism. It is equipped with a detection component 7 that can provide timely feedback in case of abnormal situations such as jamming, preventing damage to the mechanism and the material, increasing the safety protection of the device and the material, ensuring the reliability of clamping and conveying the material, and reducing the risks that may occur during the conveying process. It is also equipped with a material detection component 10, which can detect whether the gripper is clamping the material, ensuring the stability of the feeding process.

[0036] In this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, which includes not only the elements listed but also other elements not expressly listed.

[0037] In this document, the directional terms such as front, back, top, and bottom are defined based on the location of the components in the accompanying drawings and their relative positions to each other, solely for the purpose of clarity and convenience in expressing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed in this application.

[0038] Where there is no conflict, the above embodiments and features described herein can be combined with each other.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A flexible gripper device, characterized in that, It includes a base (1), a first moving member (2), a second moving member (3), a first gripper (4), a driving component (5), a second gripper (6), and a detection component (7). The first moving member (2) and the second moving member (3) are movably disposed on the base (1). The first moving member (2) and the second moving member (3) are distributed along a first direction (X) and a first elastic member (8) is disposed between them. A locking block (21) is provided at one end of the first moving member (2) facing the second moving member (3). A slot (31) is provided on the second moving member (3). The locking block (21) is disposed in the slot (31) and can move a set distance within the slot (31). The base (1) is provided with an abutment block (11) and a stop block (12). The abutment block (11) is located on the side of the second moving member (3) facing the first moving member (2). The stop block (12) is located on the side of the second moving member (3) away from the first moving member (2). A second elastic member (9) is provided between the second moving member (3) and the abutment block (11). The first gripper (4) and the driving component (5) are provided on the first moving member (2). The second gripper (6) is provided on the driving component (5). The detection component (7) is configured to detect the position of the first moving member (2) in the first direction (X).

2. The flexible gripper device according to claim 1, characterized in that, It includes a first slider (23), a second slider (32), and a slide rail (13). The slide rail (13) is disposed on the base (1). The length direction of the slide rail (13) is consistent with the first direction (X). The first slider (23) and the second slider (32) are fitted onto the slide rail (13). The first moving member (2) is fixedly connected to the first slider (23), and the second moving member (3) is fixedly connected to the second slider (32).

3. The flexible gripper device according to claim 1, characterized in that, It also includes a second direction (Y) perpendicular to the first direction (X). The card block (21) includes a connecting part (211) and a snap-fit ​​part (212) along the first direction (X). The size of the snap-fit ​​part (212) in the second direction (Y) is larger than the size of the connecting part (211) in the second direction (Y). One side of the card groove (31) penetrates the end face of the second moving member (3). The card groove (31) has two snap protrusions (311) on its two inner walls in the second direction (Y). When the card block (21) is located in the card groove (31), the connecting part (211) is located between the two snap protrusions (311). The snap protrusions (311) form a stop and limit on the snap-fit ​​part (212).

4. The flexible gripper device according to claim 2, characterized in that, One end of the first gripper (4) is fixedly connected to the side of the first moving member (2) away from the base (1), and the other end of the first gripper (4) extends along the first direction (X) in a direction away from the second moving member (3); The driving component (5) is located on the side of the first moving member (2) away from the first gripper (4), and the driving end of the driving component (5) is away from the first gripper (4). The second gripper (6) is located at the drive end, and the drive component (5) drives the second gripper (6) to move closer to or away from the first gripper (4).

5. The flexible gripper device according to claim 4, characterized in that, It also includes a third direction (Z) perpendicular to the first direction (X), one end of the first moving member (2) is connected to the first slider (23), the other end of the first moving member (2) extends out of the base (1) in a direction away from the second moving member (3) and bends in the third direction (Z) away from the first gripper (4) to form a bent portion (22), the driving component (5) includes a driving body (51) and a driving shaft (52), the driving body (51) is located on the side of the bent portion (22) facing the base (1) and is fixedly connected to the bent portion (22), the driving shaft (52) is away from the first gripper (4) in the third direction (Z), and the second gripper (6) is fixedly connected to the driving shaft (52).

6. The flexible gripper device according to claim 5, characterized in that, One end of the second gripper (6) is connected to the drive shaft (52), and the other end of the second gripper (6) is bent along the third direction (Z) toward the first gripper (4) and then bent along the first direction (X) toward the direction away from the second moving member (3).

7. The flexible gripper device according to claim 4, characterized in that, It also includes a second direction (Y) perpendicular to the first direction (X), and the first gripper (4) is provided with a material detection component (10) on one side of the second direction (Y).

8. The flexible gripper device according to claim 1, characterized in that, The detection component (7) includes a detection piece (71), a first position detection component (72), and a second position detection component (73). The detection piece (71) is connected to the first moving member (2). The first position detection component (72) and the second position detection component (73) are located on both sides of the detection piece (71) in the first direction (X).

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