Valve and electron beam detection equipment
By adopting an articulated transmission valve structure in the electron beam detection equipment, the problems of easy wear and sealing failure of the sealing valve are solved, higher sealing performance and service life are achieved, and the normal operation of the equipment is ensured.
Patent Information
- Application Number
- CN202423261979.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2034-12-27
AI Technical Summary
The sealing valves of existing electron beam detection equipment are prone to generate powder during use, resulting in seal failure, short service life, and affecting equipment performance.
The valve structure adopts an articulated transmission, through the articulated movement of the sealing plate and the push plate, combined with the elastic member and the drive assembly, to achieve the sealing and opening of the connecting through hole, reducing friction and wear.
It effectively suppresses the generation of powder, ensures the sealing and service life of the valve, and ensures the normal operation and working performance of the electron beam detection equipment.
Smart Images
Figure CN223483467U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a valve and electron beam detection device. Background Art
[0002] In semiconductor manufacturing, samples need to be inspected using electron beam testing equipment. This equipment requires a medium-to-high vacuum operating environment. However, achieving this environment is challenging, requiring prolonged vacuuming and high-temperature baking. Therefore, when the electron gun of the testing equipment is transferred to the testing machine after commissioning or when changing samples, a valve is used to bring the electron gun into a vacuum environment, and a portion of the chamber (the testing chamber where the sample is placed) is devastated to ensure the operation and performance of the electron beam testing equipment.
[0003] Currently, in existing technologies, some sealing valves have a sealing block at the electron beam passage. A fixed stop is driven to abut against the sealing block, and under the reverse force of the pressure block, the sealing block moves towards the electron beam passage to cover it, thus achieving a seal. However, the contact movement between the sealing block and the fixed stop involves hard friction, which easily generates a lot of powder. This can cause the sealing block to fail in covering the electron beam passage, leading to a decrease in the performance of the electron beam detection equipment, or even its inoperability. Furthermore, the excessive thrust required for the fixed stop to push the sealing block due to hard friction significantly reduces the valve's lifespan. Utility Model Content
[0004] One objective of this invention is to provide a valve and electron beam detection device that can overcome any of the technical defects in the prior art.
[0005] A further objective of this invention is to suppress powder generation, ensure valve sealing, guarantee the normal operation of the electron beam detection equipment, and ensure the working performance of the electron beam detection equipment.
[0006] Another further objective of this invention is to extend the service life of the valve.
[0007] Specifically, this utility model provides a valve for opening and closing a connection through hole provided on a partition wall in an electron beam detection device, and the valve includes:
[0008] A sealing plate is provided on a surface that is parallel to the partition wall and has a sealing part on the surface opposite to the partition wall for engaging with the connecting through hole.
[0009] A push plate is positioned on the side of the sealing plate opposite to the partition wall.
[0010] One or more connecting rods, each connecting rod having its two ends hinged to a sealing plate and a push plate, respectively;
[0011] The stop is installed on the partition wall and is located on the same side as the sealing plate and the push plate;
[0012] A drive assembly, disposed on the opposite side of the sealing plate and the push plate and the stop member, and configured to push the sealing plate and the push plate toward the stop member to close the connection through hole, includes:
[0013] The first push rod is used to push the sealing plate toward the stop member and is connected to the sealing plate by an elastic member to allow the first push rod and the sealing plate to move relative to each other.
[0014] The second push rod is used to push the push plate toward the stop and is fixedly set with the side of the push plate. The stop is configured to limit the position of the sealing plate along the pushing direction, and the connecting rod presses the sealing plate against the partition wall as the push plate continues to be pushed, so that the sealing part seals with the connecting through hole.
[0015] Furthermore, the driving component also includes:
[0016] The connector extends from the side of the push plate that mates with the second push rod and connects to the first push rod, thereby transmitting the thrust of the second push rod to the first push rod.
[0017] Furthermore, a fixing hole is provided on the connector along the pushing direction, and the end of the first push rod is fixedly installed in the fixing hole.
[0018] Furthermore, the driving component also includes:
[0019] A guide shaft is disposed on the sealing plate and extends toward the connector; and,
[0020] The elastic element includes:
[0021] A spring, one end of which is sleeved on the second push rod and the other end of which is sleeved on the guide shaft, allows the first push rod and the guide shaft to undergo relative displacement in a direction perpendicular to the partition wall when transmitting the thrust of the first push rod.
[0022] Furthermore, the driving component also includes:
[0023] The cylinder includes a cylinder rod connected to the second push rod, for providing thrust to the second push rod via the cylinder rod, and for driving the push plate and sealing plate away from the stop via the cylinder rod to open the connecting through hole.
[0024] Furthermore, the valve also includes:
[0025] A housing, fitted over the connecting through-hole, has an inlet for allowing the sealing plate and the push plate to be pushed into the housing, and also has a first sidewall disposed relative to the partition wall, the first sidewall being used to restrict the sealing plate and the push plate away from the partition wall when the stop restricts the movement of the sealing plate in the pushing direction.
[0026] Furthermore, the casing has a second sidewall corresponding to the opening; and,
[0027] The stop components include:
[0028] A stop block is provided on the second side wall, and its end facing the partition wall is provided with a mating structure for abutting the sealing plate.
[0029] Furthermore, the fillet of the stop block between the two sides facing the partition wall and the sealing plate is adjusted according to the structure; or,
[0030] The mating structure is a rotating shaft that is rotatably mounted at the end of the stop block facing the partition wall.
[0031] Furthermore, the number of connecting rods is set to multiple, with multiple connecting rods hinged to two opposing sides of the sealing plate in the vertical pushing direction, and multiple connecting rods hinged to two opposing sides of the push plate in the vertical pushing direction; or,
[0032] The number of connecting rods is set to four. The four connecting rods are hinged in pairs to the two opposite sides of the sealing plate in the vertical pushing direction. The two sets of connecting rods are also hinged to the two opposite sides of the push plate in the vertical pushing direction.
[0033] This utility model also provides an electron beam detection device, which includes the aforementioned valve; and...
[0034] The electron beam detection equipment also includes an electron beam emission cavity, a transfer cavity, and a sample detection cavity, with the transfer cavity connecting the electron beam emission cavity and the sample detection cavity; and,
[0035] The transfer chamber and the sample detection chamber are separated by a partition wall; and,
[0036] The sealing plate, push plate, and connecting rod are all located inside the transition cavity.
[0037] Furthermore, the valve cylinder is located outside the transition chamber, and the cylinder rod extends into the transition chamber; and,
[0038] The valve housing is located inside the transition chamber.
[0039] The valve of this invention uses an elastic element to bring the sealing plate and the push plate, which are hinged together by a connecting rod, into a relatively close state. A first push rod and a second push rod apply a pushing force to the sealing plate and the push plate. With the cooperation of a stop element, the elastic element is compressed, and the sealing plate moves away from the push plate and towards the connecting through hole, thereby completing the action of sealing and pressing the connecting through hole. Furthermore, during the process of sealing the connecting through hole, the transmission between the sealing plate and the push plate is always hinged, which results in less wear compared to hard friction transmission. Therefore, this invention can suppress powder generation, ensure the valve's sealing performance, guarantee the normal operation of the electron beam detection equipment, and ensure the working performance of the electron beam detection equipment.
[0040] Furthermore, in this invention, because the sealing plate and the push plate are always hinged, the valve requires less driving force during the process of closing the connecting through hole, thus significantly reducing the wear on the valve components. Therefore, this invention can extend the service life of the valve.
[0041] Since the electron beam detection device of this utility model includes the aforementioned valve, it also possesses the beneficial technical effects of the valve.
[0042] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description
[0043] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:
[0044] Figure 1 This is one of the structural schematic diagrams of an electron beam detection device according to an embodiment of the present invention;
[0045] Figure 2 This is a second schematic diagram of the structure of an electron beam detection device according to an embodiment of the present invention;
[0046] Figure 3 This is a schematic diagram showing the cooperation of a sealing cavity, sealing plate, push plate and drive assembly in a valve according to an embodiment of the present invention;
[0047] Figure 4 This is a schematic diagram showing the cooperation of a sealing cavity, sealing plate, push plate, drive assembly and connecting through hole in a valve according to an embodiment of the present invention;
[0048] Figure 5 This is a schematic diagram of the structure of a valve according to an embodiment of the present invention;
[0049] Figure 6 This is an exploded view of a valve according to an embodiment of the present invention. DETAILED DESCRIPTION
[0050] In the description of this embodiment, it should be understood that the terms "inner" and "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.
[0051] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically stated, this indicates that other features are not excluded and may be further included.
[0052] Unless otherwise expressly specified and limited, the terms "installation," "setting," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this invention according to the specific circumstances.
[0053] Furthermore, in the description of this embodiment, "above" or "below" the second feature can include direct contact between the first and second features, or it can include contact between the first and second features through another feature between them. That is, in the description of this embodiment, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," or "below" of the second feature can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0054] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of these embodiments have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.
[0055] In the description of this embodiment, the terms "this embodiment," "modified embodiment," "an alternative embodiment," "implementation," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0056] The following is combined Figure 1 and Figure 2 The electron beam detection device of this embodiment will be described in detail below. It should be noted that... Figure 1 and Figure 2 Only some components of the electron beam detection equipment are shown.
[0057] Reference Figure 1 and Figure 2 In this embodiment, the electron beam detection device may include a valve 500; and the electron beam detection device may also include an electron beam emitting cavity 100, a transfer cavity 200 and a sample detection cavity 300, wherein the transfer cavity 200 is connected between the electron beam emitting cavity 100 and the sample detection cavity 300; the transfer cavity 200 and the sample detection cavity 300 are separated by a partition wall 400, and the partition wall 400 is provided with a connection through hole 410.
[0058] It is understandable that the electron beam detection equipment can open or close the connection port 410 through the valve 500, thereby realizing the connection and disconnection of the electron beam emission cavity 100 and the sample detection cavity 300.
[0059] In some application scenarios, when the electron gun of the detection equipment needs to be transferred to the detection stage (electron beam emission chamber 100) after debugging, when the sample to be tested (e.g., a wafer) needs to be placed into the sample detection chamber 300, or when the tested sample needs to be removed from the sample detection chamber 300, the valve 500 can be used to close the connecting through hole 410, so that the electron beam emission chamber 100 where the electron beam emission device is placed is kept in a vacuum state. Then, the electron gun can be transferred into the electron beam emission chamber 100, or the vacuum in the detection chamber can be broken to place or replace the sample. Furthermore, after the sample is placed into the sample detection chamber 300, the sample detection chamber 300 can be evacuated again. When the vacuum level of the sample detection chamber 300 reaches the set standard, the valve 500 can be used to open the connecting through hole 410, so that the electron beam emitted by the electron gun can enter the sample detection chamber 300 to detect the sample.
[0060] In this embodiment, the valve 500 can be the same as the valve 500 described in the following embodiments. Therefore, the electron beam detection device of this embodiment can also possess the beneficial technical effects of the valve 500 described in the following embodiments.
[0061] The following is combined Figures 1 to 6 The valve 500 of this embodiment will be described in detail below. Furthermore, Figure 1 and Figure 4 This shows the state where valve 500 is closed when connecting through hole 410 is closed. Figure 3 The middle sealing plate, the push plate, and the drive assembly are in the state of having the connection through hole 410 open.
[0062] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 In this embodiment, valve 500 can be used to open and close the connection through hole 410 provided on the partition wall 400 in the electron beam detection equipment. Valve 500 may include sealing plate 510, push plate 530, one or more connecting rods 520, drive assembly 550 and stop member 540.
[0063] The sealing plate 510 is arranged parallel to the partition wall 400, and the surface of the sealing plate 510 opposite to the partition wall 400 is provided with a sealing part 511 for engaging with the connecting through hole 410. The push plate 530 is provided on the side of the sealing plate 510 opposite to the partition wall 400; the two ends of each connecting rod 520 are respectively hinged to the sealing plate 510 and the push plate 530.
[0064] A stop 540 is disposed on the partition wall 400, and the stop 540 is located on the same side as the sealing plate 510 and the push plate 530. A drive assembly 550 is disposed on the opposite side of the sealing plate 510 and the push plate 530, opposite to the stop 540, and the stop 540 is configured to push the sealing plate 510 and the push plate 530 toward the stop 540 to close the connecting through hole 410. The drive assembly 550 may include a first push rod 551 and a second push rod 552. The first push rod 551 is used to push the sealing plate 510 in a direction parallel to the partition wall 400, and the first push rod 551 and the sealing plate 510 are connected by an elastic member 560 to allow relative movement between the first push rod 551 and the sealing plate 510. The second push rod 552 is used to push the push plate 530 in a direction parallel to the partition wall 400, and the second push rod 552 is fixedly disposed on the side of the push plate 530.
[0065] The stop member 540 is configured to limit the position of the sealing plate 510 along the pushing direction, and the connecting rod 520 presses the sealing plate 510 against the partition wall 400 during the process of the push plate 530 being pushed, so that the sealing part 511 is sealed and engaged with the connecting through hole 410.
[0066] In this embodiment, the valve 500, through the elastic element 560, allows the sealing plate 510 and the push plate 530, hinged by the connecting rod 520, to be in a relatively close state. Furthermore, the first push rod 551 and the second push rod 552 apply a pushing force to the sealing plate 510 and the push plate 530. With the cooperation of the stop member 540, the elastic element 560 is compressed, and the sealing plate 510 moves away from the push plate 530 and closer to the connecting through hole 410, thereby completing the action of sealing and pressing the connecting through hole 410. Moreover, during the process of sealing the connecting through hole 410, the valve 500 maintains a hinged transmission between the sealing plate 510 and the push plate 530. Compared to hard friction transmission, this transmission method results in less wear. Therefore, this embodiment can suppress powder generation, ensure the sealing performance of the valve 500, guarantee the normal operation of the electron beam detection equipment, and ensure the working performance of the electron beam detection equipment.
[0067] Reference Figure 3 and Figure 4 In this embodiment, the valve 500 closes the connecting through hole 410 in the following manner: before closing the connecting through hole 410, the elastic member 560 is in an extended state, and the sealing plate 510 and the push plate 530 are relatively close, with the sealing plate 510 closer to the stop member 540. During the process of closing the connecting through hole 410, the second push rod 552 pushes the push plate 530 towards the stop member 540, and the first push rod 551 simultaneously pushes the sealing plate 510 towards the stop member 540 through the elastic member 560. When the sealing plate 510 abuts against the stop member 540, the push plate 530 continues to be pushed towards the stop member 540 by the second push rod 552. At this time, under the action of the connecting rod 520, the elastic member 560 is compressed, allowing the sealing plate 510 to have displacement relative to the first push rod 551 along the sealing direction (towards the connecting through hole 410) and displacement towards the first push rod 551. Furthermore, the connecting rod 520 can convert the movement of the push plate 530 toward the stop member 540 into the movement of the sealing plate 510 away from the push plate 530 and pressing it toward the connecting through hole 410. Consequently, the valve 500 can close the connecting through hole 410, so that the electron beam emission cavity 100 and the sample detection cavity 300 are separated, thereby making the electron beam emission cavity 100 a sealed state.
[0068] Reference Figure 3 and Figure 4In this embodiment, the valve 500 can open the connecting through hole 410 by the second push rod 552 pulling the push plate 530 away from the stop member 540, and the first push rod 551 pulling the sealing plate 510 away from the stop member 540 via the elastic member 560. At this time, under the action of the connecting rod 520, the extension of the elastic member 560 will give the sealing plate 510 a force away from the partition wall 400 (or connecting through hole 410) and close to the push plate 530, as well as a force away from the first push rod 551. Since the elastic member 560 allows the sealing plate 510 to have a displacement away from the partition wall 400 (or connecting through hole 410) and away from the first push rod 551 relative to the first push rod 551, the connecting rod 520 rotates, and the elastic member 560 can cause the sealing plate 510 to move away from the connecting through hole 410 (closer to the push plate 530) to open the connecting through hole 410. Furthermore, the push plate 530 and the sealing plate 510 continue to move away from the stop member 540, thereby allowing the valve 500 to fully open the connecting through hole 410, thus connecting the electron beam emission chamber 100 and the sample detection chamber 300. During the process of the valve 500 opening the connecting through hole 410, the sealing plate 510 does not contact the partition wall 400, thereby further suppressing powder generation, ensuring the sealing performance of the valve 500, ensuring the normal operation of the electron beam detection equipment, and further guaranteeing the working performance of the electron beam detection equipment.
[0069] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 In this embodiment, since the sealing plate 510 and the push plate 530 are always hinged, the valve assembly is effectively prevented from jamming during the opening or closing of the connecting through hole 410, thus ensuring the working performance of the valve 500.
[0070] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 In this embodiment, since the sealing plate 510 and the push plate 530 are always hinged, the valve 500 requires less driving force during the process of closing the connecting through hole 410, and the wear of the various components of the valve 500 can be greatly reduced. Therefore, this embodiment can improve the service life of the valve 500.
[0071] Reference Figure 1 , Figure 2 and Figure 4 In this embodiment, the sealing plate 510, the push plate 530 and the connecting rod 520 are all disposed in the transition cavity 200 so as to enable the valve 500 to be configured on the electron beam detection equipment of the above embodiment.
[0072] Reference Figure 6 In this embodiment, the sealing part 511 can be a sealing ring to ensure the sealing effect of the valve 500.
[0073] Reference Figure 3 and Figure 4 In this embodiment, the drive assembly 550 further includes a connector 553. The connector 553 extends from the side of the push plate 530 that mates with the second push rod 552 and connects to the first push rod 551, thereby transmitting the thrust of the second push rod 552 to the first push rod 551.
[0074] It is understandable that the thrust on the first push rod 551 can be provided by the second push rod 552 through the connecting member 553. Furthermore, the connecting member 553 can be disposed on the push plate 530 (e.g., at the end of the second push rod 552) or on the second push rod 552. Moreover, when the sealing plate 510 closes and presses against the connecting through hole 410, the connecting member 553 can restrict the movement of the sealing plate 510 away from the stop member, ensuring the stability of the sealing plate 510 in closing and pressing against the connecting through hole 410.
[0075] Reference Figure 5 In this embodiment, the connector 553 and the push plate 530 can be an integral structure to ensure the connection stability between the connector 553 and the push plate 530.
[0076] Reference Figure 5 In this embodiment, the connectors 553 can all be plates.
[0077] Reference Figure 5 In this embodiment, the connector 553 can be set at the end of the push plate 530 where the second push rod 552 is set, thereby reserving a larger space for the configuration of the sealing plate 510, ensuring the movement stroke (predetermined range) of the sealing plate 510 close to or far from the push plate, and ensuring the working performance of the valve 500.
[0078] Reference Figure 3 and Figure 4 In this embodiment, a fixing hole 5531 can be provided on the connector 553 along the pushing direction. The end of the first push rod 551 is fixedly disposed in the fixing hole 5531 to realize the connection between the first push rod 551 and the connector 553 and to ensure the connection stability between the first push rod 551 and the connector 553.
[0079] In this embodiment, the pushing direction is the direction in which the sealing plate 510 / push plate 530 moves toward the stop member 540.
[0080] Reference Figure 3 , Figure 4 and Figure 6In this embodiment, the drive assembly 550 may further include a guide shaft 554. The guide shaft 554 is disposed on the sealing plate 510 and extends toward the connector 553; and the spring may include a spring 561, one end of which is sleeved on the second push rod 552, and the other end of which is sleeved on the guide shaft 554, thereby allowing relative displacement between the first push rod and the guide shaft in a direction perpendicular to the partition wall when transmitting the thrust of the first push rod.
[0081] Understandably, the guide shaft 554 ensures the stability of the spring 561 during compression and opening, that is, ensures the stability of the elastic element 560 during compression and opening, and further ensures the stability of the valve 500 in opening or closing the connecting through hole 410.
[0082] Reference Figure 3 and Figure 4 In this embodiment, the guide shaft 554 and the sealing plate 510 can be connected by opening a mounting hole 512 on the end face of the sealing plate 510 facing the connector 553, and the guide shaft 554 can be connected to the mounting hole 512 by a thread.
[0083] In an alternative embodiment of the connection between the guide shaft 554 and the sealing plate 510, the guide shaft 554 and the sealing plate 510 can be an integral structure.
[0084] Reference Figure 2 , Figure 5 and Figure 6 In this embodiment, the drive assembly 550 further includes a cylinder 570. The cylinder 570 includes a cylinder rod 571 connected to the second push rod 552. The cylinder 570 is used to provide thrust to the second push rod 552 through the cylinder rod 571, and to drive the push plate 530 and the sealing plate 510 away from the stop member 540 through the cylinder rod 571, so as to open the connection through hole 410.
[0085] It is understandable that the valve 500 can provide thrust to the second push rod 552 through the setting of the cylinder 570, thereby completing the action of closing the connection through hole 410. Furthermore, the valve 500 can open the connection through hole 410 by retracting the cylinder rod 571, thereby moving the pressure plate and sealing plate 510 away from the stop member 540.
[0086] Reference Figure 2 , Figure 5 and Figure 6 In this embodiment, the second push rod 552 and the cylinder rod 571 can be an integral structure to ensure the stability of the power transmission from the cylinder rod 571 to the second push rod 552 and to ensure the stability of the valve 500's operation.
[0087] Reference Figure 1 and Figure 2 In this embodiment, the cylinder 570 of the valve 500 can be located outside the transition cavity 200, and the cylinder rod 571 of the cylinder 570 can pass through the wall of the transition cavity 200 and extend into the transition cavity 200 to ensure the normal operation of the valve 500 and realize the configuration of the valve 500 on the electron beam detection equipment.
[0088] In an alternative embodiment of cylinder 570, the difference from the above embodiment is that cylinder 570 is replaced with a hydraulic cylinder. Similarly, valve 500 can perform the actions of closing and opening the connection through hole 410.
[0089] Reference Figure 1 , Figure 3 , Figure 4 and Figure 6 In this embodiment, the valve 500 may further include a housing 580. The housing 580 covers the connection through hole 410 and has an extension 581 for allowing the sealing plate 510 and the push plate 530 to be pushed into the housing 580. The housing 580 also has a first sidewall 582 disposed relative to the partition wall 400. The first sidewall 582 is used to restrict the sealing plate 510 and the push plate 530 away from the partition wall 400 when the stop member 540 restricts the movement of the sealing plate 510 in the pushing direction.
[0090] It is understandable that when valve 500 closes and presses against the connecting through hole 410, the first sidewall 582 can assist the sealing plate 510 in pressing against the connecting through hole 410. Specifically, with the stop 540 restricting the movement of the sealing plate 510 in the pushing direction, the sealing plate 510 and the push plate 530 are restricted from moving away from the partition wall 400 to ensure the sealing performance of valve 500, the vacuum degree of electron beam emission cavity 100, and the working performance of electron beam detection equipment. Furthermore, through the setting of the inlet 581, the sealing plate 510 and the push plate 530 can be pushed to the connecting through hole 410 to close the connecting through hole 410, ensuring the normal opening and closing of valve 500 and the operation of the connecting through hole 410.
[0091] Reference Figure 1 , Figure 3 and Figure 4 In this embodiment, a through hole 5821 is provided on the first sidewall 582, which is opposite to the connecting through hole 410. The through hole 5821 is used to allow the electron beam emitted by the electron beam detection device to enter the housing 580.
[0092] Understandably, when valve 500 opens the connecting through hole 410, the electron beam emitted from the electron beam emission cavity 100 enters the transfer cavity 200 and then passes through the through hole 5821 and the connecting through hole 410 to enter the sample detection cavity 300 for sample detection. This avoids disturbance of the electron beam by the first sidewall 582 and ensures the normal operation of the electron beam detection equipment.
[0093] Reference Figure 1 , Figure 3 and Figure 4 In this embodiment, the cover 580 has a second sidewall 583 corresponding to the extension inlet 581. Furthermore, the stop member 540 includes a stop block 541, which is disposed on the second sidewall 583. The end of the stop block 541 facing the partition wall 400 is provided with a mating structure 542 for abutting against the sealing plate 510.
[0094] It is understood that the stop block 541 can be disposed on the second side wall 583, and the second side wall 583 can be connected to the partition wall 400. Furthermore, the stop member 540 can be disposed on the partition wall 400. The mating structure 542 is used to reduce / limit the (hard) friction between the stop block and the sealing plate 510. Furthermore, the mating structure 542 can further suppress powder generation, further ensure the sealing performance of the valve 500, ensure the normal operation of the electron beam detection equipment, and further ensure the working performance of the electron beam detection equipment.
[0095] Reference Figure 3 In the first embodiment of the stop member 540 in this embodiment, the mating structure 542 has a rounded corner 5422 between the two sides of the stop block 541 facing the partition wall 400 and the sealing plate 510.
[0096] Understandably, before the sealing plate 510 closes and presses against the connecting through hole 410, the stop 540 can limit the sealing plate 510 by having the sealing plate 510 abut against the rounded corner of the stop block 541. As the push plate 530 continues to move toward the stop 540, the connecting rod 520 converts the displacement of the push plate 530 toward the stop 540 into the displacement of the sealing plate 510 against the rounded corner 5422 toward the connecting through hole 410, thereby allowing the valve 500 to close the connecting through hole 410. The rounded corner design allows for smoother relative movement between the stop 540 and the sealing plate 510, further suppressing powder generation.
[0097] Reference Figure 4In the second embodiment of the stop member 540 in this embodiment, the mating structure 542 is a pivot 5421 rotatably disposed at the end of the stop block 541 facing the partition wall 400. Specifically, the pivot 5421 can be disposed between the two sides of the stop block 541 facing the partition wall 400 and the sealing plate 510.
[0098] Understandably, before the sealing plate 510 closes and presses against the connecting through hole 410, the stop 540 can limit the sealing plate 510 by having the sealing plate 510 abut against the rotating shaft 5421 of the stop block 541. As the push plate 530 continues to move towards the stop 540, the connecting rod 520 converts the displacement of the push plate 530 towards the stop 540 into the displacement of the sealing plate 510 against the rotating shaft 5421 towards the connecting through hole 410, thereby allowing the valve 500 to close the connecting through hole 410. The rotating shaft 5421 allows the relative movement between the stop 540 and the sealing plate 510 to be converted into the rolling of the rotating shaft 5421, further reducing the friction between the sealing plate 510 and the stop 540, thus further suppressing powder generation.
[0099] Reference Figure 6 In this embodiment, the cover 580 may also have a third sidewall 584 and a fourth sidewall 585, which are respectively connected to the two sides of the first sidewall 582 and the second sidewall 583 to form the cover 580. The third sidewall 584 and the fourth sidewall 585 may be connected to the partition wall 400 to ensure the connection stability between the stop member 540 and the partition wall 400.
[0100] Reference Figure 1 , Figure 3 and Figure 4 In this embodiment, the cover 580 of the valve 500 can be located inside the transition cavity 200 to enable the valve 500 to be configured on the electron beam detection equipment.
[0101] Reference Figure 6 In this embodiment, the first sidewall 582, the second sidewall 583, the third sidewall 584 and the fourth sidewall 585 can be connected to the partition wall 400 by multiple cavity pins 586 so that the cover 580 covers the connecting through hole 410 and the cover 580 is configured in the transition cavity 200.
[0102] Reference Figure 6 In this embodiment, the number of connecting rods 520 can be set to multiple rods. Multiple connecting rods 520 are hinged to the two opposite sides of the sealing plate 510 in the vertical pushing direction, and multiple connecting rods 520 are hinged to the two opposite sides of the push plate 530 in the vertical pushing direction.
[0103] Understandably, setting multiple connecting rods 520 can ensure the stability of the sealing plate 510 and the push plate 530 during movement.
[0104] In one embodiment of this invention, the number of connecting rods 520 can be two. The two connecting rods 520 are respectively hinged to the two opposite sides of the sealing plate 510 in the vertical pushing direction (width direction), and the two connecting rods 520 are respectively hinged to the two opposite sides of the push plate 530 in the vertical pushing direction (width direction) to ensure the stability of the sealing plate 510 and the push plate 530 during the movement.
[0105] Reference Figure 6 In another embodiment of this invention, the number of connecting rods 520 is set to four. Two connecting rods 520 are respectively hinged to two opposing sides of the sealing plate 510 in the vertical pushing direction (width direction). Furthermore, the two sets of connecting rods 520 are respectively hinged to two opposing sides of the pressing plate 530 in the vertical pushing direction (width direction). This further ensures the stability of the sealing plate 510 and the pressing plate 530 during movement.
[0106] Reference Figure 6 In this embodiment, the connecting rod 520 can be hinged to the sealing plate 510 and the push plate 530 via the hinge shaft 521.
[0107] Reference Figures 1 to 6 In this embodiment, before the valve 500 closes the connecting through hole 410, the sealing plate 510 and the push plate 530 can be located outside the cover 580 (or a portion of the sealing plate 510 and the push plate 530 can be located outside the cover 580), and the spring 561 is in an extended state. The connecting rod 520 can be in a state where the end of the push plate 530 is inclined toward the stop member 540, the sealing plate 510 and the push plate 530 are in a relatively close state, and the sealing plate 510 and the push plate 530 are in a state where the sealing plate 510 is closer to the stop member 540.
[0108] When it is necessary to close the connecting through hole 410, the cylinder 570 extends via the cylinder rod 571 to drive the second push rod 552, which in turn moves the push plate 530 toward the stop member 540. Simultaneously, since the sealing plate 510 is connected to the second push rod 552 / push plate 530 / cylinder rod 571 via the guide shaft 554, spring 561, first push rod 551, and connecting member 553, the sealing plate 510 moves synchronously toward the stop member 540. The sealing plate 510 and push plate 530 then enter the cover 580 through the inlet 581, and the sealing plate 510 preferentially abuts against the stop member 540. At this time, the sealing plate 510 is positioned corresponding to the connecting through hole 410.
[0109] As the cylinder rod 571 continues to extend, the second push rod 552 continues to push the push plate 530 toward the stop 540. At this time, under the action of the connecting rod 520 and the stop 540, the spring 561 is compressed, and the spring 561 allows the sealing plate 510 to move relative to the first push rod 551 in the sealing direction (towards the connecting through hole 410) and to move toward the first push rod 551. Furthermore, the connecting rod 520 can convert the movement of the push plate 530 toward the stop 540 into the movement of the sealing plate 510 away from the push plate 530 and pressing it toward the connecting through hole 410, thereby closing the connecting through hole 410. At this time, the connecting rod 520 can be in a state perpendicular to the partition wall. It should be noted that during the entire process of closing the connecting through hole 410, the sealing plate 510 and the push plate 530 are in hinged contact through the connecting rod 520. Compared to hard friction transmission, this transmission form can have less wear. Therefore, this embodiment can suppress powder generation, ensure the sealing of valve 500, ensure the normal operation of the electron beam detection equipment, and ensure the working performance of the electron beam detection equipment.
[0110] When the connecting through hole 410 needs to be opened, the cylinder 570 retracts via the cylinder rod 571, which in turn drives the push plate 530 to move away from the stop member 540 via the second push rod 552. At this time, the movement of the second push rod 552 away from the stop member 540 creates space for the extension of the spring 561 located between the sealing plate 510 and the push plate 530, as well as for the movement of the sealing plate. Under the action of the connecting rod 520, the extension of the spring 561 exerts a force on the sealing plate 510 to move away from the partition wall 400 (or the connecting through hole 410) and closer to the push plate 530, and also exerts a force on the sealing plate 510 to move away from the first push rod 551. Furthermore, since spring 561 allows the sealing plate 510 to move away from the partition wall 400 (or the connecting through hole 410) and towards the push plate 530 relative to the first push rod 551, and also away from the first push rod 551, spring 561 can cause the sealing plate 510 to move away from the connecting through hole 410 (and towards the push plate 530) until the elastic force of spring 561 balances the relative positions between the sealing plate 510 and the push plate 530, and between the sealing plate 510 and the first push rod 551, and no longer moves relative to each other. At this time, the sealing plate 510 can still be in the position corresponding to the connecting through hole 410. And the sealing plate 510 and the push plate 530 can return to a relatively close state. And during this process, the connecting rod 520 can return from a state perpendicular to the partition wall 400 to an inclined state; the sealing plate 510 can continue to contact the stop member 540.
[0111] As the cylinder rod 571 continues to retract, the push plate 530 and the sealing plate 510 will extend together from the cover 580 through the inlet 581 (or the extended parts of the push plate 530 and the sealing plate 510). The sealing plate 510 will disengage from the stop member 540, and finally the valve 500 will open the connection through hole 410, and the cylinder 570 will stop operating.
[0112] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.
Claims
1. A valve, characterized in that, The valve is used to open and close a connection through-hole provided on the partition wall of the electron beam detection equipment, and the valve includes: A sealing plate is provided parallel to the partition wall, and the plate surface opposite to the partition wall is provided with a sealing part for engaging with the connecting through hole; A push plate is disposed on the side of the sealing plate opposite to the partition wall; One or more connecting rods, each of which is hinged at both ends to the sealing plate and the push plate, respectively; A stop is provided on the partition wall and located on the same side as the sealing plate and the push plate; A drive assembly, disposed on the opposite side of the sealing plate and the push plate from the stop member, and configured to push the sealing plate and the push plate toward the stop member to close the connection through hole, includes: A first push rod is used to push the sealing plate toward the stop member and is connected to the sealing plate by an elastic member to allow the first push rod and the sealing plate to move relative to each other. The second push rod is used to push the push plate toward the stop member and is fixedly disposed with the side of the push plate. The stop member is configured to limit the position of the sealing plate along the pushing direction, and the connecting rod presses the sealing plate against the partition wall during the process of the push plate being pushed, so that the sealing part is sealed and engaged with the connecting through hole.
2. The valve according to claim 1, characterized in that, The driving component also includes: A connector extends from the side of the push plate that mates with the second push rod and is connected to the first push rod, thereby transmitting the thrust of the second push rod to the first push rod.
3. The valve according to claim 2, characterized in that, The connector has a fixing hole along the pushing direction, and the end of the first push rod is fixedly installed in the fixing hole.
4. The valve according to claim 2, characterized in that, The driving component also includes: A guide shaft is disposed on the sealing plate and extends toward the connector; and, The elastic element includes: A spring, one end of which is sleeved on the second push rod and the other end of which is sleeved on the guide shaft, allows the first push rod and the guide shaft to undergo relative displacement in a direction perpendicular to the partition wall when transmitting the thrust of the first push rod.
5. The valve according to claim 1, characterized in that, The driving component also includes: The cylinder includes a cylinder rod connected to the second push rod, for providing thrust to the second push rod via the cylinder rod, and for driving the push plate and the sealing plate away from the stop member via the cylinder rod, so as to open the connecting through hole.
6. The valve according to claim 1, characterized in that, Also includes: A housing, fitted over the connecting through-hole, has an inlet for allowing the sealing plate and the push plate to be pushed into the housing, and also has a first sidewall disposed relative to the partition wall, the first sidewall being used to restrict the sealing plate and the push plate away from the partition wall when the stop restricts the movement of the sealing plate in the pushing direction.
7. The valve according to claim 6, characterized in that, The housing has a second sidewall corresponding to the opening; and... The stop member includes: A stop block is disposed on the second side wall, and its end facing the partition wall is provided with a mating structure for abutting against the sealing plate.
8. The valve according to claim 7, characterized in that, The mating structure is the rounded corner between the two sides of the stop block facing the partition wall and the sealing plate; or... The mating structure is a pivot rotatably mounted on the end of the stop block facing the partition wall.
9. The valve according to claim 1, characterized in that, The number of connecting rods is set to multiple, and the multiple connecting rods are hinged to two opposite sides of the sealing plate arranged perpendicular to the pushing direction, and the multiple connecting rods are also hinged to two opposite sides of the push plate arranged perpendicular to the pushing direction; or, The number of connecting rods is set to four. The four connecting rods are respectively hinged in pairs to the two opposite sides of the sealing plate that are perpendicular to the pushing direction. The two sets of connecting rods are respectively hinged to the two opposite sides of the push plate that are perpendicular to the pushing direction.
10. An electron beam detection device, characterized in that, Includes the valve according to any one of claims 1 to 9; and, The electron beam detection device further includes an electron beam emitting cavity, a transfer cavity, and a sample detection cavity, wherein the transfer cavity is connected between the electron beam emitting cavity and the sample detection cavity; as well as, The transfer chamber and the sample detection chamber are separated by the partition wall; as well as, The sealing plate, the push plate, and the connecting rod are all disposed within the transition cavity.
11. The electron beam detection device according to claim 10, characterized in that, The valve cylinder is located outside the transition cavity, and the cylinder rod extends into the transition cavity; furthermore, The valve housing is located inside the transition cavity.