Air conditioner purification system for cleaning workshop

Abstract

The utility model provides an air conditioner purification system for cleaning a workshop. The system comprises a fresh air unit, an air conditioning unit and a filtering air supply device, wherein the fresh air unit is used for performing coarse filtering and humidity regulation on outdoor fresh air; the air conditioning unit is used for performing medium-efficiency filtering and temperature regulation on flowing air; the filtering air supply device is used for efficiently filtering the air regulated and purified by the air conditioning unit and supplying the air into a clean space; the air return fresh air device is arranged on the upstream of an air flow path of the air conditioning unit, and the measurement and control system is responsible for measuring, regulating and controlling indoor environment parameters and system operation parameters. The utility model provides a novel air conditioner purification system flow and a regulation and control method, solves the decoupling problem of mutual coupling of positive pressure regulation and control and humidity regulation and control, realizes independent regulation and control of four environmental parameters, namely temperature, humidity, cleanliness and positive pressure, of the clean workshop, improves the control precision of the environmental parameters of the clean workshop, and improves the control precision of the clean workshop. And the operation energy consumption of air conditioner purification is greatly reduced.

Description

Technical Field

[0001] This utility model relates to the field of air conditioning and purification, specifically to an air conditioning and purification system for cleanrooms that independently controls four environmental parameters: temperature, humidity, cleanliness, and positive pressure. Background Technology

[0002] Production, assembly, and testing in aerospace, electronics, and biopharmaceutical industries all require cleanrooms. Cleanrooms are typically high-energy-consuming buildings, and reducing energy consumption is a crucial design challenge. Cleanrooms require control of numerous indoor environmental parameters, necessitating simultaneous regulation of temperature, humidity, cleanliness, and positive pressure. However, these parameters are interconnected and coupled; adjusting one often causes changes in others, making simultaneous precise control difficult. For example, to improve the precision of air conditioning temperature and humidity control, traditional methods typically involve cooling and condensing to achieve the required moisture content, followed by heating to raise the temperature. This results in heat cancellation, significantly increasing the energy consumption of the air conditioning system. Decoupling these four parameters and achieving independent, precise control remains a significant unresolved technical challenge in cleanroom design.

[0003] Currently, the following technologies exist for air conditioning and purification in cleanrooms:

[0004] (1) Chinese invention patent with authorization announcement number CN102297502B discloses a vertically installed FFU system for clean halls, which includes air filter units (FFUs) vertically installed on the ceiling (or floor) of the clean hall.

[0005] (2) Chinese invention patent application CN105299758A discloses an environmentally friendly air conditioning system for clean halls. This system includes a water collection tank located below the heat exchange coils in the air conditioning unit. The heat exchange coils heat or cool the water in the collection tank to regulate and control air humidity.

[0006] (3) A Chinese utility model with authorization announcement number CN207113088U discloses a clean hall and purification system (CN207113088U), which adopts an airflow organization form with air supply vents covering the top and return air on the ground.

[0007] However, none of the aforementioned systems in the existing technology involve independent adjustment and control of indoor environmental parameters.

[0008] Furthermore, existing patent documents concerning air conditioning systems that independently control two parameters—temperature and humidity—exist in the following areas: CN201120151858.X (temperature and humidity dual-parameter control air conditioning refrigeration unit), CN201720367465.X (a temperature and humidity independent control air conditioning system suitable for large spaces), CN201610240179.7 (a temperature and humidity independent control air conditioning system), CN201710223241.6 (a temperature and humidity independent control air conditioning system), CN201710050861.4 (a temperature and humidity independent control air conditioning system), and CN201520688772.9 (a temperature and humidity independent control air conditioning system). These patents all address the problem of independently controlling two parameters—indoor temperature and humidity—and do not address the problem of independently controlling four parameters: temperature, humidity, cleanliness, and positive pressure. These patents for temperature and humidity independent control air conditioning systems all employ methods that control the room... The method of using fresh air for dehumidification (or humidification) achieves independent control of indoor humidity. The larger the fresh air volume, the stronger the dehumidification (or humidification) capacity. However, this method has the following problems when applied in cleanrooms: Due to the excellent sealing of the cleanroom lobby, the fresh air volume may be too small. When the indoor humidity load is high, the fresh air volume required for dehumidification is large. Insufficient fresh air volume will make it impossible to meet the requirements for dehumidification or humidification, resulting in uncontrolled indoor humidity. This is the contradiction between positive pressure control and humidity control encountered by the temperature and humidity independent control air conditioning system in the cleanroom lobby. Previous temperature and humidity independent control air conditioning purification system solutions could only solve this contradiction by increasing the indoor exhaust air volume to simultaneously meet the requirements of humidity treatment and indoor positive pressure control. However, the method of significantly increasing the indoor exhaust air volume to increase the fresh air volume will significantly increase the operating energy consumption of the air conditioning purification system.

[0009] Therefore, it is indeed necessary to provide an air conditioning and purification system that can independently control and regulate four indoor environmental parameters of cleanroom: temperature, humidity, cleanliness, and positive pressure. Utility Model Content

[0010] This utility model provides an air conditioning and purification system capable of independently controlling four indoor environmental parameters—temperature, humidity, cleanliness, and positive pressure—in a cleanroom. The system includes, arranged sequentially according to airflow direction, a fresh air handling unit for coarse filtration of outdoor fresh air and independent adjustment of indoor humidity and positive pressure; an air conditioning unit for medium-efficiency filtration of flowing air and independent adjustment of indoor temperature and cleanliness; and an air supply device for high-efficiency filtration of the air regulated by the air conditioning unit and distribution to the cleanroom lobby. The system further includes: [details omitted]. The air return and fresh air device upstream of the air conditioning unit's gas flow path includes a return air duct that introduces indoor air into the air conditioning unit and a mixing air duct that mixes outdoor fresh air with the return air in the return air duct before introducing it into the air conditioning unit, as well as a measurement and control system. This system includes a measuring device for measuring the environmental parameters and operating parameters of the air conditioning and purification system in the clean hall, and a control device for adjusting the operating parameters of the air conditioning and purification system based on the measurement results. The environmental parameters include indoor temperature, humidity, particulate matter concentration, and indoor positive pressure, while the operating parameters include fan operating frequency and valve opening.

[0011] The air conditioning purification system according to this utility model can independently regulate the temperature, humidity, cleanliness, and positive pressure of indoor air.

[0012] Preferably, the return air duct of the return air fresh air device includes a return air inlet arranged in the clean hall and a return air pipe connecting the return air inlet and the air inlet side of the air conditioning unit, and the mixing air duct of the return air fresh air device includes a bypass pipe that introduces indoor return air into the air inlet of the fresh air unit. By setting the bypass pipe, the air conditioning purification system according to this utility model can enable the fresh air unit to switch between a 100% fresh air handling mode and a mixed air handling mode that handles part of the fresh air and part of the return air.

[0013] Preferably, the fresh air handling unit includes: a fresh air housing and a coarse filter arranged sequentially in the airflow direction within the fresh air housing, a fresh air fan driving the fresh air flow, a fresh air handling unit surface cooler heater for regulating the fresh air temperature, and a humidifier for increasing the fresh air humidity; the air conditioning unit includes: an air conditioning housing and an air conditioning fan driving the air circulation flow, an air conditioning unit surface cooler heater for regulating the air temperature, and a medium-efficiency filter for medium-efficiency filtration of the flowing air arranged sequentially in the airflow direction within the housing; the air supply device includes: multiple filtered air supply devices arranged downstream of the air supply path of the air conditioning unit and an air supply duct connecting the air outlet side of the air conditioning unit and the air inlet side of each filtered air supply device.

[0014] Preferably, the return air and fresh air system further includes a fresh air duct, which includes a fresh air inlet located outside the clean hall and a fresh air inlet duct connecting the fresh air inlet to the air inlet side of the fresh air unit.

[0015] Preferably, the measuring device of the measurement and control system includes: a fresh air inlet temperature and humidity sensor arranged on the air inlet side of the fresh air handling unit, a fresh air outlet temperature sensor arranged on the air outlet side of the fresh air handling unit, an air conditioning supply air temperature and humidity sensor arranged on the air outlet side of the air conditioning unit, and an indoor temperature and humidity sensor, an indoor particulate matter concentration sensor, and an indoor positive pressure sensor arranged in the clean hall; the control device of the measurement and control system includes: a control cabinet arranged in the air conditioning room, an air conditioning unit water supply regulating valve, a fresh air handling unit water supply regulating valve, a humidifier water supply regulating valve, a return air bypass regulating valve on the bypass pipe, and a fresh air inlet electric valve on the fresh air inlet pipe.

[0016] Preferably, the air conditioning fan of the air conditioning unit is a variable frequency centrifugal fan. The control device controls the operating frequency of the air conditioning fan based on the particulate matter concentration in the indoor air detected by the indoor particulate matter concentration sensor, and uses the median particulate matter concentration that meets the predetermined air cleanliness level as the control target value. Specifically, if the particulate matter concentration detected by the indoor particulate matter concentration sensor is lower than the control target value and exceeds the set deviation value, the control device controls the air conditioning fan to increase the operating frequency to increase the purification air volume; conversely, if the indoor cleanliness level detected by the indoor particulate matter concentration sensor is lower than the control target value and exceeds the set deviation value, the control device controls the air conditioning fan to decrease the operating frequency to reduce the purification air volume.

[0017] Preferably, the fresh air fan of the fresh air handling unit is a variable frequency centrifugal fan. The control device controls the operating frequency of the fresh air fan based on the indoor positive pressure detected by the indoor positive pressure sensor. Specifically, when the indoor positive pressure is higher than the set value and exceeds the set deviation value, the control device lowers the operating frequency of the fresh air fan to reduce the fresh air volume; and when the indoor positive pressure is lower than the set value and exceeds the set deviation value, the operating frequency of the fresh air fan is increased to increase the fresh air volume.

[0018] Preferably, the control device controls the opening of the fresh air bypass regulating valve based on the indoor positive pressure detected by the indoor positive pressure sensor. If the amount of fresh air required to maintain the indoor positive pressure is too small and affects the independent control of indoor humidity, the control is performed to open the fresh air bypass regulating valve more, so that the fresh air unit changes from the unit's 100% fresh air handling mode to the mixed air handling mode of fresh air and return air.

[0019] Preferably, the control device adjusts the opening of the air conditioning water supply regulating valve and the humidifier water supply regulating valve of the fresh air unit according to the indoor humidity detected by the indoor temperature and humidity sensor, thereby controlling the indoor humidity: For summer operation: when the indoor relative humidity is higher than the set value and exceeds a certain deviation value, the humidity can be reduced by opening the air conditioning water supply regulating valve; when the indoor relative humidity is lower than the set value and exceeds a certain deviation value, the humidity can be increased by closing the air conditioning water supply regulating valve; for winter operation, the indoor humidity is controlled by the humidifier water supply regulating valve. When the indoor relative humidity is higher than the set value and exceeds a certain deviation value, the humidifier water supply regulating valve is closed; when the indoor relative humidity is lower than the set value and exceeds a certain deviation value, the humidifier water supply regulating valve is opened.

[0020] The control device regulates the opening of the fresh air bypass valve and the fresh air intake electric valve based on the indoor humidity detected by the indoor temperature and humidity sensor. Specifically, in summer, when the air conditioning water supply regulating valve of the fresh air handling unit is at its maximum opening and the indoor humidity continues to increase, the control device opens the fresh air bypass valve wider and simultaneously closes the fresh air intake electric valve. This continues until the indoor humidity begins to decrease, at which point the adjustment of the fresh air bypass valve stops, and humidity regulation is achieved solely by controlling the opening of the air conditioning water supply valve of the fresh air handling unit. In winter, when the humidification water supply manual valve of the fresh air handling unit is at its maximum opening and the indoor humidity continues to decrease, the control device opens the return air bypass valve wider and simultaneously closes the fresh air intake electric valve. This continues until the indoor humidity begins to increase, at which point the adjustment of the fresh air bypass valve stops, and humidity regulation is achieved solely by controlling the opening of the humidification water supply valve of the fresh air handling unit.

[0021] Preferably, if the indoor positive pressure detected by the indoor positive pressure sensor is still lower than the set value and continues to decrease when the frequency of the fresh air fan of the fresh air unit is adjusted to the power frequency, the control device closes the return air bypass valve and simultaneously opens the fresh air inlet valve until the indoor positive pressure begins to increase and exceeds the set value.

[0022] The air conditioning purification system of this utility model, by setting a bypass pipe and a fresh air bypass valve and regulating it according to the above-mentioned control method, can change the operating condition of the fresh air unit from handling all fresh air to handling part of the fresh air and part of the return air. This can maintain a small fresh air volume while significantly increasing the processing air volume and dehumidification (or humidification) capacity of the fresh air unit, thereby solving the decoupling problem of the contradiction between positive pressure control and humidity control, and reducing the operating energy consumption of air conditioning purification.

[0023] In summary, the beneficial effects of the air conditioning purification system of this utility model are: it solves the decoupling problem of independent control of four parameters in cleanrooms: indoor temperature, humidity, cleanliness, and positive pressure, especially the contradiction between humidity control and positive pressure control when the fresh air volume in the cleanroom is too small. It improves the control accuracy of the four indoor environmental parameters, minimizes the circulating air volume and fresh air volume of the air conditioning purification system, and eliminates the problems of reheating by electric heating and the cancellation of cold and heat in the control, thereby significantly reducing the operating energy consumption of the air conditioning purification system. Attached Figure Description

[0024] Figure 1 This is a schematic diagram showing the functional modules of an air conditioning purification system according to an embodiment of the present utility model;

[0025] Figure 2 This is a plan view showing the structure of an air conditioning purification system according to an embodiment of the present invention.

[0026] Figure 3 It is along Figure 2 The cross-sectional view of the air conditioning purification system according to an embodiment of the present invention is shown by the AA line. Detailed Implementation

[0027] Exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative configuration of components, numerical representations, and values ​​described in these embodiments does not limit the scope of the present invention.

[0028] The following description, in conjunction with the accompanying drawings, uses a clean hall employing top-supply airflow, single-sided lower return airflow, and a centralized air conditioning purification scheme as an example to illustrate the structure and operation of the air conditioning purification system according to this invention. However, it is clear that this invention is not limited to this; other airflow organization forms, such as top-supply airflow with double-sided lower return airflow and side-supply / side-return stratified air conditioning purification, as well as decentralized air conditioning purification schemes, can also be used.

[0029] Please see Figures 1 to 3The air conditioning purification system 10 according to an embodiment of the present invention includes an air conditioning unit 100, a fresh air unit 200, an air supply device 300, a return air and fresh air device 400, and a monitoring and control system 500 arranged sequentially according to the airflow direction. The fresh air unit 200 performs coarse filtration and humidity regulation on outdoor fresh air, and can independently control indoor air humidity and positive pressure. The air conditioning unit 100 performs medium-efficiency filtration and temperature regulation on the air flowing through it, and can independently control indoor air temperature and indoor particulate matter concentration. The air supply device 300 performs high-efficiency filtration on the air purified by the air conditioning unit 100 and supplies it to the cleanroom. The return air and fresh air device 400 is arranged upstream of the airflow path of the air conditioning unit 100, and includes a return air duct 410 that introduces indoor air from the cleanroom into the air conditioning unit 100, and a mixing duct 420 that mixes outdoor fresh air with return air in the return air duct 410 before introducing it into the air conditioning unit 100. The measurement and control system 500 includes a measuring device 510 for measuring the environmental parameters and operating parameters of the air conditioning and purification system in the clean hall, and a control device 520 for adjusting the operating parameters of the air conditioning and purification system based on the measurement results. The environmental parameters in the clean hall include indoor air temperature, humidity, particulate matter concentration, and positive pressure, while the operating parameters of the air conditioning and purification system include fan operating frequency and the opening degree of each electric valve.

[0030] The air conditioning unit 100 includes an air conditioning housing 110 and an air conditioning fan 120 for driving air circulation, an air conditioning unit surface cooler 130 for regulating air temperature, a medium-efficiency filter 140 for filtering the air flowing through it, and an air conditioning unit inlet duct 150 for delivering fresh air and part of the return air to the air inlet of the air conditioning unit.

[0031] The air conditioning fan 120 is preferably a variable frequency centrifugal fan, which can operate at a variable frequency to control the amount of purified airflow. By adjusting the operating frequency of the air conditioning fan 120 of the air conditioning unit 100, the concentration of particulate matter in the indoor air can be regulated. Using the median particulate matter concentration of the required cleanliness level as the control target value, if the concentration is higher than the target value and exceeds a certain deviation, the operating frequency of the air conditioning fan 120 is increased to improve the purified airflow; if the concentration is lower than the target value and exceeds a certain deviation, the operating frequency of the air conditioning fan 120 is decreased (but not lower than 30Hz to ensure a minimum purified airflow) to reduce the purified airflow.

[0032] In summer, the air conditioning unit's surface cooler heater 130 is supplied with chilled water to cool the air, while in winter, the air conditioning unit's surface cooler heater 130 is supplied with hot water to heat the air.

[0033] The air conditioning unit 100 also includes an air conditioning water supply pipe 131 and an air conditioning water return pipe 133 connected to the air conditioning unit surface cooler heater 130. As a preferred embodiment, the air conditioning water supply pipe is equipped with a manual air conditioning water supply valve 132 for switching the air conditioning water supply on and off, and the air conditioning water return pipe 133 is equipped with an air conditioning water return valve 134 for switching the air conditioning water return on and off. The manual air conditioning water supply valve 132 and the manual air conditioning water return valve 134 are mainly used to shut off the air conditioning water supply and return pipes during air conditioning unit maintenance.

[0034] The indoor temperature can be controlled by adjusting the opening of the air conditioning water supply regulating valve 522 of the air conditioning unit 100. Specifically, for summer operation: when the indoor temperature is lower than the set value and exceeds a certain deviation value, closing the air conditioning water supply regulating valve 522 will increase the temperature; conversely, when the indoor temperature is higher than the set value and exceeds a certain deviation value, opening the air conditioning water supply regulating valve 522 will decrease the temperature. For winter operation: when the indoor temperature is lower than the set value and exceeds a certain deviation value, opening the air conditioning water supply regulating valve 522 will increase the temperature; conversely, when the indoor temperature is higher than the set value and exceeds a certain deviation value, closing the air conditioning water supply regulating valve 522 will decrease the temperature.

[0035] The fresh air handling unit 200 includes a fresh air housing 210 and, arranged sequentially in the airflow direction within the fresh air housing 210, a coarse filter 220, a fresh air fan 230 that drives the flow of fresh air, a fresh air handling unit surface cooler heater 240 that regulates the temperature of the fresh air, and a humidifier 250 that increases the humidity of the fresh air. The fresh air fan is preferably a variable frequency centrifugal fan, which can operate at a variable frequency to control the airflow delivered by the fresh air fan. The fresh air handling unit surface cooler heater 240 provides chilled water in summer to cool and dehumidify the fresh air or part of the return air, and provides hot water in winter to heat the fresh air or part of the return air. The humidifier 250 is preferably a high-pressure micro-mist humidifier for humidification in winter.

[0036] The fresh air handling unit 200 also includes a fresh air handling unit air conditioning water supply pipe 243 and a fresh air handling unit air conditioning water return pipe 242 connected to the fresh air handling unit surface cooler heater 240. As a preferred embodiment, the fresh air handling unit air conditioning water supply pipe 243 is equipped with a fresh air handling unit air conditioning water supply manual valve 241 for switching the air conditioning water supply and a fresh air handling unit air conditioning water return manual valve 244 for switching the air conditioning water return. The air conditioning water supply manual valve 241 and the air conditioning water return manual valve 244 are mainly used to shut off the air conditioning water supply and return pipes when the fresh air handling unit 200 is under maintenance. Alternatively, the fresh air handling unit 200 also includes a humidification water supply pipe 251 connected to the humidifier 250. The humidification water supply pipe 251 is connected to softened water and is also equipped with a humidification water supply manual valve 252 for switching the humidifier water supply pipe. This valve is mainly used to shut off the humidification water supply when the humidifier 250 and the humidifier water supply regulating valve 524 are under maintenance.

[0037] Indoor humidity can be regulated by adjusting the opening of the fresh air handling unit water supply regulating valve 523 and the humidifier water supply regulating valve 524 of the fresh air handling unit 200. For example, in summer: when the indoor relative humidity is higher than the set value and exceeds a certain deviation value, opening the fresh air handling unit water supply regulating valve 523 can reduce the humidity; when the indoor relative humidity is lower than the set value and exceeds a certain deviation value, closing the fresh air handling unit water supply regulating valve 523 can increase the humidity. In winter, the humidifier water supply regulating valve 524 is used to regulate indoor humidity. When the indoor relative humidity is higher than the set value and exceeds a certain deviation value, the humidifier water supply regulating valve 524 is closed; conversely, when the indoor relative humidity is lower than the set value and exceeds a certain deviation value, the humidifier water supply regulating valve 524 is opened.

[0038] In addition, the refrigerant for the surface coolant heater 130 of the air conditioning unit 100 and the surface coolant heater 240 of the fresh air unit 200 can be chilled water supplied from the outside at 7°C and returned at 12°C, and the heat medium can be hot water supplied from the outside at 60°C and returned at 50°C. The supply and return water temperatures of the refrigerant and heat medium can be adjusted according to actual needs.

[0039] The air supply device 300 is capable of efficiently filtering the air supplied to the room and delivering and distributing clean air into the clean space. It includes: multiple filtered air supply devices 310 arranged downstream of the air path of the air conditioning unit 100; air supply ducts 320 connecting the air outlet side of the air conditioning unit 100 and the air inlet side of each filtered air supply device; and an air supply silencer 330 arranged on the main air supply duct 323. Specifically, the air supply duct 320 includes a main air supply duct 323, a main air supply duct 322, and a branch air supply duct 321 arranged sequentially and interconnected along the air supply direction, so as to deliver the air output from the air conditioning unit 100 to the clean hall after efficient filtration by the connected filtered air supply devices 310. The filtered air supply device 310 includes an air outlet 311 communicating with the interior of the clean hall and a high-efficiency filter 312 communicating with the air outlet 311 to efficiently filter the air flowing through it. A high-efficiency filter 312 is arranged between the main air supply duct 322 and the branch air supply duct 321. In addition, the air supply duct 320 also includes an air supply valve 324 installed on the branch air supply duct 321. By adjusting the opening of the air supply valve 324, the air volume delivered to the filtered air supply device 310 can be controlled, thereby adjusting the air volume delivered to the clean hall and ensuring that the air volume delivered to each air outlet in the clean hall is basically the same. Alternatively, the air outlet 311 can be arranged on the top or side wall of the clean hall.

[0040] The return air and fresh air device 400 is arranged upstream of the gas flow path of the air conditioning unit 100 and can collect and transport indoor return air and fresh air. It includes a return air duct 410 that introduces return air into the air conditioning unit 100 and a mixing air duct 420 that mixes outdoor fresh air with the return air in the return air duct and introduces it into the air conditioning unit.

[0041] Specifically, the return air duct 410 includes multiple return air outlets 411 arranged in the clean hall and a return air pipe 412 connecting the return air outlets 411 and the air inlet side of the air conditioning unit 100. The return air pipe 412 includes return air branch pipes 4121, return air main pipes 4122, and return air main pipes 4123 connected sequentially along the airflow direction, and also includes return air valves 4124 respectively installed on each return air branch pipe 4121. The multiple return air branch pipes 4121 are respectively connected to multiple return air outlets 411, the return air branch pipes 4121 are arranged between the return air outlets 411 and the return air main pipes 4122, and the return air main pipes 4122 are connected to the air conditioning unit 100. As a preferred embodiment, the return air duct 410 also includes a return air silencer 413, which is preferably installed on the return air main pipe 4123. The mixing duct 420 includes a bypass duct 421 that introduces indoor return air into the fresh air intake duct 432.

[0042] In addition, the return air and fresh air unit 400 also includes a fresh air duct 430, which includes: a fresh air inlet 431 located outside the clean hall, and a fresh air inlet duct 432 and a fresh air inlet duct 434 connected sequentially along the airflow direction between the fresh air inlet 431 and the air inlet side of the fresh air unit 200. Furthermore, as a preferred embodiment, the fresh air duct 430 also includes a fresh air silencer 433 installed on the fresh air inlet duct 434. A bypass pipe 421 connects the fresh air inlet duct 432 and the return air main duct 4123.

[0043] The measurement and control system 500 is capable of measuring, displaying, and regulating air conditioning environmental parameters. Specifically, the measurement device 510 of the measurement and control system 500 includes: a fresh air intake temperature and humidity sensor 517 arranged on the air intake side of the fresh air handling unit 200, used to measure the temperature and humidity of the outdoor fresh air; a fresh air outlet temperature sensor 518 arranged on the air outlet side of the fresh air handling unit 200, used to measure the outlet temperature of the fresh air handling unit 200; and an air conditioning supply air temperature and humidity sensor 519 arranged on the air outlet side of the air conditioning unit 100, used to measure the outlet temperature and humidity of the air conditioning unit 100. In addition, the measurement device 510 also includes an indoor air temperature and humidity sensor 513 arranged in the clean room, used to measure the indoor temperature and humidity of the clean room; a particulate matter concentration sensor 511, used to measure the particulate matter concentration in the air of the clean room; and an indoor positive pressure sensor 512, used to measure the indoor positive pressure of the clean room.

[0044] The control device 520 of the measurement and control system 500 includes: a control cabinet 521 arranged in the air conditioning room; an air conditioning unit water supply regulating valve 522 arranged on the air conditioning water supply pipe 131 of the air conditioning unit 100; a fresh air unit water supply regulating valve 523 arranged on the air conditioning water supply pipe 243 of the fresh air unit 200; a humidifier water supply regulating valve 524 arranged on the humidifier water supply pipe 251 of the humidifier 250 of the fresh air unit 200; a return air bypass regulating valve 525 arranged on the bypass pipe 421; and a fresh air intake electric valve 526 arranged on the fresh air intake pipe 432. The air conditioning unit water supply regulating valve 522 is used to regulate the water supply flow of the air conditioning water supply pipe 131 of the air conditioning unit 100; the fresh air unit water supply regulating valve 523 is used to regulate the water supply flow of the air conditioning water supply pipe 243 of the fresh air unit 200; the humidifier water supply regulating valve 524 is used to regulate the humidification capacity of the humidifier 250 of the fresh air unit 200; the return air bypass regulating valve 525 is used to regulate the return air volume of indoor return air delivered to the inlet of the fresh air unit 200 through the bypass pipe 421; and the fresh air inlet electric valve 526 is used to regulate the air volume of outdoor fresh air entering the fresh air unit 200.

[0045] The control cabinet 521 includes a display screen and an operation keypad, capable of displaying and adjusting environmental and / or operating parameters. Furthermore, the operation keypad can be integrated with the display screen.

[0046] The control device 520 controls the operating frequency of the air conditioning fan 120 based on the indoor cleanliness detected by the particulate matter concentration sensor 511, and uses the median air particulate matter concentration that meets the predetermined cleanliness level as the control target value. When the particulate matter concentration detected by the particulate matter concentration sensor 511 is higher than the control target value and exceeds the set deviation value, the control device 520 controls the operation of the air conditioning fan 120 to increase the purification airflow. Conversely, when the indoor cleanliness detected by the particulate matter concentration sensor 511 is lower than the control target value and exceeds the set deviation value, the control device 520 controls the operation of the air conditioning fan 120 to decrease the purification airflow, thereby achieving energy-saving effects by reducing operating energy consumption.

[0047] The control device 520 controls the operating frequency of the fresh air fan 230 based on the indoor positive pressure detected by the indoor positive pressure sensor 512. When the indoor positive pressure is higher than the set value and exceeds the set deviation value, the control device 520 lowers the operating frequency of the fresh air fan 230 to reduce the fresh air volume, but controls the frequency of the fresh air fan 230 to not be lower than 30Hz to ensure the minimum fresh air volume. When the indoor positive pressure is lower than the set value and exceeds a certain deviation value, the control device 520 increases the operating frequency of the fresh air fan 230 to increase the fresh air volume.

[0048] The control device 520 also controls the opening of the return air bypass regulating valve 525 based on the indoor positive pressure detected by the indoor positive pressure sensor 512. If the fresh air volume required to maintain the indoor positive pressure is too small and affects the independent control of indoor humidity, the control is performed to open the return air bypass regulating valve 525 more, so that the fresh air unit 200 changes from the unit's 100% fresh air handling mode to the mixed air handling mode of fresh air and return air.

[0049] The following describes the automatic monitoring, judgment, and automatic control method of the air conditioning purification system according to this utility model when there is a conflict between dehumidification control and positive pressure control. Specifically, the control device 520 can adjust the opening degree of the return air bypass regulating valve 525 and the fresh air intake electric valve 526 based on the indoor humidity detected by the indoor air temperature and humidity sensor 513. For example, under summer conditions, if the air conditioning water supply regulating valve 523 of the fresh air unit 200 is opened to the maximum while the indoor humidity continues to increase, this indicates a conflict between dehumidification control and positive pressure control. The control device will then open the return air bypass regulating valve 525 more and simultaneously close the fresh air intake electric valve 526 until the indoor humidity begins to decrease, at which point the adjustment of the fresh air bypass valve will stop. In winter operation, if the humidifier water supply regulating valve 524 of the fresh air handling unit 200 is opened to its maximum but the indoor humidity continues to decrease, this indicates a conflict between dehumidification control and positive pressure control. The control device 520 will then open the return air bypass regulating valve 525 and simultaneously close the fresh air intake electric valve 526 until the indoor humidity begins to increase. At this point, the control device will stop adjusting the return air bypass regulating valve 525 and instead regulate humidity by controlling the opening of the humidifier water supply regulating valve 524 of the fresh air handling unit 200. If the indoor positive pressure detected by the indoor positive pressure sensor 512 is still lower than the design value and continues to decrease when the fresh air fan frequency of the fresh air handling unit 200 is adjusted to the industrial frequency, the control device 520 will close the return air bypass regulating valve 525 and simultaneously open the fresh air intake electric valve 526 until the indoor positive pressure begins to increase and exceeds the design value.

[0050] As a preferred embodiment, the indoor air temperature and humidity sensor 513, particulate matter concentration sensor 511, and indoor positive pressure sensor 512 can all have the function of displaying the detected environmental parameters. These sensors can be installed at a height of 1.2m to 1.8m above the ground for easy observation. Alternatively, multiple sensors can be installed at different locations, and the system can be adjusted by averaging the detection results.

[0051] In addition, when the cleanroom stops operating, the fresh air intake electric valve 526 can be closed to maintain a clean indoor air-conditioned environment, thereby reducing energy consumption.

[0052] In summary, the air conditioning and purification system provided by this utility model solves the decoupling problem of independent control of four parameters in a clean hall: indoor temperature, humidity, cleanliness, and positive pressure. In particular, it solves the contradiction between humidity control and positive pressure control when the fresh air volume in the clean hall is too low. This improves the control accuracy of the four indoor environmental parameters and minimizes the circulating air volume and fresh air volume of the air conditioning and purification system. It also eliminates the problem of heat and cold cancellation caused by electric heating for reheating, thereby significantly reducing the operating energy consumption of the air conditioning and purification system.

[0053] While the present invention has been described above with reference to exemplary embodiments, these embodiments are only for illustrating the technical concept and features of the present invention and should not be construed as limiting the scope of protection of the present invention. Any equivalent modifications or alterations made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

[0054] Explanation of reference numerals in the attached figures:

[0055] 10. Air conditioning purification system;

[0056] 100 air conditioning units;

[0057] 110 Air conditioner unit;

[0058] 120 Air Conditioner Fan;

[0059] 130 Air conditioning unit surface coolant heater;

[0060] 131 Air conditioning unit water supply pipe;

[0061] 132 Manual valve for air conditioning water supply of air conditioning unit;

[0062] 133 Air conditioning unit return water pipe;

[0063] 134 Manual return water valve for air conditioning units;

[0064] 140 Medium-efficiency filter;

[0065] 150 Air inlet duct for air conditioning unit;

[0066] 200 fresh air handling units;

[0067] 210 Fresh air intake enclosure;

[0068] 220 coarse filter;

[0069] 230 Fresh air fans;

[0070] 240 Fresh air handling unit surface cooler heater;

[0071] 241. Manual valve for air conditioning water supply to fresh air handling unit;

[0072] 242 Fresh air handling unit air conditioning return water pipe;

[0073] 243. Fresh air handling unit air conditioning water supply pipe;

[0074] 244 Fresh air handling unit air conditioner return water manual valve;

[0075] 250 Humidifier;

[0076] 251 Humidifier water supply pipe;

[0077] 252 Humidifier water supply manual valve;

[0078] 300 air supply unit;

[0079] 310 Filtered air supply device;

[0080] 311 Air outlet;

[0081] 312 high-efficiency filter;

[0082] 320 air supply duct;

[0083] 321 Air supply branch pipe;

[0084] 322 Air supply duct;

[0085] 323 Main air supply pipe;

[0086] 324 Air supply valve;

[0087] 330 Air supply silencer;

[0088] 400 Return air fresh air unit;

[0089] 410 return air duct;

[0090] 411 Return air vent;

[0091] 412 return air duct

[0092] 4121 Return air branch pipe;

[0093] 4122 Return air main;

[0094] 4123 Return air main;

[0095] 4124 Return air valve;

[0096] 413 Return air silencer;

[0097] 420 Mixing air duct;

[0098] 421 Bypass pipe;

[0099] 430 Fresh air duct;

[0100] 431 New Opportunities;

[0101] 432 Fresh air intake duct;

[0102] 433 Fresh air silencer;

[0103] 434 Fresh air intake duct;

[0104] 500 Measurement and Control System;

[0105] 510 Measuring device;

[0106] 511 particulate matter concentration sensor;

[0107] 512 Indoor Positive Pressure Sensor;

[0108] 513 Indoor air temperature and humidity sensor;

[0109] 517 Fresh air intake temperature and humidity sensor;

[0110] 518 Fresh air outlet temperature sensor;

[0111] 519 Air Conditioner Air Supply Temperature and Humidity Sensor;

[0112] 520 Control Device;

[0113] 521 Control cabinet;

[0114] 522 Air conditioning unit water supply regulating valve;

[0115] 523 Fresh air handling unit water supply regulating valve;

[0116] 524 Humidifier water supply regulating valve;

[0117] 525 Return air bypass regulating valve;

[0118] 526 Fresh air intake electric valve.

Claims

1. An air conditioning and purification system for a cleanroom, the air conditioning and purification system (10) comprising, arranged sequentially according to the airflow direction, a fresh air handling unit (200) for coarsely filtering outdoor fresh air and independently regulating indoor humidity and positive pressure; an air conditioning unit (100) for medium-efficiency filtering the air flowing through and independently regulating indoor temperature and cleanliness; and an air supply device (300) for efficiently filtering the air regulated by the air conditioning unit and supplying it to the cleanroom hall, characterized in that, The air conditioning purification system also includes: A return air / fresh air unit (400) is arranged upstream of the gas flow path of the air conditioning unit, comprising a return air duct (410) that introduces indoor air into the air conditioning unit and a mixing air duct (420) that mixes outdoor fresh air with the return air in the return air duct and then introduces it into the air conditioning unit. The measurement and control system (500) includes a measuring device (510) for measuring the environmental parameters of the clean hall and the operating parameters of the air conditioning and purification system, and a control device (520) for adjusting the operating parameters of the air conditioning and purification system based on the measurement results. Among them, the mixing duct of the return air and fresh air device includes a bypass pipe (421) that introduces outdoor return air into the inlet of the fresh air unit.

2. The air conditioning purification system according to claim 1, characterized in that, The return air duct of the return air fresh air unit includes a return air inlet (411) arranged in the clean hall and a return air duct (412) connecting the return air inlet and the air inlet side of the air conditioning unit.

3. The air conditioning purification system according to claim 1 or 2, characterized in that, The fresh air handling unit includes: a fresh air housing (210) and a coarse filter (220) arranged in the fresh air housing in the direction of airflow, a fresh air fan (230) that drives the flow of fresh air, a fresh air handling unit surface heater (240) that regulates the air temperature, and a humidifier (250) that increases the air humidity. The air conditioning unit includes: an air conditioning housing (110) and an air conditioning fan (120) arranged in the housing according to the airflow direction to drive the air circulation, an air conditioning unit surface cooler (130) to regulate the air temperature, and a medium-efficiency filter (140) to filter the air flowing through it. The air supply device (300) includes: a plurality of filtered air supply devices (310) arranged downstream of the air passage of the air conditioning unit and an air supply duct (320) connected between the air outlet side of the air conditioning unit and the air inlet side of each filtered air supply device (310).

4. The air conditioning purification system according to claim 2, characterized in that, The return air fresh air unit (400) also includes a fresh air duct (430), which includes a fresh air inlet (431) located outside the clean hall and a fresh air inlet duct (432) connecting the fresh air inlet and the air inlet side of the fresh air unit.

5. The air conditioning purification system according to claim 4, characterized in that, The measuring devices of the measurement and control system include: a fresh air intake temperature and humidity sensor (517) arranged on the intake side of the fresh air handling unit, a fresh air outlet temperature sensor (518) arranged on the outlet side of the fresh air handling unit, an air conditioning supply air temperature and humidity sensor (519) arranged on the outlet side of the air conditioning unit, and an indoor air temperature and humidity sensor (513), a particulate matter concentration sensor (511), and an indoor positive pressure sensor (512) arranged in the clean hall. The control and regulation devices of the measurement and control system include: a control cabinet (521) arranged in the air conditioning room of the hall, an air conditioning unit water supply regulating valve (522), a fresh air unit water supply regulating valve (523), a humidifier water supply regulating valve (524), a return air bypass regulating valve (525) on the bypass pipe, and a fresh air intake electric valve (526) on the fresh air intake pipe.

6. The air conditioning purification system according to claim 3, characterized in that, The air conditioning unit uses a variable frequency centrifugal fan.

7. The air conditioning purification system according to claim 3, characterized in that, The fresh air fan in the fresh air handling unit is a variable frequency centrifugal fan.

8. The air conditioning purification system according to claim 5, characterized in that, The control device controls the air conditioning water supply regulating valve of the air conditioning unit based on the indoor temperature detected by the indoor temperature and humidity sensor. The control device regulates the opening of the air conditioning water supply regulating valve, humidifier water supply regulating valve, fresh air bypass regulating valve and fresh air intake electric valve of the fresh air unit based on the indoor humidity detected by the indoor temperature and humidity sensor. The control device regulates the operating frequency of the air conditioning fan based on the indoor cleanliness detected by the indoor particulate matter concentration sensor. The control device controls the operating frequency of the fresh air fan based on the indoor positive pressure detected by the indoor positive pressure sensor.

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