Objective table structure for chip focused ion beam experimental detection

Abstract

The utility model discloses an objective table structure for chip focused ion beam experiment detection, which relates to the technical field of chip experiment detection and comprises an objective table, the objective table is plate-shaped, one side of the objective table is provided with a mounting groove, and the mounting groove is in a square groove shape; the experiment table is in a disc shape, the experiment table is arranged on the objective table, the experiment table is detachably connected with the objective table, and the experiment table is used for performing section sample preparation and sheet preparation on an experiment chip; the accessory mounting assembly comprises an accessory mounting table and a mounting base; and a clamping piece. The molybdenum net is bent by the clamping pieces to abut against the clamping grooves, so that the molybdenum net is fixed and limited, the effect of limiting and fixing the position of the molybdenum net is guaranteed, meanwhile, the clamping pieces are used for elastically clamping the molybdenum net at the clamping grooves, and the position can be adjusted when the position needs to be adjusted; and the defect that in the prior art, the limiting and fixing effect on the molybdenum net is poor is effectively overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of chip experimental detection, in particular to a stage structure for chip focused ion beam experimental detection. Background Technique

[0002] When performing focused ion beam experimental detection on an experimental chip, a molybdenum mesh needs to be used for TEM sample preparation and observation. After the experimental chip sample is prepared by TEM, the sample is very thin, and the molybdenum mesh needs to be limited and fixed. Then, a sample transfer needle is used to pick up the thin slice on the experimental chip and bond it to the molybdenum mesh to ensure that the observation area after TEM sample preparation of the experimental chip sample remains unchanged and to ensure the observation effect of the experimental chip sample. At present, the molybdenum mesh is generally fixed in a limited way by bonding, but this method is easy to damage the molybdenum mesh, and the molybdenum mesh cannot be adjusted twice after bonding. Content of the Utility Model

[0003] The purpose of the utility model is to solve the problem of poor effect of limiting and fixing the molybdenum mesh in the prior art, and to provide a stage structure for chip focused ion beam experimental detection.

[0004] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0005] A stage structure for chip focused ion beam experimental detection includes:

[0006] A stage, the stage is in a plate shape, and an installation groove is provided on one side of the stage. The installation groove is in a square groove shape;

[0007] An experimental table, the experimental table is in a disc shape, the experimental table is arranged on the stage, the experimental table is detachably connected to the stage, and the experimental table is used for preparing a cross-section thin slice of an experimental chip;

[0008] An accessory installation component, the accessory installation component includes:

[0009] An accessory installation table, the accessory installation table is in a square structure, the accessory installation table is arranged in the installation groove, the accessory installation table is detachably connected to the installation groove, a clamping groove is provided on one surface of the accessory installation groove, the clamping groove is in a mountain shape, and the clamping groove is located near the experimental table;

[0010] A clamping piece, the clamping piece is in a mountain shape, the clamping piece is bent near the opening, the clamping piece is clamped in the clamping groove at a position far from the opening, and the clamping piece is bent and abutted against a clamping groove near the opening;

[0011] Among them, the molybdenum mesh is located at a position between the clamping piece bent and abutted against the clamping groove near the opening.

[0012] In some feasible solutions, the accessory installation component further includes:

[0013] The second locking member is disposed on one side of the platform. One end of the second locking member passes through the platform and extends into the mounting groove. One end of the second locking member abuts against the accessory mounting platform. The second locking member is threadedly connected to the platform. The accessory mounting platform is detachably connected to the mounting groove through the second locking member.

[0014] In some feasible solutions, the clip is made of an elastic material.

[0015] In some feasible solutions, the experimental platform is provided with a plug-in rod, which is inserted into the interior of the stage, and the experimental platform is connected to the stage through the plug-in rod.

[0016] In some feasible solutions, the experimental platform further includes:

[0017] The first locking member is disposed on one side of the platform, and the other end of the first locking member extends through into the interior of the platform and abuts against the plug rod. The first locking member is detachably connected to the platform by threads.

[0018] In some feasible solutions, the stage is also provided with a mounting block, and the stage is detachably connected to the focused ion beam experimental detection equipment via the mounting block.

[0019] The beneficial effects of this utility model are as follows:

[0020] This invention achieves fixed positioning of the molybdenum mesh by bending the clamping piece against the slot, ensuring the effective positioning of the molybdenum mesh. At the same time, the clamping piece elastically holds the molybdenum mesh at the slot, allowing for adjustment when needed. This effectively solves the problem of poor positioning and fixing of the molybdenum mesh in the prior art. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of a stage for chip-focused ion beam experimental detection provided in this embodiment of the present invention;

[0022] Figure 2 This is an exploded view of the overall structure of a stage for chip-focused ion beam experimental detection provided in this embodiment of the present invention.

[0023] The markings in the diagram are as follows:

[0024] 1. Stage; 11. Mounting block;

[0025] 2. Experimental table; 21. First locking element; 22. Connecting rod;

[0026] 3. Accessory mounting platform; 31. Second locking component; 32. Clamping plate; 33. Clamping groove. Detailed Implementation

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0029] In this utility model, unless otherwise explicitly specified and limited, the terms "connection," "fixing," etc., should be interpreted broadly. For example, "fixing" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0031] Reference Figures 1 to 2In this embodiment, to address the shortcomings of existing technologies in terms of poor positioning and fixing of molybdenum mesh, this invention provides a stage 1 structure for chip focused ion beam (FIB) experimental detection. The stage 1 structure includes: a stage 1, an experimental stage 2, and accessory mounting components. The stage 1 is plate-shaped, with a mounting groove (not shown in the figure) on one side. The mounting groove is a square recess. The stage 1 is used to mount the molybdenum mesh, thus creating an observation platform for observation with the FIB experimental detection equipment. The experimental stage 2 is disk-shaped and mounted on the stage 1. The experimental stage 2 is detachably connected to the stage 1. The experimental stage 2 is used to prepare a cross-sectional sample sheet of the experimental chip, facilitating the removal of the prepared sample sheet from the experimental stage 2 using a sample transfer needle and bonding it to the molybdenum mesh. The accessory mounting assembly is disposed on one side of the stage 1. The accessory mounting assembly is detachably connected to the stage 1 via the mounting groove. The accessory mounting assembly is used to install and fix the molybdenum mesh, facilitating the subsequent bonding of the experimental chip sample sheet to the molybdenum mesh. In this embodiment, the experimental chip sample is cut at the experimental stage 2, and then the molybdenum mesh is fixed using the accessory mounting assembly. A sample transfer needle is then used to bond the experimental chip sample sheet to the molybdenum mesh for observation. This effectively solves the problem of poor fixing effect of the molybdenum mesh in the prior art. Simultaneously, the detachable connection between the accessory mounting assembly and the stage 1 allows for adjustment of the observation position of the sample sheet when observing it in different directions by adjusting the position of the accessory mounting assembly and the stage 1. Specifically, in this embodiment, the accessory mounting assembly includes: an accessory mounting stage 3, a second locking member 31, a clamping piece 32, and a clamping groove 33. The accessory mounting platform 3 has a square structure and is set in the mounting groove. One side of the accessory mounting groove has a clamping groove 33, which is shaped like a mountain and located near the experimental table 2. The clamping piece 32 is also shaped like a mountain and is curved near the opening. The clamping piece 32 is engaged in the clamping groove 33 away from the opening. The clamping piece 32 is curved and abuts against the groove near the opening. The molybdenum mesh is located on the clamping piece 32, curved near the opening, and abuts against the groove. That is, the molybdenum mesh is bent and abutted against the groove by the clamping piece 32 to fix and limit the position of the molybdenum mesh, ensuring the positional fixation effect of the molybdenum mesh. At the same time, the clamping piece 32 elastically clamps the molybdenum mesh at the clamping groove 33, and the position can be adjusted when needed. This effectively solves the shortcomings of the existing technology in terms of poor molybdenum mesh fixation effect.In this embodiment, in order to facilitate the overall removal of the molybdenum mesh and accessory mounting assembly, the second locking member 31 is disposed on one side of the platform 1. One end of the second locking member 31 passes through the platform 1 and extends into the mounting groove. One end of the second locking member 31 abuts against the accessory mounting platform 3. The second locking member 31 is threadedly connected to the platform 1. The accessory mounting platform 3 is detachably connected to the mounting groove through the second locking member 31.

[0032] In this embodiment, in order to ensure the clamping and limiting effect of the clamping piece 32 on the molybdenum mesh, the clamping piece 32 is made of elastic material.

[0033] Reference Figure 2 In this embodiment, to facilitate the loading and unloading of the mobile experimental platform 2, a connector rod 22 is provided on the experimental platform 2. The connector rod 22 is inserted into the interior of the platform 1, and the experimental platform 2 is connected to the platform 1 via the connector rod 22. To ensure the limiting and fixing effect of the experimental platform 2 inserted into the platform 1, the experimental platform 2 further includes a first locking member 21. The first locking member 21 is disposed on one side of the platform 1, and the other end of the first locking member 21 extends through into the interior of the platform 1 and abuts against the connector rod 22. The first locking member 21 is detachably connected to the platform 1 via threads. That is, the first locking member 21 limits and fixes the connector rod 22 through threaded abutment, thereby limiting and fixing the experimental platform 2.

[0034] In this embodiment, in order to facilitate the disassembly and installation of the stage 1 and the focused ion beam experimental detection equipment, a mounting block 11 is also provided on the stage 1. The stage 1 is detachably connected to the focused ion beam experimental detection equipment by means of the mounting block 11.

[0035] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A stage structure for chip-focused ion beam experimental detection, characterized in that, Comprising: A stage, the stage is plate-shaped, and an installation groove is provided on one side of the stage, and the installation groove is in the shape of a square groove; An experimental table, the experimental table is disc-shaped, the experimental table is arranged on the stage, the experimental table is detachably connected to the stage, and the experimental table is used for making a cross-section sample thin slice of an experimental chip; An accessory installation component, the accessory installation component includes: An accessory installation table, the accessory installation table is square in structure, the accessory installation table is arranged in the installation groove, the accessory installation table is detachably connected to the installation groove, a clamping groove is provided on one surface of the accessory installation groove, the clamping groove is mountain-shaped, and the clamping groove is located near the experimental table; A clamping piece, the clamping piece is mountain-shaped, the clamping piece is bent near the opening, the clamping piece is clamped in the clamping groove at the far end from the opening, and the clamping piece is bent and abutted against the clamping groove near the opening; Wherein, the molybdenum mesh is located at the position between the clamping piece and the clamping groove where the clamping piece is bent and abutted against the clamping groove near the opening.

2. The stage structure for chip-focused ion beam experimental detection according to claim 1, characterized in that, The accessory installation component further includes: A second locking member, the second locking member is arranged on one side of the stage, one end of the second locking member penetrates through the stage and extends into the installation groove, one end of the second locking member abuts against the accessory installation table, the second locking member is threadedly connected to the stage, and the accessory installation table is detachably connected to the installation groove through the second locking member.

3. The stage structure for chip-focused ion beam experimental detection according to claim 1, characterized in that, The clamping piece is made of an elastic material.

4. The stage structure for chip-focused ion beam experimental detection according to claim 1, characterized in that, A plugging rod is arranged on the experimental table, the plugging rod is plugged into the interior of the stage, and the experimental table is plugged and connected to the stage through the plugging rod.

5. The stage structure for chip-focused ion beam experimental detection according to claim 2, characterized in that, The experimental table further includes: A first locking member, the first locking member is arranged on one side of the stage, the other end of the first locking member penetrates and extends into the interior of the stage and abuts against the plugging rod, and the first locking member is detachably connected to the stage through threads.

6. The stage structure for chip-focused ion beam experimental detection according to claim 1, characterized in that, An installation block is further arranged on the stage, and the stage is detachably connected to the focused ion beam experimental detection equipment through the installation block.

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