Bearing structure and thermal field device

Abstract

The utility model provides a bearing structure and a thermal field device, and the bearing structure comprises a bearing part which is provided with a placing cavity used for accommodating a heater; the supporting parts are sequentially arranged in the circumferential direction of the inner wall of the containing cavity, one end of each supporting part is connected with the bearing part, and the other end of each supporting part is used for supporting the heater. Due to the fact that the supporting component and the bearing force bearing points of the heater on the supporting component are concentrated on the bearing component, when the heater deforms, the supporting component can support the heater and restrain deformation of the heater, and therefore the service life of the heater can be prolonged. Moreover, a plurality of supporting points are provided for the heater at the bottom of the heater through the plurality of supporting parts, so that the stress distribution at the bottom of the heater can be improved, the bottom deformation of the heater is reduced, cracks at the bottom of the heater are reduced, and the service life of the heater is prolonged.

Description

Technical Field

[0001] This application belongs to the field of single crystal furnace technology, and in particular relates to a support structure and a thermal field device. Background Technology

[0002] In the growth of monocrystalline silicon rods, the heater, as the heat source, provides the necessary heat for growth and is the most important component in the thermal field of monocrystalline silicon rod growth. Larger feed rates are one of the main technical routes to reduce crystal pulling costs, but these require larger thermal fields in the monocrystalline furnace. Currently, 35-inch and larger thermal fields are widely used in the industry, which corresponds to larger heater diameters and weights.

[0003] Currently, the support structure for heaters is typically a double-legged plate structure located on the underside of the cylindrical structure and connected to it. As the diameter and weight of the heater's cylindrical structure increase, the connection between the cylindrical structure and the double-legged plate structure is prone to deformation due to stress concentration. Alternatively, in cylindrical structures constructed from spliced ​​components, stress concentration at the joints can also lead to deformation. This can cause premature cracking of the heater, severely impacting its service life. Utility Model Content

[0004] This application provides a load-bearing structure and a thermal field device to at least partially solve the technical problems of complex heater structure and crack generation.

[0005] According to one aspect of this application, a support structure is provided, which is applied to a heater and includes: a support member having a placement cavity for receiving the heater; and a plurality of support members arranged circumferentially along the inner wall of the placement cavity, wherein one end of each support member is connected to the support member and the other end is used to support the heater.

[0006] In an optional embodiment of this application, the supporting component includes a connector and a support; one end of the connector is detachably connected to the load-bearing component, and the other end is connected to the support, wherein the support is used to support the heater.

[0007] In an optional embodiment of this application, the load-bearing component is provided with a through hole, and the connector is a rod with one end passing through the through hole; the support component further includes a fastener, which is connected to the end of the connector that passes through the through hole.

[0008] In an optional embodiment of this application, the connector includes a snap-fit ​​portion and a connecting portion, with both ends of the connecting portion connected to the support member and the snap-fit ​​portion, respectively. In the thickness direction of the connecting portion, the snap-fit ​​portion and the support member are disposed on both sides of the connecting portion; the snap-fit ​​portion snaps onto the load-bearing component.

[0009] In an optional embodiment of this application, one of the snap-fit ​​part and the supporting component is provided with a slot, and the other is provided with a protrusion. The protrusion is received in the slot so that the snap-fit ​​part snaps into the supporting component.

[0010] In an optional embodiment of this application, the snap-fit ​​portion, the connecting portion, and the support member are integrally formed.

[0011] In an optional embodiment of this application, the support component further includes an adjusting member, which is detachably disposed between the support component and the heater to accommodate the gap between the support component and the heater.

[0012] In an optional embodiment of this application, the supporting component includes a supporting plate and an insulation cylinder, the insulation cylinder forming the placement cavity, and the supporting plate disposed at one axial end of the insulation cylinder. One end of each connector is detachably connected to the supporting plate or the insulation cylinder.

[0013] In an optional embodiment of this application, the support member is made of an insulating material or has an insulating layer on at least part of its surface.

[0014] In an optional embodiment of this application, the support component further includes a first insulating member disposed between the support component and the heater.

[0015] In an optional embodiment of this application, the connector is made of an insulating material or has an insulating layer on at least part of its surface.

[0016] In an optional embodiment of this application, the support component further includes a second insulating member disposed between the connector and the heater.

[0017] According to another aspect of this application, a thermal field device is provided, which includes a heater and the aforementioned support structure, the heater being disposed in the placement cavity and supported on a plurality of the support members.

[0018] In summary, the load-bearing structure and thermal field device provided in this application have at least the following beneficial effects:

[0019] In the thermal field device of this application, each support component is connected to a load-bearing component at one end, so that the support component is suspended on the load-bearing component as a whole, thereby concentrating the load-bearing force point (i.e., the load-bearing position) of the support component and the heater on it on the load-bearing component. Therefore, this application provides load-bearing force to the support component and the heater on it through the load-bearing component. When the heater deforms, it can provide support to the heater and suppress the deformation of the heater, thereby helping to improve the service life of the heater.

[0020] Furthermore, by providing multiple support points at the bottom of the heater using multiple support components, the stress distribution at the bottom of the heater can be improved, thereby reducing the amount of deformation at the bottom of the heater and thus reducing the occurrence of cracks at the bottom of the heater, thereby further extending the service life of the heater. In addition, since multiple support components are used to support the heater on the outer circumferential side of the heater, they can be adapted to heaters of different sizes, thereby improving the versatility of the load-bearing structure of this application. In the hot zone, the heater is sleeved on the outer side of the crucible, and placing multiple support components on the outer circumferential side of the heater can avoid problems such as arcing caused by the support components being too close to the crucible side. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application; those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0022] Figure 1 This is a schematic diagram of the internal partial structure of the thermal field device provided in one embodiment of the present application, wherein the support component is connected to the support plate;

[0023] Figure 2 for Figure 1 A three-dimensional structural diagram of the load-bearing structure is provided.

[0024] Figure 3 This is a perspective view of the thermal field device provided in another embodiment of the present application, wherein the support component is connected to the heat insulation cylinder;

[0025] Figure 4 for Figure 3 A schematic diagram of the internal partial structure of the provided thermal field device;

[0026] Figure 5 for Figure 3 A three-dimensional structural diagram of the provided support components.

[0027] The reference numerals in the attached figures are as follows:

[0028] 1000. Thermal field device;

[0029] 100. Load-bearing structure;

[0030] 10. Bearing component; 11. Bearing plate; 12. Insulation cylinder; 20. Supporting component; 21. Connecting component; 211. Snap-fit ​​part; 212. Connecting part; 22. Supporting component; 23. Fastener; 24. First insulating component; 25. Second insulating component; 26. Adjusting component;

[0031] 200. Heater;

[0032] A. Placement cavity; B. Slot; C. Protrusion; T. Through hole. Detailed Implementation

[0033] To make the above and other features and advantages of this application clearer, the present invention will be further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explanation to those skilled in the art and are exemplary only, not restrictive.

[0034] In the description of this application, features specified with "first" or "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Features specified with "first" or "second" may explicitly or implicitly include at least one of the specified features. The use of the term "multiple" generally means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can be a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0036] In the description of this application, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0037] Reference Figures 1 to 5 The thermal field device 1000 provided in this application includes a support structure 100 and a heater 200. The support structure 100 has a placement cavity A, and the heater 200 is disposed in the placement cavity A and supported on the support structure 100.

[0038] The heater 200 serves as a heat source and provides the necessary heat for the growth of the single-crystal silicon rod. Its size and weight can be selected based on the feed rate, and it can be applied to hot zones of 35 inches and above. Furthermore, the heater 200 can be a cylindrical structure or other shapes; this application does not impose specific limitations.

[0039] The support structure 100 includes a support component 10 and a plurality of support components 20. The support component 10 forms a placement cavity A. The plurality of support components 20 are arranged sequentially at intervals along the inner wall of the placement cavity A. One end of each support component 20 is connected to the support component 10, and the other end is used to support the heater 200.

[0040] Here, each support member 20 is connected to the carrier member 10 at one end, so that the support member 20 is suspended on the carrier member 10 as a whole, thereby concentrating the load-bearing point (i.e., the load-bearing position) of the support member 20 and the heater 200 on it on the carrier member 10. Therefore, this application provides load-bearing force to the support member 20 and the heater 200 on it through the carrier member 10. When the heater deforms, it can provide support to the heater and suppress the deformation of the heater, thereby helping to improve the service life of the heater 200.

[0041] Furthermore, by providing multiple support points for the heater 200 at its bottom using multiple support components 20, the stress distribution at the bottom of the heater 200 can be improved, thereby reducing the amount of deformation at the bottom of the heater 200 and thus reducing the generation of cracks in the heater 200, thereby further extending the service life of the heater 200. The generation of silicon wafer cracks includes, but is not limited to, cracks occurring at the bottom, top, joints, and bolt connections of the heater. Since the multiple support components 20 are used to support the heater 200 circumferentially outside the heater 200, they can be adapted to heaters 200 of different sizes, thereby improving the versatility of the load-bearing structure 100 of this application. In the hot zone, the heater 200 is fitted onto the outside of the crucible side; by placing the multiple support components 20 circumferentially outside the heater 200, problems such as arcing can be avoided by ensuring the support components 20 are not too close to the crucible side.

[0042] Understandably, the number of support components 20 can be two. However, to further reduce the deformation of the bottom of the heater 200, the number of support components 20 should be at least two, such as three, four, five, or six. Furthermore, the number of support components 20 can be selected based on the size and / or weight of the heater 200. For example, for a larger and heavier heater 200, the number of support components 20 can be appropriately increased, while for a smaller and lighter heater 200, the number of support components 20 can be appropriately reduced. Of course, the number of support components 20 can also be reasonably adjusted according to the required deformation of the heater 200.

[0043] Specifically, the support component 20 includes a connector 21 and a support component 22. One end of the connector 21 is detachably connected to the bearing component 10, and the other end is connected to the support component 22. The support component 22 is used to support the heater 200.

[0044] Based on the detachable connection between the connector 21 and the bearing component 10, not only can the bearing component 10 provide load-bearing capacity for the support component 20 and the heater 200 on it, but the relative positions of multiple support components 20 can also be flexibly adjusted. This allows for optimization of the spacing between the support components 20, thereby reducing the amount of deformation at the bottom of different areas of the heater 200. Furthermore, since the support components 20 are installed independently, one or more damaged support components 20 can be replaced promptly, improving the ease of replacement.

[0045] Reference Figure 1 and Figure 3 The supporting component 10 includes a supporting plate 11 and a heat preservation cylinder 12. The heat preservation cylinder 12 has a placement cavity A, and the supporting plate 11 is disposed at one axial end of the heat preservation cylinder 12.

[0046] Based on the structure of the supporting component 10, the bearing position of the deformation support point of the heater 200 can be selectively set on the supporting plate 11, that is, by setting one end of the connector 21 of each supporting component 20 on the supporting plate 11, so that the supporting plate 11 provides bearing force for the supporting component 20 and the heater 200 thereon. Of course, the bearing position of the deformation support point of the heater 200 can also be set on the insulation cylinder 12, that is, by setting one end of the connector 21 of each supporting component 20 on the insulation cylinder 12, so that the insulation cylinder 12 provides bearing force for the supporting component 20 and the heater 200 thereon.

[0047] Therefore, by utilizing the existing structure of the thermal field device 1000, this application sets the bearing position of the deformation support point of the heater 200 on the bearing component 10 of the thermal field device 1000. Regardless of whether one end of the connector 21 of the support component 20 is set on the bearing plate 11 or the insulation cylinder 12, there is no need to set an additional structure on the heater 200 to connect with the support component 20. This avoids the problem of deformation of the heater connection part connected with the support component 20 caused by the bearing position being concentrated on the heater 200, thereby helping to improve the service life of the heater 200.

[0048] It should be noted that, in order to connect the connector 21 of each support component 20 to the carrier plate 11 or the insulation cylinder 12, a threaded connection (such as directly providing a through hole on the carrier plate 11 or adding a connecting part to the inner wall of the insulation cylinder 12 and providing a through hole on the connecting part) or a snap-fit ​​connection (such as adding a connecting part to the carrier plate 11 and providing a snap-fit ​​structure on the connecting part or providing a snap-fit ​​structure on the insulation cylinder 12) can be used. The specific structure of the support component 20 will be described in detail below with reference to specific embodiments and based on the selection of the bearing position of the deformation support point of the heater 200.

[0049] Reference Figure 1 and Figure 2 One end of the connector 21 of the support component 20 is disposed on the support plate 11 of the support component 10. Specifically, the support plate 11 is provided with a through hole T, and the connector 21 is a columnar rod with one end passing through the through hole T. In order to realize the detachable connection between the connector 21 and the support plate 11, the support component 20 also includes a fastener 23, which is threadedly connected to the end of the connector 21 passing through the through hole T to fix the connector 21 to the support plate 11.

[0050] By providing a through hole T in the support plate 11 and setting the connector 21 as a columnar rod, the distance between the support member 22 and the heater 200 can be adjusted by controlling the length of the connector 21 extending out of the through hole T, thus adapting to the installation position of the heater 200. Therefore, based on the flexibility of the support member 20 during installation and use, this application facilitates adaptation to heaters 200 of different heights and dimensions.

[0051] Specifically, the connector 21 can be formed with the support 22 in an "L" shape. The connector 21 can be integrally formed with the support 22, or it can be formed separately (e.g., the connector 21 and the support 22 are threaded together).

[0052] In some embodiments, the fastener 23 is a conventional nut. The fastener 23 can be located entirely outside the through hole T and threadedly connected to one end of the connector 21 that passes through the through hole T. After connection, the fastener 23 can abut against the support plate 11 to suspend the support member 20 entirely on the support plate 11. Of course, the fastener 23 can also be an insert wholly embedded in the through hole T to suspend the support member 20 entirely on the support plate 11.

[0053] In other embodiments, the fastener 23 may also be a nut sleeve, such as a T-shaped nut sleeve. The fastener 23 may be movably disposed relative to the through hole T. In this case, part of the fastener 23 is disposed in the through hole T, and part is located outside the through hole T and is threadedly connected to one end of the connector 21 that passes through the through hole T. After connection, the large end of the fastener 23 located outside the through hole T can abut against the bearing plate 11 to suspend the support member 20 as a whole on the bearing plate 11. Of course, the fastener 23 may also be integrated with the bearing plate 11 by embedding the small end of the fastener 23 in the through hole T, so that the support member 20 is suspended as a whole on the bearing plate 11 after being connected with the connector 21.

[0054] To achieve insulation between the support member 22 and the heater 200, the support member 22 may be made of insulating material or at least have an insulating layer on its surface. Alternatively, a first insulating member 24 may be additionally provided and disposed between the support member 22 and the heater 200. Figure 1 As shown. Specifically, the first insulating member 24 can be made of a high-temperature resistant, high-insulation ceramic material, such as silicon nitride. The surface of the support member 22 is provided with an insulating layer, which may be provided in the contact area between the support member 22 and the heater.

[0055] Similarly, to achieve insulation between the connector 21 and the heater 200, the connector 21 may be made of insulating material or at least have an insulating layer on its surface. Alternatively, a second insulating element 25 may be additionally provided and disposed between the connector 21 and the heater 200. Figure 1 As shown. Specifically, the second insulating element 25 can be an insulating sleeve structure and sleeved on the connector 21. The second insulating element 25 can also be made of high temperature resistant and high insulation ceramic material, such as silicon nitride.

[0056] Reference Figures 4 to 5 One end of the connector 21 of the support component 20 is disposed on the insulation cylinder 12 of the bearing component 10. Specifically, the connector 21 includes a snap-fit ​​portion 211 and a connecting portion 212, with both ends of the connecting portion 212 connected to the support component 22 and the snap-fit ​​portion 211, respectively. The snap-fit ​​portion 211 and the support component 22 are disposed on both sides of the connecting portion 212 in the thickness direction, and the connector 21 is snapped onto the insulation cylinder 12 via the snap-fit ​​portion 211.

[0057] In this embodiment, by providing a snap-fit ​​part 211 at one end of the connector 21 that can snap onto the insulation cylinder 12, a snap-fit ​​connection between the connector 21 and the insulation cylinder 12 is achieved. This snap-fit ​​connection method is simple and allows the connector 21 to be quickly installed on the insulation cylinder 12, thereby greatly improving the installation efficiency of the thermal field device 1000.

[0058] In this embodiment, the snap-fit ​​portion 211 and the connecting portion 212 of the connector 21 can be integrally formed with the support member 22 in a Z-shaped structure. Specifically, the snap-fit ​​portion 211 and the connecting portion 212 of the connector 21 can be integrally formed with the support member 22 (e.g., Figure 5 (As shown), of course, the connecting part 212 can also be separately formed from the support member 22.

[0059] Understandably, in order to achieve the snap-fit ​​connection between the connector 21 and the insulation cylinder 12, one of the snap-fit ​​part 211 and the insulation cylinder 12 is provided with a slot B, and the other is provided with a protrusion C. The protrusion C is inserted into and received in the slot B, so that the snap-fit ​​part 211 snaps into the insulation cylinder 12.

[0060] For example, the latching part 211 is provided with a latching groove B, and the insulation cylinder 12 is provided with a protrusion C. The protrusion C on the insulation cylinder 12 can be the end of the side wall of the insulation cylinder 12. In this case, the two opposite side walls of the latching groove B are respectively attached to the inner wall surface and the outer wall surface of the side wall of the insulation cylinder 12. Of course, the protrusion C can also be a protrusion structure formed on the top surface of the side wall of the insulation cylinder 12. In this case, the two opposite side walls of the latching groove B are respectively attached to the inner wall surface and the outer wall surface of the protrusion structure, such as... Figure 4 As shown. In one embodiment, the heat insulation cylinder 12 may be composed of a carbon or graphite thin-walled cylinder and an externally wrapped soft felt or solid felt; the snap-fit ​​part 211 snaps onto the thin-walled cylinder of the heat insulation cylinder 12.

[0061] To achieve insulation between the support member 22 and the heater 200, the support member 22 may be made of insulating material or at least have an insulating layer on its surface. Alternatively, a first insulating member 24 may be additionally provided and disposed between the support member 22 and the heater 200. Figure 4 As shown. Specifically, the first insulating element 24 can be an insulating block structure and can be made of a high-temperature resistant, high-insulation ceramic material, such as silicon nitride.

[0062] Similarly, to achieve insulation between the connecting part 212 and the heater 200, the connecting member 21 may be made of insulating material or at least have an insulating layer on its surface. Alternatively, a second insulating member 25 may be additionally provided and disposed between the connecting part 212 and the heater 200, such as... Figure 4As shown. Specifically, the second insulating member 25 may be an insulating block structure located above the first insulating member 24 between the connecting part 212 and the heater 200. The second insulating member 25 may be made of a high-temperature resistant and highly insulating ceramic material, such as silicon nitride.

[0063] The support member 20 also includes at least one adjusting member 26, each adjusting member 26 being detachably disposed between the support member 22 and the heater 200 to accommodate the gap between the support member 22 and the heater 200, such as... Figure 4 As shown. When there are multiple adjusting members 26, the multiple adjusting members 26 are stacked.

[0064] In this embodiment, based on the arrangement of the adjusting members 26, the distance between the support member 22 and the heater 200 can be adjusted by selecting the number of adjusting members 26 used, so as to adapt to the installation position of the heater 200. Thus, depending on the number of adjusting members 26 used, this application can adapt to heaters 200 of different heights and dimensions.

[0065] Understandably, the material of the adjusting member 26 can be an insulating material or a non-insulating material. When the adjusting member 26 is made of an insulating material, the use of the first insulating member 24 can be eliminated.

[0066] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A load-bearing structure (100), characterized in that, Applied to heater (200), including: The supporting component (10) has a placement cavity (A) for housing the heater (200); and Multiple support components (20) are arranged sequentially along the inner circumferential direction of the placement cavity (A), and one end of each support component (20) is connected to the bearing component (10), and the other end is used to support the heater (200).

2. The load-bearing structure (100) according to claim 1, characterized in that, The support component (20) includes a connector (21) and a support component (22); One end of the connector (21) is detachably connected to the bearing component (10), and the other end is connected to the support component (22), which is used to support the heater (200).

3. The load-bearing structure (100) according to claim 2, characterized in that, The bearing component (10) is provided with a through hole (T), and the connector (21) is a rod with one end passing through the through hole (T); The support component (20) also includes a fastener (23), which is connected to the connector (21) through one end of the through hole (T).

4. The load-bearing structure (100) according to claim 2, characterized in that, The connector (21) includes a snap-fit ​​part (211) and a connecting part (212), and the two ends of the connecting part (212) are respectively connected to the support (22) and the snap-fit ​​part (211); In the thickness direction of the connecting part (212), the snap-fit ​​part (211) and the support member (22) are disposed on both sides of the connecting part (212); the snap-fit ​​part (211) snaps into the bearing member (10).

5. The load-bearing structure (100) according to claim 4, characterized in that, One of the latching part (211) and the supporting member (10) is provided with a slot (B) and the other is provided with a protrusion (C). The protrusion (C) is received in the slot (B) so that the latching part (211) is latched onto the supporting member (10).

6. The load-bearing structure (100) according to claim 4, characterized in that, The snap-fit ​​part (211), the connecting part (212), and the support member (22) are integrally formed.

7. The load-bearing structure (100) according to claim 2, characterized in that, The support member (20) further includes an adjusting member (26), which is detachably disposed between the support member (22) and the heater (200) to accommodate the gap between the support member (22) and the heater (200).

8. The load-bearing structure (100) according to any one of claims 2-7, characterized in that, The supporting component (10) includes a supporting plate (11) and a heat insulation cylinder (12), the heat insulation cylinder (12) having the placement cavity (A), and the supporting plate (11) being disposed at one axial end of the heat insulation cylinder (12); One end of each connector (21) is detachably connected to the carrier plate (11) or the insulation cylinder (12).

9. The load-bearing structure (100) according to any one of claims 2-7, characterized in that, The support member (22) is made of insulating material or has an insulating layer on at least part of its surface; or, the support member (20) further includes a first insulating member (24) disposed between the support member (22) and the heater (200); and / or The connector (21) is made of insulating material or has an insulating layer on at least part of its surface; or the support member (20) further includes a second insulating member (25) disposed between the connector (21) and the heater (200).

10. A thermal field device (1000), characterized in that, Includes a heater (200) and a support structure (100) as described in any one of claims 2-7, wherein the heater (200) is disposed in the placement cavity (A) and supported on a plurality of the support members (20).

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