Movable storage device for target material drying

Abstract

The utility model provides a movable storage device for drying a target material. The movable storage device for drying the target material comprises a box body, the box body is sequentially provided with a storage area and a water storage area from top to bottom; a plurality of layers of placing frames are arranged in the placing area at intervals in the vertical direction; a plurality of target material containing grooves are formed in the containing frame in the horizontal direction at intervals. The target material placing groove is provided with two side walls which are oppositely arranged, and the two side walls are of hollow structures; an included angle between the target material placing groove and the vertical direction is 10-60 degrees; a liquid outlet is formed in the bottom of the water storage area; and a rolling part is arranged at the bottom of the box body. The storage area and the water storage area are combined, so that waste water can be conveniently collected, and the use efficiency of the space is improved; the side walls of the two sides of the target material containing groove are each of a hollowed-out structure, and the target material containing groove is obliquely arranged, so that liquid can be rapidly drained, target material oxidation is avoided, and the target material does not need to be turned over; and the integration of placing, drying and transporting of the target material is realized.

Description

Technical Field

[0001] This utility model belongs to the field of target material drying technology and relates to a mobile storage device for target material drying. Background Technology

[0002] Magnetron sputtering, with its advantages of low sputtering temperature and high deposition rate, is widely used in various thin film manufacturing processes. It is a crucial technology essential for semiconductor chip manufacturing, a type of physical vapor deposition (PVD) that uses high-energy particles to bombard the target surface, sputtering the target's atoms and depositing them as thin films on the substrate surface to prepare thin film materials. Sputtering targets offer numerous advantages, such as uniformity and controllability in metal deposition, and are widely used in the semiconductor field.

[0003] The inspection of weld quality and uniformity of target components after welding is crucial. Currently, C-SCAN ultrasonic non-destructive testing is one of the common methods for testing targets, mainly used to detect internal impurities, porosity, and other material defects, as well as the weld bonding rate. C-SCAN ultrasonic non-destructive testing typically requires immersing the target in water. However, metal targets are highly susceptible to oxidation when exposed to water; therefore, the target must be dried as soon as possible after testing to prevent prolonged exposure to a humid environment and subsequent oxidation.

[0004] In existing technologies, ultrasonic flaw detection targets are usually dried on a platform next to a water tank. This not only poses a risk of the target falling, but also a risk that some areas on the back of the target may not be dried. Furthermore, there is a risk of the target falling during the drying process of flipping it over, which can lead to product scrap.

[0005] Therefore, there is an urgent need to design a device for drying target materials, which can overcome the shortcomings of existing technologies, quickly and effectively dry target materials, and facilitate the transfer and transportation of target materials to meet the needs of practical applications. Utility Model Content

[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a mobile storage device for target drying, which can quickly drain the moisture of the target and integrates target placement, drying and transportation. It can also be compatible with various target sizes, is highly efficient and safe, low in cost, easy to use and suitable for widespread use.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] This utility model provides a mobile storage device for drying target materials, characterized in that the mobile storage device for drying target materials includes a box body;

[0009] The box consists of a storage area and a water storage area from top to bottom;

[0010] The storage area is provided with several layers of shelves spaced at intervals along the vertical direction;

[0011] The placement rack is provided with several target placement slots spaced at intervals along the horizontal direction;

[0012] The target placement groove has two oppositely arranged side walls, and both side walls are hollow structures;

[0013] The angle between the target placement groove and the vertical direction is 10-60°, for example, it can be 10°, 15°, 20°, 25°, 30°, 35°, 40°, 45°, 50°, 55° or 60°, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0014] A drain outlet is provided at the bottom of the water storage area;

[0015] The bottom of the box is equipped with a rolling component.

[0016] This utility model provides a mobile storage device for target drying. By combining a storage area and a water storage area, it facilitates wastewater collection and improves space utilization efficiency. Furthermore, the layered design, with its multiple shelves and target placement slots, allows for the simultaneous drying of multiple targets, enhancing drying efficiency. Additionally, the perforated side walls of the target placement slots and their inclined design facilitate rapid drainage, preventing target oxidation and eliminating the need for target flipping, thus preventing further oxidation. Finally, a drain outlet at the bottom of the unit facilitates the discharge of collected liquid for subsequent processing. This mobile storage device integrates target placement, drying, and transportation, is compatible with various target sizes, is highly efficient, safe, low-cost, and easy to use, making it suitable for widespread application.

[0017] As a preferred technical solution of this utility model, the interval between adjacent placement racks is 10-30cm, for example, it can be 10cm, 12cm, 15cm, 16cm, 18cm, 20cm, 22cm, 25cm, 26cm, 28cm or 30cm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0018] In this invention, by controlling the interval between adjacent placement racks within the range of 10-30cm, not only is it convenient for the target material to drain water quickly, but the utilization rate of the box is also fully improved.

[0019] As a preferred technical solution of this utility model, the shortest distance between the placement rack and the bottom of the box is 10-20cm, for example, it can be 10cm, 11cm, 12cm, 13cm, 14cm, 15cm, 16cm, 17cm, 18cm, 19cm or 20cm, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0020] As a preferred technical solution of this utility model, the number of layers of the placement rack is ≥3, for example, it can be 3, 4, 5 or 6, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0021] The placement rack is provided with 4-8 target placement slots at intervals, for example, 4, 5, 6, 7 or 8.

[0022] As a preferred technical solution of this utility model, the included angle between the target placement groove and the vertical direction is 30-60°, for example, it can be 30°, 32°, 35°, 38°, 40°, 42°, 45°, 48°, 50°, 52°, 55°, 58° or 60°, but is not limited to the listed values. Other unlisted values ​​within the range are also applicable.

[0023] As a preferred technical solution of this utility model, the two sides of the target placement groove adjacent to the two side walls are both open structures.

[0024] In this invention, the target placement groove adopts a front and rear open space design, that is, only the two opposite sides of the four sides have side walls, and the other two sides are designed as openings, which not only facilitates the quick drainage of moisture from the target material, but also allows for the drying of various target materials.

[0025] As a preferred technical solution of this utility model, the depth of the target placement groove is 2-4 times the thickness of the target to be dried.

[0026] In this invention, to avoid scratching the target material and affecting product use, the depth of the target material placement groove is controlled to be at least twice the thickness of the target material.

[0027] As a preferred technical solution of this utility model, a handle is provided on one side wall of the box body.

[0028] In this invention, a trolley handle is provided on one side wall of the box to facilitate the operation of the storage device by technicians.

[0029] As a preferred embodiment of this invention, the number of rolling components is four, and they are located at the four corners of the bottom of the box.

[0030] The rolling component includes a swivel wheel.

[0031] In this invention, a rolling component is provided to facilitate the movement of the placement device in multiple directions, and the direction can be changed without rotating the entire device, thus enabling the transfer and processing of target materials.

[0032] As a preferred technical solution of this utility model, a valve is provided on the drain port.

[0033] This utility model also provides a method of using the mobile storage device for drying target materials as described above. The method includes: placing several targets to be dried in the target material storage trough, then using an air gun to blow dry or letting the targets drain naturally, then draining the bottom wastewater through the drain port, and finally transferring the mobile storage device to the next process, and then taking out the targets for later use.

[0034] Compared with the prior art, the present invention has the following beneficial effects:

[0035] This utility model provides a mobile storage device for target drying. By combining a storage area and a water storage area, it facilitates wastewater collection and improves space utilization efficiency. Furthermore, the layered design, with multiple storage racks and target placement slots, allows for the simultaneous drying of multiple targets, enhancing drying efficiency. Additionally, the openwork structure on the opposite side walls of the target placement slots and the inclined design of the slots facilitate rapid drainage without requiring target rotation, thus preventing target oxidation. Finally, a drain outlet at the bottom of the unit allows for easy discharge of collected liquid for subsequent processing. This mobile storage device integrates target placement, drying, and transportation, is compatible with various target sizes, is highly efficient, safe, low-cost, and easy to use, making it suitable for widespread application. Attached Figure Description

[0036] Figure 1 This is a front view of the movable storage device for drying target material provided in Example 1;

[0037] Figure 2 This is a left view of the movable storage device for drying target material provided in Embodiment 1;

[0038] Figure 3 This is a rear view of the movable storage device for drying target material provided in Example 1;

[0039] Figure 4 This is a top view of the movable storage device for drying target material provided in Example 1;

[0040] Among them, 1-box body, 2-storage area, 3-water storage area, 4-placement rack, 5-target material placement tank, 6-drainage port, 7-rolling component. Detailed Implementation

[0041] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0042] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0043] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0044] Example 1

[0045] This embodiment provides a mobile storage device for target drying (such as...). Figure 1-4 As shown), the mobile storage device for drying target material includes a housing 1;

[0046] The box consists of a storage area 2 and a water storage area 3 from top to bottom;

[0047] The storage area 2 is provided with three layers of shelves 4 at intervals along the vertical direction; the interval between adjacent shelves 4 is 20cm; the shortest distance between the shelf 4 and the bottom of the box 1 is 15cm.

[0048] The placement rack 4 is provided with four target placement slots 5 spaced apart in the horizontal direction;

[0049] The depth of the target placement groove 5 is three times the thickness of the target to be dried; the target placement groove 5 has two oppositely arranged side walls, and both side walls are hollow structures; the two sides of the target placement groove 5 adjacent to the two side walls are open structures; the angle between the target placement groove 5 and the vertical direction is 40-50°.

[0050] The bottom of the water storage area 3 is provided with a drain outlet 6, and a valve is provided on the drain outlet;

[0051] The bottom of the housing 1 is provided with four rolling components 7, which are located at the four corners of the bottom of the housing 1; the rolling components 7 are omnidirectional wheels.

[0052] Example 2

[0053] This embodiment provides a mobile storage device for drying target materials, which includes a housing;

[0054] The box consists of a storage area and a water storage area from top to bottom;

[0055] The storage area is provided with two shelves spaced apart vertically; the distance between adjacent shelves is 10cm; the shortest distance between the shelf and the bottom of the box is 10cm.

[0056] The placement rack has five target placement slots spaced at intervals along the horizontal direction;

[0057] The depth of the target placement groove is twice the thickness of the target to be dried; the target placement groove has two oppositely arranged side walls, and both side walls are hollow structures; the two sides of the target placement groove adjacent to the two side walls are open structures; the angle between the target placement groove and the vertical direction is 30-45°.

[0058] A drain outlet is provided at the bottom of the water storage area, and a valve is provided on the drain outlet;

[0059] A handle is provided on one side wall of the box;

[0060] The bottom of the box is provided with four rolling components, which are located at the four corners of the bottom of the box; the rolling components are omnidirectional wheels.

[0061] When using the mobile storage device provided in Embodiments 1-2, several targets to be dried can be placed in the target placement trough, and then the targets can be dried with an air gun. After that, the bottom wastewater can be discharged through the drain port. Finally, the mobile storage device can be transferred to the next process, and then the targets can be taken out for use.

[0062] Comparative Example 1

[0063] This comparative example provides a mobile storage device for drying target materials. Except that the box body does not have a water storage area and the shortest distance between the placement rack and the bottom of the box body is 1 cm, all other conditions are the same as in Example 1.

[0064] When using the mobile storage device provided in this comparative example, the lack of a water storage area not only causes the water splashed out during the drying process of the target material to land on the storage rack, but also makes it impossible to collect the splashed water, which is not conducive to subsequent processing.

[0065] Comparative Example 2

[0066] This comparative example provides a mobile storage device for drying target materials. Except that the angle between the target material placement groove and the vertical direction is 0-5°, all other conditions are the same as in Example 1.

[0067] When using the movable placement device provided in this comparative example, the target placement groove has an excessively small tilt angle, which is not conducive to the rapid drying of the target.

[0068] Comparative Example 3

[0069] This comparative example provides a mobile storage device for drying target materials. Except that the two side walls are not provided with a hollow structure, all other conditions are the same as in Example 1.

[0070] When using the mobile placement device provided in this comparative example, because the side walls of the target placement groove are not provided with a hollow structure, it is not conducive to quickly throwing out liquid during the target drying process.

[0071] The applicant declares that the above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A movable storage device for drying target materials, characterized in that, The mobile storage device for drying target materials includes a housing; The box consists of a storage area and a water storage area from top to bottom; The storage area is provided with several layers of shelves spaced at intervals along the vertical direction; The placement rack is provided with several target placement slots spaced at intervals along the horizontal direction; The target placement groove has two oppositely arranged side walls, and both side walls are hollow structures; The angle between the target placement groove and the vertical direction is 10-60°; A drain outlet is provided at the bottom of the water storage area; The bottom of the box is equipped with a rolling component.

2. The mobile storage device for target drying according to claim 1, characterized in that, The spacing between adjacent placement racks is 10-30cm.

3. The mobile storage device for target drying according to claim 1, characterized in that, The shortest distance between the placement rack and the bottom of the box is 10-20cm.

4. The mobile storage device for target drying according to claim 1, characterized in that, The number of layers in the placement rack is ≥3; The placement rack has 4-8 target placement slots spaced apart.

5. The mobile storage device for target drying according to claim 1, characterized in that, The angle between the target placement groove and the vertical direction is 30-60°.

6. The mobile storage device for target drying according to claim 1, characterized in that, The target placement groove and the two sides adjacent to the two side walls are both open structures.

7. The mobile storage device for target drying according to claim 1, characterized in that, The depth of the target placement groove is 2-4 times the thickness of the target to be dried.

8. The mobile storage device for target drying according to claim 1, characterized in that, A handle is provided on one side wall of the box.

9. The mobile storage device for target drying according to claim 1, characterized in that, The number of rolling components is four, and they are located at the four corners of the bottom of the box. The rolling component includes a swivel wheel.

10. The mobile storage device for target drying according to claim 1, characterized in that, A valve is installed on the drain outlet.

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