Self-cleaning scraper device
By designing a self-cleaning scraper device, a cylinder piston drives the scraper head to scrape away powder in the air intake pipe, and self-cleaning is achieved through the relative movement of the main scraper head and the auxiliary scraper head. This solves the problems of the scraper device being unable to self-clean and being prone to corrosion, and realizes pipe dredging and scraper life extension.
Patent Information
- Application Number
- CN202422709912.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-07
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-07
AI Technical Summary
Existing scraper devices cannot self-clean, resulting in powder adhesion and thickening, reduced airflow, easy pipe blockage, and easy corrosion in humid and acidic environments, leading to a short service life.
A self-cleaning scraper device was designed, comprising a cylinder, a cylinder piston, a cylinder connecting rod, a main scraper head, and a secondary scraper head. The up-and-down movement of the cylinder piston drives the scraper head to scrape off powder in the air intake pipe, and self-cleaning is achieved through the relative movement of the main scraper head and the secondary scraper head.
It effectively removes powder from the inner wall of pipes, prevents pipe blockage, extends the service life of the scraper, maintains smooth airflow, and reduces scrubber downtime.
Smart Images
Figure CN223518194U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a semiconductor equipment field especially a self -cleaning scraper device. BACKGROUND
[0002] In the semiconductor production process, the process waste gas is transported through the pipeline, but in the transportation, the powder is easy to deposit in some special parts of the pipeline, which finally leads to the pipeline blockage; in addition, the pipeline blockage also easily causes the inlet pipeline pressure to rise and causes the Scrubber (tail gas treatment equipment) to be down. Using the scraper to remove the powder accumulated on the inner wall of the pipeline can greatly reduce the occurrence of pipeline blockage.
[0003] The existing scraper device is generally directly arranged in the pipeline, and has the following problems: 1. It does not have self-cleaning ability, when the powder adheres to the scraper, it is equivalent to that the surface of the scraper is thickened by one layer, with the increase of the powder adhered to the surface of the scraper, the gas flow that can pass becomes smaller, so that the pipeline blockage is easily caused; 2. The traditional scraper is often corroded and has a short service life due to the deposition of the powder and the acidic environment caused by the moisture of the inner wall of the pipeline.
[0004] In view of the above problems, the utility model provides a scraper device which can effectively remove the deposited powder on the inner wall of the pipeline and realize self-cleaning, which can effectively improve and solve the defects and limitations in the prior art. UTILITY MODEL CONTENTS
[0005] The utility model aims at providing a self-cleaning scraper device which can effectively remove the powder deposition on the inner wall of the pipeline and realize self-cleaning of the scraper, and avoids the pipeline blockage and the Scrubber down machine failure that may be caused by the blockage.
[0006] In order to achieve the above purpose, the utility model provides a self-cleaning scraper device for dredging the pipeline of the easily blocked part in the inlet pipe, which comprises:
[0007] A cylinder is internally provided with a cylinder piston, and the cylinder piston can move up and down in the cylinder along the axial direction of the cylinder;
[0008] A cylinder fixing flange is hollow in the middle, the bottom thereof is fixedly arranged at the gas inlet of the inlet pipe and located directly below the cylinder, and the top thereof is fixed with the cylinder;
[0009] A cylinder connecting rod is connected to the cylinder piston at one end and moves up and down with the cylinder piston, and the other end of the cylinder connecting rod penetrates through the cylinder fixing flange and extends into the inlet pipe;
[0010] A main wiper head is arranged inside the intake pipe, below the cylinder fixing flange coaxially, and connected to the other end of the cylinder connecting rod, for wiping the powder deposited on the inner wall of the intake pipe;
[0011] A sub-wiper head is coaxially arranged inside the main wiper head, and fixedly connected to the bottom of the cylinder fixing flange, for wiping the powder remaining on the main wiper head.
[0012] Optionally, the outer wall of the main wiper head is in close contact with the inner wall of the intake pipe, and the main wiper head moves up and down in the intake pipe under the driving of the cylinder connecting rod.
[0013] Optionally, the outer wall of the sub-wiper head is in close contact with the inner wall of the main wiper head, and the sub-wiper head moves relatively with the main wiper head and forms friction during the up-and-down movement of the main wiper head.
[0014] Optionally, the main wiper head comprises:
[0015] A reverse U-shaped connecting piece comprises a horizontal bar and two vertical bars arranged in parallel at the two ends of the horizontal bar, and the horizontal bar is connected to the other end of the cylinder connecting rod;
[0016] A circular ring is fixed at the end of the two vertical bars away from the horizontal bar, for wiping the powder adhered to the inner wall of the intake pipe.
[0017] Optionally, the outer diameter of the circular ring matches the inner diameter of the intake pipe.
[0018] Optionally, the sub-wiper head comprises:
[0019] A sub-wiper head base is connected to the bottom of the cylinder fixing flange;
[0020] A plurality of sub-wiper head blades are in the form of long strips, and are distributed along the edge of the sub-wiper head base, for cleaning the powder falling on the inner wall of the main wiper head.
[0021] Optionally, the outer wall of the sub-wiper head blade is in close contact with the inner wall of the circular ring.
[0022] Optionally, the cylinder further comprises:
[0023] An upper cylinder interface is arranged at the upper end of the cylinder, for inputting gas into the cylinder or discharging gas from the cylinder;
[0024] A lower cylinder interface is arranged at the lower end of the cylinder, for discharging gas from the cylinder or inputting gas into the cylinder.
[0025] Optionally, the upper cylinder interface and the lower cylinder interface are both connected to gas pipes with electromagnetic valves, for conveying gas to the upper cylinder interface and the lower cylinder interface; the electromagnetic valves are both connected to the PLC, and are opened or closed according to the control of the PLC.
[0026] Optionally, the gas cylinder fixing flange is provided with threads at the edge of the middle hollowed part, and is connected with the gas cylinder through the threads.
[0027] In summary, compared with the prior art, the utility model has the following beneficial effects:
[0028] 1、 the utility model provides a self -cleaning scraper device, its cylinder scraper head is mainly located in the top of inlet pipe, when scraping powder, it is relatively not easy to self -adhesion powder.
[0029] 2、 the utility model provides a self -cleaning scraper device, its cylinder scraper head is mainly located in the top of inlet pipe, the environment where it is located is drier, and the scraper head is not easy to be corroded, thereby increasing the service life.
[0030] 3、 the utility model provides a self -cleaning scraper device, has the ability of self -cleaning, can realize self -maintenance, and further prolongs the service life. BRIEF DESCRIPTION OF DRAWINGS
[0031] Fig. 1 It is the structure schematic view of the self -cleaning scraper device of the utility model;
[0032] Fig. 2 It is the sectional view of the self -cleaning scraper device of the utility model;
[0033] Fig. 3 It is the schematic view of the main scraper head moving down to the lowest point of the utility model;
[0034] Fig. 4 It is the explosion view of each part of the self -cleaning scraper device of the utility model. DETAILED DESCRIPTION
[0035] The following will be combined with the drawings Figs. 1-4 The technical content, construction features, purposes achieved and effects of the utility model are described in detail through preferred embodiments.
[0036] It should be noted that the drawings are very simplified and all use non-precise proportions, only to facilitate and clearly assist the purpose of explaining the embodiments of the utility model, and are not used to limit the limited conditions of the embodiments of the utility model, so they do not have the substantial meaning of technology, any modification of structure, change of proportion relationship or adjustment of size, without affecting the effects and purposes achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model.
[0037] In the description of the utility model, it needs to explain, the term "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation is based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element must have a particular orientation, a particular orientation and operation, therefore, it cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0038] In the description of the utility model, it needs to explain, unless otherwise expressly provided and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixed connection, can also be detachable connection, or integrally connected, can be mechanical connection, can be directly connected, can also be indirectly connected through the intermediate medium, can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0039] The utility model provides a kind of novel self-cleaning doctor blade device, for the easy jamming part 52 in air inlet pipe 5 is carried out pipeline dredging. Figs. 1-2 As shown, the self-cleaning doctor blade device includes: cylinder 1, internally provided with cylinder piston, the cylinder piston can move up and down in the cylinder 1 along the axial direction of cylinder 1;Cylinder fixed flange 2, hollow disc type in the middle, its bottom is fixedly arranged at the air inlet 51 of the air inlet pipe 5, and located below the middle of the cylinder 1, and the top of the cylinder 1 is fixed;Cylinder connecting rod 6, one end of which is connected to the cylinder piston in the cylinder 1 and moves up and down with it, for transmitting the force for pushing the cylinder piston in the cylinder 1 through the cylinder connecting rod 6, the other end of which passes through the cylinder fixed flange 2 and extends into the inside of the air inlet pipe 5;Main scraping head 4, arranged inside the air inlet pipe 5, located coaxially below the cylinder fixed flange 2, and connected to the other end of the cylinder connecting rod 6, the outer wall of the main scraping head 4 is tightly attached to the inner wall of the air inlet pipe 5, and can move with the up-and-down movement of the cylinder connecting rod 6, and then scrape the powder deposited on the inner wall of the air inlet pipe 5;Secondary scraping head 3, arranged inside the air inlet pipe 5, and coaxially arranged inside the main scraping head 4, the outer wall of which is tightly attached to the inner wall of the main scraping head 4, and is fixedly connected with the bottom of the cylinder fixed flange 2, the main scraping head 4 moves upward relative to the secondary scraping head 3, so that the secondary scraping head 3 can scrape and clean the powder adhered to the inner wall of the main scraping head 4.
[0040] Among them, as shown in Fig. 2As shown, the cylinder 1 further comprises: an upper cylinder interface 11 located at the upper end of the cylinder 1, for inputting gas into the cylinder 1 or discharging gas from the cylinder 1; and a lower cylinder interface 12 located at the lower end of the cylinder 1, for discharging gas from the cylinder 1 or inputting gas into the cylinder 1. When the upper cylinder interface 11 is for gas input and the lower cylinder interface 12 is for gas discharge, the gas flow in the cylinder 1 flows from top to bottom, pushing the cylinder piston to move downward and driving the cylinder connecting rod 6 to move downward; when the lower cylinder interface 12 is for gas input and the upper cylinder interface 11 is for gas discharge, the gas flow in the cylinder 1 flows from bottom to top, pushing the cylinder piston to move upward and driving the cylinder connecting rod 6 to move upward.
[0041] The air inlet 51 of the air inlet pipe 5 is located at one end close to the self-cleaning scraper device, and the air inlet pipe 5 further comprises: a clogging-prone part 52 located at the opposite side of the air inlet 51, which is the position where the self-cleaning scraper device needs to scrape off powder.
[0042] Further, as shown, Fig. 4 The disc size of the cylinder fixing flange 2 is consistent with the size of the air inlet 51 of the air inlet pipe 5, and the cylinder fixing flange 2 is connected with the air inlet 51 of the air inlet pipe 5; specifically, the cylinder fixing flange 2 is connected with the air inlet 51 through screws.
[0043] In the specific embodiment of the utility model, the cylinder 1 and the cylinder fixing flange 2 are connected through threads at the edges of the middle hollow part.
[0044] The end of the cylinder connecting rod 6 close to the main scraper head 4 is connected with the main scraper head 4 through screws.
[0045] The auxiliary scraper head 3 is fixedly connected with the bottom of the cylinder fixing flange 2 through screws.
[0046] The main scraper head 4 comprises: a reverse U-shaped connecting piece 41 comprising a horizontal rod and two vertical rods arranged in parallel at the two ends of the horizontal rod, the horizontal rod being connected with the other end of the cylinder connecting rod 6; and a circular ring 42 fixed at the end of the two vertical rods away from the horizontal rod, the outer diameter of the circular ring 42 matching the inner diameter of the air inlet pipe 5, for scraping the powder deposited on the inner wall of the air inlet pipe 5, and the scraped powder being easy to accumulate and adhere to the inner wall of the circular ring 42 under the condition that the outer wall of the circular ring 42 tightly abuts against the inner wall of the air inlet pipe 5.
[0047] As shown, Fig. 4As shown, the auxiliary scraper 3 comprises: an auxiliary scraper base 31 connected with the bottom of the cylinder fixing flange 2; a plurality of auxiliary scraper blades 32 in strip type, distributed along the edge of the auxiliary scraper base 31, the outer wall of the auxiliary scraper blades 32 abuts the inner wall of the ring 42, for cleaning the powder scraped on the inner wall of the main scraper 4.
[0048] In the embodiment of the utility model, the auxiliary scraper blades 32 are four, and the auxiliary scraper blades 32 are evenly distributed along the edge of the auxiliary scraper base 31.
[0049] Further, as shown, Fig. 3 The self-cleaning scraper device moves downward along the inner wall of the air inlet pipe 5 under the driving of the cylinder connecting rod 6, and the ring 42 scrapes the deposited powder along the inner wall of the air inlet pipe 5 to dredge the easily blocked part 52 of the air inlet pipe 5.
[0050] Further, after the first scraping is completed, since part of the powder is accumulated and attached to the inner wall of the ring 42, when the main scraper 4 moves upward to the air inlet 51 along with the cylinder connecting rod 6, since the inner wall of the ring 42 abuts the outer wall of the auxiliary scraper blade 32, with the relative movement, the inner wall of the ring 42 contacts and rubs the outer wall of the auxiliary scraper blade 32, and the powder on the ring 42 is scraped by the auxiliary scraper blade 32.
[0051] The upper cylinder interface 11 and the lower cylinder interface 12 of the self-cleaning scraper device are respectively connected with air pipes with electromagnetic valves, for conveying gas to the upper cylinder interface 11 / lower cylinder interface 12; the electromagnetic valves are connected with a PLC (programmable logic controller) and are controlled by the PLC.
[0052] The use process of the novel self-cleaning scraper device is as follows:
[0053] Step S1, connecting the air pipes with electromagnetic valves to the upper cylinder interface 11 and the lower cylinder interface 12 respectively;
[0054] Step S2, controlling the upper cylinder interface 11 to intake air and the lower cylinder interface 12 to naturally exhaust air by the PLC, the cylinder piston drives the cylinder connecting rod 6 to move downward, and further drives the main scraper 4 to move downward, until the ring 42 on the main scraper 4 scrapes the powder deposited in the easily blocked part 52 at the lowermost end of the air inlet pipe 5, and the scraped powder is cleaned away along with the airflow in the air inlet pipe 5;
[0055] Step S3, by PLC control, the air cylinder interface 12 is inhaled, the air cylinder interface 11 is naturally exhausted, the air cylinder piston pushes the air cylinder connecting rod 6 to move upwards, and then drives the main scraper head 4 to move upwards until it returns to the air inlet 51, and in the process that the main scraper head 4 returns to the air inlet 51, relative motion occurs between the main scraper head 4 and the auxiliary scraper head 3, and friction is formed between the inner wall of the circular ring 42 and the outer wall of the auxiliary scraper head blade 32, so that the powder adhered to the main scraper head 4 is wiped off by the auxiliary scraper head 3, and the residual powder is also washed away with the airflow in the air inlet pipe 5, so that the self-cleaning of the scraper device is realized.
[0056] In summary, the novel self-cleaning scraper device provided by the utility model can realize the scraping of the powder deposited on the inner wall of the air inlet pipe and the cleaning of the scraper itself through the special design of the main scraper head and the auxiliary scraper head, effectively avoids the blockage in the air inlet pipe, and simultaneously, the design is also beneficial to prolonging the service life of the scraper.
[0057] Although the content of the utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as the limitation of the utility model. After the above content is read by the person skilled in the art, various modifications and substitutions of the utility model will be obvious. Therefore, the protection scope of the utility model should be limited by the attached claims.
Claims
1. A self-cleaning doctor blade device for pipe de-clogging of a clog-prone location (52) in an air intake pipe (5), characterized in that, The utility model relates to a powder feeding device, which comprises: a cylinder (1) with a cylinder piston movably arranged in the cylinder (1) along the axial direction of the cylinder (1); a cylinder fixing flange (2) with a hollowed middle part, a bottom part fixedly arranged at an air inlet (51) of an air inlet pipe (5) and located directly below the cylinder (1), and a top part fixedly connected with the cylinder (1); a cylinder connecting rod (6) with one end connected with the cylinder piston and the other end penetrating through the cylinder fixing flange (2) and extending into the air inlet pipe (5); a main scraping head (4) arranged in the air inlet pipe (5) and coaxially below the cylinder fixing flange (2) and connected with the other end of the cylinder connecting rod (6) for scraping the powder deposited on the inner wall of the air inlet pipe (5); a secondary scraping head (3) coaxially arranged in the main scraping head (4) and fixedly connected with the bottom part of the cylinder fixing flange (2) for wiping the powder remaining on the main scraping head (4).
2. The self-cleaning doctor blade apparatus of claim 1, wherein, The outer wall of the main scraping head (4) is tightly attached to the inner wall of the air inlet pipe (5), and the main scraping head (4) moves up and down in the air inlet pipe (5) under the driving of the cylinder connecting rod (6).
3. The self-cleaning doctor blade apparatus of claim 2, wherein, The outer wall of the secondary scraping head (3) is tightly attached to the inner wall of the main scraping head (4), and the secondary scraping head (3) moves relative to the main scraping head (4) and forms friction during the up-and-down movement of the main scraping head (4).
4. The self-cleaning doctor blade apparatus of claim 3, wherein, The main scraping head (4) comprises: a reverse U-shaped connecting piece (41) comprising a horizontal rod and two vertical rods arranged in parallel at the two ends of the horizontal rod, wherein the horizontal rod is connected with the other end of the cylinder connecting rod (6); a circular ring (42) fixedly arranged at the end of the two vertical rods away from the horizontal rod for scraping the powder attached to the inner wall of the air inlet pipe (5).
5. The self-cleaning doctor blade apparatus of claim 4, wherein, The outer diameter of the circular ring (42) matches the inner diameter of the air inlet pipe (5).
6. The self-cleaning doctor blade apparatus of claim 4, wherein, The secondary scraping head (3) comprises: a secondary scraping head base (31) connected with the bottom part of the cylinder fixing flange (2); a plurality of secondary scraping head blades (32) in the shape of long strips and arranged along the edge of the secondary scraping head base (31) for cleaning the powder scraped on the inner wall of the main scraping head (4).
7. The self-cleaning doctor blade apparatus of claim 6, wherein, The outer wall of the secondary scraping head blade (32) is attached to the inner wall of the circular ring (42).
8. The self-cleaning doctor blade apparatus of claim 1, wherein, The cylinder (1) further comprises: an upper cylinder interface (11) arranged at the upper end of the cylinder (1) for inputting or discharging gas into or from the cylinder (1); a lower cylinder interface (12) arranged at the lower end of the cylinder (1) for discharging or inputting gas from or into the cylinder (1).
9. The self-cleaning doctor blade apparatus of claim 1, wherein, The upper cylinder interface (11) and the lower cylinder interface (12) are connected with gas pipes with electromagnetic valves for conveying gas to the upper cylinder interface (11) and the lower cylinder interface (12); the electromagnetic valves are connected with a PLC and are opened or closed according to the control of the PLC.
10. The self-cleaning doctor blade apparatus of claim 1, wherein, The cylinder fixing flange (2) is provided with threads at the edge of the hollowed middle part, and is connected with the cylinder (1) through the threads.