Storage mechanism, feeding and discharging device and stripping equipment

Abstract

The utility model provides a material storage mechanism, a feeding and discharging device and stripping equipment, and the material storage mechanism comprises a rack, a first bearing platform which is arranged on the rack and is used for bearing a first material box, and the first material box is used for loading a wafer to be stripped or a wafer after glass sheet stripping; and the second bearing table is arranged on the rack, is positioned below the first bearing table and is used for bearing a second material box, and the second material box is used for loading a glass sheet stripped from the surface of the wafer. According to the storage mechanism, the first bearing table is arranged on the rack, and the second bearing table is arranged below the first bearing table, so that the overall structure is simple and compact, the space in the vertical direction can be fully utilized, the occupied area is reduced, and then the space is saved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of wafer processing, and more particularly to a storage mechanism, a feeding and discharging device, and a peeling device. BACKGROUND

[0002] Wafer peeling refers to separating a wafer from a glass sheet attached to the surface of the wafer. In the wafer peeling process, a storage mechanism is used to store the wafer to be peeled and the wafer and glass sheet after peeling. The storage mechanism in the related art occupies a large area, which is not conducive to saving space. CONTENT OF THE UTILITY MODEL

[0003] The embodiments of the application provide a storage mechanism, which is compact in structure and conducive to reducing the occupied area and saving space.

[0004] The technical scheme adopted by the embodiments of the application is as follows: a storage mechanism is provided, which comprises:

[0005] a rack,

[0006] a first bearing table arranged on the rack and used for bearing a first box, the first box being used for loading a wafer to be peeled or a wafer after peeling a glass sheet; and

[0007] a second bearing table arranged on the rack and located below the first bearing table, and used for bearing a second box, the second box being used for loading a glass sheet peeled from the surface of the wafer.

[0008] Further, the storage mechanism further comprises:

[0009] a slide rail arranged on the rack; and

[0010] a sliding block slidably arranged on the slide rail in a first direction, the second bearing table being connected with the sliding block.

[0011] Further, a handle is arranged on the second bearing table.

[0012] Further, the storage mechanism further comprises a first positioning assembly arranged on the first bearing table and used for positioning the first box.

[0013] and / or,

[0014] The storage mechanism further comprises a second positioning assembly arranged on the second bearing table and used for positioning the second box.

[0015] Further, a bottom surface of the first material box is provided with a first clamping groove and a second clamping groove, the first positioning assembly comprises a first positioning member and a second positioning member, the first positioning member and the second positioning member are arranged in a first direction, the first positioning member is clamped with the first clamping groove, and the second positioning member is clamped with the second clamping groove.

[0016] and / or,

[0017] A bottom surface of the second material box is provided with a third clamping groove and a fourth clamping groove, the second positioning assembly comprises a third positioning member and a fourth positioning member, the third positioning member and the fourth positioning member are arranged in the first direction, the third positioning member is clamped with the third clamping groove, and the fourth positioning member is clamped with the fourth clamping groove.

[0018] The first direction is arranged at an angle with a vertical direction.

[0019] Further, the first bearing table is provided with two or more first workstations for bearing the first material box, and each first workstation is arranged side by side in a second direction.

[0020] and / or,

[0021] The second bearing table is provided with two or more second workstations for bearing the second material box, and each second workstation is arranged side by side in the second direction.

[0022] The second direction is arranged at an angle with a vertical direction.

[0023] Further, the material storage mechanism further comprises:

[0024] A first sensor is arranged on the first bearing table and is used to detect whether the first bearing table bears the first material box.

[0025] A second sensor is arranged on the second bearing table and is used to detect whether the second bearing table bears the second material box.

[0026] Further, the rack comprises:

[0027] A base, the second bearing table is arranged on the base; and,

[0028] A support, one end of the support is connected with the base, and the other end of the support is connected with the first bearing table.

[0029] The embodiment of the present application also provides an up and down feeding device, which comprises a manipulator and a material storage mechanism as described above,

[0030] The mechanical arm is arranged on one side of the rack and is used to take out the wafer to be peeled from the first box or put the wafer after the glass sheet is peeled into the first box.

[0031] The mechanical arm is also used to put the glass sheet peeled from the wafer surface into the second box.

[0032] The embodiment of the present application also provides a peeling device, which comprises a peeling table, a separation mechanism and the feeding and discharging device as described above,

[0033] The peeling table is arranged on one side of the feeding and discharging device and is used to fix the wafer to be peeled,

[0034] The separation mechanism is arranged above the peeling table and is used to move along the direction close to the peeling table to contact the glass sheet on the wafer surface or move along the direction away from the peeling table to separate the glass sheet from the wafer.

[0035] The storage mechanism provided by the embodiment of the present application has the beneficial effects that the storage mechanism of the embodiment of the present application is simple and compact in overall structure, can fully utilize the space in the vertical direction, reduces the floor area and saves space. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor under the premise of the drawings.

[0037] Figure 1 The use state diagram of the storage mechanism provided by the embodiment of the present application is shown in the figure.

[0038] Figure 2 The three-dimensional structure diagram of the storage mechanism provided by the embodiment of the present application is shown in the figure.

[0039] Figure 3 The three-dimensional structure diagram of the peeling device provided by the embodiment of the present application is shown in the figure.

[0040] In the figure, various reference signs are as follows:

[0041] 10, rack; 11, base; 12, support; 20, first bearing table; 30, second bearing table; 31, handle; 40, slide rail; 50, slide block; 60, first positioning assembly; 61, first positioning member; 62, second positioning member; 70, second positioning assembly; 71, third positioning member; 72, fourth positioning member; 80, first sensor; 90, second sensor; 100, first material box; 200, second material box; 300, mechanical hand; 400, peeling bearing table; 500, separating mechanism. DETAILED DESCRIPTION

[0042] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects clearer, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0043] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0044] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0045] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0046] Please refer to Figure 1 and Figure 2 , the storage mechanism provided by the embodiments of the present application will be described. The storage mechanism provided by the embodiments of the present application comprises a rack 10, a first bearing table 20 and a second bearing table 30.

[0047] The first bearing table 20 is arranged on the rack 10 and is used to bear the first material box 100. The first material box 100 is used to load the wafer to be peeled or the wafer after the glass sheet is peeled.

[0048] The second supporting table 30 is arranged on the rack 10 and below the first supporting table 20, and is used for supporting the second box 200. The second box 200 is used for loading the glass sheet peeled from the wafer surface.

[0049] The storage mechanism provided by the embodiment of the present application has the following advantages: the first supporting table 20 is arranged on the rack 10, and the second supporting table 30 is arranged below the first supporting table 20, so that the overall structure is simple and compact, the space in the vertical direction can be fully utilized, the floor area is reduced, and the space is saved.

[0050] Please refer to Figure 2 The storage mechanism can further include a sliding rail 40 and a sliding block 50. The sliding rail 40 is arranged on the rack 10. The sliding block 50 is slidably installed on the sliding rail 40 in a first direction. The second supporting table 30 is connected with the sliding block 50. Through the cooperation of the sliding block 50 and the sliding rail 40, the second supporting table 30 can be slidably pulled out in the first direction, which greatly facilitates the taking and placing of the second box 200 and improves the taking and placing efficiency.

[0051] The first direction is arranged at an angle with the vertical direction, for example, the angle can be 90°. Please refer to Figure 1 The vertical direction can be represented by the Z axis, the first direction can be represented by the X axis, and the second direction described below can be represented by the Y axis.

[0052] Please refer to Figure 1 and Figure 2 The second supporting table 30 can be provided with a handle 31. Through the arrangement of the handle 31, the pulling out of the second supporting table 30 is facilitated.

[0053] Please refer to Figure 2 The storage mechanism can further include a first positioning assembly 60 arranged on the first supporting table 20 and used for positioning the first box 100. Through the arrangement of the first positioning assembly 60, the first box 100 can be positioned, and displacement of the first box 100 is avoided.

[0054] The storage mechanism can further include a second positioning assembly 70 arranged on the second supporting table 30 and used for positioning the second box 200. Through the arrangement of the second positioning assembly 70, the second box 200 can be positioned, and displacement of the second box 200 is avoided.

[0055] Please refer to Figure 1 and Figure 2The bottom surface of the first material box 100 can be provided with a first clamping groove (not shown in the figure) and a second clamping groove (not shown in the figure). The first positioning assembly 60 can include a first positioning piece 61 and a second positioning piece 62, and the first positioning piece 61 and the second positioning piece 62 are arranged in a first direction. The first positioning piece 61 is clamped with the first clamping groove, and the second positioning piece 62 is clamped with the second clamping groove. Through the clamping of the first positioning piece 61 and the first clamping groove, and the clamping of the second positioning piece 62 and the second clamping groove, the first material box 100 can be limited.

[0056] Please refer to Figure 1 and Figure 2 The bottom surface of the second material box 200 can be provided with a third clamping groove (not shown in the figure) and a fourth clamping groove (not shown in the figure). The second positioning assembly 70 can include a third positioning piece 71 and a fourth positioning piece 72, and the third positioning piece 71 and the fourth positioning piece 72 are arranged in a first direction. The third positioning piece 71 is clamped with the third clamping groove, and the fourth positioning piece 72 is clamped with the fourth clamping groove. Through the clamping of the third positioning piece 71 and the third clamping groove, and the clamping of the fourth positioning piece 72 and the fourth clamping groove, the second material box 200 can be limited.

[0057] Please refer to Figure 2 Specifically, the second positioning piece 62 and the fourth positioning piece 72 can be arranged in a strip shape extending in a second direction. By arranging in a strip shape, the first bearing table 20 can be compatible with first material boxes 100 of different width sizes, or the second bearing table 30 can be compatible with second material boxes 200 of different width sizes.

[0058] Please refer to Figure 1 and Figure 2 The first bearing table 20 can be provided with two or more first stations for carrying the first material box 100, and each first station is arranged side by side in a second direction. By arranging multiple first stations, the first bearing table 20 can place multiple first material boxes 100 at the same time, which can reduce the feeding and discharging time of the first material box 100.

[0059] Please refer to Figure 1 and Figure 2 The second bearing table 30 can be provided with two or more second stations for carrying the second material box 200, and each second station is arranged side by side in a second direction. By arranging multiple second stations, the second bearing table 30 can place multiple second material boxes 200 at the same time, which can reduce the feeding and discharging time of the second material box 200.

[0060] The second direction is arranged at an angle with the first direction and the vertical direction. Specifically, the second direction can be arranged at an angle of 90° with the first direction and the vertical direction, respectively.

[0061] Please refer to Figure 2The storage mechanism can further include a first sensor 80 and a second sensor 90. The first sensor 80 is arranged on the first bearing table 20 and is used to detect whether the first bearing table 20 carries the first material box 100. The second sensor 90 is arranged on the second bearing table 30 and is used to detect whether the second bearing table 30 carries the second material box 200. Through the arrangement of the first sensor 80 and the second sensor 90, it can be detected whether there is material.

[0062] Referring to Figure 1 and Figure 2 The rack 10 can include a base 11 and a support 12. The second bearing table 30 is arranged on the base 11. One end of the support 12 is connected with the base 11, and the other end of the support 12 is connected with the first bearing table 20. Specifically, the height between the second bearing table 30 and the first bearing table 20 is greater than the height of the second material box 200, so that the second material box 200 can be placed on the second bearing table 30 without interfering with the first bearing table 20.

[0063] Referring to Figure 3 The embodiment of the present application also provides a feeding and discharging device, which includes a mechanical arm and the storage mechanism in any of the above embodiments.

[0064] The mechanical arm 300 is arranged on one side of the rack 10 and is used to take out the wafer to be peeled in the first material box 100 or put the wafer after the glass sheet is peeled into the first material box 100. The mechanical arm 300 is also used to put the glass sheet peeled from the wafer surface into the second material box 200. Through the arrangement of the mechanical arm 300, the wafer to be peeled in the first material box 100 or the wafer after the glass sheet is peeled can be put into the first material box 100, and the glass sheet peeled from the wafer surface can be put into the second material box 200, so that the overall structure is simple and compact.

[0065] Referring to Figure 3 The embodiment of the present application also provides a peeling device, which includes a peeling table 400, a separation mechanism 500, and the feeding and discharging device in any of the above embodiments.

[0066] The peeling table 400 is arranged on one side of the feeding and discharging device and is used to fix the wafer to be peeled.

[0067] The separation mechanism 500 is arranged above the peeling table 400 and is used to move along the direction close to the peeling table 400 to contact the glass sheet on the wafer surface, or move along the direction away from the peeling table 400 to separate the glass sheet from the wafer.

[0068] The peeling device of the embodiment of the present application has the beneficial effects brought by the feeding and discharging device in any of the above embodiments due to the feeding and discharging device in any of the above embodiments, which will not be described here.

[0069] The above only describes preferred embodiments of the present application and is not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A stocker characterized by comprising: include: frame, A first support platform is disposed on the frame and is used to support a first material box, which is used to load the wafer to be stripped or the wafer after the glass sheet has been stripped. as well as, The second support platform is disposed on the frame and located below the first support platform, and is used to support the second material box, which is used to load the glass sheet peeled off from the surface of the wafer.

2. The stock mechanism according to claim 1, characterized in that The storage mechanism also includes: Slide rails, mounted on the frame; and, A slider is slidably mounted on the slide rail in a first direction, and the second support platform is connected to the slider. The first direction is set at an angle to the vertical direction.

3. The stock mechanism according to claim 1, wherein The second support platform is equipped with a handle.

4. A reservoir according to any one of claims 1 to 3, wherein The storage mechanism further includes a first positioning component, which is disposed on the first support platform and is used to position the first material box; And / or, The storage mechanism further includes a second positioning component, which is disposed on the second support platform and is used to position the second material box.

5. The stock mechanism according to claim 4, wherein The bottom surface of the first material box is provided with a first slot and a second slot. The first positioning component includes a first positioning element and a second positioning element. The first positioning element and the second positioning element are spaced apart along a first direction. The first positioning element is engaged with the first slot, and the second positioning element is engaged with the second slot. And / or, The bottom surface of the second material box is provided with a third slot and a fourth slot. The second positioning component includes a third positioning element and a fourth positioning element. The third positioning element and the fourth positioning element are spaced apart along the first direction. The third positioning element is engaged with the third slot, and the fourth positioning element is engaged with the fourth slot. The first direction is set at an angle to the vertical direction.

6. A reservoir according to any one of claims 1 to 3, wherein The first support platform is provided with two or more first stations for supporting the first material box, and each first station is arranged side by side along the second direction; And / or, The second support platform is provided with two or more second stations for carrying the second material box, and each second station is arranged side by side along the second direction; The second direction is set at an angle to the vertical direction.

7. A reservoir mechanism according to any one of claims 1 to 3, wherein The storage mechanism also includes: A first sensor is disposed on the first support platform and is used to detect whether the first support platform carries a first material box. The second sensor is disposed on the second support platform and is used to detect whether the second support platform is carrying the second material box.

8. A reservoir according to any one of claims 1 to 3, wherein The rack includes: A base, wherein the second support platform is disposed on the base; and, A support member, one end of which is connected to the base and the other end of which is connected to the first support platform.

9. A loading and unloading device, characterized in that, Includes a robotic arm and the storage mechanism as described in any one of claims 1-8. The robotic arm is located on one side of the frame and is used to remove the wafer to be stripped from the first material box or to put the wafer after the glass sheet has been stripped into the first material box. The robotic arm is also used to place the glass sheet peeled off the surface of the wafer into the second material box.

10. A peeling apparatus characterized by comprising: Includes a stripping platform, a separation mechanism, and the loading / unloading device as described in claim 9. The stripping stage is located on one side of the loading and unloading device and is used to fix the wafer to be stripped. The separating mechanism is disposed above the peeling stage and is movable in a direction close to the peeling stage to contact the glass sheet on the wafer surface, or in a direction away from the peeling stage to separate the glass sheet from the wafer.

Images