Novel evaporation boat
By dividing the evaporation boat into high-temperature and low-temperature zones and installing a protective cover in the low-temperature zone, the problem of aluminum sputtering was solved, and stable conversion and continuous film deposition of aluminum were achieved.
Patent Information
- Application Number
- CN202422966631.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-03
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-12-03
AI Technical Summary
Existing evaporation boats cannot achieve uniform solid-liquid and liquid-gas conversion of aluminum materials, resulting in aluminum material sputtering and affecting the continuous film deposition length.
The evaporation boat is divided into a high-temperature zone and a low-temperature zone, with a hollow protective cover installed in the low-temperature zone. The low-temperature zone is used for melting aluminum wires, and the high-temperature zone is used for evaporating molten aluminum. Independent temperature control and a heat insulation layer prevent aluminum material from splashing.
This effectively avoids aluminum sputtering problems, increases the continuous film deposition length, and achieves a stable aluminum conversion process.
Smart Images
Figure CN223522640U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to electroplating technical field especially relates to a novel evaporation boat. BACKGROUND
[0002] Vacuum evaporation refers to under the condition of vacuum, adopting certain heating evaporation mode to evaporate plating film material (or called film material) and make it gasify, particle flies to the surface of substrate and condenses into film. In the existing conductive metal thin film preparation production, evaporation boat has been widely used, evaporation boat is a main body rectangular parallelepiped boat-shaped structure, the middle part is concave, forms the molten pool, through heating to aluminum material (one kind of film material, the most widely used in conductive metal thin film preparation), can change the aluminum material in molten pool from solid to liquid and then evaporate, that is, in the molten pool, respectively, the change of aluminum material from solid to liquid, and the change of aluminum liquid from liquid to gas.
[0003] In the process of realizing the utility model, the inventor finds that at least the following problems exist in the prior art:
[0004] When the molten pool is used for solid-liquid conversion and liquid-gas conversion at the same time, the conversion process cannot be uniform, and it is impossible to completely convert all solid aluminum into liquid aluminum before gasification, so the situation of direct gasification of solid aluminum often occurs, and due to the different heating efficiencies of solid and liquid, the situation of aluminum sputtering is prone to occur, which further limits the continuous film plating length. Therefore, how to eliminate the problem of aluminum sputtering during evaporation boat evaporation is a problem to be solved. UTILITY MODEL CONTENTS
[0005] The utility model embodiment provides a novel evaporation boat to solve the problem of aluminum sputtering during evaporation boat evaporation.
[0006] In order to achieve the above purpose, the utility model embodiment provides a novel evaporation boat, which comprises an evaporation boat body and a protective cover, the protective cover is a hollow cylindrical structure with an open bottom, a recessed molten pool is formed in the middle of the evaporation boat body, and the bottom of the protective cover is connected to the bottom surface of the molten pool; a feeding hole is formed in the upper part of the protective cover, the feeding hole penetrates the inner and outer sides of the protective cover, and the diameter of the feeding hole is greater than the diameter of the film aluminum wire; a liquid flow hole is formed in the bottom of the protective cover, and the liquid flow hole penetrates the inner and outer sides of the protective cover; the part of the evaporation boat body below the protective cover is a low-temperature zone, the part of the evaporation boat body outside the low-temperature zone is a high-temperature zone, and the temperature of the low-temperature zone is lower than that of the high-temperature zone.
[0007] Further, the temperature range of the low-temperature zone is 660-800 DEG C, and the temperature range of the high-temperature zone is 1100-1500 DEG C.
[0008] Further, a temperature insulation layer is arranged between the low-temperature zone and the high-temperature zone.
[0009] Further, the high-temperature zone and the low-temperature zone are connected with different heating bodies respectively, and the set temperature of the heating body corresponding to the high-temperature zone is higher than the set temperature of the heating body corresponding to the low-temperature zone.
[0010] Further, the high-temperature zone is connected with the heating body, and the low-temperature zone is not connected with the heating body.
[0011] Further, the heating body is a graphite electrode.
[0012] Further, the feeding hole is arranged on the sidewall of the protective cover, or the feeding hole is arranged on the top plate of the protective cover.
[0013] Further, when the feeding hole is arranged on the sidewall of the protective cover, the number of the feeding hole is two, and the two feeding holes are symmetrically arranged with the axis of the protective cover as the center; the connecting line of the two feeding holes is parallel to the length direction of the evaporation boat body, or the connecting line of the two feeding holes is perpendicular to the length direction of the evaporation boat body.
[0014] Further, the liquid flow hole is a plurality of liquid flow holes, and the plurality of liquid flow holes are circumferentially distributed on the sidewall of the protective cover.
[0015] Further, the protective cover is connected with the evaporation boat body in a detachable manner.
[0016] The above technical scheme has the following beneficial effects:
[0017] In the technical scheme, the evaporation boat is divided into a high-temperature zone and a low-temperature zone, and a hollow protective cover is arranged on the low-temperature zone, so that a heating space for melting the solid film aluminum wire is formed in the low-temperature zone, and the temperature in the heating space can be adjusted to a temperature range suitable for melting the solid aluminum material. After the aluminum material is transported, the aluminum material is melted in the low-temperature zone heating space, and then the molten aluminum liquid is transferred to the outside high-temperature zone for evaporation, so that the melting process and the evaporation process of the aluminum material are carried out in different zones, and the problem of aluminum liquid splashing existing in the existing evaporation boat is effectively avoided. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.
[0019] Figure 1 is a cross-sectional view of a novel evaporation boat according to an embodiment of the present application;
[0020] Figure 2 is Figure 1A magnified view of a portion of point I in the middle;
[0021] Figure 3 This is a schematic diagram of yet another embodiment of a novel evaporation boat according to this utility model;
[0022] Figure 4 This is a schematic diagram of yet another embodiment of a novel evaporation boat according to this utility model;
[0023] Reference numerals: 10, Evaporation boat body; 11, Molten pool; 20, Protective cover; 21, Feed hole; 22, Liquid flow hole. Detailed Implementation
[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0025] like Figure 1 , Figure 2 As shown, this embodiment of the utility model provides a novel evaporation boat, including an evaporation boat body 10 and a protective cover 20. The protective cover 20 is a hollow cylindrical structure with an open bottom. A recessed molten pool 11 is formed in the middle of the evaporation boat body 10, and the bottom of the protective cover 20 is connected to the bottom surface of the molten pool 11. A feed hole 21 is formed at the upper part of the protective cover 20, penetrating both the inner and outer sides of the protective cover 20, and the diameter of the feed hole 21 is larger than the diameter of the aluminum wire in the film. A liquid flow hole 22 is formed at the bottom of the protective cover 20, penetrating both the inner and outer sides of the protective cover 20. The portion of the evaporation boat body 10 located below the protective cover 20 is a low-temperature zone, and the portion of the evaporation boat body 10 located outside the low-temperature zone is a high-temperature zone. The temperature of the low-temperature zone is lower than the temperature of the high-temperature zone. Preferably, the temperature range of the low-temperature zone is 660–800°C, and the temperature range of the high-temperature zone is 1100–1500°C.
[0026] To solve the foregoing problems, in the embodiments of the present application, the evaporation boat body 10 is divided into a high-temperature zone and a low-temperature zone (which is equivalent to dividing the molten pool 11 into a low-temperature zone in the middle and a high-temperature zone on the outside) that can be independently temperature-controlled, and a hollow protective cover 20 is connected to the low-temperature zone, thereby forming a heating space that is used for melting solid film aluminum wire, and the temperature in the heating space can be adjusted to a temperature range suitable for melting solid aluminum. After the film aluminum wire is transported into the protective cover 20 from the feeding hole 21, the solid aluminum wire is melted into a molten state, and then the molten aluminum liquid is transferred into the molten pool 11 (i.e., the high-temperature zone) on the outside through the liquid flow hole 22, and the normal set temperature of the molten pool 11 corresponds to the evaporation temperature of the aluminum liquid, so the aluminum liquid will evaporate in the molten pool 11 on the outside of the protective cover 20, thereby completing the evaporation. In this process, the melting process of the solid aluminum wire and the evaporation process are carried out in two isolated areas, so there is no direct conversion of the aluminum wire from a solid state to a gaseous state, and the problem of aluminum or aluminum liquid splashing that exists in the existing evaporation boat is avoided.
[0027] Further, in order to avoid temperature interference between the two zones and achieve better independent temperature control, the evaporation boat body 10 can be appropriately improved, and a temperature insulation layer made of heat insulation material is arranged between the low-temperature zone (preferably a circular zone matching the shape of the protective cover 20) and the high-temperature zone, for example, the insulation layer is designed as an annular layer with a certain thickness, which is embedded in the evaporation boat body 10 and is sleeved on the outside of the low-temperature zone.
[0028] In order to control the temperature of the high-temperature zone and the low-temperature zone in different ranges, the following two implementation manners can be selected:
[0029] The first kind: the high-temperature zone and the low-temperature zone are respectively connected with different heating bodies (the heating body material can be a graphite electrode of the existing material), and the set temperature of the heating body corresponding to the high-temperature zone is higher than the set temperature of the heating body corresponding to the low-temperature zone. For example, when the heating body is a graphite electrode laid under the molten pool 11, the graphite electrode laying density under the high-temperature zone can be greater than the graphite electrode laying density under the low-temperature zone, so as to generate a predetermined temperature difference between the two zones.
[0030] The second kind: the high-temperature zone is connected with a heating body, and the low-temperature zone is not connected with a heating body, and relies on the heat conduction of the molten pool 11 itself to make the low-temperature zone also receive heat from the high-temperature zone, but since the low-temperature zone is not directly heated by the heating body, its temperature will still be lower than that of the high-temperature zone.
[0031] Further, according to the actual situation of the device, when it is suitable for transverse feeding, the feeding hole 21 can be opened on the side wall of the protective cover 20 (at this time, due to the possibility of a small amount of droop at the front end of the aluminum wire, the hole diameter of the feeding hole 21 should be appropriately enlarged), and when it is suitable for vertical feeding from top to bottom, the feeding hole 21 can be vertically opened on the top plate of the protective cover 20 (as shown in Figure 3 ).
[0032] Further, when the feeding hole 21 is opened on the side wall of the protective cover 20, in order to speed up the supply speed of the aluminum liquid, the number of feeding holes 21 can be set to two, and the two feeding holes 21 are symmetrically arranged with the axis of the protective cover 20 as the center, at this time, bilateral feeding can be realized at the same time; in addition, according to the actual arrangement of the device, the connecting line of the two feeding holes 21 can be parallel to the length direction of the evaporation boat body 10 (as shown in Figure 1 ), or the connecting line of the two feeding holes 21 is perpendicular to the length direction of the evaporation boat body 10 (as shown in Figure 4 ).
[0033] Further, in order to improve work efficiency, the liquid flow hole 22 is multiple, for example, 3, 4, or 6, etc., and the multiple liquid flow holes 22 are circumferentially distributed on the side wall of the protective cover 20.
[0034] Further, in order to facilitate maintenance or replacement, the protective cover 20 is preferably connected with the evaporation boat body 10 in a detachable manner, for example, an annular groove is opened in the middle of the bottom surface of the molten pool 11, and the protective cover 20 is connected with the groove by clamping.
[0035] In actual work, a continuous feeding mechanism can be used to transport the film material aluminum wire, and the continuous feeding mechanism includes a wire feeding disc and a traction mechanism. The film material aluminum wire is wound and fixed on the wire feeding disc. The traction mechanism includes a traction wheel driven by a motor and a clamping wheel arranged in pairs with the traction wheel. The traction wheel and the clamping wheel jointly clamp the film material aluminum wire in the wheel groove and play a guiding and traction role. Then, the film material aluminum wire is sent into the protective cover 20 through the feeding hole 21.
[0036] In the above detailed description, various features are combined together in a single embodiment to simplify the disclosure. Such a disclosure method should not be interpreted as reflecting the intention that the embodiments of the claimed subject matter require more features than those clearly stated in each claim. On the contrary, as reflected in the appended claims, the utility model is in a state of less than all the features of the disclosed single embodiment. Therefore, the appended claims are hereby incorporated into the detailed description, wherein each claim is separately as a separate preferred embodiment of the utility model.
[0037] For any person skilled in the art to be able to implement or use the present application, the above discloses the embodiments. For those skilled in the art, various modifications of these embodiments are obvious, and the general principles defined herein can also be applied to other embodiments without departing from the spirit and protection scope of the present disclosure. Therefore, the present disclosure is not limited to the embodiments given herein, but is consistent with the broadest scope of the principles and novel features disclosed in the present application.
[0038] The above detailed description of the specific implementation of the present application, the purpose, technical solutions and beneficial effects of the present application have been further described in detail, it should be understood that the above is only a specific implementation of the present application, and is not used to limit the protection scope of the present application, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. A novel evaporation boat characterized in that, The evaporation boat body (10) and the protective cover (20) are provided, the protective cover (20) is a hollow cylindrical structure with an open bottom, and a recessed molten pool (11) is formed in the middle of the evaporation boat body (10). An inlet hole (21) is formed in the upper part of the protective cover (20) and penetrates the inside and outside of the protective cover (20), and the diameter of the inlet hole (21) is greater than the diameter of the aluminum wire. The part of the evaporation boat body (10) below the protective cover (20) is a low-temperature zone, and the part of the evaporation boat body (10) outside the low-temperature zone is a high-temperature zone, and the temperature of the low-temperature zone is lower than that of the high-temperature zone.
2. The novel evaporation boat as claimed in claim 1, wherein, The temperature of the low-temperature zone ranges from 660 to 800 DEG C, and the temperature of the high-temperature zone ranges from 1100 to 1500 DEG C.
3. The novel evaporation boat as claimed in claim 1 or 2, characterized in that A temperature insulation layer is arranged between the low-temperature zone and the high-temperature zone.
4. The novel evaporation boat as claimed in claim 2, wherein, The high-temperature zone and the low-temperature zone are respectively connected with different heating bodies, and the set temperature of the heating body corresponding to the high-temperature zone is higher than that of the heating body corresponding to the low-temperature zone.
5. The novel evaporation boat as claimed in claim 2, wherein, The high-temperature zone is connected with a heating body, and the low-temperature zone is not connected with a heating body.
6. The novel evaporation boat as claimed in claim 4 or 5, characterized in that The heating body is a graphite electrode.
7. The novel evaporation boat as claimed in any one of claims 1, 2, 4 or 5, characterized in that The inlet hole (21) is formed on the side wall of the protective cover (20), or the inlet hole (21) is formed on the top plate of the protective cover (20).
8. The novel evaporation boat as claimed in claim 7, wherein When the inlet hole (21) is formed on the side wall of the protective cover (20), the number of the inlet hole (21) is two, and the two inlet holes (21) are symmetrically arranged with the axis of the protective cover (20) as the center; the connecting line of the two inlet holes (21) is parallel to the length direction of the evaporation boat body (10), or the connecting line of the two inlet holes (21) is perpendicular to the length direction of the evaporation boat body (10).
9. The novel evaporation boat as claimed in any one of claims 1, 2, 4, 5 or 8, characterized in that The liquid flow hole (22) is a plurality of liquid flow holes (22) which are circumferentially distributed on the side wall of the protective cover (20).
10. The novel evaporation boat as claimed in any one of claims 1, 2, 4, 5 or 8, characterized in that The protective cover (20) is detachably connected with the evaporation boat body (10).