Electrode connecting structure for evaporation equipment and evaporation equipment

Abstract

The embodiment of the utility model provides an electrode connecting structure for evaporation equipment and the evaporation equipment. The electrode connecting structure comprises two power supply switching parts and two conductive bands, the two power supply switching parts are electrically connected with the power supply anode and the power supply cathode respectively; two ends of each conductive band are respectively connected with one graphite electrode contact and one power supply switching part, the two conductive bands are not contacted with each other, and a buffer bend is arranged in the middle of each conductive band. After the technical scheme is adopted, when the height of the evaporation tank is adjusted, the connection between the graphite electrode and the power supply does not need to be additionally adjusted, so that the working efficiency is improved, and the labor intensity is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to electroplating technical field especially, a kind of electrode connecting structure and evaporation equipment for evaporation equipment. BACKGROUND

[0002] The existing evaporation equipment before being put into use, often need to be adjusted according to the scene and actual needs, evaporating tank is adjusted to the appropriate height position, make it with the most suitable distance between cooling main roll, can guarantee evaporation quality;In addition, in the working process, with the extension of time, the height position of evaporating tank will also gradually reduce, also hope to be able to adjust regularly.For this reason, in the prior art, the way of setting white cotton layer below graphite electrode (used for heating) of evaporating tank is adopted, by adjusting the thickness or layer number of white cotton layer, the height of graphite electrode can be adjusted, and then the height of evaporating tank is adjusted, to meet the work needs.Simultaneously, since high-temperature environment in the vacuum cavity (evaporating tank part is located in the vacuum cavity) of evaporation equipment, ordinary cable is difficult to withstand high temperature, therefore, two graphite electrode joints usually adopt rigid metal conductive plate to connect with positive and negative poles of power supply, in the process of adjusting the height of evaporating tank, since the metal plate cannot be deformed, therefore, electrode connecting structure also needs to be adjusted, for example, loosen the compression screw at connecting point, replace more suitable size of metal connecting plate, then re-tighten, so that the metal conductive plate can adapt to the new position of evaporating tank.

[0003] In the process of realizing the utility model, the inventor finds that there are at least the following problems in the prior art:

[0004] The adjustment process is time-consuming and laborious, which affects production efficiency.Therefore, how to improve the electrode connecting structure of graphite electrode in evaporation equipment, so that the electrode connecting structure can be adjusted during the process of adjusting the height of evaporating tank, thereby reducing labor intensity and improving work efficiency, is a problem to be solved. UTILITY MODEL CONTENTS

[0005] The utility model embodiment provides a kind of electrode connecting structure and evaporation equipment for evaporation equipment to solve the problem that graphite electrode needs to be adjusted simultaneously when evaporating tank is adjusted height in evaporation equipment.

[0006] To achieve the above purpose, on the one hand, the utility model embodiment provides a kind of electrode connecting structure for evaporation equipment, including two power adapter parts and two conductive strips made of metal plate;Two power adapter parts are electrically connected with positive and negative poles of power supply respectively;Two ends of each conductive strip are connected with one graphite electrode joint and one power adapter part respectively, and two conductive strips do not contact each other;Buffer bend is arranged in the middle of conductive strip.

[0007] Further, the conductive strip is a C-shaped conductive strip; the C-shaped conductive strip is sequentially connected by an upper connecting plate, a middle section and a lower connecting plate, the upper connecting plate and the lower connecting plate are symmetrically arranged in an up-down direction, and the middle section is in a circular arc structure and located on the same side of the upper connecting plate and the lower connecting plate.

[0008] Further, the conductive strip is an S-shaped conductive strip; the S-shaped conductive strip comprises a first connecting plate, a middle connecting plate and a second connecting plate, the first connecting plate and the second connecting plate are parallel to each other, the first connecting plate is horizontally arranged above a front side of the second connecting plate, the upper end of the middle connecting plate is fixedly connected with the rear end of the first connecting plate, the lower end of the middle connecting plate is fixedly connected with the front end of the second connecting plate, a round corner is arranged at the connection between the middle connecting plate and the first connecting plate, and a round corner is also arranged at the connection between the middle connecting plate and the second connecting plate.

[0009] Further, in the corresponding group of graphite electrode connectors and power adapter parts, the upper end of the conductive strip is connected with the graphite electrode connector, and the lower end of the conductive strip is connected with the power adapter part.

[0010] Further, the graphite electrode connector is connected with the conductive strip through a clamping seat; the clamping seat comprises an upper clamping seat and a lower clamping seat which are detachably connected together, the upper clamping seat, the graphite electrode connector and the lower clamping seat are arranged in a stack from top to bottom, and the lower clamping seat is connected with the conductive strip.

[0011] Further, the rack of the evaporation device is further provided with a clamping seat support plate for supporting the clamping seat and an adapter part support plate for supporting the power adapter part, an insulating plate is arranged between the clamping seat support plate and the corresponding lower clamping seat, and an insulating plate is also arranged between the adapter part support plate and the corresponding power adapter part.

[0012] Further, the power adapter part is arranged on the side plate of the rack; the two conductive strips are arranged at intervals along the length direction of the evaporation tank, and a conductive pipe is further arranged between the conductive strip away from the side plate and the corresponding power adapter part, and the axis of the conductive pipe is parallel to the length direction of the evaporation tank.

[0013] Further, the rack is further provided with a support arm, the support arm is vertically arranged below the conductive pipe, and the conductive pipe is connected with the support arm through an insulating clamp.

[0014] On the other hand, the utility model also provides a kind of evaporation device, which is provided with the electrode connecting structure for evaporation tank as described above between graphite electrode and power supply.

[0015] The above technical solution has the following beneficial effects:

[0016] The conductive strip with the buffer bend is provided in the technical scheme, when the evaporation tank height of the evaporation equipment is adjusted, the conductive strip can be deformed in the height direction synchronously with the evaporation tank height through the deformation of the buffer bend, so that the height compensation effect is achieved, and thus the electrode connecting structure does not need to be disassembled again like the prior art, so that the work efficiency is greatly improved, and the labor intensity is reduced.

[0017] In addition, the technical scheme has the following characteristics:

[0018] In the application, an evaporation tank height automatic adjustment mechanism is also designed, which comprises a lifting shaft, a lifting seat and a matched transmission mechanism, so that the evaporation tank height can be remotely adjusted by controlling the transmission mechanism, and the evaporation tank height is no longer adjusted on site by the working personnel entering the machine and manually adjusting the white cotton layer thickness like the prior art, so that the adjustment speed is fast. The height automatic adjustment mode is combined with the electrode connecting structure of the application, which is more helpful to improve the automation level and improve the production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0020] Figure 1 is a structural schematic view of an electrode connecting structure for an evaporation equipment according to an embodiment of the present application;

[0021] Figure 2 is another angle schematic view of an electrode connecting structure for an evaporation equipment according to an embodiment of the present application;

[0022] Figure 3 is a schematic view of an evaporation tank height adjustment mechanism and a transmission mechanism according to an embodiment of the present application;

[0023] Figure 4 is a structural schematic view of a C-shaped conductive strip according to an embodiment of the present application;

[0024] Figure 5 is a structural schematic view of an S-shaped conductive strip according to an embodiment of the present application;

[0025] Reference signs: 1, graphite electrode connector; 2, lower clamp seat; 3, clamping seat support plate; 4, insulating plate; 5, conductive pipe clamp; 6, conductive strip; 7, support arm; 8, insulating clamp; 9, conductive pipe; 10, power adapter; 11, adapter support plate; 12, upper clamp seat; 20, fixed rack; 21, side plate; 30, lifting bracket; 40, motor; 41, lifting shaft; 42, lifting seat; 43, shaft sleeve; 45, transmission shaft; 46, worm; 61, upper connecting plate; 62, middle section; 63, lower connecting plate; 64, first connecting plate; 65, middle connecting plate; 66, second connecting plate. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0027] As shown in Figure 1 , Figure 2 , in order to solve the foregoing problems, the present embodiment provides an electrode connection structure for evaporation equipment, which comprises two power adapters 10 and two conductive strips 6; the two power adapters 10 are respectively electrically connected with the positive and negative poles of a power supply; the two ends of each conductive strip 6 are respectively connected with a graphite electrode connector 1 and a power adapter 10, and the two conductive strips 6 do not contact each other; a buffer bend is arranged in the middle of the conductive strip 6. Due to the introduction of the buffer bend, when the height of the evaporation tank is adjusted, the buffer bend can deform correspondingly with the change of the height of the graphite electrode of the evaporation tank, thereby playing a height compensation role. At this time, the components of the electrode connection structure do not need to be disassembled and reassembled, and the conductive strip 6 will not be damaged due to the height of the graphite electrode, thereby greatly improving the work efficiency and reducing the labor intensity. Of course, the deformation of the buffer bend is limited, so the corresponding size design needs to be made according to the actual needs, and the maximum allowable deformation of the buffer bend needs to be ensured to be less than the maximum value of the height change of the evaporation tank. In addition, the conductive strip 6 can realize the conduction of large current in addition to having a certain activity allowance.

[0028] Further, the conductive strip 6 is made of a metal plate, as shown in Figure 1 , the shape thereof can be C-shaped as shown in Figure 4 , or can be Figure 5The C-shaped conductive strip is sequentially connected by the upper connecting plate 61, the middle section 62 and the lower connecting plate 63. The upper connecting plate 61 and the lower connecting plate 63 are symmetrically arranged in the up-down direction. The middle section 62 is in a circular arc shape and is located on the same side of the upper connecting plate 61 and the lower connecting plate 63. The S-shaped conductive strip includes the first connecting plate 64, the middle connecting plate 65 and the second connecting plate 66. The first connecting plate 64 and the second connecting plate 66 are parallel to each other. The first connecting plate 64 is horizontally arranged above the front side of the second connecting plate 66. The upper end of the middle connecting plate 65 is fixedly connected with the rear end of the first connecting plate 64. The lower end of the middle connecting plate 65 is fixedly connected with the front end of the second connecting plate 66. The connection between the middle connecting plate 65 and the first connecting plate 64 is provided with a round corner. The connection between the middle connecting plate 65 and the second connecting plate 66 is also provided with a round corner. The middle sections of the two structures are both arc-bent or provided with round corners (i.e. buffer bends), so that the deformation in the height direction can be ensured under the action of external force. The two shapes of structures are simple and very convenient to process. The raw material of the conductive strip 6 is preferably a copper plate.

[0029] In addition, since the height change of the evaporation groove is in the vertical direction, the C-shaped or S-shaped structure of the conductive strip 6 should also be vertically arranged, that is, the top end of the C-shaped structure is connected with one graphite electrode connector 1, and the bottom end of the C-shaped structure is connected with the corresponding power adapter 10. The top end of the S-shaped structure is connected with another graphite electrode connector 1, and the bottom end of the S-shaped structure is connected with the corresponding power adapter 10.

[0030] In actual application, appropriate forms of the conductive strip 6 can be selected according to the actual needs of the site arrangement, for example Figure 1 In the embodiment, the conductive strip 6 far away from the side plate 21 is a C-shaped conductive strip, and the conductive strip 6 close to the side plate 21 is an S-shaped conductive strip.

[0031] Further, the conductive strip 6 and the graphite electrode connector 1 are difficult to be directly fixed and connected together. Therefore, the graphite electrode connector 1 and the conductive strip 6 can be connected through a clamping seat. The clamping seat includes an upper clamping seat 12 and a lower clamping seat 2 which are detachably connected together. The upper clamping seat 12 and the lower clamping seat 2 are connected through a bolt or a screw. The upper clamping seat 12, the graphite electrode connector 1 and the lower clamping seat 2 are stacked from top to bottom. At the same time, the lower clamping seat 2 is preferably a U-shaped structure connected by a bottom plate and two side plates. At this time, the upper clamping seat 12 and the lower clamping seat 2 enclose a hollow square frame. The graphite electrode connector 1 is fixed in the hollow square frame, so that the graphite electrode connector 1 is firmly fixed. Further, the bottom plate of the lower clamping seat 2 can be made wider (i.e. the bottom of the lower clamping seat 2 protrudes outward more than the upper clamping seat 12), so that the protruding part is more convenient to connect with the conductive strip 6. The raw material of the upper clamping seat 12 and the lower clamping seat 2 is preferably a copper plate.

[0032] Further, in order to ensure the stability of the clamping seat and the power adapter 10, the rack is further provided with a clamping seat support plate 3 for supporting the clamping seat, and an adapter support plate 11 for supporting the power adapter 10. An insulating plate 4 is arranged between the clamping seat support plate 3 and the corresponding lower clamping seat 2, and an insulating plate 4 is also arranged between the adapter support plate 11 and the corresponding power adapter 10. The insulating plate 4 can avoid short circuit between the clamping seat and the rack, or short circuit between the power adapter 10 and the rack.

[0033] Further, the side plate 21 is the boundary between the vacuum cavity and the outside world, so the power supply is arranged on the side plate 21 to supply power to the vacuum cavity. The power adapter 10 is arranged on the side plate 21 of the rack. Since the evaporation groove bottom needs to be heated by the evaporation groove graphite electrode, and the evaporation groove itself extends from one end (i.e. the side plate 21) of the vacuum cavity to the other end, the evaporation groove is usually a long strip structure. Among the two graphite electrode joints 1 of the evaporation groove graphite electrode, one is close to the side plate 21, and the other is away from the side plate 21. Correspondingly, the two conductive strips 6 also need to be arranged at intervals along the length direction of the evaporation groove. The conductive strip 6 away from the side plate 21 is further provided with a conductive pipe 9 between the corresponding power adapter 10. The conductive pipe 9 extends from one end (i.e. the side plate 21) of the vacuum cavity to the other end of the vacuum cavity, so that both of the two graphite electrode joints 1 of the evaporation groove graphite electrode can be turned on at the same time. The two ends of the conductive pipe 9 are in conduction and fixed with the conductive pipe clamp 5, and then connected with the graphite electrode joint 1 or the power adapter 10 through the conductive pipe clamp 5. The conductive pipe 9 is preferably provided with two, which can realize greater conduction current.

[0034] Further, the rack is further provided with a support arm 7, which is vertically arranged below the conductive pipe 9, and the support arm 7 is provided with a plurality of insulating clamps 8 for clamping and fixing the conductive pipe 9. This structure can avoid the bending of the conductive pipe 9 due to large span.

[0035] Further, although the conventional way of changing the thickness or the number of layers of the white cotton layer can adjust the height of the evaporation tank, it is obvious that this way is too complicated, therefore, in the present application, the way of adjusting the height of the evaporation tank is also improved, for this purpose, in the present application, the conventional integrated structure of the rack is split into two, that is, the rack includes the lifting bracket 30 and the fixed rack 20 below, the evaporation tank, the graphite electrode and the like are arranged on the lifting bracket 30, and the lifting mechanism is arranged between the lifting bracket 30 and the fixed rack 20, so that the lifting bracket 30 can move up and down, thereby generating a distance between the lifting bracket 30 and the fixed rack 20, and then the height of the evaporation tank is changed accordingly, in this way, the operation is simplified, and it is not necessary to disassemble the white cotton layer every time. The lifting mechanism can be in various forms, for example, it can be a pneumatic cylinder, an electric push rod or the like linear actuator, however, considering the high temperature environment in which the evaporation equipment is located, in order to ensure that the lifting mechanism can normally and reliably operate, it is preferred to adopt a mechanical transmission form, the composition and principle of this lifting mechanism are as follows: Figure 3 As shown in the figure, the fixed rack 20 is hinged to the lifting shaft 41 through the shaft sleeve 43, the top of the lifting shaft 41 is provided with external threads, the bottom of the lifting bracket 30 is connected with the lifting seat 42, and the lifting seat 42 is provided with internal threads matched with the external threads; the top of the lifting shaft 41 is engaged with the lifting seat 42; the fixed rack 20 and the lifting bracket 30 are also respectively provided with a guide sleeve and a guide shaft, the guide shaft can move up and down along the guide sleeve, so as to ensure that the top thread of the lifting shaft 41 will not drive the entire lifting bracket 30 to rotate when rotating in the lifting seat 42. At this time, when the lifting shaft 41 is rotated, the lifting seat 42 is lifted through the screw pair transmission between the lifting shaft 41 and the lifting seat 42, and then the entire lifting bracket 30 is lifted synchronously, thereby achieving the purpose of adjusting the height of the evaporation tank.

[0036] Further, in order to further simplify the work and improve the efficiency, as shown in Figure 2 , Figure 3 , a transmission mechanism for driving the lifting mechanism can also be provided; the transmission mechanism includes a motor 40 (preferably a motor reducer assembly provided with a speed reducer) arranged outside the fixed rack 20, a transmission shaft 45 connected with the output shaft end of the motor 40, a worm 46 connected to the transmission shaft 45, and a worm wheel 44 fixedly connected to the bottom end of the lifting shaft 41 and matched with the worm 46. At this time, the external controller (not shown in the figure) gives the motor 40 an instruction, the motor 40 rotates, thereby driving the transmission shaft 45 to rotate, and then driving the lifting shaft 41 to rotate, so as to realize the lifting of the lifting seat 42.

[0037] In the process of automatically adjusting the height of the evaporation tank in this way, the aforementioned electrode connecting structure for the evaporation tank can also be applied, and the combination of the two structures can maximize the work efficiency.

[0038] In the above detailed description, various features are combined together in a single embodiment to simplify this disclosure. This approach to disclosure should not be construed as reflecting an intention that embodiments of the claimed subject matter require more features than are explicitly stated in each claim. Rather, as reflected in the appended claims, the invention is presented with fewer features than all of the features in a single disclosed embodiment. Therefore, the appended claims are hereby explicitly incorporated into the detailed description, with each claim representing a separate preferred embodiment of the invention.

[0039] The disclosed embodiments have been described above to enable any person skilled in the art to implement or use this invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be applied to other embodiments without departing from the spirit and scope of this disclosure. Therefore, this disclosure is not limited to the embodiments given herein, but is consistent with the widest scope of the principles and novel features disclosed in this application.

[0040] The above specific embodiments further illustrate the purpose, technical solution and beneficial effects of this utility model. It should be understood that the above are only specific embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. An electrode connection structure for an evaporation apparatus, the graphite electrode of the evaporation apparatus having two graphite electrode terminals (1), characterized in that, Two power adapters (10) and two conductive strips (6) made of metal plates; the two power adapters (10) are electrically connected with the positive and negative poles of a power supply respectively; the two ends of each conductive strip (6) are connected with a graphite electrode connector (1) and a power adapter (10) respectively, and the two conductive strips (6) do not contact each other; a buffer bend is arranged in the middle of the conductive strip (6).

2. The electrode connection structure for an evaporation apparatus according to claim 1, wherein The conductive strip (6) is a C-shaped conductive strip; the C-shaped conductive strip is sequentially connected by an upper connecting plate (61), an intermediate section (62) and a lower connecting plate (63); the upper connecting plate (61) and the lower connecting plate (63) are symmetrically arranged above and below; the intermediate section (62) is in a circular arc structure, and the intermediate section (62) is located on the same side of the upper connecting plate (61) and the lower connecting plate (63).

3. The electrode connection structure for an evaporation apparatus according to claim 1 or 2, wherein The conductive strip (6) is an S-shaped conductive strip; the S-shaped conductive strip includes a first connecting plate (64), an intermediate connecting plate (65) and a second connecting plate (66); the first connecting plate (64) and the second connecting plate (66) are parallel to each other, and the first connecting plate (64) is horizontally arranged above the front side of the second connecting plate (66); the upper end of the intermediate connecting plate (65) is fixedly connected with the rear end of the first connecting plate (64), and the lower end of the intermediate connecting plate (65) is fixedly connected with the front end of the second connecting plate (66); a round corner is arranged at the connection between the intermediate connecting plate (65) and the first connecting plate (64), and a round corner is also arranged at the connection between the intermediate connecting plate (65) and the second connecting plate (66).

4. The electrode connection structure for an evaporation apparatus according to claim 1 or 2, wherein In a corresponding set of graphite electrode connectors (1) and power adapters (10), the upper end of the conductive strip (6) is connected with the graphite electrode connector (1), and the lower end of the conductive strip (6) is connected with the power adapter (10).

5. The electrode connection structure for an evaporation apparatus according to claim 4, wherein The graphite electrode connector (1) is connected with the conductive strip (6) through a clamping seat; the clamping seat includes an upper clamping seat (12) and a lower clamping seat (2) which are detachably connected together; the upper clamping seat (12), the graphite electrode connector (1) and the lower clamping seat (2) are stacked from top to bottom, and the lower clamping seat (2) is connected with the conductive strip (6).

6. The electrode connection structure for an evaporation apparatus according to claim 5, wherein The rack of the evaporation equipment is also provided with a clamping seat support plate (3) for supporting the clamping seat and an adapter support plate (11) for supporting the power adapter (10); an insulating plate (4) is arranged between the corresponding lower clamping seat (2) and the clamping seat support plate (3), and the insulating plate (4) is also arranged between the corresponding power adapter (10) and the adapter support plate (11).

7. The electrode connection structure for an evaporation apparatus according to claim 5 or 6, wherein The raw materials of the conductive strip (6), the upper clamping seat (12) and the lower clamping seat (2) are all copper plates.

8. The electrode connection structure for an evaporation apparatus according to claim 6, wherein The power adapter (10) is arranged on the side plate (21) of the frame; two conductive strips (6) are arranged at intervals along the length direction of the evaporation groove, and a conductive tube (9) is further arranged between the conductive strip (6) away from the side plate (21) and the corresponding power adapter (10), and the axis of the conductive tube (9) is parallel to the length direction of the evaporation groove.

9. The electrode connection structure for an evaporation apparatus according to claim 8, wherein A support arm (7) is further arranged on the frame, and the support arm (7) is arranged vertically below the conductive tube (9), and the conductive tube (9) is connected with the support arm (7) through an insulating clamp (8).

10. An evaporation apparatus, characterized by, An electrode connecting structure for an evaporation device as claimed in any one of claims 1-9 is arranged between a graphite electrode and a power source.

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