Novel fluid conveying device

By optimizing the piezoelectric pump through a single-chamber design and a multi-hole check valve structure, the problems of large size and poor heat dissipation of dual-chamber piezoelectric pumps have been solved, achieving miniaturization and efficient fluid delivery.

CN223523934UActive Publication Date: 2025-11-07JIANGSU ANTSS POWER TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202423044744.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-10
Publication Date
2025-11-07
Estimated Expiration
2034-12-10

AI Technical Summary

Technical Problem

The dual-chamber structure of existing piezoelectric pumps results in a large pump body size, complex fluid path, large energy loss, and poor heat dissipation of piezoelectric components, which affects efficiency.

Method used

It adopts a single pump chamber design, with multi-hole check valves installed at the pump inlet and outlet. The flow hole is designed with a multi-hole structure, combined with a flexible support plate and heat dissipation structure to optimize the fluid path and heat dissipation.

Benefits of technology

Significantly reduces pump size, simplifies fluid path, reduces energy loss, improves fluid delivery capacity and efficiency, is suitable for miniaturized equipment, and ensures good heat dissipation of piezoelectric components.

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Abstract

The utility model relates to the technical field of piezoelectric pumps, in particular to a novel fluid conveying device, which is characterized in that a vibration component is matched with a pump seat groove to define a pump cavity, the pump cavity is communicated with the outside through a pump inlet and a pump outlet which are arranged on a pump seat, and a first one-way valve and a second one-way valve are respectively arranged at the pump inlet and the pump outlet. The circulation holes in the first one-way valve and the second one-way valve are of a porous structure, and the pumping capacity of the fluid conveying device can be improved by increasing the total length of the edges of the circulation holes compared with a single-hole design with the same area. The fluid conveying device adopts a single-pump-cavity design, so that the overall size of the pump body can be obviously reduced, the pump inlet and the pump outlet are formed in the pump base and are provided with the first one-way valve and the second one-way valve respectively, and effective pumping-in and pumping-out of fluid in the same pump cavity are achieved; the fluid path is simplified, meanwhile, the turning process of the fluid is reduced, and therefore energy loss in the fluid pumping process is reduced.
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Description

TECHNICAL FIELD

[0001] The utility model relates to piezoelectric pump technical field especially relates to a novel fluid conveying device. BACKGROUND

[0002] Piezoelectric pumps are widely used in medical devices, electronic device cooling, pneumatic tools and other fields; at present, piezoelectric pump design mostly adopts double-pump cavity structure, and two intercommunicating chambers are separated out for fluid suction and discharge through the internal piezoelectric component actuation.

[0003] The piezoelectric pump product of double-pump cavity structure is relatively large in size, which limits its application potential in miniaturization and integrated devices; especially in the portable or miniature fluid conveying system with extremely high space requirement, the pump inlet and pump outlet of the double-pump cavity piezoelectric pump are respectively arranged in different chambers, although the fluid transmission function is realized, but fluid path is also lengthened and complicated.

[0004] During use, the fluid needs to pass through multiple turns and compression in the process of flowing from one chamber to another, which not only increases energy loss, but also may cause fluid instability and noise generation. Meanwhile, the piezoelectric component is packaged inside the pump cavity, and a large amount of heat is generated during high-frequency vibration, which may cause temperature rise of the piezoelectric component if not dissipated in time, thereby affecting the electric energy utilization rate and the working efficiency of the piezoelectric pump.

[0005] The information disclosed in this BACKGROUND section is only for the purpose of enhancing the understanding of the general background of the disclosure and should not be taken as admitting that such information is prior art known to those of ordinary skill in the art. SUMMARY

[0006] The utility model discloses a novel fluid conveying device to solve the technical problem of the prior art.

[0007] In order to achieve the above purpose, the utility model adopts the technical scheme that:

[0008] A novel fluid conveying device, comprising a pump seat and a vibration assembly arranged thereon, a recess is arranged on one side of the pump seat, and the vibration assembly cooperates with the recess to form a pump cavity;

[0009] The pump cavity is communicated with the outside through a pump inlet and a pump outlet arranged on the pump seat, and a first one-way valve and a second one-way valve are arranged at the pump inlet and the pump outlet respectively;

[0010] The flow-through hole of the first one-way valve communicated with the outside is arranged as a multi-hole structure, and the flow-through hole of the second one-way valve communicated with the pump cavity is arranged as a multi-hole structure.

[0011] Further, the first one-way valve comprises a first input valve plate, a first valve sheet and a first output valve plate connected in sequence along the thickness direction of the first one-way valve, and the second one-way valve comprises a second input valve plate, a second valve sheet and a second output valve plate connected in sequence along the thickness direction of the second one-way valve.

[0012] A plurality of first flow-through holes and a plurality of second flow-through holes are respectively formed in the first input valve plate and the second input valve plate, and first valve petals and second valve petals for plugging the first flow-through holes and the second flow-through holes are respectively arranged on the first valve sheet and the second valve sheet.

[0013] A first output hole and a second output hole are respectively formed in the first output valve plate and the second output valve plate, and a first valve hole and a second valve hole corresponding to the first output hole and the second output hole are respectively formed in the first valve sheet and the second valve sheet.

[0014] Further, the vibration assembly comprises a flexible support plate and a piezoelectric vibrator arranged thereon, and the pump inlet and the pump outlet are arranged close to the vibration antinode of the piezoelectric vibrator.

[0015] Further, a through hole is formed in the bottom of the groove, and the through hole is arranged opposite to the antinode of the piezoelectric vibrator.

[0016] The first one-way valve and the second one-way valve are arranged in the same plane of the through hole, and the through hole cooperates with the first one-way valve and the second one-way valve to respectively form the pump inlet and the pump outlet.

[0017] Further, a first ring groove is arranged at one end of the through hole close to the pump cavity, and the first input valve plate and the second output valve plate abut against the bottom of the first ring groove.

[0018] Further, a second ring groove is arranged at the opening of the first ring groove, and a rubber seal is arranged in the second ring groove.

[0019] A filter plate is arranged at the other end of the through hole away from the pump cavity, and a plurality of through holes are formed in the filter plate in a honeycomb shape.

[0020] Further, the flexible support plate comprises an outer ring plate, an inner support plate and a flexible ring plate, the inner support plate is arranged in the inner circle of the outer ring plate and connected to the outer ring plate through the flexible ring plate, the outer ring plate is connected to the opening end surface of the groove, and the piezoelectric vibrator is arranged on the inner support plate.

[0021] Further, a cover is arranged on the side of the vibration assembly away from the pump base, and a heat dissipation opening is formed in the cover.

[0022] The heat dissipation opening comprises a first heat dissipation hole arranged corresponding to the vibration antinode of the vibration assembly, and a plurality of second heat dissipation holes arranged in the outer circle of the first heat dissipation hole in the circumferential direction.

[0023] The utility model discloses the beneficial effects are:

[0024] In the application, by setting the flow hole on the first check valve and the second check valve arranged in the pump inlet and the pump outlet respectively as a multi-hole structure, the total length of the edge of the flow hole is increased, compared with the single-hole design of the same area, the pumping capacity of the fluid conveying device can be improved.

[0025] Further, the fluid conveying device adopts a single-pump-cavity design, which can significantly reduce the overall size of the pump body, is more suitable for application in miniaturized and integrated equipment, and has obvious advantages in portable or miniature fluid conveying systems; by arranging the pump inlet and the pump outlet on the pump base and respectively providing the first check valve and the second check valve, effective pumping in and pumping out of fluid in the same pump cavity are realized; the fluid path is simplified, the turning process of fluid is reduced, and the energy loss in the fluid pumping process is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments described in the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.

[0027] Figure 1 It is a schematic view of the novel fluid conveying device in the utility model;

[0028] Figure 2 It is a structural schematic view of the pump base in the utility model;

[0029] Figure 3 It is an exploded structural schematic view of the novel fluid conveying device in the utility model;

[0030] Figure 4 It is a structural schematic view of the cover in the utility model;

[0031] Figure 5 It is a structural schematic view of the first check valve and the second check valve in the utility model;

[0032] Figure 6 It is a flow direction schematic view of fluid flowing through the first input valve plate in the utility model;

[0033] Figure 7 It is a schematic view of the novel fluid conveying device installing the cover in the utility model;

[0034] Figure 8 It is a sectional schematic view of the novel fluid conveying device in the utility model.

[0035] 1, pump base; 11, groove; 12, through hole; 13, first ring groove; 14, second ring groove; 15, filter plate; 151, through hole; 2, vibration assembly; 21, flexible support plate; 211, outer ring plate; 212, inner support plate; 213, flexible ring plate; 22, piezoelectric vibrator; 31, pump cavity; 32, pump inlet; 33, pump outlet; 4, first one-way valve; 41, first input valve plate; 411, first flow-through hole; 42, first valve piece; 421, first valve flap; 422, first valve hole; 43, first output valve plate; 431, first output hole; 5, second one-way valve; 51, second input valve plate; 511, second flow-through hole; 52, second valve piece; 521, second valve flap; 522, second valve hole; 53, second output valve plate; 531, second output hole; 6, housing; 61, heat dissipation opening; 611, first heat dissipation hole; 612, second heat dissipation hole. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0037] It should be noted that when an element is referred to as being "on" another element, it can be directly on the other element or intervening elements can also be present. Where an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements can also be present. The terms "vertical", "horizontal", "left", "right" and similar expressions as used herein are for illustrative purposes only and are not intended to be limiting.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this description, the terms "therefore" and "because" are used in their plain, ordinary sense, meaning "as a result of" or "because of".

[0039] At present, most piezoelectric pumps adopt a double-pump-cavity structure design, which separates two interconnected cavities by an internal actuator, and is respectively used for fluid suction and discharge. However, the double-pump-cavity structure leads to a relatively large pump size, and the pump inlet and the pump outlet are arranged in different cavities, which prolongs and complicates the fluid path and increases the energy loss.

[0040] As Figures 1 to 8As shown, the utility model discloses a novel fluid conveying device, including pump seat 1 and setting vibration subassembly 2 on it, recess 11 is provided with on one side of pump seat 1, and vibration subassembly 2 cooperates recess 11 and forms pump cavity 31 by enclosing, and pump cavity 31 is communicated with the outside through pump inlet 32 and pump outlet 33 of setting on pump seat 1, and first check valve 4 and second check valve 5 are arranged respectively at pump inlet 32 and pump outlet 33, the flow -through hole of first check valve 4 communicated outside is provided with the porous structure, and the flow -through hole of second check valve 5 communicated pump cavity 31 is provided with the porous structure.

[0041] In the application, by setting the flow-through hole on the first check valve and the second check valve arranged in the pump inlet and the pump outlet as a multi-hole structure, the total length of the edge of the flow-through hole is increased, compared with the single-hole design of the same area, the pumping capacity of the fluid conveying device can be improved.

[0042] Further, the fluid conveying device adopts a single-pump cavity design, which can significantly reduce the overall size of the pump body, and is more suitable for the application of small and integrated equipment, especially in portable or miniature fluid conveying systems. Specifically, by arranging the pump inlet and the pump outlet on the pump seat and respectively providing the first check valve and the second check valve, the effective pumping of the fluid in the same pump cavity is realized. The fluid path is simplified, the turning process of the fluid is reduced, and the energy loss in the fluid pumping process is reduced.

[0043] In the embodiment, as shown in Figure 3 and Figure 5 The first check valve 4 includes a first input valve plate 41, a first valve plate 42 and a first output valve plate 43 connected in sequence along the thickness direction thereof, and the second check valve 5 includes a second input valve plate 51, a second valve plate 52 and a second output valve plate 53 connected in sequence along the thickness direction thereof.

[0044] Among them, a plurality of first flow-through holes 411 and a plurality of second flow-through holes 511 are respectively formed on the first input valve plate 41 and the second input valve plate 51, and a first valve flap 421 and a second valve flap 521 are respectively arranged on the first valve plate 42 and the second valve plate 52 to block the first flow-through hole 411 and the second flow-through hole 511. A first output hole 431 and a second output hole 531 are respectively formed on the first output valve plate 43 and the second output valve plate 53, and a first valve hole 422 and a second valve hole 522 are respectively formed on the first valve plate 42 and the second valve plate 52 corresponding to the first output hole 431 and the second output hole 531. In the design process of the valve hole on the check valve, the size of the valve hole can be adjusted according to the actual situation and demand.

[0045] In the specific implementation process, when the first one-way valve achieves one-way cut-off, the fluid passes through the first output hole 431 on the first output valve plate 43, and the first valve flap 421 on the first valve plate 42 blocks the first flow-through hole 411 on the first input valve plate 41; when the first one-way valve is conducted, the fluid passes through the first flow-through hole 411 on the first input valve plate 41, and the first valve flap 421 on the first valve plate 42 is separated from the first flow-through hole 411, and the fluid sequentially passes through the first valve hole 422 on the first valve plate 42 and the first output hole 431 on the first output valve plate 43 to achieve one-way conduction.

[0046] As a preferred embodiment of the above, it is particularly pointed out here that in the one-way valve structure in the present application, a plurality of flow-through hole structures replace the structure of one valve hole on the current input valve plate, and the area of the plurality of flow-through holes is the same as that of one valve hole on the current input valve plate, but the fluid pumping capacity can be further improved.

[0047] Specifically referring to Figure 6 As shown in the figure, taking the first one-way valve 4 as an example, the fluid has better outflow capacity when passing through a plurality of first flow-through holes 411 than when passing through one through hole. When the piezoelectric vibrator 22 deforms and drives the first valve flap 421 to open, the fluid flows to the first valve flap 421 through the first flow-through hole 411. At this time, the outflow state is as shown in Figure 6 As shown in the figure, the fluid will flow radially from the circumferential edge of each first flow-through hole 411, so the speed of the fluid passing through the first input valve plate 41 and the first valve plate 42 depends on the total length of the circumferences of the plurality of first flow-through holes 411.

[0048] Similarly, in the fluid pumping process, due to the rapid alternating deformation of the piezoelectric vibrator 22, which reaches several hundred or even tens of thousands of hertz per second, the fluid outflow from the pump outlet 33 is completed in an instant. This process relies on the rapid switching of the edge of the second valve flap 521, and the middle part of each second flow-through hole 511 is blocked by the second valve flap 521. Therefore, the speed of the fluid flowing out of the second flow-through hole 511 depends on the size of the edge of the second flow-through hole 511.

[0049] In the present embodiment, the pumping capacity of the fluid conveying device is improved by increasing the total length of the edge of the valve hole on the input valve plate. Compared with the design of one through hole with the same area, the design of a plurality of flow-through holes has a longer edge length, which can significantly improve the output capacity of the fluid pump.

[0050] It can be clearly obtained by the following formula that under the same area, one large circle and a plurality of small circles have a longer total length of circumferences.

[0051] Suppose the outflow radius of a single hole is R, the hole radius of a multi-hole outflow is r, the number of holes is n, and the area of a single hole is the same as that of a multi-hole, then the following formula is obtained:

[0052] R²π = nr²π;

[0053] Further calculate the edge length ratio X between the two:

[0054]

[0055] In summary, the ratio of the total length of the outlet edge of a multi-hole flow to the edge length of a single-hole flow is: While keeping the flow area constant, the edge length of the outlet is significantly increased, thus significantly improving the pumping capacity of the fluid.

[0056] like Figure 2 As shown, both the pump inlet 32 ​​and the pump outlet 33 are located at the bottom of the groove 11 of the pump seat 1; preferably, see [reference needed]. Figure 3 and Figure 4 As shown, the vibration assembly 2 includes a flexible support plate 21 and a piezoelectric vibrator 22 disposed thereon. The pump inlet 32 ​​and the pump outlet 33 are both located near the antinodes of the piezoelectric vibrator 22. A through hole 12 is provided at the bottom of the groove 11, and the through hole 12 is positioned opposite to the antinodes of the piezoelectric vibrator 22. The first one-way valve 4 and the second one-way valve 5 are both disposed in the same plane as the through hole 12, and together with the space of the through hole 12, they form the pump inlet 32 ​​and the pump outlet 33, respectively.

[0057] By positioning the pump inlet 32 ​​and pump outlet 33 at the antinodes of the vibrating assembly 2, the vibration energy of the vibrating assembly 2 can be maximized. The antinodes are where the vibration amplitude is greatest, therefore the fluid flow at the antinodes experiences the strongest driving force, thus improving the response speed. In specific implementation, the first one-way valve 4 and the second one-way valve 5 are correspondingly positioned at the antinodes. This not only improves the response speed but also ensures the unidirectional flow of gas during pumping in and out. Positioning them at the antinodes allows for the formation of a jet when pumping outwards, making gas transmission more concentrated and reducing energy loss, thereby enhancing the efficiency of gas transmission.

[0058] Furthermore, a first annular groove 13 is provided at the end of the through hole 12 near the pump chamber 31, and the first input valve plate 41 and the second output valve plate 53 both abut against the bottom of the first annular groove 13. A second annular groove 14 is provided at the opening of the first annular groove 13, and an adhesive seal is provided in the second annular groove 14; a filter plate 15 is provided at the end of the through hole 12 away from the pump chamber 31, and multiple through holes 151 are formed in a honeycomb pattern on the filter plate 15.

[0059] The laminated one-way valve structure has high strength and stability, and is convenient for processing and assembly. The edges of the components of each layer are fixed by laser welding or glue bonding, which ensures the close connection between the components and improves the sealing performance and durability of the one-way valve. The valve holes in the layers provide a clear path for the flow of fluid and ensure the one-way conduction of the one-way valve; specifically, the valve flap effectively blocks or opens the flow-through hole in the input valve plate to realize the one-way conduction function.

[0060] Further, the first ring groove 13 at one end of the through hole 12 provides stable support for the one-way valve, and facilitates the installation and positioning of the one-way valve, and the glue seal in the second ring groove 14 allows the one-way valve to be stably installed in the through hole 12; the filter plate 15 can filter out impurities in the fluid to ensure the cleanliness of the one-way valve and the pump cavity 31.

[0061] In this embodiment, considering that the brake of the traditional piezoelectric pump is packaged inside the pump cavity 31, it is not conducive to heat dissipation of the brake, which leads to temperature rise during long-time operation, affecting the utilization of electric energy and work efficiency. In the specific implementation process of the present application, the piezoelectric vibrator 22 in the vibration assembly 2 is arranged on the flexible support plate 21, which is conducive to heat dissipation, ensuring that the heat generated by the piezoelectric vibrator 22 during high-frequency vibration can be dissipated in time, maintaining the work efficiency of the fluid conveying device.

[0062] The flexible support plate 21 includes an outer ring plate 211, an inner support plate 212, and a flexible ring plate 213. The inner support plate 212 is arranged in the inner circle of the outer ring plate 211 and is connected to the outer ring plate 211 through the flexible ring plate 213. The outer ring plate 211 is connected to the slot end face of the groove 11, and the piezoelectric vibrator 22 is arranged on the inner support plate 212.

[0063] The outer ring plate 211 of the flexible support plate 21 is tightly connected to the slot end face of the groove 11, ensuring stable installation of the flexible support plate 21 on the pump base 1, and connecting the inner support plate 212 through the flexible ring plate 213, so that the flexible support plate 21 has sufficient rigidity to support the piezoelectric vibrator 22 and has a certain flexibility to adapt to the vibration of the piezoelectric vibrator 22.

[0064] In this embodiment, as shown in Figure 7 and Figure 8 A cover 6 is arranged on the side of the vibration assembly 2 away from the pump base 1, and a heat dissipation opening 61 is formed in the cover 6; the heat dissipation opening 61 includes a first heat dissipation hole 611 corresponding to the vibration antinode of the vibration assembly 2, and a plurality of second heat dissipation holes 612 arranged in the outer circle of the first heat dissipation hole 611 in the circumferential direction.

[0065] The cover 6 provides physical protection for the vibration assembly 2, and also provides an effective heat dissipation channel through the heat dissipation holes 61 thereon; it is particularly suitable for application scenarios where the protection requirement for the vibration assembly 2 is relatively high or the working environment is relatively harsh. In the air flow heat dissipation process, under the action of the vibration assembly 2, the hot air in the cover 6 is sprayed out from the first heat dissipation holes 611, and at the same time, the external air is sucked in from the second heat dissipation holes 612, so that the high-temperature air sprayed out is prevented from being sucked into the heat dissipation cavity again, thereby improving the heat dissipation efficiency.

[0066] Those skilled in the art should understand that the present application is not limited to the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the present application, and various changes and improvements can be made to the present application without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A novel fluid delivery device characterized by, The pump seat (1) and the vibration assembly (2) arranged thereon are provided with a recess (11) on one side of the pump seat (1), and the vibration assembly (2) cooperates with the recess (11) to form a pump cavity (31); The pump cavity (31) is communicated with the outside through the pump inlet (32) and the pump outlet (33) arranged on the pump seat (1), and a first one-way valve (4) and a second one-way valve (5) are arranged at the pump inlet (32) and the pump outlet (33) respectively; The flow-through hole of the first one-way valve (4) and the flow-through hole of the second one-way valve (5) are arranged in a multi-hole structure.

2. The novel fluid delivery device of claim 1, wherein, The first one-way valve (4) comprises a first input valve plate (41), a first valve plate (42) and a first output valve plate (43) connected in sequence in the thickness direction, and the second one-way valve (5) comprises a second input valve plate (51), a second valve plate (52) and a second output valve plate (53) connected in sequence in the thickness direction. A plurality of first flow-through holes (411) and a plurality of second flow-through holes (511) are respectively formed in the first input valve plate (41) and the second input valve plate (51), and a first valve flap (421) and a second valve flap (521) are respectively arranged on the first valve plate (42) and the second valve plate (52) to block the first flow-through hole (411) and the second flow-through hole (511). A first output hole (431) and a second output hole (531) are respectively formed in the first output valve plate (43) and the second output valve plate (53), and a first valve hole (422) and a second valve hole (522) are respectively formed in the first valve plate (42) and the second valve plate (52) corresponding to the first output hole (431) and the second output hole (531).

3. The novel fluid delivery device of claim 2, wherein, The vibration assembly (2) comprises a flexible support plate (21) and a piezoelectric vibrator (22) arranged thereon, and the pump inlet (32) and the pump outlet (33) are arranged close to the vibration antinode of the piezoelectric vibrator (22).

4. The novel fluid delivery device of claim 3, wherein, A through hole (12) is formed in the bottom of the recess (11), and the through hole (12) is arranged opposite to the antinode of the piezoelectric vibrator (22); The first one-way valve (4) and the second one-way valve (5) are arranged in the same plane of the through hole (12) and form the pump inlet (32) and the pump outlet (33) in space respectively.

5. The novel fluid delivery device of claim 4, wherein, A first ring groove (13) is arranged at one end of the through hole (12) close to the pump cavity (31), and the first input valve plate (41) and the second output valve plate (53) abut the groove bottom of the first ring groove (13).

6. The novel fluid delivery device of claim 5, wherein, A second ring groove (14) is arranged at the opening of the first ring groove (13), and a rubber seal is arranged in the second ring groove (14); A filter plate (15) is arranged at one end of the through hole (12) away from the pump cavity (31), and a plurality of through holes (151) are formed in a honeycomb shape on the filter plate (15).

7. The novel fluid delivery device of claim 3, wherein, The flexible support plate (21) comprises an outer ring plate (211), an inner support plate (212) and a flexible ring plate (213), the inner support plate (212) is arranged in the inner ring of the outer ring plate (211) and is connected with the outer ring plate (211) through the flexible ring plate (213), the outer ring plate (211) is connected with the notch end surface of the groove (11), and the piezoelectric vibrator (22) is arranged on the inner support plate (212).

8. The novel fluid delivery device of claim 1, wherein, A cover (6) is arranged on the side of the vibration assembly (2) away from the pump base (1), and a heat dissipation opening (61) is formed in the cover (6); The heat dissipation opening (61) comprises a first heat dissipation hole (611) arranged at the vibration antinode of the vibration assembly (2), and a plurality of second heat dissipation holes (612) arranged in the outer ring of the first heat dissipation hole (611) in the circumferential direction.

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