Molecular pump turbine structure

Abstract

The utility model provides a molecular pump turbine structure, which relates to the technical field of molecular pumps and comprises a pump body, a motor is mounted on the inner bottom wall of the pump body, a rotary column is fixed at the output end of the motor, a sleeve support is placed in the pump body, and a plurality of connecting sleeves are mounted in the sleeve support. When a static blade is damaged due to rotating friction and collision of a moving blade in a pump body, a user only needs to unscrew a second bolt to disassemble the top cover, at the moment, the sleeve support is not limited by the top cover any more, the user can directly move upwards to take out the whole sleeve support, at the moment, the user unscrews a first bolt, a first baffle is not fixed to the sleeve support any more, and therefore the whole sleeve support can be taken out conveniently. When the connecting sleeves and the fixed blades in the connecting sleeves are damaged, a user can take out the connecting sleeves and the fixed blades in the connecting sleeves through the openings, when the connecting sleeves and the fixed blades in the connecting sleeves are taken out, the movable blades can also be directly taken out, and the user can directly and independently replace the connecting sleeves and the fixed blades or the movable blades in the connecting sleeves according to the damage condition.

Description

TECHNICAL FIELD

[0001] The utility model relates to molecular pump technical field especially relates to a molecular pump turbine structure. BACKGROUND

[0002] Before the emergence of molecular pump turbine structure, early vacuum pumps such as mechanical pump, diffusion pump etc. have certain limitations in high vacuum field. Mechanical pump is difficult to reach higher vacuum degree, and diffusion pump can obtain high vacuum, but has oil pollution problem, and cannot meet the demand for some application scenarios with high requirement for vacuum environment cleanliness, such as semiconductor manufacturing, high-energy physics experiment etc.

[0003] A kind of molecular pump turbine structure in prior art, due to the setting of multiple groups of moving blades and static blades, it will often appear damage phenomenon when running, and the moving blades and static blades inside the traditional molecular pump turbine structure are integrated with pump body, when single component inside it is damaged, only overall replacement or return to manufacturer for repair processing can be carried out, and practicality is poor. SUMMARY

[0004] The utility model discloses a molecular pump turbine structure, which solves the problem of frequent damage of the moving blades and static blades in the prior art when running, and the moving blades and static blades inside the traditional molecular pump turbine structure are integrated with the pump body.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a kind of molecular pump turbine structure, including pump body, the inner bottom wall of the pump body is installed with motor, the output end of the motor is fixed with rotating column, the sleeve support is placed in the pump body, the sleeve support is installed with multiple connecting sleeves, the connecting sleeve is fixed with static blade, every two groups of static blades are equipped with moving blade, the inner wall of static blade and moving blade is fixed with sleeve ring, the inner wall of the sleeve ring in moving blade is fixed with limit block, the outer wall of rotating column is equipped with the limit slot matched with limit block, the top of the pump body is installed with top cover, the inner side of the top cover is equipped with second baffle, the top of second baffle and rotating column is abutted.

[0006] Preferably, the sleeve support is provided with a plurality of clamping grooves matched with the connecting sleeves, and the outer wall of the sleeve support is provided with openings matched with the clamping grooves, and the openings are installed with first baffles.

[0007] Preferably, the outer wall of the first baffle is fixed with a mounting plate, the mounting plate is fixed with the sleeve support through first bolts, and the inner wall of the first baffle is abutted with the connecting sleeve.

[0008] Preferably, the top cover is fixed to the pump body by a second bolt, the bottom end of the top cover abuts against the sleeve support, and the inner wall of the top cover is fixed with a plurality of connecting plates, and the end of each connecting plate away from the top cover is fixed to the second baffle.

[0009] Preferably, the bottom end of the pump body is fixed with a base, one end of the base is mounted with a controller, and the outer wall of the pump body is fixed with an air outlet pipe.

[0010] Preferably, the sleeve ring is sleeved on the outer side of the rotating column, and the blade directions of the moving blades and the stationary blades are opposite.

[0011] Compared with the prior art, the utility model has the advantages and positive effects that;

[0012] In the utility model, when the stationary blades are damaged due to the rotating friction and collision of the moving blades, the user only needs to unscrew the second bolt to disassemble the top cover, at this time, the sleeve support is no longer limited by the top cover, the user can directly move up to take out the sleeve support as a whole, at this time, the user unscrews the first bolt to make the first baffle no longer fixed to the sleeve support, and the user can take out each connecting sleeve and the stationary blades inside the connecting sleeve through the opening, when the connecting sleeve and the stationary blades inside the connecting sleeve are taken out, the moving blades can also be directly taken out, the user can directly replace the connecting sleeve and the stationary blades inside the connecting sleeve or the moving blades according to the damage condition, and the pump body of the device can be installed back through the original disassembling steps, when the internal components of the pump body are damaged, the user can directly replace and process the pump body, the pump body does not need to be replaced as a whole, cost is reduced, and the utility is stronger. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 A perspective view of a molecular pump turbine structure is provided for the utility model;

[0014] Figure 2 A sectional view of a molecular pump turbine structure is provided for the utility model;

[0015] Figure 3 An internal structure schematic view of a moving blade of a molecular pump turbine structure is provided for the utility model;

[0016] Figure 4 An internal structure schematic view of a sleeve support of a molecular pump turbine structure is provided for the utility model.

[0017] Legend: 1, pump body; 2, base; 3, controller; 4, air outlet pipe; 5, motor; 6, rotating column; 7, sleeve support; 8, stationary blade; 9, connecting sleeve; 10, clamping groove; 11, opening; 12, first baffle; 13, mounting plate; 14, first bolt; 15, moving blade; 16, sleeve ring; 17, limiting block; 18, limiting groove; 19, top cover; 20, second bolt; 21, second baffle; 22, connecting plate. Detailed Implementation

[0018] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0019] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0020] Example 1, such as Figures 1-4 As shown, this utility model provides a molecular pump turbine structure, including a pump body 1, a motor 5 installed on the inner bottom wall of the pump body 1, a rotating column 6 fixed at the output end of the motor 5, a sleeve support 7 placed inside the pump body 1, a plurality of connecting sleeves 9 installed inside the sleeve support 7, stationary blades 8 fixed inside the connecting sleeves 9, a moving blade 15 provided between every two sets of stationary blades 8, a collar 16 fixed on the inner wall of both the stationary blades 8 and the moving blades 15, a limit block 17 fixed on the inner wall of the collar 16 inside the moving blades 15, a limit groove 18 matching the limit block 17 opened on the outer wall of the rotating column 6, a top cover 19 installed at the top of the pump body 1, a second baffle 21 provided on the inner side of the top cover 19, and the second baffle 21 abutting against the top of the rotating column 6.

[0021] The effect achieved by the entire embodiment 1 is that the operation of the motor 5 can drive the rotating column 6 to rotate. Due to the limiting block 17 and the limiting groove 18, when the rotating column 6 rotates, it will drive the limiting block 17 to rotate, thereby driving the moving blade 15 to rotate as a whole. Then, the air is extracted through the cooperation of the stationary blade 8. The top cover 19 can abut against the sleeve bracket 7 to install and limit it. On the other hand, the second baffle 21 inside it will block the top of the rotating column 6 to prevent the uppermost moving blade 15 from moving out, thus making it more stable.

[0022] Example 2, as Figures 1-4As shown, the sleeve support 7 is provided with a plurality of clamping grooves 10 matched with the connecting sleeves 9, and the outer wall of the sleeve support 7 is provided with openings 11 matched with the clamping grooves 10, and the first baffle 12 is installed in the openings 11, the outer wall of the first baffle 12 is fixedly provided with the mounting plate 13, the mounting plate 13 is fixedly connected with the sleeve support 7 through the first bolt 14, the inner wall of the first baffle 12 abuts against the connecting sleeve 9, the top cover 19 is fixedly connected with the pump body 1 through the second bolt 20, the bottom end of the top cover 19 abuts against the sleeve support 7, and the inner wall of the top cover 19 is fixedly provided with a plurality of connecting plates 22, one end of each connecting plate 22 away from the top cover 19 is fixedly connected with the second baffle 21, the bottom end of the pump body 1 is fixedly provided with the base 2, one end of the base 2 is installed with the controller 3, the outer wall of the pump body 1 is fixedly provided with the gas outlet pipe 4, the sleeve ring 16 is sleeved on the outer side of the rotating column 6, and the blade direction of the moving blade 15 is opposite to that of the stationary blade 8.

[0023] The effect of the whole embodiment 2 is that when the stationary blade 8 is damaged due to the rotating friction and collision of the moving blade 15 in the pump body 1, the user only needs to unscrew the second bolt 20 to disassemble the top cover 19, at this time, the sleeve support 7 is no longer limited by the top cover 19, the user can directly move up to take out the whole sleeve support 7, at this time, the user unscrews the first bolt 14 to make the first baffle 12 no longer fixed with the sleeve support 7, the user can take out each connecting sleeve 9 and the stationary blade 8 in the connecting sleeve 9 through the opening 11, when the connecting sleeve 9 and the stationary blade 8 in the connecting sleeve 9 are taken out, the moving blade 15 can also be directly taken out, the user can directly replace the connecting sleeve 9 and the stationary blade 8 in the connecting sleeve 9 or the moving blade 15 according to the damage condition, and then the original disassembly step is used for installation, when the internal components of the pump body 1 of the device are damaged, the user can directly replace the components, the whole device does not need to be replaced, the cost is reduced, and the practicability is higher.

[0024] Working principle: when the device is used, the motor 5 is controlled to run by the controller 3, which can drive the rotating column 6 to rotate. When the rotating column 6 rotates, the limiting block 17 will rotate, thereby driving the whole rotating blade 15 to rotate. The suction process is carried out through the cooperation of the static blade 8. When the static blade 8 is damaged due to the rotating friction and collision of the rotating blade 15, the user only needs to unscrew the second bolt 20 to disassemble the top cover 19. At this time, the sleeve support 7 is no longer limited by the top cover 19, and the user can directly move up to take out the sleeve support 7 as a whole. At this time, the user unscrews the first bolt 14, so that the first baffle 12 is no longer fixed with the sleeve support 7. The user can take out each connecting sleeve 9 and the static blade 8 inside it through the opening 11. When the connecting sleeve 9 and the static blade 8 inside it are taken out, the rotating blade 15 can also be directly taken out. The user can directly replace the connecting sleeve 9 and the static blade 8 inside it or the rotating blade 15 according to the damage condition, and then install them back according to the original disassembly steps. When the internal components of the pump body 1 of the device are damaged, the user can directly replace them, without the need to replace the whole device, thereby reducing the cost and being more practical.

[0025] The above is only a preferred embodiment of the present application, and does not limit the present application in other forms. Any person skilled in the art can modify or change the above disclosed technical content to equivalent embodiments applied to other fields, but any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present application still belong to the protection scope of the technical scheme of the present application.

Claims

1. A turbomolecular pump structure comprising a pump body (1), characterized in that: The inner bottom wall of the pump body (1) is provided with a motor (5), the output end of the motor (5) is fixedly provided with a rotating column (6), the pump body (1) is provided with a sleeve support (7), the sleeve support (7) is provided with a plurality of connecting sleeves (9), the connecting sleeves (9) are fixedly provided with static vanes (8), the static vanes (8) are provided with dynamic vanes (15), the inner walls of the static vanes (8) and the dynamic vanes (15) are fixedly provided with sleeve rings (16), the inner wall of the sleeve ring (16) in the dynamic vane (15) is fixedly provided with a limiting block (17), the outer wall of the rotating column (6) is provided with a limiting groove (18) matched with the limiting block (17), the top end of the pump body (1) is provided with a top cover (19), the inner side of the top cover (19) is provided with a second baffle (21), and the top end of the rotating column (6) abuts against the second baffle (21).

2. A turbomolecular pump according to claim 1, characterized in that: The sleeve support (7) is provided with a plurality of clamping grooves (10) matched with the connecting sleeves (9), the outer wall of the sleeve support (7) is provided with an opening (11) matched with the clamping grooves (10), and the opening (11) is provided with a first baffle (12).

3. A turbomolecular pump according to claim 2, characterized in that: The outer wall of the first baffle (12) is fixedly provided with a mounting plate (13), the mounting plate (13) is fixedly connected with the sleeve support (7) through a first bolt (14), and the inner wall of the first baffle (12) abuts against the connecting sleeve (9).

4. A turbomolecular pump according to claim 1, characterized in that: The top cover (19) is fixedly connected with the pump body (1) through a second bolt (20), the bottom end of the top cover (19) abuts against the sleeve support (7), the inner wall of the top cover (19) is fixedly provided with a plurality of connecting plates (22), and the end, away from the top cover (19), of each connecting plate (22) is fixedly connected with the second baffle (21).

5. A turbomolecular pump according to claim 1, characterized in that: The bottom end of the pump body (1) is fixedly provided with a base (2), one end of the base (2) is provided with a controller (3), and the outer wall of the pump body (1) is fixedly provided with an air outlet pipe (4).

6. A turbomolecular pump according to claim 1, characterized in that: The sleeve ring (16) is sleeved on the outer side of the rotating column (6), and the blade directions of the dynamic vanes (15) and the static vanes (8) are opposite.

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