Cooling device of waste gas treatment equipment

Abstract

The utility model relates to the technical field of semiconductor processing waste gas treatment, in particular to a cooling device of waste gas treatment equipment. The device comprises an upper cavity and a lower cavity, the upper cavity and the lower cavity are connected through a connecting part; a plurality of nozzle assemblies are respectively arranged on the side walls of the upper cavity and the lower cavity; the nozzle assembly is obliquely mounted downwards, so that a first included angle is formed between the nozzle assembly and the horizontal plane; the nozzle assembly is used for spraying a liquid cooling medium into the upper cavity and the lower cavity; at least one gas connector is arranged on the upper portion of the upper cavity and used for spraying nitrogen into the upper cavity. The device is simple in structure, low in processing cost and convenient to assemble. Through testing, water is adopted as a liquid cooling medium, and the cooling effect is better under the condition of the same water pressure and water flow and can be improved by more than 20% compared with the prior art.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor processing waste gas treatment technical field, especially a kind of cooling device of waste gas treatment equipment. BACKGROUND

[0002] In the process of treating waste gas generated in manufacturing semiconductor devices, especially in the process of treating hydrogen, a large amount of heat energy will be generated. If the heat is not absorbed and exchanged in time, the equipment temperature will be too high, which may cause equipment alarm or even shutdown. Therefore, a large amount of cooling medium is needed to absorb heat energy.

[0003] Therefore, the structure for absorbing heat energy in the cavity of the waste gas treatment equipment is particularly important. It is necessary to use less cooling medium to absorb more heat, so as to achieve the effect of cooling and ensure the stability of the whole system.

[0004] However, the cooling cavity structure of the waste gas treatment equipment is complex, the processing difficulty is high, the cost is high, and the cooling effect is general. INVENTION CONTENTS

[0005] The utility model aims to provide a kind of waste gas treatment equipment cooling device, and the device is simple in structure, and cooling effect is better.

[0006] The cooling device of the waste gas treatment equipment includes an upper cavity and a lower cavity;

[0007] The upper cavity and the lower cavity are connected by a connecting part;

[0008] A plurality of nozzle assemblies are arranged on the side walls of the upper cavity and the lower cavity, respectively;

[0009] The nozzle assemblies are installed obliquely downward, so that the nozzle assemblies form a first included angle with the horizontal plane. The nozzle assemblies are used to spray liquid cooling medium into the upper cavity and the lower cavity.

[0010] At least one gas connector is arranged on the upper part of the upper cavity, which is used to spray nitrogen into the upper cavity.

[0011] In the preferred embodiment, the nozzle assembly includes a sleeve, a nozzle and an internally threaded stud;

[0012] The internally threaded stud is arranged on the side wall of the upper cavity or the lower cavity at an angle of the first included angle with the horizontal plane. One end of the nozzle is screwed with the internally threaded stud, and the other end is connected with the sleeve. The sleeve is used to connect the pipeline for conveying liquid cooling medium.

[0013] In the preferred embodiment, the first included angle is 10°-20°.

[0014] In a preferred embodiment, an overflow ring is further included;

[0015] The longitudinal section of the overflow ring is U-shaped, arranged at the upper end of the inner chamber of the upper cavity; the U-shaped opening of the overflow ring faces the outlet of the gas joint, so that the nitrogen gas delivered by the gas joint can enter the overflow ring; the inner side surface of the overflow ring is provided with a plurality of gas outlet holes uniformly distributed in the axial direction.

[0016] In a preferred embodiment, a baffle is further included;

[0017] The baffle is basin-shaped, with the upper edge arranged on the upper end of the upper cavity and the upper surface of the overflow ring, the bottom part extending into the inner chamber of the upper cavity, and the side wall part located inside the overflow ring.

[0018] In a preferred embodiment, four nozzle assemblies are arranged on the side walls of the upper cavity and the lower cavity, respectively;

[0019] The nozzle assemblies of the upper cavity are uniformly distributed in the circumferential direction;

[0020] The nozzle assemblies of the lower cavity are uniformly distributed in the circumferential direction.

[0021] In a preferred embodiment, the nozzle assemblies of the upper cavity are consistent in the height direction;

[0022] The nozzle assemblies of the lower cavity are consistent in the height direction.

[0023] In a preferred embodiment, the inner diameter of the upper cavity is larger than the inner diameter of the lower cavity, and the connecting part is a tapered cylinder.

[0024] In a preferred embodiment, the upper end of the upper cavity is further provided with an upper flange, and the gas joint communicates with the inner chamber of the upper cavity through the upper flange.

[0025] In a preferred embodiment, the lower end of the lower cavity is further provided with a lower flange.

[0026] The utility model has the following beneficial effects:

[0027] The device has simple structure, low processing cost and convenient assembly. Through testing, the liquid cooling medium adopts water, and under the condition of the same water pressure and water flow, the cooling and temperature reduction effect is better, which can be improved by more than 20% compared with the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the premise of not paying creative labor.

[0029] Figure 1 The first angle schematic view of the waste gas treatment equipment cooling device provided by the embodiments of the present application is shown in the figure.

[0030] Figure 2 The explosion schematic view of the waste gas treatment equipment cooling device provided by the embodiments of the present application is shown in the figure.

[0031] Figure 3 The second angle schematic view of the waste gas treatment equipment cooling device provided by the embodiments of the present application is shown in the figure.

[0032] Figure 4 The third angle schematic view of the waste gas treatment equipment cooling device provided by the embodiments of the present application is shown in the figure.

[0033] Figure 5 The Figure 4 The enlarged schematic view of the region I.

[0034] Figure mark:

[0035] 1-upper cavity; 2-lower cavity; 3-upper flange;

[0036] 4-lower flange; 5-baffle; 6-overflow ring;

[0037] 7-gas joint; 8-nozzle assembly; 801-sleeve;

[0038] 802-nozzle; 803-internal thread stud. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the following will combine the drawings in the embodiments of the present application to clearly and completely describe the technical scheme in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and marked in the drawings can be arranged and designed in various different configurations.

[0040] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents the selected embodiments of the application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0041] It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0042] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, and are merely for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0043] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0044] In the description of the present application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "provided", "mounted", "connected", "connected" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0045] Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the case of no conflict, the following embodiments and features in the embodiments can be combined with each other.

[0046] As shown in Figures 1 to 4 The present embodiment provides a cooling device of a waste gas treatment equipment, which comprises an upper cavity 1 and a lower cavity 2;

[0047] In this embodiment, both the upper cavity 1 and the lower cavity 2 are cylindrical, and the diameter of the upper cavity 1 is larger than the diameter of the lower cavity 2. The upper cavity 1 and the lower cavity 2 are connected by a conical connecting part to form the main chamber.

[0048] Several nozzle assemblies are respectively provided on the side walls of the upper cavity 1 and the lower cavity 2; the nozzle assemblies are used to spray liquid cooling medium into the main cavity to cool the waste gas generated during the manufacturing of semiconductor devices.

[0049] In this embodiment, the liquid cooling medium is water.

[0050] The nozzle assembly faces the central axis of the main chamber and is installed at an angle downwards, so that the nozzle assembly forms a first angle with the horizontal plane; the value of the first angle is in the range of 10° to 20°, and in this embodiment, the value of the first angle is 15°.

[0051] In a preferred embodiment, four nozzle assemblies are respectively provided on the side walls of the upper cavity 1 and the lower cavity 2.

[0052] The nozzle assembly of the upper cavity 1 is evenly distributed in the circumference, and the nozzle assembly of the lower cavity 2 is also evenly distributed in the circumference.

[0053] Furthermore, the nozzle assembly of the upper cavity 1 maintains a consistent height direction, and the nozzle assembly of the lower cavity 2 maintains a consistent height direction.

[0054] This arrangement ensures that the liquid cooling medium ejected from the nozzle assembly can cover the entire main chamber.

[0055] The nozzle assemblies of the upper chamber 1 and the lower chamber 2 can be aligned or staggered in the downward projection direction. The staggered arrangement can better cover the space of the main chamber.

[0056] like Figure 5 As shown, the nozzle assembly includes a ferrule 801, a nozzle 802, and an internally threaded stud 803. The internally threaded stud 803 is welded to the side wall of the upper cavity 1 or the lower cavity 2 at a first angle with the horizontal plane. One end of the nozzle 802 is screwed to the internally threaded stud 803, and the other end is connected to the ferrule 801. The ferrule 801 is used to connect the pipeline for conveying liquid cooling medium.

[0057] At least one gas connector 7 is provided on the upper part of the upper cavity 1 for injecting nitrogen into the main cavity for purging and assisting in cooling the gas in the main cavity.

[0058] In a preferred embodiment, two gas connectors 7 are provided, which are positioned opposite each other on the top side of the upper cavity 1.

[0059] An overflow ring 6 is arranged at the upper end of the inner chamber of the upper cavity 1; the longitudinal section of the overflow ring 6 is U-shaped, and the inner side surface of the overflow ring 6 is provided with a plurality of gas outlet holes which are uniformly distributed in the axial direction. The U-shaped opening of the overflow ring 6 faces the outlet of the gas joint 7, so that the nitrogen gas delivered by the gas joint 7 can enter the overflow ring 6, and then be uniformly distributed into the main chamber from the gas outlet holes, to participate in the cooling of the exhaust gas, so as to improve the cooling effect.

[0060] A baffle 5 is further arranged at the upper end of the upper cavity 1. The baffle 5 is in the shape of a basin, and the upper edge is arranged on the upper end of the upper cavity 1 and the upper surface of the overflow ring 6, the bottom extends into the inner chamber of the upper cavity 1, and the side wall part is located on the inner side of the overflow ring 6, so as to guide the nitrogen gas delivered by the gas joint 7. At the same time, the baffle 5 can block the liquid cooling medium sprayed by the nozzle assembly from entering the upper reaction chamber.

[0061] In addition, the upper end of the upper cavity 1 is further provided with an upper flange 3, and the gas joint 7 communicates with the inner chamber of the upper cavity 1 through the upper flange 3. The upper flange 3 is used to connect with the upper reaction chamber, and an O-ring is arranged on the upper flange 3 to ensure the sealing between the upper flange 3 and the upper reaction chamber.

[0062] The lower end of the lower cavity 2 is further provided with a lower flange 4, which is used to be mounted in cooperation with the lower connecting member.

[0063] The device has simple structure, low processing cost and convenient assembly. Through tests, the liquid cooling medium is water, and under the same water pressure and water flow, the cooling effect is better, which can be improved by more than 20% compared with the prior art.

[0064] The above is only the preferred embodiment of the present application, and is not used to limit the present application. For those skilled in the art, the present application can be variously changed and modified. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A cooling device for waste gas treatment equipment, characterized in that, The upper cavity and the lower cavity are connected by a connecting part; The upper cavity and the lower cavity are connected by a connecting part; A plurality of nozzle assemblies are arranged on the side walls of the upper cavity and the lower cavity, respectively; The nozzle assemblies are inclined downwardly and arranged at a first angle with the horizontal plane, and are used for spraying liquid cooling medium into the upper cavity and the lower cavity; An upper flange is arranged on the upper end of the upper cavity, and the gas joint communicates with the inner chamber of the upper cavity through the upper flange.

2. The exhaust treatment device cooling apparatus of claim 1, wherein, The nozzle assembly comprises a sleeve, a nozzle and an internally threaded stud; The internally threaded stud is arranged on the side wall of the upper cavity or the lower cavity at a first angle with the horizontal plane, one end of the nozzle is screwed with the internally threaded stud, and the other end is connected with the sleeve, and the sleeve is used for connecting the pipeline for conveying liquid cooling medium.

3. The exhaust treatment device cooling apparatus of claim 1 or 2, wherein The first angle is 10°-20°.

4. The exhaust treatment device cooling apparatus of claim 1, wherein, The overflow ring is further arranged on the upper end of the inner chamber of the upper cavity, and the U-shaped opening of the overflow ring faces the outlet of the gas joint, so that the nitrogen gas conveyed by the gas joint can enter the overflow ring. The baffle is further arranged on the upper end of the upper cavity and the upper surface of the overflow ring, and the bottom of the baffle extends into the inner chamber of the upper cavity, and the side wall of the baffle is located inside the overflow ring.

5. The exhaust treatment device cooling apparatus of claim 4, wherein, The upper cavity and the lower cavity are connected by a connecting part; The nozzle assemblies of the upper cavity are uniformly distributed in the circumferential direction; 6. The exhaust treatment device cooling apparatus of claim 1, wherein, The nozzle assemblies of the lower cavity are uniformly distributed in the circumferential direction. The nozzle assemblies of the upper cavity are consistent in the height direction; The nozzle assemblies of the lower cavity are consistent in the height direction.

7. The exhaust treatment device cooling apparatus of claim 1, wherein, The inner diameter of the upper cavity is larger than the inner diameter of the lower cavity, and the connecting part is a tapered cylinder. An upper flange is arranged on the upper end of the upper cavity, and the gas joint communicates with the inner chamber of the upper cavity through the upper flange.

8. The exhaust treatment device cooling apparatus of claim 1, wherein, A lower flange is arranged on the lower end of the lower cavity.

9. The exhaust treatment device cooling apparatus of claim 1, wherein, ​ 10. The exhaust treatment device cooling apparatus of claim 1, wherein, ​

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