Integrated special gas cylinder detection cabinet
By integrating the pipeline purging switch valve disc and the gas detector switch valve disc into an integrated special gas cylinder detection cabinet, and installing a detector at the exhaust port, the problem of leakage during special gas detection is solved, achieving the effect of rapid location and prevention of hazards.
Patent Information
- Application Number
- CN202422702386.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-06
AI Technical Summary
Existing technologies cannot effectively prevent leaks from the pipeline purging switch valve disc and the gas detector switch valve disc during special gas detection processes, which could lead to potential hazardous events.
The pipeline purging switch valve disc and the gas detector switch valve disc are integrated into an integrated special gas cylinder detection cabinet, and a special gas detector is installed at the exhaust port for real-time monitoring of leaks.
It effectively prevents and quickly locates gas leaks, avoids hazardous incidents, and improves the safety of the detection process.
Smart Images
Figure CN223526321U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. BACKGROUND
[0002] Special gases have played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition, etc. A considerable amount of special gases must be used. However, the special gases are corrosive, flammable, or even toxic, and must be used with caution. These special gases are almost always supplied in steel cylinders.
[0003] During use, general visual inspection cannot determine the purity of the special gas in the gas cylinder. The gas cylinder may contain impurities, insufficient purity, or incomplete cleaning, which may mix with one or more other special gases. If not tested, direct use may cause problems due to the purity of the special gas, resulting in major problems in the entire semiconductor process (causing significant losses). Therefore, a purity detection system for special gas cylinders has been developed.
[0004] In a semiconductor manufacturing plant, a large amount of different special gases are required, and some of these special gases are corrosive or toxic, which are highly hazardous to the human body. Therefore, in the purity detection system for special gas cylinders, it is necessary to monitor whether the special gas leaks during the detection process to prevent harm to the human body and cause industrial safety incidents.
[0005] The purity detection system of special gas cylinder is composed of several parts according to known technology: gas pipeline, including two parts, one is special gas detection and purging pipeline, and the other is waste gas discharge pipeline; purging gas cylinder cabinet, loaded with purging gas cylinder, generally nitrogen; special gas cylinder cabinet, which is sealed and has an exhaust port connected to the outside (negative pressure generated by the external exhaust system to make the gas in the special gas cylinder cabinet fixedly exhaust to the exhaust port), the exhaust port has a special gas detector, which can detect the leakage of the special gas cylinder cabinet as soon as it occurs; pipeline purging switch valve disc, which first separates the gas in the pipeline to the waste gas treatment system, and then controls the purging gas cylinder to open, and the residual special gas in the special gas detection and purging pipeline is cleaned by nitrogen; gas detector switch valve disc, which is used to control the special gas cylinder to open, and then the special gas is transported to the gas detection analyzer through the special gas detection pipeline; gas detection analyzer, which is usually used to analyze the content of impurities / moisture / purity of special gas, and the gas detector switch valve disc can open and close the switch valve in the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc.; purging gas cylinder cabinet, special gas cylinder cabinet, pipeline purging pipeline control valve disc, gas detector switch valve disc and gas detection analyzer are connected in series by gas pipeline, and the opening and closing of the switch valve of the pipeline purging switch valve disc and the gas detector switch valve disc controls the process of pipeline purging (pre-purging, post-purging), special gas detection, waste gas discharge, post-purging after detection, etc. The above control mode is the content of known technology, which will not be described here.
[0006] The above known special gas cylinder purity detection system integrates the purging gas cylinder cabinet and the special gas cylinder cabinet, which are provided by the same gas supplier, and the pipeline purging switch valve disc and the gas detector switch valve disc are provided by another switch valve manufacturer. As mentioned above, the special gas cylinder cabinet that may leak is detected by the special gas detector on the exhaust port, and the leakage can be discharged to the external cleaning system. In other words, the special gas cylinder cabinet itself has a hazard control means. The pipeline purging switch valve disc and the gas detector switch valve disc have many gas switch valves, which may leak due to poor quality, aging, etc. At present, when the pipeline purging switch valve disc and the gas detector switch valve disc leak, a vacuum degree measuring instrument is used to measure whether there is a leakage. That is, a pump is used to make the gas pipeline approach a vacuum state; when the vacuum degree measuring instrument detects an abnormal result, it means that there is a switch valve leakage. If leakage is found, the switch valves in the pipeline purging switch valve disc and the gas detector switch valve disc can be checked one by one by manual method.
[0007] The above manner cannot exclude the situation that the switch valve in the pipeline blowing switch valve disc and the gas detector switch valve disc suddenly leaks during the special gas detection process. In other words, the known technology still has the possibility of producing a harmful event during the special gas detection process.
[0008] Therefore, how to prevent the special gas leakage that may occur during the special gas detection process of the pipeline blowing switch valve disc and the gas detector switch valve disc from producing harm in the purity detection system of the special gas cylinder becomes an important technical development focus in the technical field. Practical new type content
[0009] In order to solve the problems and defects of the known technology, the utility model discloses an integrated special gas cylinder detection cabinet, by integrating the pipeline blowing switch valve disc and the gas detector switch valve disc into the integrated special gas cylinder detection cabinet, using the special gas detector in the exhaust hole in the special gas cylinder detection cabinet as a tool for detecting whether the switch valve in the pipeline blowing switch valve disc and the gas detector switch valve disc leaks, the possible leakage problem in the detection that the previous technology cannot solve can be effectively solved, and the special technical effect of preventing the external leakage harm that may occur during the special gas detection process is achieved.
[0010] To achieve the above purpose, the utility model provides an integrated special gas cylinder detection cabinet, include: a first cabinet body is equipped with a blowout cylinder, and is connected a main gas pipeline, and is equipped with a first control panel, this first control panel is used to control the blowout cylinder a gas's discharge and stop discharging action, a second cabinet body is airtight and is equipped with a to be measured cylinder area, the to be measured cylinder area is equipped with at least one to be measured cylinder, the second cabinet body is equipped with connecting a waste gas treatment system a first exhaust hole, the first exhaust hole is equipped with a special gas detector, the second cabinet body is also equipped with a second control panel, the second control panel is used to control the to be measured cylinder a special gas's discharge and stop discharging action, a third cabinet body is airtight and is equipped with a pipeline blowout switch valve disc area, the pipeline blowout switch valve disc area is equipped with a plurality of manual switch valves, the third cabinet body is equipped with connecting the waste gas treatment system a second exhaust hole, the second exhaust hole is also equipped with the special gas detector, and a fourth cabinet body is airtight and is equipped with a gas detector switch valve disc area, the gas detector switch valve disc area is also equipped with a plurality of manual switch valves, the fourth cabinet body is equipped with connecting the waste gas treatment system a third exhaust hole, the third exhaust hole is also equipped with the special gas detector, wherein, part of the manual switch valve of the gas detector switch valve disc area is connected a gas detection analyzer cabinet, wherein, the blowout cylinder, the to be measured cylinder, a part of the plurality of manual switch valves of the pipeline blowout switch valve disc area and a part of the plurality of manual switch valves of the gas detector switch valve disc area are connected the main gas pipeline, and another part of the plurality of manual switch valves of the pipeline blowout switch valve disc area and still another part of the plurality of manual switch valves of the gas detector switch valve disc area are connected a waste gas discharge pipeline.
[0011] The detailed features and advantages of the utility model are described in the following embodiments in detail, and the contents are sufficient to enable any person skilled in the relevant art to understand the technical content of the utility model and implement it, and according to the content disclosed in the specification, the patent application range and the drawing, any person skilled in the relevant art can easily understand the related purposes and advantages of the utility model. BRIEF DESCRIPTION OF DRAWINGS
[0012] Figure 1 It is an embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0013] Figure 2 It is still another embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model.
[0014] Figure 3 It is still another embodiment system architecture diagram of the integrated special gas cylinder detection cabinet of the utility model. DETAILED DESCRIPTION
[0015] For the convenience of simple and easy to understand other features and advantages of the present application and the effects achieved can be more apparent, the present application with the drawings, detailed description of the features and advantages of the present application, the following examples are further detailed to illustrate the present application, but not in any view limit the scope of the present application.
[0016] Please refer to Figure 1 The integrated special gas cylinder detection cabinet 10 can be applied to a special steel cylinder gas purity detection system. The special steel cylinder gas purity detection system includes: the integrated special gas cylinder detection cabinet 10, a gas detection analyzer cabinet 50, a pump 60, a waste gas treatment device 70 (including a waste gas chimney 71), a vacuum degree measuring instrument 80, a main gas pipeline 20, a waste gas discharge pipeline 90, and the like. The embodiment of the present application integrates the to-be-tested steel cylinder area 12, the pipeline blowing clean switch valve disc area 13, and the gas detector switch valve disc area 14 into the same airtight cabinet body under the existing system architecture, and shares an exhaust hole 17. The special gas detector arranged in the exhaust hole 17 is used to detect whether there is a special gas leakage in the integrated airtight cabinet body. Figure 1 The embodiment of the present application discloses that the integrated special gas cylinder detection cabinet 10 includes two cabinet bodies, a first cabinet body with a blowing clean steel cylinder area 11, and a second cabinet body composed of the to-be-tested steel cylinder area 12, the pipeline blowing clean switch valve disc area 13, and the gas detector switch valve disc area 14. In other words, when the special gas detector in the exhaust hole 17 detects that there is a special gas leakage, it means that at least one of the to-be-tested steel cylinder area 12, the pipeline blowing clean switch valve disc area 13, and the gas detector switch valve disc area 14 has a leakage. Since the exhaust hole 17 is connected to the waste gas treatment system, even if there is a special gas leakage, it will be limited in the airtight cabinet body and will not cause any harm. The present application effectively prevents the special gas leakage accident. Figure 1
[0017] Figure 1 Similar to known technologies, the main gas pipeline 20 and the exhaust gas pipeline 90 connect to: the purging cylinder 30 (purging cylinder area 11), the cylinder to be tested 40 (cylinder to be tested area 12), the switching valves 13-1, 13-2, and 13-3 in the pipeline purging switching valve panel 13, the switching valves 14-1, 14-2, 14-3, and 14-4 in the gas detector switching valve panel 14, the switching valve 52 in the gas detection analyzer cabinet 50, and the switching valves 61, 62, 63, 64, 65, and 81. The pump 60 and the vacuum measuring instrument 80 are used to maintain the vacuum required in the processes of pre-pipeline purging (pre-purge and post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging. These are known technologies and will not be elaborated upon here. Gas detection and analysis unit 51 represents one of multiple gas detection and analysis units within the gas detection and analysis cabinet 50. In practice, the gas detection and analysis cabinet 50 contains multiple (4-5) gas detection and analysis units. This is also a known technology and will not be elaborated upon here. Switch valves 13-1, 13-2, 13-3, 14-2, and 14-4 are manual switch valves, normally open. Switch valves 14-1 and 14-3 are electromagnetic switch valves, which can be controlled to open or close by the second control panel 16.
[0018] The aforementioned processes, including pre-pipeline purging (pre-purge and post-purge), special gas detection, exhaust gas emission, and post-detection pipeline purging, are set and executed by the first control panel 15 and the second control panel 16. These are known technologies and will not be elaborated upon here. The first control panel controls the emission and cessation of emission of a gas from the purging cylinder; the second control panel controls the emission and cessation of emission of a special gas from the cylinder under test.
[0019] in, Figure 1 In the test cylinder area 12, only one test cylinder 40 is drawn, and the switch valves in the other areas are only drawn in a basic number. This is used to illustrate the overall nature of this utility model and is not intended to limit the number of related components of this utility model.
[0020] Figure 2 Another embodiment of this utility model is disclosed, compared to Figure 1 , Figure 2 In this embodiment, the gas cylinder testing area sub-cabinet 12A is treated as a separate airtight cabinet, and the pipeline purging switch valve panel area 13A and the gas detector switch valve panel area 14A are integrated into one airtight sub-cabinet. In other words, Figure 2The embodiment of the present application comprises three cabinet bodies: the first cabinet body with the purging cylinder area 11, the second cabinet body with the test cylinder area sub-cabinet 12A, and the third cabinet body with the pipeline purging switch valve plate area 13A and the gas detector switch valve plate area 14A integrated into one sub-cabinet. In addition, another exhaust hole 18 is opened on the third cabinet body, which is designed the same as the exhaust hole 17, and also has a special gas detector.
[0021] Compared with the embodiment of the present application, Figure 1 The embodiment of the present application, Figure 2 The embodiment of the present application can master whether the test cylinder area sub-cabinet 12A has a special gas leakage situation through the special gas detector in the exhaust hole 17, and whether the pipeline purging switch valve plate area 13A and the gas detector switch valve plate area 14A have a special gas leakage situation through the special gas detector in the exhaust hole 18. That is, the embodiment of the present application can let the on-site operator confirm which sub-cabinet (first, second or third cabinet body) the switch valve in which sub-cabinet leaks, so that the leaking switch valve can be quickly checked.
[0022] Figure 3 Another embodiment of the present application is disclosed, compared with the embodiment of the present application, Figure 2 The embodiment of the present application, Figure 3 The test cylinder area sub-cabinet 12A is taken as a separate airtight cabinet body, and the pipeline purging switch valve plate sub-cabinet 13B and the gas detector switch valve plate sub-cabinet 14B are respectively and separately set as an airtight sub-cabinet, in other words, Figure 3 The embodiment of the present application comprises four cabinet bodies: the first cabinet body with the purging cylinder area 11, the second cabinet body with the test cylinder area sub-cabinet 12A, the third cabinet body with the pipeline purging switch valve plate sub-cabinet 13B, and the fourth cabinet body with the gas detector switch valve plate sub-cabinet 14B. In addition, another exhaust hole 18 is opened on the third cabinet body, and an exhaust hole 19 is opened on the fourth cabinet body, which are designed the same as the exhaust hole 17, and also have a special gas detector.
[0023] Compared with the embodiment of the present application, Figure 2 The embodiment of the present application, Figure 3 The embodiment of the present application can master whether the test cylinder area sub-cabinet 12A has a special gas leakage situation through the exhaust hole 17, whether the pipeline purging switch valve plate sub-cabinet 13B has a special gas leakage situation through the special gas detector in the exhaust hole 18, and whether the gas detector switch valve plate sub-cabinet 14B has a special gas leakage situation through the special gas detector in the exhaust hole 19. That is, the embodiment of the present application can let the on-site operator confirm which sub-cabinet the switch valve in which sub-cabinet leaks, so that the leaking switch valve can be quickly checked.
[0024] Although the technical content of the utility model has been disclosed as above with preferred embodiments, it is not intended to limit the utility model, and any person skilled in the art can make some changes and decorations without departing from the spirit of the utility model, which should be covered in the scope of the utility model, therefore the protection scope of the utility model should be defined by the appended patent application scope.
Claims
1. An integrated special gas cylinder detection cabinet, characterized in that, Comprising: a first cabinet configured with a purging cylinder, and connected with a main gas pipeline, and configured with a first control panel for controlling the purging cylinder to discharge and stop discharging a gas; a second cabinet airtight and configured with a testing cylinder area, the testing cylinder area configured with at least one testing cylinder, the second cabinet configured with a first exhaust hole connected with a waste gas treatment system, the first exhaust hole configured with a special gas detector, the second cabinet further configured with a second control panel for controlling the testing cylinder to discharge and stop discharging a special gas; a third cabinet airtight and configured with a pipeline purging switch valve plate area, the pipeline purging switch valve plate area configured with a plurality of manual switch valves, the third cabinet configured with a second exhaust hole connected with the waste gas treatment system, the second exhaust hole also configured with the special gas detector; and a fourth cabinet airtight and configured with a gas detector switch valve plate area, the gas detector switch valve plate area also configured with a plurality of manual switch valves, the fourth cabinet configured with a third exhaust hole connected with the waste gas treatment system, the third exhaust hole also configured with the special gas detector, wherein part of the manual switch valves of the gas detector switch valve plate area are connected with a gas detection analyzer cabinet; wherein the purging cylinder, part of the plurality of manual switch valves of the testing cylinder, part of the plurality of manual switch valves of the pipeline purging switch valve plate area, and part of the plurality of manual switch valves of the gas detector switch valve plate area are connected with the main gas pipeline, and another part of the plurality of manual switch valves of the pipeline purging switch valve plate area and another part of the plurality of manual switch valves of the gas detector switch valve plate area are connected with a waste gas discharge pipeline.