Integrated special gas cylinder detection cabinet
By integrating the pipeline purging switch valve disc and the gas detector switch valve disc into an integrated special gas cylinder detection cabinet, and using a special gas detector to detect leaks, the leakage problem that cannot be prevented in the existing technology is solved, and a safe gas detection process is achieved.
Patent Information
- Application Number
- CN202422702485.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-11-06
AI Technical Summary
Existing technologies cannot effectively prevent leaks from the pipeline purging switch valve disc and the gas detector switch valve disc during special gas detection processes, which could lead to potential hazardous events.
The pipeline purging switch valve disc and the gas detector switch valve disc are integrated into an integrated special gas cylinder testing cabinet, and a special gas detector is used to detect leaks. The exhaust port is connected to the waste gas treatment system to limit gas leakage inside the cabinet.
It effectively prevents leaks during the detection of special gases, avoids hazardous incidents, and improves safety and reliability.
Smart Images
Figure CN223526322U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. BACKGROUND
[0002] Special gases have played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition, etc. A considerable amount of special gases must be used. However, the special gases are corrosive, flammable, or even toxic, and must be used with caution. These special gases are almost always supplied in steel cylinders.
[0003] During use, general visual inspection cannot determine the purity of the special gas in the gas cylinder. The gas cylinder may contain impurities, insufficient purity, or incomplete cleaning, which may mix with one or more other special gases. If not tested, direct use may cause problems due to the purity of the special gas, resulting in major problems in the entire semiconductor process (causing significant losses). Therefore, a purity detection system for special gas cylinders has been developed.
[0004] In a semiconductor manufacturing plant, a large amount of different special gases are required, and some of these special gases are corrosive or toxic, which are highly hazardous to the human body. Therefore, in the purity detection system for special gas cylinders, it is necessary to monitor whether the special gas leaks during the detection process to prevent harm to the human body and cause industrial safety incidents.
[0005] The purity detection system of the special gas cylinder has several parts of known technology: gas pipeline, including two parts, one is the special gas detection and blowing pipeline, and the other is the waste gas discharge pipeline; the blowing gas cylinder cabinet is loaded with blowing gas cylinder, which is generally nitrogen; the special gas cylinder cabinet is sealed and has an exhaust port connected to the outside (a negative pressure generated by the external exhaust system allows the special gas cylinder cabinet to fixedly exhaust gas to the exhaust port), and the exhaust port has a special gas detector that can detect the leakage of the special gas cylinder cabinet once it leaks; the pipeline blowing switch valve disc, which first separates the gas in the pipeline to the waste gas treatment system, then controls the blowing gas cylinder to open, and then uses nitrogen in the special gas detection and blowing pipeline to clean the residual special gas; the gas detector switch valve disc is used to control the special gas cylinder to open, and then the special gas is transported to the gas detection analyzer through the special gas detection pipeline; the gas detection analyzer, which usually has multiple gas detection analyzers, is used to analyze the impurity content / moisture / purity of the special gas, and the gas detector switch valve disc can open and close the related switch valves in the process of pipeline blowing (pre-blowing, post-blowing), special gas detection, waste gas discharge, and post-detection pipeline blowing; the blowing gas cylinder cabinet, the special gas cylinder cabinet, the pipeline blowing control valve disc, the gas detector switch valve disc, and the gas detection analyzer are connected in series by the gas pipeline, and the opening and closing of the switch valves of the pipeline blowing switch valve disc and the gas detector switch valve disc control the processes of pipeline blowing (pre-blowing, post-blowing), special gas detection, waste gas discharge, and post-detection pipeline blowing. The above control mode is the content of the known technology, which will not be described in detail here.
[0006] The known special gas cylinder purity detection system integrates the blowing gas cylinder cabinet and the special gas cylinder cabinet, which are provided by the same gas supplier, and the pipeline blowing switch valve disc and the gas detector switch valve disc are provided by another switch valve manufacturer. As mentioned earlier, the special gas cylinder cabinet that may leak has a special gas detector on the exhaust port that can detect the leakage, and the leakage can be discharged to the external waste gas treatment system. In other words, the special gas cylinder cabinet itself has a hazard control means. The pipeline blowing switch valve disc and the gas detector switch valve disc have many gas switch valves, which may leak due to poor quality, aging, and other factors. Currently, when the pipeline blowing switch valve disc and the gas detector switch valve disc leak, a vacuum degree measuring instrument is used to measure whether there is a leakage. That is, a pump is used to make the gas pipeline approach a vacuum state; when the vacuum degree measuring instrument detects an abnormal result, it means that there is a switch valve leakage. If leakage is found, the switch valves in the pipeline blowing switch valve disc and the gas detector switch valve disc can be checked one by one manually.
[0007] The above manner cannot rule out the situation that the switch valves in the pipeline purging switch valve disc and the gas detector switch valve disc suddenly leak during the special gas detection process. In other words, the known technology still has the possibility of causing a hazard event during the special gas detection process.
[0008] Therefore, how to prevent the special gas leakage caused by the pipeline purging switch valve disc and the gas detector switch valve disc during the special gas detection process from causing harm becomes an important technical development focus in the technical field. Practical new type content
[0009] In order to solve the problems and defects of the known technology, the integrated special gas cylinder detection cabinet integrates the pipeline purging switch valve disc and the gas detector switch valve disc into the integrated special gas cylinder detection cabinet, uses the special gas detector in the exhaust hole in the special gas cylinder detection cabinet as a tool for detecting whether the switch valves in the pipeline purging switch valve disc and the gas detector switch valve disc leak, effectively solves the possible leakage problem in the detection that the previous technology cannot solve, and achieves the special technical effect of preventing the external leakage hazard that may occur during the special gas detection process.
[0010] To achieve the above purpose, the integrated special gas cylinder detection cabinet comprises a first cabinet body, a purging cylinder, a main gas pipeline connected to the purging cylinder, and a first control panel configured to control the discharge and stop of the gas in the purging cylinder; a second cabinet body, a to-be-detected cylinder area, at least one to-be-detected cylinder in the to-be-detected cylinder area, a first exhaust hole connected to a waste gas treatment system in the second cabinet body, a special gas detector in the first exhaust hole, a second control panel in the second cabinet body, and the second control panel configured to control the discharge and stop of the special gas in the to-be-detected cylinder; and a third cabinet body, a pipeline purging switch valve disc area and a gas detector switch valve disc area, a plurality of electromagnetic switch valves in the pipeline purging switch valve disc area and the gas detector switch valve disc area, a second exhaust hole connected to the waste gas treatment system in the third cabinet body, and the special gas detector in the second exhaust hole. Part of the electromagnetic switch valves in the gas detector switch valve disc area are connected to a gas detection analyzer cabinet. Part of the electromagnetic switch valves in the pipeline purging switch valve disc area and the gas detector switch valve disc area are connected to the main gas pipeline, and another part of the electromagnetic switch valves in the pipeline purging switch valve disc area and the gas detector switch valve disc area are connected to a waste gas discharge pipeline.
[0011] The following detailed description of the features and advantages of this utility model in the embodiments is sufficient to enable anyone skilled in the art to understand the technical content of this utility model and implement it accordingly. Furthermore, based on the content disclosed in this specification, the scope of the patent application, and the drawings, anyone skilled in the art can easily understand the related objectives and advantages of this utility model. Attached Figure Description
[0012] Figure 1 This is a system architecture diagram of an embodiment of the integrated special gas cylinder testing cabinet of this utility model.
[0013] Figure 2 This is a system architecture diagram of another embodiment of the integrated special gas cylinder testing cabinet of this utility model.
[0014] Figure 3 This is a system architecture diagram of another embodiment of the integrated special gas cylinder testing cabinet of this utility model. Detailed Implementation
[0015] To facilitate a quick and easy understanding of the other features, advantages, and effects of this utility model, the features and advantages of this utility model will be described in detail with reference to the accompanying drawings. The following embodiments are for further detailed explanation of the viewpoints of this utility model, but are not intended to limit the scope of this utility model in any way.
[0016] Please refer to Figure 1 This utility model discloses an integrated special gas cylinder testing cabinet 10, which can be used in a gas purity testing system for special steel cylinders. The gas purity testing system for special steel cylinders includes: the integrated special gas cylinder testing cabinet 10, a gas detection and analysis instrument cabinet 50, a pump 60, waste gas treatment equipment 70 (including a waste gas chimney 71), a vacuum measuring instrument 80, a main gas pipeline 20, and a waste gas emission pipeline 90, etc. Figure 1 In one embodiment, under the existing system architecture, the gas cylinder area 12 to be tested, the pipeline purging switch valve panel area 13, and the gas detector switch valve panel area 14 are integrated into the same airtight cabinet and share a vent 17. A special gas detector installed in the vent 17 is used to detect whether there is any special gas leakage in this integrated airtight cabinet. Figure 1The embodiment of the application discloses a special gas cylinder detection cabinet 10 which comprises two cabinet bodies, a first cabinet body with a cylinder purging area 11, and a second cabinet body composed of a cylinder to be detected area 12, a pipeline purging switch valve plate area 13, and a gas detector switch valve plate area 14. In other words, when the special gas detector in the exhaust hole 17 detects that there is special gas leakage, it means that at least one of the cylinder to be detected area 12, the pipeline purging switch valve plate area 13, and the gas detector switch valve plate area 14 has a leakage. Since the exhaust hole 17 is connected to a waste gas treatment system, even if there is special gas leakage, it will be limited in the airtight cabinet body and will not cause any harm. The application effectively prevents the special gas leakage hazard accident.
[0017] Figure 1 In the application, the main gas pipeline 20 and the waste gas discharge pipeline 90 are connected with the cylinder to be detected 40 (the cylinder to be detected area 12), the switch valves 13-4, 13-5 and 13-6 in the pipeline purging switch valve plate area 13, the switch valves 14-5, 14-6, 14-7 and 14-8 in the gas detector switch valve plate area 14, the switch valve 52 in the gas detection analyzer cabinet 50, and the switch valves 61, 62, 63, 64, 65 and 81, which are the same as the known technology. The pump 60 and the vacuum degree measuring instrument 80 are used to perform the vacuum state work required in the processes of front pipeline purging (front purging and rear purging), special gas detection, waste gas discharge, detection rear pipeline purging and the like, which are part of the known technology and will not be described here. The gas detection analysis unit 51 represents one of a plurality of gas detection analysis units in the gas detection analyzer cabinet 50. In practice, there are a plurality of (4-5) gas detection analysis units in the gas detection analyzer cabinet 50. The same is part of the known technology and will not be described here.
[0018] In the application, the switch valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7 and 14-8 are all electromagnetic switch valves, and the third control panel 16-1 and the fourth control panel 16-2 are additionally arranged in the pipeline purging switch valve plate area 13 and the gas detector switch valve plate area 14 respectively to control the opening or closing of each electromagnetic switch valve.
[0019] The front pipeline blowing (front blowing, rear blowing), special gas detection, exhaust emission, and pipeline blowing after detection are controlled by the first control panel 15 and the second control panel 16, which are part of the known technology and are not described here. The first control panel is used to control the discharge and stop of the gas in the cylinder. The second control panel is used to control the discharge and stop of the special gas in the cylinder.
[0020] The first control panel is used to control the discharge and stop of the gas in the cylinder. The second control panel is used to control the discharge and stop of the special gas in the cylinder. Figure 1 Only one cylinder 40 is drawn in the detection cylinder area 12, and only a basic number of switch valves are drawn in the switch valve areas of the other areas, which are used to illustrate the overall nature of the utility model and do not limit the number of related components.
[0021] Figure 2 Another embodiment of the utility model is disclosed, which is different from the embodiment of Figure 1 , Figure 2 The third control panel 16-1 and the fourth control panel 16-2 of the embodiment of Figure 1 are integrated into a fifth control panel 16-3. Similarly, the utility model can also be extended to integrate the functions of the control switch valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 of the third control panel 16-1 and the fourth control panel 16-2 into the second control panel 16, which is controlled by the second control panel 16.
[0022] Figure 3 Another embodiment of the utility model is disclosed, which is different from the embodiment of Figure 2 , Figure 3 The third control panel 16-1 and the fourth control panel 16-2 of the embodiment of Figure 1 are integrated into a fifth control panel 16-3. Similarly, the utility model can also be extended to integrate the functions of the control switch valves 13-4, 13-5, 13-6, 14-5, 14-6, 14-7, and 14-8 of the third control panel 16-1 and the fourth control panel 16-2 into the second control panel 16, which is controlled by the second control panel 16. However, the embodiment of Figure 2 is different from the embodiment of Figure 3 The detection cylinder area sub-cabinet 12A is a separate airtight cabinet, and the pipeline blowing switch valve plate area 13A and the gas detector switch valve plate area 14A are integrated into a sub-cabinet, in other words, Figure 3The embodiment of the present application comprises three cabinets: the first cabinet with the blow-down cylinder area 11, the second cabinet with the sub-cabinet 12A for the cylinders to be tested, and the third cabinet with the pipeline blow-down switch valve plate area 13A and the gas detector switch valve plate area 14A integrated into one sub-cabinet. In addition, another exhaust hole 18 is opened on the third cabinet, which is designed the same as the exhaust hole 17, and also has a special gas detector.
[0023] As for another embodiment of the present application, Figure 3 The embodiment of the present application can be extended and integrated Figure 1 The embodiment of the present application, that is, the third control panel 16-1 and the fourth control panel 16-2 are respectively arranged in the pipeline blow-down switch valve plate area 13A and the gas detector switch valve plate area 14A.
[0024] Although the technical content of the present application has been disclosed above with the preferred embodiments, it is not intended to limit the present application, and any person skilled in the art can make some changes and decorations without departing from the spirit of the present application, which should be covered in the scope of the present application. Therefore, the protection scope of the present application should be defined by the appended patent claims.
Claims
1. An integrated special gas cylinder detection cabinet, characterized in that, Comprising: a first cabinet configured with a purging cylinder, and connected with a main gas pipeline, and configured with a first control panel for controlling the purging cylinder to discharge and stop discharging a gas; a second cabinet configured with a testing cylinder area, the testing cylinder area configured with at least one testing cylinder, the second cabinet configured with a first exhaust hole connected with a waste gas treatment system, the first exhaust hole configured with a special gas detector, the second cabinet configured with a second control panel for controlling the testing cylinder to discharge and stop discharging a special gas; and a third cabinet configured with a pipeline purging switch valve plate area and a gas detector switch valve plate area, the pipeline purging switch valve plate area and the gas detector switch valve plate area respectively configured with a plurality of electromagnetic switch valves, the third cabinet configured with a second exhaust hole connected with the waste gas treatment system, the second exhaust hole also configured with the special gas detector, wherein part of the electromagnetic switch valves of the gas detector switch valve plate area connected with a gas detection analyzer cabinet; wherein the purging cylinder, the testing cylinder, part of the electromagnetic switch valves of the pipeline purging switch valve plate area and part of the electromagnetic switch valves of the gas detector switch valve plate area connected with the main gas pipeline, and another part of the electromagnetic switch valves of the pipeline purging switch valve plate area and another part of the electromagnetic switch valves of the gas detector switch valve plate area connected with a waste gas discharge pipeline.
2. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, Further comprising: a third control panel configured in the pipeline purging switch valve plate area for controlling the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve plate area; and a fourth control panel configured in the gas detector switch valve plate area for controlling the opening and closing of the electromagnetic switch valves in the gas detector switch valve plate area.
3. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, Further comprising: a fifth control panel configured in the pipeline purging switch valve plate area and the gas detector switch valve plate area for controlling the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve plate area and the gas detector switch valve plate area.
4. The integrated special gas cylinder detection cabinet according to claim 1, characterized in that, The second control panel controls the opening and closing of the electromagnetic switch valves in the pipeline purging switch valve plate area and the gas detector switch valve plate area.