Multilayer piezoelectric actuator with laminated design
By adding a hollow diaphragm in the multilayer piezoelectric actuator stack structure, the problem of uneven stress caused by uneven thickness is solved, achieving thickness consistency and improved reliability, simplifying the manufacturing process and reducing costs.
Patent Information
- Application Number
- CN202421278723.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-05
- Publication Date
- 2025-11-07
- Estimated Expiration
- 2034-06-05
AI Technical Summary
Existing multilayer piezoelectric actuators have uneven thickness in the overlapping area of the positive and negative electrodes and at the edges, which leads to uneven stress distribution, easily causing cracks and affecting the reliability of the device.
A hollow membrane is incorporated into the composite structure. The hollow region is formed by casting, drying and cutting. The thickness difference between the dielectric layer and the electrode layer is adjusted. The composite structure is prepared by lamination and isostatic pressing processes.
This achieves consistency in thickness between the center and the edges, reducing the risk of device failure, simplifying the manufacturing process, and lowering costs.
Smart Images
Figure CN223528442U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to piezoelectric actuator technical field, concretely relates to a multilayer piezoelectric actuator of laminated design. BACKGROUND
[0002] The multilayer piezoelectric actuator base is ceramic material. The ceramic dielectric layer and the electrode are staggered and laminated, and the positive and negative electrodes are connected in parallel through the end electrode. This multilayer piezoelectric actuator structure design can realize amplification displacement under low voltage. However, the overlapping area of the positive and negative electrodes in the middle and the edge of the structure has the phenomenon of uneven overall thickness due to the difference in the number of electrode layers. During co-firing, the middle and the edge shrink inconsistently; when bearing pre-load, the stress distribution of the edge and the center is uneven. It is prone to crack, causing device failure during use. SUMMARY
[0003] The utility model discloses a multilayer piezoelectric actuator of laminated design, which adds a diaphragm with a hollow design in the laminated structure, so that the total thickness of the middle and the edge remains consistent, and the thickness difference between the middle and the edge of the device is reduced when the dielectric layer is thin and the electrode is thick.
[0004] The technical scheme of the utility model is as follows:
[0005] A multilayer piezoelectric actuator of laminated design comprises a laminated structure composed of a positive electrode layer, a first intermediate hollow layer, an intermediate blank layer, a second intermediate hollow layer and a negative electrode layer from top to bottom, the bottom surface of the positive electrode layer is printed with a positive inner electrode, and the positive inner electrode is exposed from one side of the positive electrode layer, the side of the exposed electrode of the positive electrode layer is coated with a first end electrode, the top surface of the negative electrode layer is printed with a negative inner electrode, and the negative inner electrode is exposed from one side of the negative electrode layer, the side of the exposed electrode of the negative electrode layer is coated with a second end electrode, the positive inner electrode and the negative inner electrode are connected in parallel through the first end electrode and the second end electrode, and the overlapping area of the intermediate hollow area of the first intermediate hollow layer and the intermediate hollow area of the second intermediate hollow layer is adapted to the overlapping area of the positive inner electrode and the negative inner electrode.
[0006] Further, the intermediate blank layer is a blank ceramic diaphragm made by flow drying.
[0007] Further, the first intermediate hollow layer and the second intermediate hollow layer are blank ceramic diaphragms obtained by flow drying first, and then the intermediate hollow area is obtained by cutting.
[0008] Further, the intermediate hollow area is a right-angled quadrilateral.
[0009] Further, the positive electrode layer and the negative electrode layer are obtained by first casting and drying to obtain a blank ceramic diaphragm, and then printing the positive inner electrode and the negative inner electrode on the blank ceramic diaphragm by using a screen printing technology.
[0010] Further, the multilayer piezoelectric actuator is obtained by first laminating a plurality of layers through a laminating process, wherein the parameters of the laminating process are 55 DEG C of temperature, 25t-40t of pressure, and 30s of pressure maintaining; after the laminating, an isostatic pressing process is performed; after the isostatic pressing is completed, the block is cut into a set shape to obtain a green body of the device; the green body of the device is then slowly degassed, and then sintered in a muffle furnace; the sintered element is polished, and finally, the first end electrode and the second end electrode are coated on the two sides with exposed electrodes.
[0011] Compared with the prior art, the utility model has the beneficial effects that:
[0012] (1) by adding the diaphragm with the intermediate hollow design in the laminated structure, the total thickness of the intermediate and the edge can be kept consistent;
[0013] (2) the laminated design of the multilayer piezoelectric actuator is low in cost, simple in design and easy to operate;
[0014] (3) the multilayer piezoelectric actuator can adjust the number of the central blank layers according to the thickness of the electrode and the number of the dielectric layers, and has adjustability. BRIEF DESCRIPTION OF DRAWINGS
[0015] In order to more clearly illustrate the technical scheme in the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.
[0016] Fig. 1 It is a structure schematic view of the multilayer piezoelectric actuator of the laminated design of the utility model;
[0017] Fig. 2 It is a composition schematic view of the laminated structure of the utility model;
[0018] Fig. 3 It is a bottom surface schematic view of the positive electrode layer of the utility model;
[0019] Fig. 4 It is a top surface schematic view of the negative electrode layer of the utility model;
[0020] Fig. 5 It is a structure schematic view of the first intermediate hollow layer of the utility model;
[0021] Fig. 6 The structure diagram of the second intermediate hollow layer of the utility model is shown.
[0022] Fig. 7 The structure diagram of the intermediate blank layer of the utility model is shown. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical scheme and advantages of the utility model more clearly and clearly, the utility model is further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described here are only used to explain the utility model and are not used to limit the utility model.
[0024] In order to explain the technical scheme of the utility model, the following specific examples are used to explain.
[0025] EMBODIMENT
[0026] Please refer to Figs. 1-7 The embodiment provides a multi-layer piezoelectric actuator of laminated design, which comprises a laminated structure composed of a positive electrode layer 1, a first intermediate hollow layer 2, an intermediate blank layer 3, a second intermediate hollow layer 4 and a negative electrode layer 5 from top to bottom, a positive inner electrode 11 is printed on the bottom surface of the positive electrode layer 1, and the positive inner electrode 11 is exposed from one side of the positive electrode layer 1, a first end electrode 6 is coated on one side of the exposed electrode of the positive electrode layer 1, a negative inner electrode 51 is printed on the top surface of the negative electrode layer 5, and the negative inner electrode 51 is exposed from one side of the negative electrode layer 5, a second end electrode 7 is coated on one side of the exposed electrode of the negative electrode layer 5, the positive inner electrode 11 and the negative inner electrode 51 are connected in parallel through the first end electrode 6 and the second end electrode 7, the overlapping area of the positive inner electrode 1 and the negative inner electrode 5 is matched with the intermediate hollow area 21 of the first intermediate hollow layer 2 and the intermediate hollow area 41 of the second intermediate hollow layer 4, the number of layers of the first intermediate hollow layer 2 and the second intermediate hollow layer 4 depends on the thickness of the electrode and the number of layers of the dielectric layer, and the number of layers of the intermediate blank layer 3 depends on the thickness of the dielectric layer.
[0027] The intermediate blank layer 3 is a blank ceramic diaphragm made by flow drying.
[0028] The first intermediate hollow layer 2 and the second intermediate hollow layer 4 are blank ceramic diaphragms obtained by flow drying first, and then the right-angled quadrilateral intermediate hollow areas are obtained by cutting.
[0029] The positive electrode layer 1 and the negative electrode layer 5 are blank ceramic diaphragms obtained by flow drying first, and then the positive inner electrode 11 and the negative inner electrode 51 are formed by using screen printing technology on the blank ceramic diaphragm.
[0030] In the manufacturing process, firstly, a plurality of layering structures are laminated together through a laminating process, the laminating process parameters are 55 DEG C, 25t-40t pressure, 30s pressure maintaining, after the laminating, an isostatic pressing process is performed, after the isostatic pressing is completed, the bar is cut into a set shape to obtain a device green body, the device green body is then slowly degassed, and then sintered in a muffle furnace, the sintered element is polished, and finally, the first end electrode 6 and the second end electrode 7 are applied on the two sides with exposed electrodes, and finally, the multilayer piezoelectric actuator is obtained.
[0031] The above is only a preferred embodiment of the present application, and is not intended to limit the present application, and any modification, equivalent replacement and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A multi-layer piezoelectric actuator of a stacked design, characterized by: The laminated structure comprises several layers from top to bottom, which are positive electrode layer, first intermediate hollow layer, intermediate blank layer, second intermediate hollow layer and negative electrode layer, the bottom surface of the positive electrode layer is printed with positive inner electrode, the positive inner electrode is exposed from one side of the positive electrode layer, the side of the exposed electrode of the positive electrode layer is coated with first end electrode, the top surface of the negative electrode layer is printed with negative inner electrode, the negative inner electrode is exposed from one side of the negative electrode layer, the side of the exposed electrode of the negative electrode layer is coated with second end electrode, the positive inner electrode and the negative inner electrode are connected in parallel through the first end electrode and the second end electrode, the overlapping area of the positive inner electrode and the negative inner electrode is matched with the intermediate hollow area of the first intermediate hollow layer and the second intermediate hollow layer.
2. A multi-layer piezoelectric actuator of a cascaded design according to claim 1, characterized in that: The intermediate blank layer is a blank ceramic membrane prepared by flow drying.
3. A multi-layer piezoelectric actuator of a cascaded design according to claim 1, characterized in that: The first intermediate hollow layer and the second intermediate hollow layer are blank ceramic membranes prepared by flow drying first, and then cut to obtain the intermediate hollow area.
4. A multi-layer piezoelectric actuator of a cascaded design according to claim 1 or 3, characterized in that: The intermediate hollow area is a right-angled quadrilateral.
5. A multi-layer piezoelectric actuator of a cascaded design according to claim 1, characterized in that: The positive electrode layer and the negative electrode layer are formed by printing the positive inner electrode and the negative inner electrode on the blank ceramic membrane using screen printing technology first, and then drying.