Automatic carbon dioxide fire extinguishing device in semiconductor field

Abstract

The utility model relates to an automatic carbon dioxide fire extinguishing device in the field of semiconductors, which comprises a control cabinet and a gas supply cabinet, a base is mounted on the inner wall of the bottom of the control cabinet, and a carbon dioxide fire extinguisher is placed on the base. A fixing mechanism for fixing the carbon dioxide fire extinguisher is arranged at the top of the base and comprises two annular plates, a driving mechanism mounted on the inner wall of one side of the control cabinet and used for driving the two annular plates to synchronously ascend and descend, and a plurality of groups of fixing assemblies mounted on the two annular plates; the driving mechanism comprises a strip-shaped opening formed in the inner wall of one side of the control cabinet and a limiting rod installed in the strip-shaped opening. In the using process, the carbon dioxide fire extinguisher is convenient to disassemble and install, and the carbon dioxide fire extinguisher is convenient to use. And meanwhile, the stability of the carbon dioxide fire extinguisher in the control cabinet is improved, and people can use the control cabinet more conveniently.

Description

Technical Field

[0001] This utility model belongs to the field of gas supply cabinet protection technology, specifically relating to an automatic carbon dioxide fire extinguishing device in the semiconductor field. Background Technology

[0002] In the semiconductor industry, gas supply cabinets are important devices used to store, manage, and supply specific gases. Semiconductor manufacturing requires a variety of gases, such as gaseous chemicals, inert gases, and high-purity gases. These gases play a key role in semiconductor processes such as photolithography, etching, thin film deposition, ion implantation, cleaning, doping, oxidation, diffusion, and measurement.

[0003] To ensure the safety of the gas supply cabinet during use, fire extinguishing devices are installed to ensure timely fire suppression in the event of a fire. Existing fire extinguishing devices typically place carbon dioxide fire extinguishers inside the control cabinet. To ensure the stability of the carbon dioxide fire extinguishers during use, they are usually fixed inside the control cabinet, making it inconvenient to replace them and thus inconvenient for users. Utility Model Content

[0004] The purpose of this invention is to provide a simple and rationally designed automatic carbon dioxide fire extinguishing device for the semiconductor field in order to solve the above-mentioned problems.

[0005] This utility model achieves the above objectives through the following technical solutions:

[0006] An automatic carbon dioxide fire extinguishing device for the semiconductor industry includes a control cabinet and a gas supply cabinet. A base is installed on the bottom inner wall of the control cabinet, and a carbon dioxide fire extinguisher is placed on the base. A fixing mechanism for securing the carbon dioxide fire extinguisher is provided on the top of the base. The fixing mechanism includes two annular plates, a drive mechanism installed on one side inner wall of the control cabinet for synchronously raising and lowering the two annular plates, and multiple sets of fixing components installed on the two annular plates. The drive mechanism includes a slotted opening on one side inner wall of the control cabinet and a limiting rod installed inside the slotted opening. Two limiting blocks are sleeved on the outside of the limiting rod. Connecting plates are installed on the bottom inner wall of the control cabinet and on one side of the two annular plates. One side of each connecting plate is fixedly connected to one side of the two annular plates, and the other side is fixedly connected to one side of each of the two limiting blocks. A fixing plate is installed on one side inner wall of the control cabinet above the slotted opening. An electric telescopic rod is installed at the bottom of the fixing plate, and the output end of the electric telescopic rod is fixedly connected to the top of one of the connecting plates. Each pair of adjacent connecting plates is connected by a connecting component.

[0007] As a further optimization of this utility model, a cabinet door is hinged to one side of the control cabinet, a main controller is installed on the cabinet door, an audible and visual alarm is installed on the outer surface of the cabinet door, a release valve is installed on the bottle mouth of the carbon dioxide fire extinguisher, and the release valve and the audible and visual alarm are electrically connected to the main controller.

[0008] As a further optimization of this utility model, a temperature sensor and a flame detector electrically connected to the main controller are installed on the top inner wall of the gas supply cabinet, a nozzle is installed on the top inner wall of the gas supply cabinet, and a delivery pipe connected to the nozzle is installed at the bottle mouth of the carbon dioxide fire extinguisher.

[0009] As a further optimization of this utility model, the fixing component includes a movable plate located outside the annular plate and a fixing rod installed on one side of the movable plate. One end of the fixing rod passes through the annular plate and extends into the interior of the annular plate and is fitted with a mounting bracket. A fixing bead is rotatably connected inside the mounting bracket. A spring is sleeved on the outside of the fixing rod, and the two ends of the spring are fixedly connected to one side of the movable plate and the outside of the annular plate, respectively.

[0010] As a further optimization of this utility model, the connecting assembly includes a first connecting rod and a second connecting rod rotatably connected to one side of the first connecting rod, with the ends of the first and second connecting rods rotatably connected to two adjacent connecting plates.

[0011] As a further optimization of this utility model, the base is provided with an annular ramp on its exterior, and the annular ramp slopes downward from the top of the base.

[0012] The beneficial effects of this utility model are as follows: When the carbon dioxide fire extinguisher needs to be replaced during use, the two annular plates will move downwards synchronously under the drive mechanism, thus moving to the outside of the base. At this time, the staff can directly remove the carbon dioxide fire extinguisher from the base. When the carbon dioxide fire extinguisher needs to be installed, it is placed directly on the base, and the drive mechanism will drive the two annular plates to rise synchronously, thus fitting the annular plates onto the outside of the carbon dioxide fire extinguisher and fixing them with multiple fixing components. This not only facilitates disassembly but also facilitates installation, and also improves the stability of the carbon dioxide fire extinguisher in the control cabinet, making it more convenient for people to use. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the control cabinet structure of this utility model;

[0015] Figure 3This is a cross-sectional structural diagram of the control cabinet of this utility model;

[0016] Figure 4 This is the utility model Figure 3 A magnified structural diagram of the structure;

[0017] Figure 5 This is a schematic diagram of the circuit structure of this utility model.

[0018] In the diagram: 1. Control cabinet; 2. Gas supply cabinet; 3. Main controller; 4. Audible and visual alarm; 5. Temperature sensor; 6. Flame detector; 7. Nozzle; 8. Delivery pipe; 9. Carbon dioxide fire extinguisher; 10. Release valve; 11. Base; 12. Annular plate; 13. Fixing plate; 14. Electric telescopic rod; 15. Fixing rod; 16. Mounting bracket; 17. Fixing bead; 18. Moving plate; 19. Spring; 20. Strip-shaped opening; 21. First connecting rod; 22. Limiting rod; 23. Limiting block; 24. Connecting plate; 25. Second connecting rod. Detailed Implementation

[0019] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0020] like Figure 1 - Figure 5As shown, an automatic carbon dioxide fire extinguishing device for the semiconductor industry includes a control cabinet 1 and a gas supply cabinet 2. A base 11 is installed on the bottom inner wall of the control cabinet 1, and a carbon dioxide fire extinguisher 9 is placed on the base 11. A fixing mechanism for fixing the carbon dioxide fire extinguisher 9 is provided on the top of the base 11. The fixing mechanism includes two annular plates 12, a drive mechanism installed on one side inner wall of the control cabinet 1 for synchronously raising and lowering the two annular plates 12, and multiple sets of fixing components installed on the two annular plates 12. The drive mechanism includes a slot 20 opened on one side inner wall of the control cabinet 1, and a limiting rod 22 installed inside the slot 20. Two limiting blocks 23 are sleeved on the outside of the limiting rod 22. The bottom inner wall of the control cabinet 1 and the two... Each of the two annular plates 12 has a connecting plate 24 installed on one side. One side of each of the two connecting plates 24 is fixedly connected to one side of the two annular plates 12, and the other side is fixedly connected to one side of each of the two limiting blocks 23. A fixing plate 13 located above the strip opening 20 is installed on the inner wall of one side of the control cabinet 1. An electric telescopic rod 14 is installed at the bottom of the fixing plate 13. The output end of the electric telescopic rod 14 is fixedly connected to the top of one of the connecting plates 24. Each pair of adjacent connecting plates 24 are connected by a connecting assembly. The connecting assembly includes a first connecting rod 21 and a second connecting rod 25 rotatably connected to one side of the first connecting rod 21. The ends of the first connecting rod 21 and the second connecting rod 25 that are far apart from each other are rotatably connected to the two adjacent connecting plates 24.

[0021] When in use, the carbon dioxide fire extinguisher 9 can be placed on the base 1. Then, the electric telescopic rod 14 will drive the bottom connecting plate 24 to move upward. At this time, the first connecting rod 22 and the second connecting rod 25 will unfold, causing the two annular plates 12 to move upward synchronously. The two annular plates 12 will fit over the outside of the carbon dioxide fire extinguisher 9, thus fixing the carbon dioxide fire extinguisher 9. When it is necessary to remove the carbon dioxide fire extinguisher 9 from the inside of the control cabinet 1, the electric telescopic rod 14 will drive the top connecting plate 24 to move downward. At this time, the first connecting rod 14 and the second connecting rod 15 will fold, and the two annular plates 12 will move downward synchronously. When the two annular plates 12 move to the outside of the base 11, the electric telescopic rod 14 stops moving. At this time, the carbon dioxide fire extinguisher can be directly removed from the top of the base 11.

[0022] like Figure 3 and Figure 4As shown, the base 11 has an annular ramp on its exterior, and the annular ramp slopes downward from the top of the base 11. The fixing assembly includes a movable plate 18 located outside the annular plate 12, and a fixing rod 15 installed on one side of the movable plate 18. One end of the fixing rod 15 passes through the annular plate 12 and extends into the interior of the annular plate 12 and is fitted with a mounting bracket 16. A fixing bead 17 is rotatably connected inside the mounting bracket 16. A spring 19 is sleeved on the exterior of the fixing rod 15. The two ends of the spring 19 are fixedly connected to one side of the movable plate 18 and the exterior of the annular plate 12, respectively.

[0023] During use, when the annular plate 12 moves downward, the fixing bead 17 slides on the outside of the carbon dioxide fire extinguisher 9, and moves along the annular ramp to the outside of the base 11. When the annular plate 12 moves upward, the fixing bead 17 moves along the annular ramp to the outside of the carbon dioxide fire extinguisher 9. Under the action of the spring 19, the fixing bead 17 will be tightly attached to the outside of the carbon dioxide fire extinguisher 9, so that carbon dioxide fire extinguishers of different sizes can be fixed.

[0024] like Figure 1 and Figure 5 As shown, a cabinet door is hinged to one side of the control cabinet 1. A main controller 3 is installed on the cabinet door. An audible and visual alarm 4 is installed on the outer surface of the cabinet door. A release valve 10 is installed on the bottle mouth of the carbon dioxide fire extinguisher 9. The release valve 10 and the audible and visual alarm 4 are electrically connected to the main controller 3. A temperature sensor 5 and a flame detector 6, which are electrically connected to the main controller 3, are installed on the top inner wall of the gas supply cabinet 2. A nozzle 7 is installed on the top inner wall of the gas supply cabinet 2. A delivery pipe 8, which is connected to the nozzle 7, is installed on the bottle mouth of the carbon dioxide fire extinguisher 9. The main controller 3 is electrically connected to a centralized control system.

[0025] During use, a temperature detector 5 and a flame detector 6 are installed in the gas supply cabinet 2. When either detector detects a fire, it transmits a signal to the main controller 3 in the control cabinet 1. The main controller 3 immediately sends a signal to the audible and visual alarm 4 to alert the staff of the fire. At the same time, the main controller 4 outputs a signal to the release valve 10 according to the preset program, causing the release valve 10 to open. At this time, the carbon dioxide inside the carbon dioxide fire extinguisher 9 is sprayed out from the nozzle 7 through the delivery pipe 8, realizing the entire automatic fire extinguishing process. While issuing the audible and visual alarm signal, the main controller 3 can also send the signal to the owner's centralized monitoring system to alert the remote operator of the fire.

[0026] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An automatic carbon dioxide fire extinguishing device for the semiconductor industry, comprising a control cabinet (1) and a gas supply cabinet (2), characterized in that, A base (11) is installed on the bottom inner wall of the control cabinet (1). A carbon dioxide fire extinguisher (9) is placed on the base (11). A fixing mechanism for fixing the carbon dioxide fire extinguisher (9) is provided on the top of the base (11). The fixing mechanism includes two annular plates (12), a drive mechanism installed on one side inner wall of the control cabinet (1) for driving the two annular plates (12) to move synchronously, and multiple sets of fixing components installed on the two annular plates (12). The drive mechanism includes a strip opening (20) opened on one side inner wall of the control cabinet (1) and a limiting rod (22) installed inside the strip opening (20). The outside of the limiting rod (22) Two limiting blocks (23) are fitted. Connecting plates (24) are installed on the bottom inner wall of the control cabinet (1) and on one side of the two annular plates (12). One side of the two connecting plates (24) is fixedly connected to one side of the two annular plates (12) respectively, and the other side is fixedly connected to one side of the two limiting blocks (23). A fixing plate (13) located above the strip opening (20) is installed on one side inner wall of the control cabinet (1). An electric telescopic rod (14) is installed at the bottom of the fixing plate (13). The output end of the electric telescopic rod (14) is fixedly connected to the top of one of the connecting plates (24). Each pair of adjacent connecting plates (24) are connected by a connecting assembly.

2. The automatic carbon dioxide fire extinguishing device for the semiconductor field according to claim 1, characterized in that: The control cabinet (1) has a door hinged to one side, a main controller (3) is installed on the door, an audible and visual alarm (4) is installed on the outer surface of the door, a release valve (10) is installed on the mouth of the carbon dioxide fire extinguisher (9), and the release valve (10) and the audible and visual alarm (4) are electrically connected to the main controller (3).

3. The automatic carbon dioxide fire extinguishing device for the semiconductor field according to claim 2, characterized in that: The top inner wall of the gas supply cabinet (2) is equipped with a temperature sensor (5) and a flame detector (6) that are electrically connected to the main controller (3). The top inner wall of the gas supply cabinet (2) is equipped with a nozzle (7). The bottle mouth of the carbon dioxide fire extinguisher (9) is equipped with a delivery pipe (8) that is connected to the nozzle (7).

4. The automatic carbon dioxide fire extinguishing device for the semiconductor field according to claim 1, characterized in that: The fixing assembly includes a movable plate (18) located outside the annular plate (12) and a fixing rod (15) installed on one side of the movable plate (18). One end of the fixing rod (15) passes through the annular plate (12) and extends into the interior of the annular plate (12) and is fitted with a mounting bracket (16). A fixing bead (17) is rotatably connected inside the mounting bracket (16). A spring (19) is sleeved on the outside of the fixing rod (15). The two ends of the spring (19) are fixedly connected to one side of the movable plate (18) and the outside of the annular plate (12), respectively.

5. The automatic carbon dioxide fire extinguishing device for the semiconductor field according to claim 1, characterized in that: The connecting assembly includes a first connecting rod (21) and a second connecting rod (25) rotatably connected to one side of the first connecting rod (21). The ends of the first connecting rod (21) and the second connecting rod (25) that are far apart from each other are rotatably connected to two adjacent connecting plates (24).

6. The automatic carbon dioxide fire extinguishing device for the semiconductor field according to claim 1, characterized in that: The base (11) is provided with an annular ramp on its exterior, and the annular ramp slopes downward from the top of the base (11).

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