Material taking and placing device and processing equipment

Abstract

The utility model is suitable for the technical field of machining, and provides a material taking and placing device and machining equipment. The connecting part is connected to the adsorption assembly; the anti-falling assembly comprises a mounting part and a supporting claw mechanism, and the supporting claw mechanism is arranged on the mounting part and can move relative to the mounting part in the transverse direction; and the lifting driving assembly is connected to the mounting component so as to drive the mounting component to move relative to the adsorption assembly in the height direction, and the transverse direction is perpendicular to the height direction. According to the material taking and placing device provided by the embodiment of the invention, the occupied operation space during material taking and placing can be reduced.

Description

Technical Field

[0001] This application belongs to the field of processing technology, and more specifically, relates to a material handling device and processing equipment. Background Technology

[0002] Currently, the methods for handling disc-shaped products (such as crystal ingots) include gripper gripping and pallet retrieval. Both grippers and pallets require a large operating space when handling materials. Utility Model Content

[0003] The embodiments of this application provide a material handling device and processing equipment that can reduce the working space occupied during material handling.

[0004] In a first aspect, embodiments of this application provide a material handling device, comprising:

[0005] Adsorption components;

[0006] A connecting component, connected to the adsorption assembly;

[0007] A fall arrestor assembly includes a mounting component and a claw mechanism, the claw mechanism being disposed on the mounting component and movable laterally relative to the mounting component;

[0008] A lifting drive assembly is connected to the mounting component to drive the mounting component to move relative to the adsorption assembly along the height direction of the material handling device, wherein the lateral movement is perpendicular to the height direction.

[0009] In some possible implementations of the first aspect, the mounting component is disposed on the connecting component and is movable relative to the connecting component along the height direction of the material handling device.

[0010] In some possible implementations of the first aspect, the claw mechanism includes:

[0011] A claw component is disposed on the mounting component;

[0012] A claw drive mechanism is connected to the claw component to drive the claw component to move relative to the mounting component in the lateral direction.

[0013] In some possible implementations of the first aspect, the claw mechanism further includes:

[0014] A first position detection sensor is disposed on the mounting component to detect the claw component at a first position;

[0015] A second position detection sensor is disposed on the mounting component to detect the claw component at a second position;

[0016] Along the lateral direction, the first position detection sensor and the second position detection sensor are spaced a specified distance apart to limit the movement of the claw component between the first position detection sensor and the second position detection sensor.

[0017] In some possible implementations of the first aspect, the claw mechanism further includes:

[0018] A third position detection sensor is located between the first position detection sensor and the second position detection sensor to detect the claw component at a third position.

[0019] In some possible implementations of the first aspect, the claw mechanism further includes:

[0020] The pressure block is detachably disposed at the position of the claw component for supporting the workpiece.

[0021] In some possible embodiments of the first aspect, the material handling device further includes:

[0022] A fixing component, connected to the connecting component;

[0023] The lifting drive assembly is disposed on the fixed component;

[0024] An image capturing component is mounted on the fixed component.

[0025] In some possible implementations of the first aspect, the mounting component is located between the adsorption assembly and the fixing component along the height direction.

[0026] In some possible embodiments of the first aspect, the number of the claw mechanisms is multiple, and each of the claw mechanisms is distributed in a circumferential array on the mounting component.

[0027] In some possible embodiments of the first aspect, the material handling device further includes:

[0028] A floating joint is provided, through which the lifting drive assembly is connected to the mounting component.

[0029] Secondly, embodiments of this application provide a processing apparatus, including the material handling device described in any of the above claims.

[0030] The beneficial effects of the embodiments of this application are:

[0031] The connecting component is located on the adsorption assembly. The anti-fall assembly includes a mounting component and a claw mechanism. The mounting component can move relative to the connecting component in the height direction. The lifting drive component is connected to the mounting component and can drive the entire anti-fall assembly to move relative to the adsorption assembly in the height direction, thereby freeing up space in the height direction. The claw mechanism is located on the mounting component and can move relative to the mounting component in the lateral direction, thereby freeing up space in the lateral direction, which can reduce the working space occupied when picking up and putting down materials. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 A perspective view of a material handling device provided in an embodiment of this application;

[0034] Figure 2 A frontal projection view of a material handling device provided in an embodiment of this application;

[0035] Figure 3 A perspective view of the adsorption component of a material handling device provided in an embodiment of this application;

[0036] Figure 4 A perspective view of the anti-fall component of a material handling device provided in an embodiment of this application. Detailed Implementation

[0037] To make the technical problem to be solved, the technical solution and the beneficial effects of this application clearer, the following is in conjunction with the appendix. Figures 1 to 4 The present application will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

[0038] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0039] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0040] It should be understood that the term "and / or" as used in this application specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0042] The embodiments of this application provide a material handling device that can handle material handling.

[0043] Figure 1 This is a perspective view of a material handling device provided in an embodiment of this application. Figure 2 This is a frontal projection view of a material handling device provided in one embodiment of this application. (See reference...) Figure 1 and Figure 2 The material handling device provided in the embodiments of this application includes an adsorption component 1, a connecting component 2, an anti-fall component 3, and a lifting drive component 4.

[0044] The adsorption component 1 is used to adsorb the workpiece. Specifically, the adsorption component 1 can be a ceramic adsorption component or a standard suction cup component.

[0045] The aforementioned workpiece can be a crystal ingot 100, or it can be a wafer or other components to be processed. Taking a crystal ingot 100 as an example, the embodiments of this application will be described.

[0046] The connecting component 2 is disposed on the adsorption component 1.

[0047] The anti-fall component 3 is used to support the crystal ingot 100 in the height direction H of the material handling device to prevent the crystal ingot 100 from falling from the adsorption component 1. The aforementioned height direction H can specifically be a vertical direction.

[0048] The fall arrestor 3 includes a mounting component 31 and a claw mechanism 32.

[0049] Mounting component 31 can move relative to connecting component 2 along the height direction H. Claw mechanism 32 is disposed on mounting component 31 and can move relative to mounting component 31 along the lateral direction W, moving closer to or further away from adsorption component 1 along the lateral direction W. The aforementioned lateral direction W is perpendicular to the height direction H. Specifically, lateral direction W can be horizontal or radial.

[0050] The number of claw mechanisms 32 can be multiple, and each claw mechanism 32 is arranged in a circumferential array on the mounting component 31, which can support the ingot 100 at multiple positions and improve reliability. Correspondingly, the lateral direction W refers to multiple radial directions, and each claw mechanism 32 corresponds to one radial direction.

[0051] The lifting drive assembly 4 is connected to the mounting component 31 to drive the anti-fall assembly 3 to move relative to the adsorption assembly 1 along the height direction H, thereby moving closer to or further away from the adsorption assembly 1 along the height direction H.

[0052] The lifting drive component 4 can specifically be a cylinder, a lead screw transmission mechanism, or a linear motor.

[0053] During material handling, the lifting drive assembly 4 drives the mounting component 31 to move the claw mechanism 32 away from the adsorption assembly 1 in the height direction H, thereby making the entire anti-fall assembly 3 move away from the adsorption assembly 1 in the height direction H to make room for the adsorption assembly 1 to adsorb the crystal ingot 100. After the adsorption assembly 1 finishes adsorbing the crystal ingot 100, the lifting drive assembly 4 drives the mounting component 31 to move the claw mechanism 32 closer to the adsorption assembly 1 in the height direction H. The claw mechanism 32 moves relative to the mounting component 31 in the lateral direction W and gets closer to the adsorption assembly 1 until the claw mechanism 32 can hold the crystal ingot 100 at the bottom of the adsorption assembly 1. The lifting drive assembly 4 continues to drive the claw mechanism 32 closer to the adsorption assembly 1 in the height direction H, so that the claw mechanism 32 holds the crystal ingot 100, which can prevent the crystal ingot 100 from falling from the adsorption assembly 1 and improve the reliability of material handling.

[0054] During material feeding, the lifting drive assembly 4 drives the claw mechanism 32 to move away from the adsorption assembly 1 in the height direction H, releasing the crystal ingot 100. The claw mechanism 32 moves relative to the mounting component 31 in the horizontal direction W and moves away from the adsorption assembly 1. The adsorption assembly 1 releases the adsorption and places the crystal ingot 100 in the designated position.

[0055] As can be seen from the above, the connecting component 2 is set on the adsorption component 1, and the anti-fall component 3 includes the mounting component 31 and the claw mechanism 32. The mounting component 31 can move relative to the connecting component 2 along the height direction H. The lifting drive component 4 is connected to the mounting component 31 and can drive the entire anti-fall component 3 to move relative to the adsorption component 1 along the height direction H, thereby freeing up space in the height direction H. The claw mechanism 32 is set on the mounting component 31 and can move relative to the mounting component 31 along the horizontal direction W, thereby freeing up space in the horizontal direction W, which can reduce the working space occupied when picking up and putting down materials.

[0056] In some embodiments, the mounting component 31 is disposed on the connecting component 2 and can move relative to the connecting component 2 along the height direction H of the material handling device.

[0057] The connecting component 2 is used to guide the mounting component 31.

[0058] Specifically, the mounting component 31 moves along the path defined by the connecting component 2 in the height direction H, enabling stable movement.

[0059] Because the fall arrestor 3 can free up space in the height direction H and the lateral direction W, and the mounting component 31 is movably set on the connecting component 2, the space in the height direction can be fully utilized, making the overall structure of the material handling device more compact.

[0060] Figure 3 This is a perspective view of the adsorption component of a material handling device according to an embodiment of this application. (See reference) Figure 3 The aforementioned adsorption component 1 can be a standard suction cup component, which includes a suction cup mounting component 11 and multiple suction cups 12.

[0061] Each suction cup 12 is mounted on the suction cup mounting component 11. The position of the suction cup can be adjusted according to the size of the workpiece (e.g., crystal ingot 100), enabling compatibility with workpieces of various sizes.

[0062] All suction cups 12 are divided into multiple groups, and each group of suction cups 12 is connected to a different air supply path. This can prevent the suction from being completely lost if a vacuum is broken in a single air path, thus improving the reliability of adsorption.

[0063] Each air supply line is equipped with a vacuum check valve to prevent the entire air supply line from being interrupted due to a problem with one of the suction cups.

[0064] Figure 4 A perspective view of the anti-fall component of a material handling device provided in an embodiment of this application. (See reference) Figure 4 The aforementioned claw mechanism 32 may include a claw component 321 and a claw drive mechanism 322.

[0065] The claw component 321 is disposed on the mounting component 31.

[0066] The claw drive mechanism 322 is connected to the claw component 321 to drive the claw component 321 to move relative to the mounting component 31 in the lateral direction W, so that the claw component 321 moves closer to the adsorption component 1 in the lateral direction W.

[0067] The claw drive mechanism 322 can specifically be a lead screw drive mechanism, a linear motor, or a cylinder.

[0068] refer to Figure 4The aforementioned claw mechanism 32 may further include a first position detection sensor 323 and a second position detection sensor 324.

[0069] A first position detection sensor 323 is disposed on the mounting component 31 to detect the claw component 321 at a first position. The first position detection sensor 323 may specifically be a contact position sensor or a proximity position sensor.

[0070] A second position detection sensor 324 is disposed on the mounting component 31 to detect the claw component 321 at the second position. Specifically, the second position detection sensor 324 may be a contact position sensor or a proximity position sensor.

[0071] Along the transverse direction W, the first position detection sensor 323 and the second position detection sensor 324 are spaced a specified distance apart to limit the movement of the claw component 321 between the first position detection sensor 323 and the second position detection sensor 324. The first position is the extreme position on one side of the movement of the claw component 321 relative to the mounting component 31 (e.g., the left extreme position or the right extreme position). The second position is the extreme position on the other side of the movement of the claw component 321 relative to the mounting component 31 (e.g., the right extreme position or the left extreme position).

[0072] By using a first position detection sensor 323 to detect the first position claw component 321 and a second position detection sensor 324 to detect the second position claw component 321, the claw component 321 is confined between the first position detection sensor 323 and the second position detection sensor 324. This prevents the claw component 321 from getting too close to the ingot 100 and damaging the ingot 100, thus protecting the ingot 100.

[0073] refer to Figure 4 The aforementioned claw mechanism 32 may also include a third position detection sensor 325.

[0074] Along the transverse direction W, the third position detection sensor 325 is located between the first position detection sensor 323 and the second position detection sensor 324 to detect the claw component 321 at the third position.

[0075] The third position detection sensor 325 is located between the first position detection sensor 323 and the second position detection sensor 324, corresponding to the origin or starting point of the movement of the claw component 321, so as to determine the position of the claw component 321.

[0076] The third position detection sensor 325 can be specifically installed on the mounting component 31 or on the adsorption component 1.

[0077] refer to Figure 4 The aforementioned claw mechanism 32 may also include a pressure block 326.

[0078] The pressure block 326 is detachably disposed at the position of the claw member 321 for supporting the ingot 100, so as to press against the ingot 100.

[0079] The hardness of the 326 pressing block is lower than that of the crystal ingot 100, so as to avoid damaging the crystal ingot 100 and to protect the crystal ingot 100.

[0080] Since the pressure block 326 is detachably mounted on the claw component 321, it is convenient to replace the pressure block 326 when it is damaged.

[0081] refer to Figure 1 The aforementioned material handling device may also include a fixing component 5.

[0082] The fixing component 5 is connected to the connecting component 2.

[0083] The lifting drive assembly 4 is mounted on the fixed component 2. Specifically, the housing of the lifting drive assembly 4 is mounted on the fixed component 2, and the drive end of the lifting drive assembly 4 is connected to the mounting component 31.

[0084] Along the height direction H, the mounting component 31 is located between the adsorption component 1 and the fixing component 5, that is, the mounting component 31 moves between the adsorption component 1 and the fixing component 5, which can make better use of the space in the height direction.

[0085] The connecting component 2 can specifically be a guide rail or a guide rod. The fixing component 5 can specifically be a block-shaped component or a plate-shaped component.

[0086] refer to Figure 1 The aforementioned material handling device may further include an image capturing component 6.

[0087] Image capturing component 6 is used to capture images of ingot 100.

[0088] Image capturing component 6 is mounted on fixed component 5.

[0089] The image capturing component 6 is used to capture images to guide the material handling device to precisely adsorb the crystal ingot 100, and can also prevent accidental damage to the crystal ingot 100 during material handling.

[0090] refer to Figure 1 The aforementioned material handling device may also include a floating joint 7.

[0091] The lifting drive assembly 4 is connected to the mounting component 31 via the floating joint 7, thereby achieving a floating connection with the mounting component 31. This allows the lifting drive assembly 4 to move relative to the mounting component 31 in the lateral direction W, enabling the lifting drive assembly 4 to adapt to positional shifts during movement and preventing damage to the lifting drive assembly 4.

[0092] The floating joint 7 can use common standard parts.

[0093] refer to Figure 1 The aforementioned material handling device may also include a cable tray 8.

[0094] Cable management board 8 is used to house cables and conduits. Cable management board 8 can be specifically installed on mounting component 5.

[0095] The material handling device provided in the embodiments of this application, after the adsorption component 1 picks up the workpiece, the anti-fall component 33 descends and moves to support the bottom of the workpiece, which can effectively prevent the workpiece from falling due to insufficient vacuum or other reasons, protect the workpiece, improve reliability and safety, reduce the working space occupied during material handling, and has a compact overall structure.

[0096] Embodiments of this application also provide a processing device, which includes the material handling device provided in any of the above embodiments.

[0097] The aforementioned processing equipment may also include a platform.

[0098] The stage is used to place the crystal ingot 100.

[0099] The material handling device is located around the platform to pick up the crystal ingot 100 from the platform, or to place the crystal ingot 100 on the platform to discharge the material.

[0100] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A material handling device, characterized in that, include: Adsorption components; A connecting component, connected to the adsorption assembly; A fall arrestor assembly includes a mounting component and a claw mechanism, the claw mechanism being disposed on the mounting component and movable laterally relative to the mounting component; A lifting drive assembly is connected to the mounting component to drive the mounting component to move relative to the adsorption assembly along the height direction of the material handling device, wherein the lateral movement is perpendicular to the height direction.

2. The material handling device as described in claim 1, characterized in that, The mounting component is disposed on the connecting component and can move relative to the connecting component along the height direction of the material handling device.

3. The material handling device as described in claim 1, characterized in that, The claw mechanism includes: A claw component is disposed on the mounting component; A claw drive mechanism is connected to the claw component to drive the claw component to move relative to the mounting component in the lateral direction.

4. The material handling device as described in claim 3, characterized in that, The claw mechanism also includes: A first position detection sensor is disposed on the mounting component to detect the claw component at a first position; A second position detection sensor is disposed on the mounting component to detect the claw component at a second position; Along the lateral direction, the first position detection sensor and the second position detection sensor are spaced a specified distance apart to limit the movement of the claw component between the first position detection sensor and the second position detection sensor.

5. The material handling device as described in claim 4, characterized in that, The claw mechanism also includes: A third position detection sensor is located between the first position detection sensor and the second position detection sensor to detect the claw component at a third position.

6. The material handling device as described in claim 3, characterized in that, The claw mechanism also includes: The pressure block is detachably disposed at the position of the claw component for supporting the workpiece.

7. The material handling device as described in claim 1, characterized in that, The material handling device further includes: A fixing component, connected to the connecting component; The lifting drive assembly is disposed on the fixed component; An image capturing component is mounted on the fixed component.

8. The material handling device as described in claim 7, characterized in that, Along the height direction, the mounting component is located between the adsorption assembly and the fixing component.

9. The material handling device according to any one of claims 1 to 8, characterized in that, The material handling device further includes: A floating joint is provided, through which the lifting drive assembly is connected to the mounting component.

10. A processing device, characterized in that, Includes the material handling device as described in any one of claims 1 to 9.

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