Liquid cooling device for vacuum coating target material

Abstract

The utility model relates to a liquid cooling device for a vacuum coating target material, which comprises a first plate body and a second plate body which are overlapped up and down, the upper plate surface of the first plate body forms a working surface for heat dissipation of the target material, and a cooling chamber for accommodating cooling liquid is arranged at the junction of the first plate body and the second plate body. The lower plate face of the second plate body is provided with a liquid inlet pipe and a liquid outlet pipe which are used for allowing cooling liquid in the cooling cavity to flow in and out, and the first plate body, the second plate body, the liquid inlet pipe and the liquid outlet pipe are connected in a sealed assembling mode in a welded mode. According to the scheme provided by the utility model, the sealing assembly connection among the components forming the liquid cooling device is realized by adopting a welding mode, so that the problem of cooling liquid leakage caused by aging of a sealing ring in a traditional cooling device is solved, and the reliability of vacuum coating is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, specifically to a liquid cooling device for vacuum coating targets. Background Technology

[0002] In the field of vacuum coating technology, target heat dissipation is particularly important. Typically, liquid is flowed over the back of the target and into a copper backplate to dissipate heat. Current heat dissipation devices use a sealing ring between the liquid cooling plate and the liquid cooling backplate to isolate the liquid from the vacuum environment. However, with repeated use and maintenance, this method carries the risk of leakage due to aging of the sealing ring. If liquid enters the vacuum chamber, it can have catastrophic consequences for the vacuum equipment and the coated products; therefore, it is necessary to address this problem. Utility Model Content

[0003] To address the aforementioned problems, this invention provides a liquid cooling device for vacuum coating targets, which can effectively solve these problems and avoid leakage caused by the aging of the sealing ring.

[0004] The specific technical solution adopted by this utility model is as follows.

[0005] A liquid cooling device for vacuum coating targets is characterized by comprising a first plate and a second plate arranged in an upper and lower stacked manner. The upper surface of the first plate constitutes a working surface for heat dissipation of the target material. A cooling chamber for containing coolant is provided at the junction of the first plate and the second plate. An inlet pipe and an outlet pipe for coolant inlet and outlet inlet of the cooling chamber are provided on the lower surface of the second plate. The first plate, the second plate, the inlet pipe, and the outlet pipe are sealed and connected by welding.

[0006] The specific solution is as follows: a groove is provided on the lower surface of the first plate, and the second plate covers the groove opening, and the groove cavity forms a cooling chamber.

[0007] The bottom of the groove is provided with guide ribs for guiding the coolant in the cooling chamber.

[0008] The upper surface of the second plate is provided with receiving grooves corresponding to the arrangement of guide ribs, and the guide ribs are partially fixedly installed in the receiving grooves.

[0009] The groove wall is provided with a stepped structure for assembling and positioning the second plate.

[0010] The lower surfaces of the first plate and the second plate are flush. Mounting holes are provided around the perimeter of the first plate.

[0011] The groove is a rectangular groove, with the inlet pipe and outlet pipe respectively set at both ends of the groove along its length.

[0012] The length direction of the guide ribs is consistent with the groove length direction, and the guide ribs are spaced apart along the groove width direction. The two ends of the guide ribs are arranged separately from the groove wall.

[0013] The guide ribs are spaced apart along the length of the groove between the inlet pipe and the outlet pipe. The length direction of the guide ribs is arranged at an angle to the width direction of the groove. The guide ribs include two A1 guide ribs and each A2 guide rib located between the two A1 guide ribs. One end of one A1 guide rib is arranged to intersect with the A groove wall, and the other end is arranged separately from the B groove wall. One end of the other A1 guide rib is arranged to intersect with the A groove wall, and the other end is arranged separately from the B groove wall. Both ends of each A2 guide rib are arranged separately from the A groove wall and the B groove wall. The A groove wall and the B groove wall are two groove walls arranged along the length of the groove.

[0014] The two walls of the groove, arranged along its width, are denoted as wall C and wall D. Wall C is located near the inlet pipe, and wall D is located near the outlet pipe. Two guide rib units, each composed of guide ribs, are installed on the bottom of the groove. These two guide rib units are symmetrically arranged about the centerline along the length of the groove. The guide ribs forming each unit include X1, X2, and X3, which are arranged parallel to each other. The length of X1, X2, and X3 is aligned with the length of the groove. The ends of X1, X2, and X3 are connected to wall C. The walls of the C and D tanks are arranged separately. The X1, X2, and X3 guide ribs are arranged sequentially along the middle of the groove towards the outside. The ends of the X2 and X3 guide ribs near the C tank wall are connected by the Y2 guide rib. The ends of the X1 and X2 guide ribs near the D tank wall are connected by the Y1 guide rib. An X4 guide rib is also provided between the X1 and X2 guide ribs. The end of the X4 guide rib near the liquid outlet pipe is arranged separately from the Y1 guide rib. The ends of the X4 guide ribs on the two guide rib units near the liquid inlet pipe are connected by the Y3 guide rib.

[0015] The guide ribs and the receiving groove are welded together by vacuum high-temperature brazing. The periphery of the second plate and the periphery of the groove opening are welded together by argon arc welding. The inlet pipe, the outlet pipe and the second plate are welded together by argon arc welding.

[0016] This utility model also provides a method for producing a liquid cooling device for vacuum coating targets. Mounting holes, grooves, guide ribs, and stepped structures are machined on a first plate, and a receiving groove, liquid inlet, and liquid outlet are machined on a second plate. Brazing filler is placed in the receiving groove, and the first and second plates are assembled so that the reinforcing ribs on the first plate are aligned with the receiving groove. The reinforcing ribs and receiving groove are welded together using vacuum brazing. Then, the gap between the groove opening edge and the edge of the second plate is welded and sealed using argon arc welding. Finally, the liquid inlet pipe and liquid outlet pipe are welded and sealed to the liquid inlet and liquid outlet holes on the second plate using argon arc welding.

[0017] The above-mentioned solution provided by this utility model achieves sealed assembly and connection between the components of the liquid cooling device by using welding, thereby solving the problem of coolant leakage caused by the aging of the sealing ring in the traditional cooling device and improving the reliability of vacuum coating. Attached Figure Description

[0018] Figure 1 This is the front view of the present invention.

[0019] Figure 2 This is an exploded view of the present invention.

[0020] Figure 3 for Figure 1 Sectional view of AA.

[0021] Figure 4 This is a schematic diagram of the first embodiment of the guide rib.

[0022] Figure 5 This is a schematic diagram of the second embodiment of the guide rib.

[0023] Figure 6 This is a structural schematic diagram of the third embodiment of the guide rib.

[0024] Figure 7 for Figure 5 Flow diagram of the coolant.

[0025] The attached figures are labeled as follows: 10-first plate, 11-guide rib, 12-mounting hole, 20-second plate, 21-accommodating groove, 31-inlet pipe, 32-outlet pipe. Detailed Implementation

[0026] To make the objectives and advantages of this utility model clearer, the following detailed description is provided in conjunction with embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of this utility model and does not strictly limit the scope of protection specifically claimed by this utility model.

[0027] As used herein, the terms “parallel,” “perpendicular,” etc., are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0028] like Figure 1 , 2 As shown, a liquid cooling device for vacuum coating targets includes a first plate 10 and a second plate 20 stacked on top of each other. The upper surface of the first plate 10 forms a working surface for heat dissipation of the target material. A cooling chamber for containing coolant is provided at the junction of the first plate 10 and the second plate 20. An inlet pipe 31 and an outlet pipe 32 for coolant inlet and outlet within the cooling chamber are provided on the lower surface of the second plate 20. The first plate 10, the second plate 20, the inlet pipe 31, and the outlet pipe 32 are sealed and assembled together by welding. The above-mentioned solution provided by this utility model achieves sealed assembly and connection between the components of the liquid cooling device by welding, thereby solving the problem of coolant leakage caused by aging of the sealing ring in traditional cooling devices and improving the reliability of vacuum coating.

[0029] Specific solutions, such as Figure 3 As shown: A groove is provided on the lower surface of the first plate 10, and the second plate 20 seals the groove opening, forming a cooling chamber. A guide rib 11 is provided on the bottom of the groove to guide the coolant within the cooling chamber. A receiving groove 21 corresponding to the guide rib 11 is provided on the upper surface of the second plate 20, and the guide rib 11 is partially fixedly installed within the receiving groove 21. A stepped structure is provided on the groove wall for assembling and positioning the second plate 20. The lower surfaces of the first plate 10 and the second plate 20 are flush. Mounting holes 12 are provided around the perimeter of the first plate 10. The mounting holes 12 are used for positioning and installing the coolant plate device on the vacuum coating equipment. The guide ribs 11 divide the cooling chamber into corresponding flow channels, strengthening the structure and improving the cooling effect, thus solving the problems of leakage and deformation common in traditional heat dissipation devices.

[0030] A more specific solution is as follows: the groove is a rectangular groove, with the inlet pipe 31 and outlet pipe 32 respectively positioned at both ends along the length of the groove. The arrangement of the guide ribs 11 can be customized according to specific requirements. Figure 4 As shown, this is the first embodiment of the flow guide rib 11, where the length direction of the flow guide rib 11 is consistent with the groove length direction, the flow guide rib 11 is spaced apart along the groove width direction, and the two ends of the flow guide rib 11 are respectively arranged separately from the groove wall. In this embodiment, the coolant flows in a straight line within the cooling chamber. Figure 5As shown, this is a second embodiment of the guide rib 11, where the two walls of the groove arranged along the width direction are denoted as groove wall C and groove wall D. Groove wall C is located near the inlet pipe, and groove wall D is located near the outlet pipe. Two guide rib units composed of guide ribs 11 are provided on the bottom of the groove. The two guide rib units are symmetrically arranged about the center line arranged along the length direction of the groove. The guide ribs 11 that make up the guide rib unit include X1 guide rib, X2 guide rib, and X3 guide rib arranged parallel to each other. The length direction of guide ribs X1, X2, and X3 is consistent with the length direction of the groove. X1 guide rib and X2 guide rib are arranged parallel to each other. The two ends of the X3 guide rib and the walls of the C and D grooves are arranged separately. The X1, X2, and X3 guide ribs are arranged sequentially along the middle of the groove pointing outwards. The ends of the X2 and X3 guide ribs near the C groove wall are connected by the Y2 guide rib, and the ends of the X1 and X2 guide ribs near the D groove wall are connected by the Y1 guide rib. An X4 guide rib is also provided between the X1 and X2 guide ribs. The end of the X4 guide rib near the outlet pipe is arranged separately from the Y1 guide rib. The ends of the X4 guide ribs on the two guide rib units near the inlet pipe are connected by the Y3 guide rib. In this embodiment, the coolant flows in an S-shape within the cooling chamber. Figure 7 As shown. Figure 6 As shown, this is the third embodiment of the flow guide rib 11. Specifically, the flow guide ribs 11 are spaced apart along the length of the groove between the inlet pipe 31 and the outlet pipe 32. The length direction of the flow guide ribs 11 and the width direction of the groove form an angle. The flow guide ribs 11 include two A1 flow guide ribs 11 and each A2 flow guide rib 11 located between the two A1 flow guide ribs 11. One end of one A1 flow guide rib 11 intersects with the A groove wall, and the other end is separated from the B groove wall. One end of the other A1 flow guide rib 11 intersects with the A groove wall, and the other end is separated from the B groove wall. Both ends of each A2 flow guide rib 11 are separated from both the A groove wall and the B groove wall. The A groove wall and the B groove wall are two groove walls arranged along the length of the groove. In this embodiment, the coolant flows in an inclined manner within the cooling chamber. The operator can choose the appropriate method to implement this according to the required heat dissipation intensity. Figure 5 The embodiment shown has the best heat dissipation capability.

[0031] The guide ribs 11 and the receiving groove 21 are welded together by vacuum high-temperature brazing. The periphery of the second plate 20 and the periphery of the groove opening are welded together by argon arc welding. The inlet pipe 31, the outlet pipe 32, and the second plate 20 are welded together by argon arc welding. The argon arc welding seal completely isolates the gap at the junction of the first plate 10 and the second plate 20, as well as the risk of leakage at the junction of the inlet pipe 31, the outlet pipe 32, and the second plate 20. During operation, coolant enters the liquid cooling device through the inlet pipe 31. Different heat dissipation channels (guide rib arrangement) are selected for different target materials. After passing through the heat dissipation channels, the coolant reaches the outlet pipe 32, completing the cooling of the target material. The reinforcing ribs result in high structural strength, good channel sealing after welding, and strong heat dissipation capacity.

[0032] This utility model also provides a method for producing a liquid cooling device for vacuum coating targets, comprising: machining mounting holes 12, grooves, guide ribs 11, and stepped structures on a first plate 10; machining a receiving groove, a liquid inlet, and a liquid outlet on a second plate 20; arranging brazing filler metal in the receiving groove; assembling the first plate 10 and the second plate 20 such that the reinforcing ribs on the first plate 10 and the receiving groove are aligned; welding the reinforcing ribs and the receiving groove 21 together using vacuum brazing; then sealing the gap between the groove opening edge and the edge of the second plate 20 using argon arc welding; finally, welding and sealing the liquid inlet pipe 31 and the liquid outlet pipe 32 at the liquid inlet and liquid outlet on the second plate 20 respectively using argon arc welding.

[0033] In this invention, the structural components of the cooling device are sealed by a combination of brazing and argon arc welding, eliminating the need for sealing rings and completely avoiding leakage problems caused by aging of the sealing rings. A receiving groove 21 is machined on the second plate 20 to prevent the brazing filler metal from escaping and ensuring welding performance. The reinforcing ribs and the second plate 20 are vacuum brazed together, which not only increases heat dissipation but also enhances the overall structural strength of the liquid cooling device, solving the problem of deformation of the liquid cooling device under excessive water pressure.

[0034] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the field.

Claims

1. A liquid cooling device for vacuum coating targets, characterized in that: The device includes a first plate and a second plate arranged in an upper and lower stacked manner. The upper surface of the first plate forms a working surface for heat dissipation of the target material. A cooling chamber for containing coolant is provided at the junction of the first plate and the second plate. An inlet pipe and an outlet pipe for coolant in and out of the cooling chamber are provided on the lower surface of the second plate. The first plate, the second plate, the inlet pipe, and the outlet pipe are sealed and assembled by welding.

2. The liquid cooling device for vacuum coating targets according to claim 1, characterized in that: A groove is provided on the lower surface of the first plate, and the second plate covers the groove opening, and the groove cavity forms a cooling chamber.

3. The liquid cooling device for vacuum coating targets according to claim 2, characterized in that: The bottom of the groove is provided with guide ribs for guiding the coolant in the cooling chamber. The upper surface of the second plate is provided with receiving grooves corresponding to the arrangement of the guide ribs. The guide ribs are partially fixedly installed in the receiving grooves.

4. The liquid cooling device for vacuum coating targets according to claim 2 or 3, characterized in that: The groove wall is provided with a stepped structure for assembling and positioning the second plate.

5. The liquid cooling device for vacuum coating targets according to claim 4, characterized in that: The lower surface of the first plate and the lower surface of the second plate are arranged flush. The periphery of the first plate is provided with mounting holes for mounting the cold liquid plate device on the vacuum coating equipment.

6. The liquid cooling device for vacuum coating targets according to claim 3, characterized in that: The groove is a rectangular groove, with the inlet pipe and outlet pipe respectively set at both ends of the groove along its length.

7. The liquid cooling device for vacuum coating targets according to claim 3, characterized in that: The length direction of the guide ribs is consistent with the groove length direction, and the guide ribs are spaced apart along the groove width direction. The two ends of the guide ribs are arranged separately from the groove wall.

8. The liquid cooling device for vacuum coating targets according to claim 3, characterized in that: The guide ribs are spaced apart along the length of the groove between the inlet pipe and the outlet pipe. The length direction of the guide ribs is arranged at an angle to the width direction of the groove. The guide ribs include two A1 guide ribs and each A2 guide rib located between the two A1 guide ribs. One end of one A1 guide rib is arranged to intersect with the A groove wall, and the other end is arranged separately from the B groove wall. One end of the other A1 guide rib is arranged to intersect with the A groove wall, and the other end is arranged separately from the B groove wall. Both ends of each A2 guide rib are arranged separately from the A groove wall and the B groove wall. The A groove wall and the B groove wall are two groove walls arranged along the length of the groove.

9. The liquid cooling device for vacuum coating targets according to claim 3, characterized in that: The two walls of the groove, arranged along its width, are denoted as wall C and wall D. Wall C is located near the inlet pipe, and wall D is located near the outlet pipe. Two guide rib units, each composed of guide ribs, are installed on the bottom of the groove. These two guide rib units are symmetrically arranged about the centerline along the length of the groove. The guide ribs forming each unit include X1, X2, and X3, which are arranged parallel to each other. The length of X1, X2, and X3 is aligned with the length of the groove. The ends of X1, X2, and X3 are connected to wall C. The walls of the C and D tanks are arranged separately. The X1, X2, and X3 guide ribs are arranged sequentially along the middle of the groove towards the outside. The ends of the X2 and X3 guide ribs near the C tank wall are connected by the Y2 guide rib. The ends of the X1 and X2 guide ribs near the D tank wall are connected by the Y1 guide rib. An X4 guide rib is also provided between the X1 and X2 guide ribs. The end of the X4 guide rib near the liquid outlet pipe is arranged separately from the Y1 guide rib. The ends of the X4 guide ribs on the two guide rib units near the liquid inlet pipe are connected by the Y3 guide rib.

10. The liquid cooling device for vacuum coating targets according to claim 3, characterized in that: The guide ribs and the receiving groove are welded together by vacuum high-temperature brazing. The periphery of the second plate and the periphery of the groove opening are welded together by argon arc welding. The inlet pipe, the outlet pipe and the second plate are welded together by argon arc welding.

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