Liquid chemical supply equipment

Abstract

The utility model relates to liquid chemical supply equipment which comprises an equipment cabinet, and an electric control area, a chemical storage area and a pump pipe conveying area which are isolated from one another are arranged in the equipment cabinet. A supply barrel used for storing liquid chemicals is arranged in the chemical storage area, an air pump is arranged in the pump pipe conveying area, a suction pipe is connected between the supply barrel and a thin suction opening of the air pump, and an exhaust opening of the air pump is connected with a supply pipe. The suction pipe and the supply pipe are respectively connected with an air valve, and the air valves are connected with an air compressor used for opening the air valves. A weighing platform is arranged at the bottom of the supply barrel, and the control box controls the air pump and the air compressor to operate according to the weighing result of the weighing platform. According to the liquid chemical supply equipment, the liquid chemicals are placed in the equipment cabinet, conveying and supplying of the liquid chemicals are achieved through the air pump and the pipeline, direct contact between the liquid chemicals and people is avoided, and the safety of the working environment is improved.

Description

Technical Field

[0001] This utility model relates to the field of chemical supply systems, specifically to a liquid chemical supply device. Background Technology

[0002] In manufacturing fields such as semiconductor processing and metal processing, the use of chemical reagents is involved in the production and processing. Taking semiconductor processing as an example, many chemical reagents are involved. For instance, hydrofluoric acid is used when etching silicon dioxide, hydrochloric acid and sulfuric acid are used in wet cleaning, and isopropanol, acetone, and xylene are used for silicon wafer cleaning. The supply of these liquid chemicals requires strict control of the dosage, and replenishment and resupply are necessary when they are consumed during use.

[0003] Because many of these chemical reagents have certain acidity, alkalinity, and corrosiveness, safety must be considered during the storage and supply of these chemicals. Utility Model Content

[0004] To ensure the safety and convenience of chemical supply, this utility model provides a liquid chemical supply device that supplies liquid chemicals according to usage requirements, avoiding direct contact between chemical reagents and personnel, thus providing a safety protection function.

[0005] The technical objective of this utility model is achieved through the following technical solution:

[0006] A liquid chemical supply device includes an equipment cabinet containing an isolated electrical control area, a chemical storage area, and a pump delivery area. The chemical storage area contains a supply tank for storing liquid chemicals. The pump delivery area contains an air pump. A suction pipe connects the supply tank and the air pump's suction port, and a supply pipe connects the air pump's discharge port. Air valves are connected to both the suction pipe and the supply pipe, and each air valve is connected to an air compressor that can be opened by the air valve. A weighing platform is located at the bottom of the supply tank, and a control box controls the operation of the air pump and air compressor based on the weighing results from the weighing platform.

[0007] Furthermore, manual valves are installed on both the suction tube and the supply tube.

[0008] Furthermore, leak-proof side plates are provided on the side walls near the bottom of the chemical storage area and the side walls near the bottom of the pump pipe delivery area.

[0009] Furthermore, perforated leakage holes are provided at the bottom of the chemical storage area and the bottom of the pump pipe delivery area, respectively. A liquid collection box is provided below the bottom of the chemical storage area and the bottom of the pump pipe delivery area, and a liquid collection port is provided at the top of the liquid collection box, which is connected to the leakage hole below.

[0010] Furthermore, the bottom of the chemical storage area and the bottom of the pump pipe delivery area are respectively provided with a receiving cavity for placing the liquid collection box. The receiving cavity has an opening on the side of the equipment cabinet, and the liquid collection box is movably inserted into the receiving cavity through the opening on the side of the equipment cabinet.

[0011] Furthermore, the supply pipe includes a main supply pipe and several branch supply pipes. The manual valve on the main supply pipe is installed on the main supply pipe, and the pneumatic valve on the branch supply pipe is installed on the branch supply pipes.

[0012] Furthermore, the bottom of the equipment cabinet is also equipped with support legs and casters.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0014] 1. The liquid chemical supply equipment of this utility model places liquid chemicals in an equipment cabinet and delivers them through an air pump and pipeline, avoiding direct contact with people and improving the safety of the working environment.

[0015] 2. With the installation of leak-proof side plates, when leaks occur at the interfaces between pipelines, valves, and supply tanks, the leaked liquid chemicals can be contained inside the equipment cabinet, preventing them from flowing out of the equipment cabinet.

[0016] 3. The combination of the collection box and the leakage hole ensures that even if leakage occurs, it can be collected effectively for convenient subsequent processing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the liquid chemical supply equipment in this utility model.

[0018] Figure 2 This is a schematic diagram of the external structure of the liquid chemical supply equipment in this utility model.

[0019] Figure 3 This is a schematic diagram of the internal structure of the liquid chemical supply equipment in this utility model.

[0020] In the picture:

[0021] 1. Equipment cabinet; 2. Electrical control area; 3. Chemical storage area; 4. Pump and pipe delivery area; 5. Supply tank; 6. Air pump; 7. Suction pipe; 8. Supply pipe; 9. Air valve; 10. Weighing platform; 11. Manual valve; 12. Leak-proof side panel; 13. Hollowed-out leakage hole; 14. Liquid collection box; 15. Containing cavity; 16. Main supply pipe; 17. Branch supply pipe; 18. Support legs; 19. Casters; 20. Cabinet door. Detailed Implementation

[0022] The technical solution of this utility model will be further described below with reference to specific embodiments:

[0023] A liquid chemical supply device, such as Figures 1-3 As shown, the system includes an equipment cabinet 1, within which are isolated electrical control area 2, chemical storage area 3, and pump delivery area 4. A supply tank 5 for storing liquid chemicals is located in the chemical storage area 3. An air pump 6 is located in the pump delivery area 4. A suction pipe 7 connects the supply tank 5 and the suction port of the air pump 6, and a supply pipe 8 connects the discharge port of the air pump 6. Air valves 9 are connected to the suction pipe 7 and the supply pipe 8, and the air valves 9 are connected to an air compressor that can be opened by the air valves. A weighing platform 10 is located at the bottom of the supply tank 5. The control box controls the operation of the air pump 6 and the air compressor based on the weighing results from the weighing platform. In one specific embodiment, the air pump is, for example, a FLUX-GERATE GMBH injection-molded FDM25 air pump.

[0024] The weighing platform 10 includes a support plate, on which the supply tank is placed. A pressure sensor is installed below the support plate. The sensor is powered by DC through a transmitter, and the pressure sensor's pressure signal is sent to the control box through the signal transmitter. The control box contains a PLC control system. When liquid chemicals need to be supplied, the control box is used to operate the system, detect the current pressure value of the pressure sensor, and simultaneously start the air compressor and air pump. When the pressure value of the pressure sensor drops to the value after the liquid chemical supply is reduced, the air compressor and air pump are turned off, and the delivery is stopped. The correspondence between the pressure value of the pressure sensor and the weight of the liquid chemicals can be calculated proportionally, that is, the delivery volume of liquid chemicals corresponds to the change in the pressure value of the pressure sensor.

[0025] Preferably, manual valves 11 are provided on the suction pipe 7 and the supply pipe 8 respectively. The manual valves 11 are kept open when the equipment is in use, and the pipeline is closed by the manual valves 11 in case of emergency.

[0026] Preferably, the supply pipe 8 includes a main supply pipe 16 and several supply branch pipes 17. In this embodiment, the main supply pipe 16 is connected to two supply branch pipes 17. The manual valve 11 on the supply pipe 8 is installed on the main supply pipe, and the pneumatic valve on the supply pipe 8 is installed on the supply branch pipe. Chemicals are supplied to different processes through the supply branch pipes.

[0027] Considering the possibility of leakage at pipe joints during use, leak-proof side plates 12 are installed on the side wall near the bottom of the chemical storage area and the side wall near the bottom of the pump pipe delivery area. The leak-proof side plates 12 are higher than the bottom of the chemical storage area and the bottom of the pump pipe delivery area to prevent chemicals leaking at the bottom of the chemical storage area or the bottom of the pump pipe delivery area from overflowing through the door gap of the cabinet door 20 of the equipment cabinet.

[0028] To facilitate the collection and treatment of leaked chemicals, perforated leakage holes 13 are provided at the bottom of the chemical storage area and the bottom of the pump delivery area. Collection boxes 14 are located below the bottom of both areas, with a collection port at the top that receives the leakage hole 13. A receiving cavity 15 for holding the collection box is provided at the bottom of both the chemical storage area and the pump delivery area. The receiving cavity 15 has an opening on the side of the equipment cabinet 1, and the collection box 14 is inserted into the receiving cavity 15 through the opening on the side of the equipment cabinet. Leaked chemical liquid flows along the leakage hole into the collection box 14 within the receiving cavity. Afterwards, the collection box 15 is removed from the receiving cavity 15, and the collected chemical liquid is safely disposed of.

[0029] Preferably, the bottom of the equipment cabinet is also equipped with support feet 18 and casters 19. The support feet 18 are liftable support feet. When the equipment cabinet does not need to be moved, the support feet 18 can be extended downwards to support the ground. When the equipment cabinet needs to be moved, the support feet 18 can be raised upwards or retracted to support the ground via the casters.

[0030] In one specific embodiment, the support foot includes a mounting base and a foot with a threaded rod. The mounting base is installed at the bottom of the equipment cabinet, and the threaded rod of the foot is threadedly engaged with the mounting base. The height of the support foot can be adjusted by adjusting the thread feed of the threaded rod relative to the mounting base.

[0031] In this embodiment, the entire equipment cabinet can be made by splicing together PP sheets (polypropylene). The cabinet door and liquid collection box can also be made by splicing together PP sheets. The cabinet door is installed on the side of the cabinet body by hinges. PP material has the advantages of chemical stability, does not react with substances such as acids and alkalis, and has a smooth surface that is easy to clean.

[0032] As an alternative, ventilation valves can be installed on the side walls or top of the cabinet to ensure ventilation inside the cabinet.

[0033] This embodiment is merely a further explanation of the present invention and is not intended to limit the present invention. After reading this specification, those skilled in the art can make non-inventive modifications to this embodiment as needed, but such modifications are protected by patent law as long as they fall within the scope of the claims of the present invention.

Claims

1. A liquid chemical supply device, characterized in that, The system includes an equipment cabinet containing isolated electrical control, chemical storage, and pump delivery areas. The chemical storage area contains supply tanks for storing liquid chemicals. The pump delivery area contains an air pump. A suction pipe connects the supply tanks and the air pump's inlet, and a supply pipe connects the air pump's outlet. Air valves are connected to both the suction pipe and the supply pipe, and these air valves are connected to an air compressor that operates on the air valves. A weighing platform is located at the bottom of the supply tanks, and a control box controls the operation of the air pump and air compressor based on the weighing results from the weighing platform.

2. The liquid chemical supply equipment according to claim 1, characterized in that, Manual valves are installed on the suction pipe and the supply pipe respectively.

3. The liquid chemical supply equipment according to claim 1, characterized in that, Leak-proof side plates are respectively installed on the side wall near the bottom of the chemical storage area and the side wall near the bottom of the pump pipe delivery area.

4. A liquid chemical supply device according to claim 3, characterized in that, The bottom of the chemical storage area and the bottom of the pump pipe delivery area are respectively provided with perforated leakage holes. A liquid collection box is provided below the bottom of the chemical storage area and the bottom of the pump pipe delivery area. A liquid collection port is provided at the upper end of the liquid collection box, and the liquid collection port is connected to the bottom of the leakage holes.

5. A liquid chemical supply device according to claim 4, characterized in that, The bottom of the chemical storage area and the bottom of the pump pipe delivery area are respectively provided with a receiving cavity for placing the liquid collection box. The receiving cavity has an opening on the side of the equipment cabinet, and the liquid collection box is movably inserted into the receiving cavity through the opening on the side of the equipment cabinet.

6. A liquid chemical supply device according to claim 2, characterized in that, The supply pipe includes a main supply pipe and several branch supply pipes. A manual valve is installed on the main supply pipe, and a pneumatic valve is installed on the branch supply pipes.

7. A liquid chemical supply device according to claim 1, characterized in that, The bottom of the equipment cabinet is also equipped with support feet and casters.

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