Ceramic membrane filter for concentrating silicon powder cutting fluid

Abstract

The utility model discloses a ceramic membrane filter for concentrating silicon powder cutting fluid, and relates to the technical field of filters, the ceramic membrane filter comprises a support table and a filter pipe positioned on the support table, the top of the support table is connected with a support frame, the top of the support frame is connected with an upper collecting pipe, the top of the support table is connected with a lower collecting pipe, and the upper collecting pipe is connected with a filter screen. The ends, facing the filter pipe, of the upper collecting pipe and the lower collecting pipe are connected with communicating pipes, the communicating pipes are connected with the filter pipe, the side wall of the filter pipe is connected with a flowing opening, and the interior of the filter pipe is connected with an upper fixing disc and a lower fixing disc. According to the ceramic membrane filter for concentrating the silicon powder cutting fluid, the upper fixing disc sealing sleeve and the top plate are arranged in a matched manner, so that the filter element can be conveniently taken down to be cleaned, the efficiency of subsequently filtering the silicon powder cutting fluid is improved, meanwhile, the sealing performance of the connecting part is improved, and the leakage condition is avoided.

Description

Technical Field

[0001] This utility model relates to the field of filter technology, and more specifically to a ceramic membrane filter for concentrating silicon powder cutting fluid. Background Technology

[0002] A ceramic membrane filter for silicon powder cutting fluid concentration is a device specifically designed to treat cutting fluids containing silicon powder. It uses ceramic membrane technology to separate solid particles from the liquid in the cutting fluid. This type of filter is widely used in industries such as semiconductors, electronics, and machining, especially in processes requiring high purity and high precision. Because the filtered silicon powder cutting fluid contains solid particles, it needs to be cleaned frequently.

[0003] Chinese patent application number 201921338286.9 discloses a ceramic membrane filter. The structure includes a tank, an inlet pipe located inside the tank at the bottom, a screw at the top of the inlet pipe, and a ceramic membrane filter tube connected to the inlet pipe via the screw on the outer wall of the top of the inlet pipe. A lower support plate is also provided inside the tank. However, this ceramic membrane filter has the following problems in use:

[0004] 1. When filtering silicon powder cutting fluid, the presence of a large number of particles in the fluid can easily cause dirt to accumulate on the filter element, affecting subsequent normal filtration. In this case, it is necessary to clean the internal filter element. However, this device does not allow for easy removal of the internal filter element, which increases the difficulty of cleaning.

[0005] 2. After replacing the filter element, the seal may become loose, causing liquid that did not pass through the filter element to leak out, affecting the normal use of the filter.

[0006] Therefore, it is necessary to propose a ceramic membrane filter for concentrating silicon powder cutting fluid to solve the above problems. Utility Model Content

[0007] To address the above problems, this utility model provides a ceramic membrane filter for concentrating silicon powder cutting fluid; it facilitates the disassembly and assembly of the filter tube, allows for cleaning of the internal filter element, and improves the sealing performance at the connection points.

[0008] To achieve the above objectives, this utility model specifically adopts the following technical solution:

[0009] A ceramic membrane filter for concentrating silicon powder cutting fluid includes a support platform and a filter tube located on the support platform. A support frame is connected to the top of the support platform, an upper manifold is connected to the top of the support frame, and a lower manifold is connected to the top of the support platform. A connecting pipe is connected to the end of the upper and lower manifolds facing the filter tube. The connecting pipe is connected to the filter tube. A flow port is connected to the side wall of the filter tube. An upper fixed plate and a lower fixed plate are connected inside the filter tube. The upper and lower fixed plates have a circumferential array of fixing holes. A filter element is sleeved inside the fixing holes.

[0010] The outer wall of the filter element is fitted with a sealing sleeve located in the fixing hole. An annular groove is formed on the outer wall of the sealing sleeve, and an upper sealing ring is fitted in the annular groove. A top plate is provided between the top of the filter tube and the connecting tube. A through hole is formed on the top plate and is coaxial with the fixing hole. A sealing block is connected in the through hole. The bottom of the sealing block is provided with a stepped part that cooperates with the sealing sleeve.

[0011] Preferably, the top plate has sealing grooves on its upper and lower sides that mate with the flange, and a sealing ring is fitted inside the sealing groove.

[0012] Preferably, a telescopic rubber ball is connected to the top of the connecting pipe, and flanges are provided at both the upper and lower ends of the telescopic rubber ball.

[0013] Preferably, the upper and lower ends of the telescopic rubber ball are provided with extrusion parts, and the inner ring surface of the flange is provided with a groove corresponding to the extrusion parts.

[0014] Preferably, an annular groove is formed in the fixing hole on the lower fixing plate, and a lower sealing ring is fitted inside the annular groove.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] 1. This device, through the cooperation of the upper fixed plate sealing sleeve and the top plate, facilitates the removal of the filter element for cleaning, improves the efficiency of subsequent filtration of silicon powder cutting fluid, and enhances the sealing of the connection to prevent leakage.

[0017] 2. This device has a telescopic rubber ball component at the top of the filter tube. The telescopic rubber ball makes it easy to remove the filter tube for cleaning, thus improving the convenience of cleaning. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the support platform and filter tube structure in this utility model;

[0019] Figure 2 This is a schematic diagram of the filter tube and connecting tube structure in this utility model;

[0020] Figure 3 This is a schematic diagram of the upper fixing plate and top plate structure in this utility model;

[0021] Figure 4 This is a schematic diagram of the lower fixed plate and filter tube structure in this utility model;

[0022] Figure 5 This is an exploded view of the filter element and top plate structure in this utility model;

[0023] Figure 6 This is a schematic diagram of the telescopic rubber ball and flange structure in this utility model.

[0024] Figure label:

[0025] 101. Support platform; 102. Filter tube; 103. Support frame; 104. Upper manifold; 105. Lower manifold; 106. Connecting pipe; 107. Flow port; 108. Upper fixed plate; 109. Lower fixed plate; 110. Fixing hole; 111. Filter element; 112. Sealing sleeve; 113. Upper sealing ring; 114. Top plate; 115. Sealing block; 116. Stepped section; 117. Sealing ring; 118. Telescopic rubber ball; 119. Extrusion section; 120. Groove section; 121. Lower sealing ring; 122. Flange. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1-6A ceramic membrane filter for concentrating silicon powder cutting fluid includes a support platform 101 and a filter tube 102 located on the support platform 101. Multiple filter elements 111, each a ceramic membrane, are disposed inside the filter tube 102. Liquid passing through the ceramic membrane is discharged through a flow port 107. A support frame 103 is connected to the top of the support platform 101, and an upper manifold 104 is connected to the top of the support frame 103. Both the upper manifold 104 and the lower manifold 105 can serve as inlet and outlet pipes, respectively. The lower manifold 105 is connected to the top of the support platform 101. The upper and lower manifolds 104 face the filter tube 102. One end is connected to a connecting pipe 106, which is a tapered pipe for liquid flow. The connecting pipe 106 is connected to a filter pipe 102. A flow port 107 is connected to the side wall of the filter pipe 102 for discharging the liquid that has passed through the filter element 111. An upper fixing plate 108 and a lower fixing plate 109 are connected inside the filter pipe 102. The upper fixing plate 108 and the lower fixing plate 109 support the filter element 111. The upper fixing plate 108 and the lower fixing plate 109 are provided with a circumferential array of fixing holes 110 for the filter element 111 to pass through. The filter element 111 is fitted inside the fixing holes 110.

[0028] A sealing sleeve 112 is fitted onto the top of the outer wall of the filter element 111, located within the fixing hole 110. The sealing sleeve 112 is fitted onto the filter element 111, serving to stabilize it within the fixing hole 110. The upper sealing ring 113 on the outer wall contacts the outer wall of the fixing hole 110, improving the sealing performance. An annular groove is formed on the outer wall of the sealing sleeve 112, and the inner wall of the annular groove is triangular. The inner annular surface of the upper sealing ring 113 is also triangular to prevent the upper sealing ring 113 from flipping upside down, thus improving the stability. The upper sealing ring is fitted inside the annular groove. 113. A top plate 114 is provided between the top of the filter tube 102 and the connecting tube 106. The top plate 114 is used to press the filter element 111 onto the upper fixing plate 108. A through hole coaxially arranged with the fixing hole 110 is provided on the top plate 114. A sealing block 115 is connected in the through hole. The sealing block 115, the upper sealing ring 113, the sealing ring 117 and the lower sealing ring 121 are made of corrosion-resistant rubber. The bottom of the sealing block 115 is provided with a stepped part 116 that cooperates with the sealing sleeve 112. The stepped part 116 is used to adapt to the connection between the top of the filter element 111 and the sealing sleeve 112.

[0029] Specifically, refer to Figure 5 The top plate 114 has sealing grooves on its upper and lower sides that match the flange. The sealing grooves at the top and bottom are staggered to avoid localized strength reduction. A sealing ring 117 is fitted inside the sealing groove.

[0030] Specifically, refer to Figure 2 and Figure 6 The top of the connecting pipe 106 is connected to a telescopic rubber ball 118. The telescopic rubber ball 118 is provided with reinforcing ribs to improve the tensile strength of the lower sealing ring 121. The upper and lower ends of the telescopic rubber ball 118 are provided with flanges 122, and the lower sealing ring 121 is fixed to the upper manifold 104 or the lower manifold 105 through the flanges 122.

[0031] Specifically, refer to Figure 6 The telescopic rubber ball 118 is provided with extrusion parts 119 at both the upper and lower ends. The extrusion parts 119 on the flange 122 clamp the extrusion parts 120 to the extrusion parts 119, thereby improving the stability of the telescopic rubber ball 118 during use. The inner ring surface of the flange 122 is provided with a groove 120 corresponding to the extrusion parts 119.

[0032] Specifically, refer to Figure 4 An annular groove is provided in the fixing hole 110 on the lower fixing plate 109. The annular groove at the bottom is used to support the bottom of the filter element 111. A lower sealing ring 121 is fitted inside the annular groove.

[0033] In this embodiment, the silicon powder concentrated cutting fluid to be filtered is added from the top manifold 104. The liquid is dispersed into multiple parts and then enters the filter tube 102 through the connecting pipe 106. When it flows through the filter element 111, the liquid that can pass through the filter element 111 will enter the area between the filter element 111 and the filter tube 102, and then be discharged from the flow port 107. The liquid that does not pass through will enter the lower manifold 105 and then move to the next process.

[0034] When it is necessary to clean the filter element 111 inside the filter tube 102, first loosen the bolts on the upper and lower flanges of the filter tube 102, then remove the filter tube 102 and clean the internal filter element 111. After cleaning, put the sealing sleeve 112 on the filter element 111 and insert it into the fixing holes 110 on the upper fixing plate 108 and the lower fixing plate 109. Then cover the top plate 114. The sealing block 115 on the top plate 114 will press on the top of the sealing sleeve 112 to improve the sealing performance. Then install the filter tube 102 back through the bolt connector. The telescopic rubber ball 118 on the top has telescopic capability, which makes it easy to adjust the position when disassembling the filter tube 102.

[0035] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A ceramic membrane filter for concentrating silicon powder cutting fluid, characterized in that: Includes a support platform (101) and a filter tube (102) located on the support platform (101). A support frame (103) is connected to the top of the support platform (101). An upper manifold (104) is connected to the top of the support frame (103). A lower manifold (105) is connected to the top of the support platform (101). A connecting pipe (1) is connected to one end of the upper manifold (104) and the lower manifold (105) facing the filter tube (102). 06), the connecting pipe (106) is connected to the filter pipe (102), the filter pipe (102) has a flow port (107) connected to its side wall, the filter pipe (102) has an upper fixed plate (108) and a lower fixed plate (109) connected inside, the upper fixed plate (108) and the lower fixed plate (109) have a circumferential array of fixing holes (110), and a filter element (111) is fitted inside the fixing holes (110); The top of the outer wall of the filter element (111) is fitted with a sealing sleeve (112) located in the fixing hole (110). An annular groove is provided on the outer wall of the sealing sleeve (112). An upper sealing ring (113) is fitted in the annular groove. A top plate (114) is provided between the top of the filter tube (102) and the connecting tube (106). A through hole is provided on the top plate (114) and coaxially arranged with the fixing hole (110). A sealing block (115) is connected in the through hole. A stepped part (116) that cooperates with the sealing sleeve (112) is provided at the bottom of the sealing block (115).

2. The ceramic membrane filter for concentrating silicon powder cutting fluid according to claim 1, characterized in that: The top plate (114) has sealing grooves on its upper and lower sides that match the flanges, and a sealing ring (117) is fitted inside the sealing groove.

3. A ceramic membrane filter for concentrating silicon powder cutting fluid according to claim 1, characterized in that: The top of the connecting pipe (106) is connected to a telescopic rubber ball (118), and flanges (122) are provided at the upper and lower ends of the telescopic rubber ball (118).

4. A ceramic membrane filter for concentrating silicon powder cutting fluid according to claim 3, characterized in that: The upper and lower ends of the telescopic rubber ball (118) are provided with extrusion parts (119), and the inner ring surface of the flange (122) is provided with a groove (120) corresponding to the extrusion part (119).

5. A ceramic membrane filter for concentrating silicon powder cutting fluid according to claim 1, characterized in that: An annular groove is provided in the fixing hole (110) on the lower fixing plate (109), and a lower sealing ring (121) is fitted inside the annular groove.

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