Silicon rod end face detection tool

Abstract

The utility model relates to a silicon rod end face detection tool which comprises a base, a rotating roller seat mechanism is installed on the base in a matched mode, two installation seats which are oppositely arranged in a spaced mode are installed on the top of the base in a sliding mode, a point laser range finder is installed on each installation seat through a floating adjusting mechanism, and the two installation seats are arranged on the two sides of a workpiece on the rotating roller seat mechanism. The two laser range finders are respectively aligned with two end surfaces of the workpiece; distance data of multiple detection points on one end face of a workpiece are obtained through one point laser range finder, distance data of multiple detection points on the other end face of the workpiece are obtained through the other point laser range finder, the workpiece is driven to rotate by rotating the roller seat mechanism, and therefore the detection points on the workpiece are replaced. By arranging the rotating roller seat mechanism, the mounting seat, the floating adjusting mechanism and the point laser range finder, efficient form and location tolerance detection can be carried out on the circular surfaces at the two ends of the silicon rod, so that short rods suitable for splicing can be conveniently and quickly selected, the operation is simple and convenient, the measurement precision is high, and the measurement efficiency is high.

Description

Technical Field

[0001] This utility model relates to the field of silicon rod processing technology, and in particular to a silicon rod end face inspection tool. Background Technology

[0002] In the manufacturing process of solar monocrystalline silicon wafers, the long silicon rods pulled from the crystal pulling workshop need to be cut into standard-length round silicon rods by a cutting machine. During the cutting process, some short round silicon rods that are not of standard size will be generated. In order not to waste these short round rods, suitable short round rods are selected manually and spliced ​​into a standard-sized round rod, which is then used as a standard silicon rod in subsequent processes.

[0003] In existing technologies, during the manual selection of short round bars, operators use handheld measuring instruments to check the form and position tolerances of the bars in order to select those suitable for bonding. This method, which relies on manual handheld measuring instruments, suffers from problems such as large measurement errors, difficult measurement operations, long time consumption, and low measurement efficiency. Utility Model Content

[0004] To address the shortcomings of existing production technologies, the applicant provides a silicon rod end face inspection fixture. By incorporating a rotating roller seat mechanism, a mounting base, a floating adjustment mechanism, and a point laser rangefinder, it can efficiently inspect the dimensional and positional tolerances of the circular surfaces at both ends of the silicon rod, thereby facilitating the quick and easy selection of suitable short rods for splicing. The fixture is simple and convenient to operate, with high measurement accuracy and efficiency.

[0005] The technical solution adopted in this utility model is as follows:

[0006] A silicon rod end face inspection fixture includes a base, on which a rotating roller seat mechanism is fitted. The rotating roller seat mechanism supports the workpiece and drives the workpiece to rotate. Two opposing and spaced mounting seats are slidably mounted on the top of the base. A point laser rangefinder is mounted on a single mounting seat through a floating adjustment mechanism. The two mounting seats are arranged on both sides of the workpiece on the rotating roller seat mechanism, so that the two point laser rangefinders are respectively aligned with the two end faces of the workpiece.

[0007] The distance data of multiple detection points on one end face of the workpiece is obtained by a single laser rangefinder, and the distance data of multiple detection points on the other end face of the workpiece is obtained by another laser rangefinder. The workpiece is rotated by a rotating roller mechanism, thereby changing the detection points on the workpiece.

[0008] As a further improvement to the above technical solution:

[0009] A single mounting bracket is slidably mounted to the base via a slide rail assembly.

[0010] A linear scale is arranged below each mounting base, and the linear scale is fixed to the base.

[0011] A linear pointer is fixed on a single mounting base, and the linear pointer corresponds one-to-one with a linear scale.

[0012] The structure of the rotating roller seat mechanism is as follows: it includes two spaced rollers, and symmetrically arranged bearing assemblies are installed at both ends of the outer circumference of each roller. Each bearing assembly includes a self-aligning bearing. A pressure plate is installed on one side of the self-aligning bearing, and a scale is installed on the other side of the self-aligning bearing. A shaft clamp is installed on one side of the scale, and an indicator needle is fixed on the shaft clamp. The indicator needle points to the scale line on the scale.

[0013] The middle section of the outer circumference of a single roller is coated with rubber.

[0014] One end of one of the rollers is provided with a square key bar, which is used to fix the handwheel.

[0015] The structure of a single floating adjustment mechanism includes a first adjustment shaft and a second adjustment shaft;

[0016] A spherical bearing is fitted on the outer circumference of the first adjusting shaft. The first adjusting shaft is installed in conjunction with the corresponding mounting base through the spherical bearing. A mounting plate is fixed to the shaft end of the first adjusting shaft.

[0017] A handle is fixed to one end of the second adjusting shaft, and a turntable is fixed to the other end of the second adjusting shaft;

[0018] The turntable is rotatably mounted on the mounting plate. A fixing seat is fixed on the end face of the turntable. The fixing seat is used to install the corresponding point laser rangefinder. A limiting rod is fixed on the end face of the fixing seat. A rubber head is fitted to the end of the limiting rod.

[0019] A single mounting base is installed by several adjusting bolts in conjunction with a corresponding mounting plate. By changing the tightening force of different adjusting bolts on the corresponding mounting plate, the first adjusting shaft is displaced, thereby driving the corresponding point laser rangefinder to move.

[0020] The base is supported by a frame, on which an electrical control cabinet is installed. The electrical control cabinet is electrically connected to two point laser rangefinders.

[0021] The beneficial effects of this utility model are as follows:

[0022] This utility model has a compact and reasonable structure and is easy to operate. By setting up a rotating roller seat mechanism, a mounting base, a floating adjustment mechanism and a point laser rangefinder, it can acquire multiple sets of distance data, thereby obtaining the form and position tolerance parameters of the two end faces of the workpiece. This makes it convenient and quick to select suitable splicing silicon rods. The operation is simple and convenient, with high measurement accuracy and high measurement efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of this utility model.

[0024] Figure 2 This is a structural diagram of the present invention with the frame omitted.

[0025] Figure 3 This is a schematic diagram of the base structure in this utility model.

[0026] Figure 4 This is a schematic diagram of the rotating roller seat mechanism in this utility model (only one roller shaft is shown).

[0027] Figure 5 This is a schematic diagram of the installation structure between the mounting base and the point laser rangefinder in this utility model.

[0028] Figure 6 This is a schematic diagram of the floating adjustment mechanism in this utility model.

[0029] The components include: 1. Base; 2. Rotating roller seat mechanism; 3. Mounting seat; 4. Slide rail assembly; 5. Floating adjustment mechanism; 6. Point laser rangefinder; 7. Frame; 8. Adjusting bolt; 9. Workpiece; 10. Linear ruler; 11. Linear pointer; 12. Clamp; 13. Handwheel;

[0030] 201. Roller shaft; 202. Dial; 203. Self-aligning bearing; 204. Pressure plate; 205. Square key bar; 206. Indicator needle; 207. Shaft clamp;

[0031] 501. First adjusting shaft; 502. Second adjusting shaft; 503. Mounting plate; 504. Handle; 505. Joint bearing; 506. Turntable; 507. Fixing seat; 508. Protective cover; 509. Limiting rod; 510. Rubber head. Detailed Implementation

[0032] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0033] The structure and function of this utility model are as follows:

[0034] like Figures 1-6As shown, a silicon rod end face inspection fixture includes a base 1, on which a rotating roller seat mechanism 2 is mounted. The rotating roller seat mechanism 2 supports a workpiece 9 and drives the workpiece 9 to rotate. Two opposing and spaced mounting seats 3 are slidably mounted on the top of the base 1. A point laser rangefinder 6 is mounted on each mounting seat 3 through a floating adjustment mechanism 5. The two mounting seats 3 are arranged on both sides of the workpiece 9 on the rotating roller seat mechanism 2, so that the two point laser rangefinders 6 are respectively aligned with the two end faces of the workpiece 9. By setting up the rotating roller seat mechanism 2, mounting seats 3, floating adjustment mechanism 5 and point laser rangefinder 6, efficient form and position tolerance inspection of the circular surfaces at both ends of the silicon rod can be performed, thereby facilitating and quickly selecting suitable spliced ​​silicon rods. The operation is simple and convenient, with high measurement accuracy and high measurement efficiency.

[0035] Distance data for multiple detection points on one end face of workpiece 9 is acquired using a single-point laser rangefinder 6, and distance data for multiple detection points on the other end face of workpiece 9 is acquired using a second-point laser rangefinder 6. The workpiece 9 is then rotated via a rotating roller mechanism 2, thereby changing the detection points on workpiece 9. Based on the distance data acquired by the two laser rangefinders 6, the form and position tolerance parameters for the two end faces of workpiece 9 can be obtained, including parallelism and perpendicularity.

[0036] A single mounting base 3 is slidably mounted to the base 1 via a slide rail assembly 4. The slide rail assembly 4 includes two slide rails, each with several sliders mounted on it. These sliders are fixed to the bottom of the corresponding mounting base 3. By setting up the slide rail assembly 4, the mounting base 3 can be easily moved relative to the base 1, thereby facilitating the adjustment of the position of the corresponding point laser rangefinder 6 and ensuring that the distance of the corresponding point laser rangefinder 6 is within its measuring range. In this invention, it is necessary to ensure that the distance between the two point laser rangefinders 6 and their corresponding end faces is within the range of 30mm-50mm.

[0037] In addition, a clamp 12 is installed on each individual mounting base 3 to lock the corresponding mounting base 3 and prevent displacement after the distance adjustment is completed.

[0038] A linear scale 10 is arranged below each individual mounting base 3 and is fixed to the base 1. A linear pointer 11 is fixed on each individual mounting base 3, and the linear pointer 11 corresponds one-to-one with the linear scale 10. By setting the linear scale 10 and the corresponding linear pointer 11, a reference can be provided for adjusting the position of the mounting base 3, making it convenient to quickly adjust the mounting base 3 into place.

[0039] The rotating roller support mechanism 2 has the following structure: it includes two spaced rollers 201. Symmetrically arranged bearing assemblies are installed at both ends of the outer circumference of each roller 201. Each bearing assembly includes a self-aligning bearing 203. A pressure plate 204 is installed on one side of the self-aligning bearing 203, and a scale 202 is installed on the other side. A shaft clamp 207 is installed on one side of the scale 202, and an indicator needle 206 is fixed on the shaft clamp 207, pointing to a graduation line on the scale 202. The workpiece 9 is placed on both rollers 201 simultaneously, and the two rollers 201 jointly support the workpiece 9. By setting the scale 202, the rotation angle of each rotation of the corresponding roller 201 can be determined, thereby determining the rotation angle of the workpiece 9.

[0040] The single roller shaft 201 is rotatably installed on the base 1 via the corresponding self-aligning bearing 203. By setting the pressure plate 204 and the shaft clamp 207, the axial displacement of the corresponding self-aligning bearing 203 is limited to ensure its installation stability.

[0041] The middle section of the outer circumference of a single roller 201 is coated with rubber to prevent the workpiece 9 from being bumped or knocked during the rotation of the workpiece 9 by the roller 201.

[0042] One end of one of the roller shafts 201 is provided with a square key bar 205, which is used to fix the handwheel 13. By providing the handwheel 13, it is convenient for the operator to drive the corresponding roller shaft 201 to rotate.

[0043] The structure of a single floating adjustment mechanism 5 is as follows: it includes a first adjustment shaft 501 and a second adjustment shaft 502; a spherical bearing 505 is fitted on the outer circumference of the first adjustment shaft 501, and the first adjustment shaft 501 is fitted with a corresponding mounting base 3 through the spherical bearing 505; a mounting plate 503 is fixed to the shaft end of the first adjustment shaft 501; a handle 504 is fixed to one shaft end of the second adjustment shaft 502, and a turntable 506 is fixed to the other shaft end of the second adjustment shaft 502; the turntable 506 is rotatably mounted on the mounting plate 503, and a fixing seat 507 is fixed to the end face of the turntable 506. The fixing seat 507 is used to install the corresponding point laser rangefinder 6, and a limiting rod 509 is fixed to the end face of the fixing seat 507. A rubber head 510 is fitted to the end of the limiting rod 509. The limiting rod 509 is used to limit the axial displacement of the workpiece 9 to prevent the workpiece 9 from colliding with the point laser rangefinder 6 and causing damage; the rubber head 510 prevents the limiting rod 509 from damaging the workpiece 9.

[0044] In a single floating adjustment mechanism 5, a protective cover 508 is installed on the fixed base 507. The protective cover 508 is used to protect the corresponding point laser rangefinder 6.

[0045] Each mounting base 3 is installed in conjunction with a corresponding mounting plate 503 via several adjusting bolts 8. By changing the tightening force of different adjusting bolts 8 on the corresponding mounting plate 503, the first adjusting shaft 501 is displaced, thereby moving the corresponding point laser rangefinder 6. In this invention, each mounting base 3 is provided with eight adjusting bolts 8, which are arranged in pairs in the four directions of the corresponding mounting plate 503: top, bottom, left, and right. Each adjusting bolt 8 passes through the plate surface of the corresponding mounting base 3 and tightens against the corresponding mounting plate 503. By setting up the floating adjustment mechanism 5 and adjusting bolts 8, it is convenient to calibrate the corresponding point laser rangefinder 6.

[0046] In this invention, before processing workpieces 9 (i.e., silicon rods) of different diameters, the silicon rod end face inspection fixture must first calibrate two point laser rangefinders 6 respectively; the calibration process of one of the point laser rangefinders 6 is as follows:

[0047] First, place the standard silicon rod on the rotating roller seat mechanism 2, and measure the form and position tolerance parameters of the end face of the standard silicon rod using the point laser rangefinder 6. If the form and position tolerance parameters measured by the point laser rangefinder 6 are consistent with the standard parameters of the standard silicon rod, then the point laser rangefinder 6 meets the usage requirements.

[0048] If the form and position tolerance parameters measured by the point laser rangefinder 6 are inconsistent with the standard data of the standard silicon rod, the tightening force of the adjusting bolts 8 in the four directions on the corresponding mounting plate 503 is adjusted to make the first adjusting shaft 501 float relative to the mounting base 3 (its floating degree of freedom is provided by the corresponding spherical bearing 505), thereby causing the point laser rangefinder 6 to produce a small displacement. Then, the point laser rangefinder 6 is tested again until the form and position tolerance parameters it measures are consistent with the standard parameters of the standard silicon rod, then the calibration is completed.

[0049] The calibration process for the laser rangefinder 6 is the same as described above.

[0050] The standard parameters of the standard silicon rod are accurately measured manually and then archived for later use in measurement tooling calibration.

[0051] After calibration, when measuring workpieces 9 of the same diameter, simply place workpiece 9 on the rotating roller seat mechanism 2 to perform the measurement.

[0052] The base 1 is supported by the frame 7, on which an electrical control cabinet is installed. The electrical control cabinet is electrically connected to two point laser rangefinders 6. The base 1 is fixed to the platform of the frame 7 by threaded connectors. The electrical control cabinet contains a data analysis and computing system and related supporting electrical control components, which can perform calculations and analysis on the distance data collected by the two point laser rangefinders 6 to obtain the form and position tolerance measurement results.

[0053] The working process of this utility model is as follows:

[0054] Place the workpiece 9 to be measured on the rotating roller seat mechanism 2, loosen the two clamps 12, and adjust the distance between the corresponding point laser rangefinder 6 and the two end faces of the workpiece 9 through the two mounting seats 3 respectively. After ensuring that the two point laser rangefinders 6 are within their respective ranges, lock the two clamps 12.

[0055] The operator manually turns a handle 504, which drives the corresponding turntable 506 to rotate relative to the corresponding mounting plate 503 through the corresponding second adjustment shaft 502. This, in turn, drives the corresponding point laser rangefinder 6 to rotate, thereby selecting the initial detection point of the point laser rangefinder 6. The other point laser rangefinder 6 selects its initial detection point in the same way.

[0056] Subsequently, according to the scale 202 on the roller 201 and the ratio of the diameter of the workpiece 9 to the diameter of the corresponding roller 201, the operator drives the corresponding roller 201 to rotate a certain angle through the handwheel 13, thereby driving the workpiece 9 to rotate 60° by friction. The operator drives the workpiece 9 to rotate six times by rotating the roller seat mechanism 2, each time rotating 60°. Every time the workpiece 9 rotates 60°, the laser rangefinder 6 at two points simultaneously collects distance data, thus finally obtaining six sets of distance data.

[0057] By separating and processing the six sets of distance data through the data analysis and computing system inside the electrical control cabinet, the parallelism of the two end faces of workpiece 9 and the perpendicularity of the two end faces to the axis can be obtained.

[0058] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. A tooling for inspecting the end face of a silicon rod, characterized in that: Includes a base (1), on which a rotating roller seat mechanism (2) is fitted. The rotating roller seat mechanism (2) supports the workpiece (9) and drives the workpiece (9) to rotate. Two mounting seats (3) are slidably installed on the top of the base (1) and are arranged at intervals. A point laser rangefinder (6) is installed on a single mounting seat (3) through a floating adjustment mechanism (5). The two mounting seats (3) are arranged on both sides of the workpiece (9) on the rotating roller seat mechanism (2), so that the two point laser rangefinders (6) are respectively aligned with the two end faces of the workpiece (9). The distance data of multiple detection points on one end face of the workpiece (9) is obtained by a laser rangefinder (6) at one point, and the distance data of multiple detection points on the other end face of the workpiece (9) is obtained by another laser rangefinder (6). The workpiece (9) is rotated by a rotating roller seat mechanism (2), thereby changing the detection points on the workpiece (9).

2. The silicon rod end face inspection fixture as described in claim 1, characterized in that: A single mounting base (3) is slidably mounted to the base (1) via a slide rail assembly (4).

3. The silicon rod end face inspection fixture as described in claim 1, characterized in that: A straight ruler (10) is arranged below a single mounting base (3), and the straight ruler (10) is fixed on the base (1).

4. The silicon rod end face inspection fixture as described in claim 3, characterized in that: A straight pointer (11) is fixed on a single mounting base (3), and the straight pointer (11) corresponds one-to-one with the straight ruler (10).

5. The silicon rod end face inspection fixture as described in claim 1, characterized in that: The structure of the rotating roller seat mechanism (2) is as follows: it includes two rollers (201) arranged at intervals. Each roller (201) has a bearing assembly arranged symmetrically at both ends of its outer circumference. Each bearing assembly includes a self-aligning bearing (203). A pressure plate (204) is installed on one side of the self-aligning bearing (203). A scale (202) is installed on the other side of the self-aligning bearing (203). A shaft clamp (207) is installed on one side of the scale (202). An indicator needle (206) is fixed on the shaft clamp (207). The indicator needle (206) points to the scale line on the scale (202).

6. The silicon rod end face inspection fixture as described in claim 5, characterized in that: The middle section of the outer circumference of a single roller (201) is coated with rubber.

7. The silicon rod end face inspection fixture as described in claim 5, characterized in that: One end of one of the roller shafts (201) is provided with a square key bar (205), which is used to fix the handwheel (13).

8. The silicon rod end face inspection fixture as described in claim 1, characterized in that: The structure of a single floating adjustment mechanism (5) is as follows: it includes a first adjustment shaft (501) and a second adjustment shaft (502); A spherical bearing (505) is fitted on the outer circumferential surface of the first adjusting shaft (501). The first adjusting shaft (501) is fitted with the corresponding mounting seat (3) through the spherical bearing (505). The shaft end of the first adjusting shaft (501) is fixed with a mounting plate (503). A handle (504) is fixed to one end of the second adjusting shaft (502), and a turntable (506) is fixed to the other end of the second adjusting shaft (502); The turntable (506) is rotatably mounted on the mounting plate (503). A fixing seat (507) is fixed on the end face of the turntable (506). The fixing seat (507) is used to install the corresponding point laser rangefinder (6). A limiting rod (509) is fixed on the end face of the fixing seat (507). A rubber head (510) is fitted on the end of the limiting rod (509).

9. The silicon rod end face inspection fixture as described in claim 8, characterized in that: A single mounting base (3) is installed in conjunction with a corresponding mounting plate (503) by several adjusting bolts (8). By changing the tightening force of different adjusting bolts (8) on the corresponding mounting plate (503), the first adjusting shaft (501) is displaced, thereby driving the corresponding point laser rangefinder (6) to move.

10. The silicon rod end face inspection fixture as described in claim 1, characterized in that: The base (1) is supported by the frame (7), and an electrical control cabinet is installed on the frame (7). The electrical control cabinet is electrically connected to two point laser rangefinders (6).

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