Film thickness detection equipment for flexible film piezoelectric sensor

Abstract

The utility model discloses coating thickness detection equipment for a flexible film piezoelectric sensor, which belongs to the technical field of detection equipment and comprises a working table, an online projection image measuring instrument is mounted on the working table, a portal frame is fixed on the working table, and a transverse servo module moving mechanism is fixed on the portal frame. The side face of the transverse servo module moving mechanism is connected with a longitudinal servo module moving mechanism, a bearing plate is fixed to the output end of the longitudinal servo module moving mechanism through two connecting plates, a supporting plate is fixed to the bottom end of the bearing plate, the side face of the supporting plate is connected with a pressing plate through screws, and a plurality of piezoelectric sensors are further arranged between the supporting plate and the pressing plate. The bottom end of the piezoelectric sensor is provided with a coating film, the flexible film piezoelectric sensor coating film thickness detection device further comprises an online projection image measuring instrument, and the coating film is located in the online projection image measuring instrument; by using the detection equipment, the detection efficiency is high, the data error is small, a large number of defective products are avoided, and the enterprise cost is saved.

Description

Technical Field

[0001] This utility model relates to the field of detection equipment technology, and in particular to a flexible thin-film piezoelectric sensor coating thickness detection device. Background Technology

[0002] Currently, measuring the thickness of flexible thin-film piezoelectric sensors is very troublesome because multiple surface coatings are performed during the sensor manufacturing process. Differences in coating methods and equipment make it impossible to fully inspect the coating thickness of the piezoelectric thin film.

[0003] In existing technologies, the thickness of the coating of thin-film piezoelectric sensors is detected by sampling. A piece of the coated flexible piezoelectric film is taken, the coating layer is cut open, and it is placed under an electron microscope for sampling inspection. This inspection method is time-consuming, and the measurement data is inevitably affected by human operation of the electron microscope, resulting in inaccurate repeated measurements. Moreover, the sampling inspection of the coating surface requires cutting the sensor every time, which means that a row of piezoelectric films are considered defective. In the long run, this is a huge waste. Utility Model Content

[0004] The purpose of this invention is to provide a flexible thin-film piezoelectric sensor coating thickness detection device to solve the problems of low efficiency, erroneous monitoring data, and the generation of a large number of defective products in the existing method of manually sampling and cutting the coating thickness of thin-film piezoelectric sensors.

[0005] To solve the above technical problems, this utility model provides a flexible thin-film piezoelectric sensor coating thickness detection device, including a worktable, an online projection image measuring instrument mounted on the worktable and a gantry frame fixed thereon, a horizontal servo module moving mechanism fixed on the gantry frame, a vertical servo module moving mechanism connected to the side of the horizontal servo module moving mechanism, a bearing plate fixed to the output end of the vertical servo module moving mechanism via two connecting plates, a support plate fixed to the bottom end of the bearing plate, a pressure plate connected to the side of the support plate via screws, and several piezoelectric sensors are provided between the two, with a coating at the bottom end of each piezoelectric sensor;

[0006] The flexible thin-film piezoelectric sensor coating thickness detection device also includes an online projection image measuring instrument, in which the coating is located.

[0007] Optionally, the online projection image measuring instrument includes a base and a screen. The base has a transmitting measuring head and a receiving measuring head at its two ends, respectively. The screen is mounted on the workbench and electrically connected to the receiving measuring head.

[0008] Optionally, the base is also provided with a support block, and a straight rod is fixed to the top of the support block by two support rods. Two 45° prisms are provided on the top side of the straight rod.

[0009] In the flexible thin-film piezoelectric sensor coating thickness detection device provided by this utility model, an online projection image measuring instrument is installed on the worktable and a gantry frame is fixed thereon. A horizontal servo module moving mechanism is fixed on the gantry frame. A vertical servo module moving mechanism is connected to the side of the horizontal servo module moving mechanism. A bearing plate is fixed to the output end of the vertical servo module moving mechanism through two connecting plates. A support plate is fixed to the bottom end of the bearing plate. A pressure plate is connected to the side of the support plate by screws, and several piezoelectric sensors are arranged between the two. The bottom end of the piezoelectric sensor is coated. The flexible thin-film piezoelectric sensor coating thickness detection device also includes an online projection image measuring instrument, and the coating is located in the online projection image measuring instrument. Using this detection device, the detection efficiency is high and the data error is small, which will not produce a large number of defective products and will help save enterprise costs. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of the flexible thin-film piezoelectric sensor coating thickness detection device provided by this utility model;

[0011] Figure 2 yes Figure 1 A magnified view of A in the middle. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0014] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0015] This invention provides a flexible thin-film piezoelectric sensor coating thickness detection device, the structure of which is as follows: Figure 1 , Figure 2 As shown, the device includes a workbench 1, on which an online projection image measuring instrument 2 is mounted and a gantry frame 16 is fixed. A horizontal servo module moving mechanism 3 is fixed on the gantry frame 16. A vertical servo module moving mechanism 4 is connected to the side of the horizontal servo module moving mechanism 3. A bearing plate 6 is fixed to the output end of the vertical servo module moving mechanism 4 through two connecting plates 5. A support plate 7 is fixed to the bottom of the bearing plate 6. A pressure plate 9 is connected to the side of the support plate 7 through screws 10, and several piezoelectric sensors 8 are arranged between the two. A coating 11 is provided at the bottom of the piezoelectric sensor 8. The flexible thin-film piezoelectric sensor coating thickness detection device also includes the online projection image measuring instrument 2, and the coating 11 is located in the online projection image measuring instrument 2. Using the flexible thin-film piezoelectric sensor coating thickness detection device results in high detection efficiency and small data error, avoiding the generation of a large number of defective products and helping to save enterprise costs.

[0016] Specifically, the online projection image measuring instrument 2 includes a base 21 and a screen 24. The base 21 has a transmitting measuring head 22 and a receiving measuring head 23 at its two ends, respectively. The screen 24 is mounted on the workbench 1 and electrically connected to the receiving measuring head 23.

[0017] Furthermore, a support block 12 is provided on the base 21. A straight rod 14 is fixed to the top of the support block 12 by two support rods 13. Two 45° prisms 15 are provided on the top side of the straight rod 14.

[0018] The working principle of this utility model is as follows: The longitudinal servo module moving mechanism 4 drives the coating 8 to move between the two 45° prisms 15, and then the transmitting end measuring head 22 is activated. The light emitted by the transmitting end is reflected by the two 45° prisms 15 and passes through the coating 8. At this time, the receiving end measuring head 23 receives the projection and thus measures the thickness of the coating 8 and displays it on the screen 24. Finally, the transverse servo module moving mechanism 3 is activated to drive several coatings to perform thickness detection in sequence.

[0019] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A flexible thin-film piezoelectric sensor coating thickness detection device, characterized in that, Includes a workbench (1), on which an online projection image measuring instrument (2) is installed and a gantry frame (16) is fixed. A horizontal servo module moving mechanism (3) is fixed on the gantry frame (16). A vertical servo module moving mechanism (4) is connected to the side of the horizontal servo module moving mechanism (3). A bearing plate (6) is fixed to the output end of the vertical servo module moving mechanism (4) through two connecting plates (5). A support plate (7) is fixed to the bottom of the bearing plate (6). A pressure plate (9) is connected to the side of the support plate (7) through screws (10), and several piezoelectric sensors (8) are provided between the two. A coating (11) is provided at the bottom of the piezoelectric sensor (8). The flexible thin-film piezoelectric sensor coating thickness detection device also includes an online projection image measuring instrument (2), and the coating (11) is located in the online projection image measuring instrument (2).

2. The flexible thin-film piezoelectric sensor coating thickness detection device as described in claim 1, characterized in that, The online projection image measuring instrument (2) includes a base (21) and a screen (24). The base (21) has a transmitting end measuring head (22) and a receiving end measuring head (23) at both ends. The screen (24) is mounted on the workbench (1) and electrically connected to the receiving end measuring head (23).

3. The flexible thin-film piezoelectric sensor coating thickness detection device as described in claim 2, characterized in that, The base (21) is also provided with a support block (12), and a straight rod (14) is fixed to the top of the support block (12) by two support rods (13). Two 45° prisms (15) are provided on the top side of the straight rod (14).

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