Auxiliary measuring jig for ETCH process focusing ring component

Abstract

The utility model relates to an auxiliary measuring jig for an ETCH process focusing ring component, which comprises a jig base, an accommodating hole is arranged on the jig base, a jig platform is arranged on the jig base, a detachable jig seat is arranged on one side of the jig platform on the jig base, and a clamping groove is arranged on the other side of the jig platform. The side, facing the jig platform, of the detachable jig seat is of an arc-shaped face structure, and a plurality of positioning grooves are evenly distributed in the arc-shaped face structure. A U-shaped groove is formed in the position, corresponding to the detachable jig seat, of the jig base, sliding ways are arranged on the inner walls of the two sides of the U-shaped groove, sliding blocks are arranged at the lower ends of the two side walls of the detachable jig seat, and the sliding blocks are installed in the corresponding sliding ways. And a chamfer is arranged at the upper end of the arc-shaped surface structure of the detachable jig seat. According to the utility model, the detachable jig seat is detachable and can be adjusted at will so as to reach an ideal measurement position; the roughness of two positions of the component can be measured; and the jig is used for fixing the component, so that measured data are more accurate, and manpower is saved.

Description

Technical Field

[0001] This utility model relates to the technical field of measurement and installation fixtures, and in particular to an auxiliary measurement fixture for an ETCH process focusing ring component. Background Technology

[0002] The focusing ring component is manufactured through sandblasting. It requires measuring the surface roughness at two locations, and this roughness must be strictly controlled within a specified range; otherwise, it will affect film formation. Currently, a handheld component is used to measure the roughness, followed by a probe. However, the instability of the handheld method significantly affects the roughness results. Utility Model Content

[0003] This invention aims to address the shortcomings of existing technologies by providing an auxiliary measuring fixture for the focusing ring component in the ETCH process.

[0004] To achieve the above objectives, this utility model adopts the following technical solution:

[0005] An auxiliary measurement fixture for an ETCH process focusing ring component includes a fixture base with a receiving hole and a fixture platform. A detachable fixture seat is installed on one side of the fixture platform on the fixture base. The side of the detachable fixture seat facing the fixture platform has an arc-shaped surface structure with several positioning grooves evenly distributed on the arc-shaped surface structure.

[0006] The fixture base has a U-shaped groove corresponding to the position of the detachable fixture seat. The inner walls on both sides of the U-shaped groove have slides. The lower ends of the two side walls of the detachable fixture seat have sliders, which are installed in the corresponding slides.

[0007] The upper end of the arc-shaped structure of the detachable fixture base is chamfered.

[0008] The beneficial effects of this utility model are: the detachable fixture base in this utility model is detachable and can be adjusted at will to achieve the ideal measurement position; it can measure the roughness of two positions of the component; using the fixture to fix the component makes the measurement data more accurate, while saving manpower. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the structure of this utility model;

[0010] Figure 2 This is a structural diagram of the fixture base;

[0011] Figure 3 This is a schematic diagram of the detachable fixture base;

[0012] In the diagram: 1- Fixture base; 2- Accommodation hole; 3- Fixture platform; 4- Detachable fixture seat; 5- Arc-shaped surface structure; 6- Positioning groove; 7- U-shaped groove; 8- Slide rail; 9- Slider;

[0013] The following will describe in detail the embodiments of this utility model with reference to the accompanying drawings. Detailed Implementation

[0014] The principles and features of this utility model are described below with reference to the accompanying drawings. The embodiments described are for illustrative purposes only and are not intended to limit the scope of this utility model. The utility model is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0015] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0016] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0018] like Figures 1 to 3 As shown, an auxiliary measurement fixture for an ETCH process focusing ring component includes a fixture base 1, a receiving hole 2, a fixture platform 3, a detachable fixture seat 4, an arc-shaped surface structure 5, a positioning groove 6, a U-shaped groove 7, a slide rail 8, and a slider 9.

[0019] The fixture base 1 has a receiving hole 2 and a fixture platform 3. A detachable fixture seat 4 is installed on one side of the fixture platform 3 on the fixture base 1. The side of the detachable fixture seat 4 facing the fixture platform 3 is an arc-shaped surface structure 5 and several positioning grooves 6 are evenly distributed on the arc-shaped surface structure 5.

[0020] The fixture base 1 is provided with a U-shaped groove 7 corresponding to the position of the detachable fixture seat 4. The inner walls on both sides of the U-shaped groove 7 are provided with slide rails 8. The lower ends of the two side walls of the detachable fixture seat 4 are provided with sliders 9, and the sliders 9 are installed in the corresponding slide rails 8.

[0021] The fixture base 1 is composed of a rectangular plate and an isosceles trapezoidal plate. The long side of the isosceles trapezoidal plate is connected to the rectangular plate. The U-shaped groove 7 is opened from the short side of the isosceles trapezoidal plate inward. The receiving hole 2 is opened on the rectangular plate.

[0022] The focusing ring has an overall ring structure, with a frustum-shaped top. During its manufacturing process, it is necessary to measure the roughness of the sidewalls and bottom of the frustum-shaped structure. This invention can perform these two roughness measurements.

[0023] When measuring the sidewall roughness, the focusing ring is clamped in the corresponding positioning groove 6 on the arc-shaped surface structure 5 of the detachable fixture seat 4, and the detection probe is placed on the fixture platform 3 to contact the sidewall of the focusing ring to complete the detection.

[0024] When measuring the bottom roughness, the top frustum-shaped structure of the focusing ring is clamped in the receiving hole 2, with the bottom facing upwards, and the detection is completed by contacting the detection probe.

[0025] The entire device is made of Teflon material, which will not scratch or wear the product. The dimensions are also strictly customized according to the component dimensions, so there will be no signs of loosening.

[0026] The upper end of the arc-shaped surface structure 5 of the detachable fixture seat 4 is chamfered.

[0027] A handle is provided on the side wall of the detachable fixture base 4 facing away from the fixture platform 3.

[0028] The positioning groove 6 has a U-shaped structure.

[0029] In this invention, the detachable fixture base 4 is detachable and can be adjusted at will to achieve the ideal measurement position; it can measure the roughness of two positions of the component; using the fixture to fix the component makes the measurement data more accurate and saves manpower.

[0030] The present invention has been described above with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any improvements made using the inventive concept and technical solution of the present invention, or direct application to other situations without modification, are all within the protection scope of the present invention.

Claims

1. An auxiliary measuring fixture for a focusing ring component in an ETCH process, characterized in that, It includes a fixture base (1), a receiving hole (2) is provided on the fixture base (1), a fixture platform (3) is provided on the fixture base (1), and a detachable fixture seat (4) is installed on one side of the fixture platform (3) on the fixture base (1). The side of the detachable fixture seat (4) facing the fixture platform (3) is an arc-shaped surface structure (5) and several positioning grooves (6) are evenly distributed on the arc-shaped surface structure (5).

2. The auxiliary measuring fixture for the ETCH process focusing ring component according to claim 1, characterized in that, The fixture base (1) is provided with a U-shaped groove (7) corresponding to the position of the detachable fixture seat (4). The inner walls on both sides of the U-shaped groove (7) are provided with slide rails (8). The lower ends of the two side walls of the detachable fixture seat (4) are provided with sliders (9). The sliders (9) are installed in the corresponding slide rails (8).

3. The auxiliary measuring fixture for the ETCH process focusing ring component according to claim 2, characterized in that, The upper end of the arc-shaped surface structure (5) of the detachable fixture base (4) is chamfered.

4. The auxiliary measuring fixture for the ETCH process focusing ring component according to claim 3, characterized in that, The detachable fixture base (4) has a handle on the side wall facing away from the fixture platform (3).

5. An auxiliary measuring fixture for an ETCH process focusing ring component according to claim 4, characterized in that, The fixture base (1) is composed of a rectangular plate and an isosceles trapezoidal plate. The long side of the isosceles trapezoidal plate is connected to the rectangular plate. The U-shaped groove (7) is opened from the short side of the isosceles trapezoidal plate inward. The receiving hole (2) is opened on the rectangular plate.

6. The auxiliary measuring fixture for the ETCH process focusing ring component according to claim 5, characterized in that, The positioning groove (6) has a U-shaped structure.

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