Disassembling and assembling device for disassembling and assembling vertical diffusion furnace tube

Abstract

The utility model discloses a dismounting and mounting device for dismounting and mounting a vertical diffusion furnace tube. The dismounting and mounting device comprises a moving mechanism and a mounting platform, the translation mechanism is mounted on the mounting platform and comprises a sliding part and a driving part for driving the sliding part to transversely move; the bearing table is used for bearing the vertically-arranged diffusion furnace tube, the bearing table is installed on the sliding part, an avoiding hole with an opening in one side is formed in the bearing table, and the avoiding hole vertically penetrates through the bearing table; the vertical diffusion furnace tube is placed on the machine table, a lifting mechanism enabling the vertical diffusion furnace tube to move up and down is arranged on the machine table, and the receding hole is used for allowing the lifting mechanism to penetrate through so that the lifting mechanism can place the vertical diffusion furnace tube on the bearing table. The utility model provides a vertical diffusion furnace tube mechanism, which achieves the effects that the labor cost of maintenance personnel is saved, the time required for disassembly and assembly is shortened, and the phenomenon that the diffusion furnace tube is damaged under the condition that the maintenance personnel operates improperly or the operation space is limited during disassembly and assembly is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field, especially a kind of dismounting device for dismounting vertical diffusion furnace tube. BACKGROUND

[0002] In the field of semiconductor manufacturing, most of the LPCVD adopts furnace tube mode to carry out thin film deposition, but in the LPCVD process tube furnace, the maintenance period of quartz tube is shorter, about 1 month each time. At present, the replacement scheme of quartz tube is that equipment is stopped, and 2-3 maintenance personnel cooperate to manually hold the quartz tube carefully and take out for dismounting. Specifically, the quartz tube is slowly lifted from the lifting boat by artificial, and the furnace tube is slowly inclined to the height that can pass the maintenance door, then another maintenance personnel drags the bottom of the quartz tube to prevent bumping, and the quartz tube is lifted out from the maintenance door. Since the equipment maintenance space is limited, the range of action is small when dismounting and installing, so that the time consumed in the whole process is long (generally 5 hours are needed), and the equipment utilization rate is reduced. SUMMARY

[0003] The utility model wants to achieve the purpose of providing a kind of dismounting device for dismounting vertical diffusion furnace tube, solve the problem that vertical diffusion furnace tube is damaged when being maintained due to the large volume of vertical diffusion furnace tube, not only need multiple experienced maintenance personnel to participate, and in the case of limited space, it is easy to cause the damage of vertical diffusion furnace tube, through the cooperation of dismounting mechanism and machine table, the artificial cost of maintenance personnel is saved, the time required for dismounting is shortened, and the damage of diffusion furnace tube caused by improper operation of maintenance personnel or limited operation space during dismounting is avoided.

[0004] In order to achieve the above purpose, the utility model adopts the following technical scheme: a kind of dismounting device for dismounting vertical diffusion furnace tube, characterized by moving mechanism, including installation platform;Translation mechanism, installation is in installation platform, and translation mechanism includes sliding member and the driving piece of driving sliding member horizontal transfer;Carrying table, for carrying vertically placed diffusion furnace tube, carrying table is installed in sliding member, and carrying table is equipped with the avoidance hole of one side opening, and avoidance hole penetrates carrying table up and down;Vertical diffusion furnace tube is placed on machine table, and machine table is equipped with the lifting mechanism that makes vertical diffusion furnace tube move up and down, and avoidance hole is used for lifting mechanism to pass through, to make lifting mechanism place vertical diffusion furnace tube on carrying table.

[0005] The utility model discloses a following advantage after adopting above-mentioned technical scheme: the vertical diffusion furnace is placed in the machine table, and the position in the machine table is adjusted through the up-and-down movement of the lifting mechanism, and the dismounting mechanism is convenient for dismounting or mounting the vertical furnace tube and the machine table, the dismounting mechanism includes: the moving mechanism is equipped with the installation platform for installing and supporting the translation mechanism, the translation mechanism is installed on the installation platform and includes the sliding part and the drive part that drives the horizontal movement of sliding part, and the sliding part is used for supporting the bearing table, and the drive part provides power for the horizontal movement of sliding part, thereby realizing the translation of bearing table, the bearing table is used for bearing the vertical diffusion furnace tube, and the bearing table is installed on the sliding part, so the movement of sliding part drives the movement of bearing table, thereby realizing the movement of diffusion furnace tube, and the bearing table is equipped with the one-side opening avoiding hole, and the avoiding hole penetrates the bearing table up and down, so that the avoiding hole allows the lifting mechanism to pass through the avoiding hole and place the diffusion furnace tube on the bearing table. Through the lifting mechanism, the diffusion furnace tube can be directly placed on the bearing table without manual dismounting, and the diffusion furnace tube can be directly placed on the dismounting mechanism, through the setting of the translation mechanism, the diffusion furnace tube placed on the bearing table can be moved under the drive of the sliding part, the diffusion furnace tube is moved from the inside of the machine table to the outside or from the outside to the inside, the avoiding hole is opened on the bearing table to allow the lifting mechanism to pass through the avoiding hole and place the diffusion furnace tube on the bearing table without interference with the bearing table, through the cooperation of the dismounting mechanism and the machine table, not only the manual cost of maintenance personnel is saved, and the time required for dismounting is shortened, but also the diffusion furnace tube is prevented from being damaged due to improper operation or limited operation space of the maintenance personnel during dismounting.

[0006] Further, the outer edge position of the upper end of the avoiding hole is provided with a placing groove for placing the diffusion furnace tube, and the placing groove is matched with the bottom of the diffusion vertical pipe.

[0007] Through the foregoing technical scheme, the placing groove is matched with the bottom of the diffusion furnace tube, so that the furnace tube is more stably placed on the bearing table, and the diffusion furnace tube can be limited through the placing groove, and the shaking of the diffusion pipe is reduced.

[0008] Further, the groove wall of the placing groove extends upwards and exceeds the upper surface of the bearing table to form a limiting part, or the groove wall of the placing groove extends upwards along the circumference and exceeds the upper surface of the bearing table to form a plurality of limiting parts.

[0009] Through the foregoing technical scheme, the groove wall of the placing groove extends upwards to form a limiting part exceeding the upper surface of the bearing table, or the groove wall of the placing groove extends upwards along the circumference to form a plurality of limiting parts exceeding the upper surface of the bearing table. No matter which way the limiting part is, the stability of the diffusion furnace tube in the placing groove is enhanced, the shaking of the furnace tube during dismounting is effectively prevented, and the furnace tube is prevented from being broken or damaged due to unstable placement in the placing groove, so that the safety of the furnace tube during dismounting is ensured.

[0010] Further, the opening of the avoiding hole accounts for less than 180 degrees of the central angle of the avoiding hole.

[0011] The opening of the avoiding hole is limited to less than 180 degrees of the central angle, which not only satisfies the avoiding of the lifting mechanism, but also avoids the opening of the avoiding hole being too large to cause the diffusion furnace tube placed on the bearing table to fall from the position of the opening of the avoiding hole, thereby improving the structural stability of the bearing table.

[0012] Further, the sliding member comprises a sliding rail and a sliding block slidingly connected to the sliding rail, the sliding rail is provided with an origin sensor, a first sensor and a second sensor, the first sensor and the second sensor are respectively located at two ends of the sliding rail, the sliding block is provided with a sensing piece for sensing the origin sensor, the first sensor and the second sensor, and the sliding block has an initial state and a limit state on the sliding rail, when the sliding block is in the initial state, the sensing piece on the sliding block corresponds to the origin sensor, and when the sliding block is in the limit state, the sensing piece on the sliding block corresponds to the first sensor or the second sensor.

[0013] When the sliding block is in the initial state, the sensing piece on the sliding block corresponds to the origin sensor, and through the cooperation of the sensing piece and the origin sensor, the operator can know the position of the sliding block at this time, when the sliding block is in the limit state, the sensing piece on the sliding block corresponds to the first sensor or the second sensor, and since the first sensor and the second sensor are respectively located at two ends of the sliding rail, it can be ensured that the sliding block will not exceed the predetermined range during sliding, when the sensing piece corresponds to the first sensor or the second sensor, the operator can identify that the sliding block has reached the limit of its sliding range, so that appropriate measures are taken to prevent the sliding block from continuing to slide and possible failure.

[0014] Further, the origin sensor, the first sensor and the second sensor are electrically connected with a control piece, the moving mechanism is provided with the control piece, and the control piece is electrically connected with a driving piece to control the sliding of the sliding block on the sliding rail.

[0015] Since the origin sensor, the first sensor and the second sensor are electrically connected with the control piece, when the sliding block slides on the sliding rail, the position of the sliding block can be detected in real time through the cooperation of the origin sensor, the first sensor and the second sensor, and timely response can be made, the operator adjusts the working state of the control piece according to the received position information, thereby realizing the control of the sliding of the sliding block on the sliding rail, and the cooperation makes the whole mechanism automatic, which not only improves the operation efficiency of the system, but also reduces the errors caused by human operation.

[0016] Further, the moving mechanism comprises a handle convenient for pushing, and the control piece is arranged on the handle.

[0017] The handle enables the operator to conveniently push the moving mechanism without other tools, the control member is directly arranged on the handle, the operator can directly adjust the movement state of the sliding block through the control member on the handle while pushing the moving mechanism, and the operation convenience and efficiency are improved.

[0018] Further, the first positioning member is arranged on the bottom surface of the one end of the installation platform close to the origin sensor, the second positioning member is arranged on the lower end of the machine table, and the first positioning member and the second positioning member are connected through a fastener.

[0019] According to the above technical scheme, the second positioning member at the lower end of the machine table cooperates with the first positioning member to form stable positioning, and the first positioning member and the second positioning member are fixedly connected through the fastener, so that the installation platform and the machine table are fixedly connected, which helps to keep the installation platform stable during disassembly and assembly of the diffusion furnace pipe and avoids shaking or sliding of the installation platform during disassembly and assembly.

[0020] Further, the first positioning member includes an abutting member and guide limiting members located on both sides of the abutting member, the two guide limiting members and the abutting member form an opening facing the second positioning member, the abutting member abuts against the second positioning member and is connected through the fastener.

[0021] According to the above technical scheme, the guide limiting members enable the first positioning member to be conveniently aligned with the second positioning member during installation. The opening structure formed by the guide limiting members and the abutting member provides clear guidance for installation, improves the installation accuracy, helps to reduce installation errors, improves the overall precision of the system, improves the installation efficiency, and reduces the installation cost.

[0022] Further, the moving mechanism further includes a bottom plate, a horizontal adjustment assembly for keeping the installation platform horizontal is arranged between the bottom plate and the installation platform, and a level gauge is arranged on the installation platform and located on the center line of the installation platform in the length direction.

[0023] According to the above technical scheme, the level gauge is arranged on the installation platform and located on the center line, and whether the installation platform is in a horizontal state can be clearly observed by observing the level gauge, so that abnormal conditions caused by uneven ground during disassembly and assembly of the furnace pipe are avoided, the installation platform can be adjusted to be relatively horizontal by adjusting the horizontal adjustment assembly when the ground is uneven, and the diffusion furnace pipe is disassembled and assembled, and the horizontal adjustment assembly not only plays a role in adjusting the level of the installation platform, but also plays a role in connecting the floor and the installation platform. BRIEF DESCRIPTION OF DRAWINGS

[0024] The utility model will be further described below in combination with the drawings:

[0025] Figure 1The utility model discloses a structure diagram for dismounting device of vertical diffusion furnace pipe Figure 1 ;

[0026] Figure 2 The utility model discloses a structure diagram for dismounting device of vertical diffusion furnace pipe Figure 2 ;

[0027] Figure 3 The utility model discloses a structure diagram for dismounting device of vertical diffusion furnace pipe

[0028] Figure 4 The utility model discloses a structure diagram for dismounting device of vertical diffusion furnace pipe

[0029] Figure 5 The utility model discloses a structure diagram for dismounting device of vertical diffusion furnace pipe Figure 2 ; Specific embodiments

[0030] In order to make the purpose, technical scheme and advantage of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model below, obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments.

[0031] The terms "first", "second" and the like (if exist) in the specification and claims of the utility model are used to distinguish similar objects, not to describe a specific order or sequence, even if "second" is used before a certain technical feature to distinguish, it does not mean that it must have "first". It should be understood that in the utility model, "include" and "have" and their any modification are intended to cover non-exclusive inclusion. It should be understood that in the utility model, "multiple" means two or more than two. "And / or" is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, X and / or Y can represent three cases of X alone, X and Y at the same time and Y alone. The character " / " generally represents that the front and rear associated objects are in an "or" relationship. "Include X, Y and Z", "include X, Y, Z" means that X, Y and Z are included, "include X, Y or Z" means that one of X, Y and Z is included, "include X, Y and / or Z" means that any one or any two or three of X, Y and Z is included.

[0032] The technical scheme of the utility model will be described in detail in the following specific embodiments. The following several specific embodiments can be combined or replaced according to the actual situation, and the same or similar concepts or processes may not be described in some embodiments.

[0033] As Figures 1 to 5The utility model provides a kind of dismounting device for dismounting vertical diffusion furnace pipe, including moving mechanism 3, moving mechanism 3 includes installation platform 31;Translation mechanism 4, installation is in installation platform 31, translation mechanism 4 includes sliding piece 41 and the driving piece 42 of driving sliding piece transverse movement;Carrying platform 5, for carrying vertical diffusion furnace pipe, carrying platform 5 is installed in sliding piece 41, and one side opening's avoidance hole 51 is equipped in carrying platform 5, and avoidance hole 51 is up and down through carrying platform 5;Vertical diffusion furnace pipe is placed on machine table 1, and lifting mechanism 11 for making vertical diffusion furnace pipe move up and down is equipped on machine table 1, and avoidance hole is used for lifting mechanism 11 to pass through, to make lifting mechanism 11 place vertical diffusion furnace pipe in carrying platform 5.

[0034] It can be understood that vertical diffusion furnace is placed in machine table 1, and lifting mechanism 11 in machine table 1 includes lifting platform 111 for placing diffusion furnace pipe in machine table 1, vertically arranged guide rail 112 and connecting arm 113 connected with the both, lifting platform 111 slides up and down along guide rail 112 to drive diffusion furnace pipe to move up and down in machine table 1, and dismounting mechanism is convenient to dismount or install vertical furnace pipe with machine table 1, and the dismounting mechanism includes: moving mechanism 3 is equipped with installation platform 31 for installing and supporting translation mechanism 4;Translation mechanism 4 is installed on installation platform 31, including sliding piece 41 and the driving piece 42 of driving sliding piece 41 transverse movement, sliding piece 41 is used to support carrying platform 5, and driving piece 42 provides power for the transverse movement of sliding piece 41, to realize the translation of carrying platform 5;Carrying platform 5 is used for carrying vertical diffusion furnace pipe, and carrying platform 5 is installed in sliding piece 41, so that the movement of sliding piece 41 drives carrying platform 5 to move, to realize the movement of diffusion furnace pipe, and one side opening's avoidance hole 51 is equipped in carrying platform 5, and avoidance hole 51 is up and down through carrying platform 5, to allow lifting mechanism 11 to pass through avoidance hole 51 and place diffusion furnace pipe on carrying platform 5.By lifting mechanism 11, diffusion furnace pipe can be directly placed on carrying platform 5 without manual dismounting, and diffusion furnace pipe can be directly placed on dismounting mechanism, the diffusion furnace pipe placed on carrying platform 5 can be moved under the drive of sliding piece 41 by the arrangement of translation mechanism 4, to move diffusion furnace pipe from inside machine table 1 to outside or outside to inside, and avoidance hole 51 is opened in carrying platform 5 to pass through avoidance hole 51 and place diffusion furnace pipe on carrying platform 5 by lifting mechanism 11, without interference with carrying platform 5, by the cooperation of dismounting mechanism and machine table 1, not only the artificial cost of maintenance personnel is saved, the time required for dismounting is shortened, but also the diffusion furnace pipe breakage caused by improper operation or limited operation space of maintenance personnel during dismounting is avoided.

[0035] Specifically, the outer edge position of the upper end of the avoiding hole 51 is provided with a placing groove 52 for placing the diffusion furnace tube, and the placing groove 52 is matched with the bottom of the diffusion furnace tube, so that the furnace tube is more stably placed on the bearing table 5. The diffusion furnace tube can also be limited through the placing groove 52, which reduces the shaking of the diffusion tube.

[0036] In one embodiment, the groove wall of the placing groove 52 extends upwards and exceeds the upper surface of the bearing table 5 to form a plurality of limiting portions 521.

[0037] In another embodiment, the groove wall of the placing groove 52 extends upwards and exceeds the upper surface of the bearing table 5 to form a limiting portion 521.

[0038] No matter which way the limiting portion 521 is, it enhances the stability of the diffusion furnace tube in the placing groove 52, effectively prevents the furnace tube from shaking or being broken or damaged due to unstable placement in the placing groove 52 during disassembly and assembly, thereby ensuring the safety of the furnace tube during disassembly and assembly.

[0039] Specifically, the opening of the avoiding hole 51 occupies less than 180° of the central angle of the avoiding hole 51, and the central angle of the opening of the avoiding hole 51 is limited to less than 180°. At this time, the avoiding hole 51 not only satisfies the avoiding of the lifting mechanism 11, but also avoids the opening of the avoiding hole 51 being too large to cause the diffusion furnace tube placed on the bearing table 5 to fall from the position of the opening of the avoiding hole 51, thereby improving the structural stability of the bearing table 5.

[0040] Preferably, as shown in Figure 3 The straight-line distance Y of the two ends of the opening of the avoiding hole 51 is greater than the width X of the connecting arm 113.

[0041] It should be noted that the moving mechanism 3 includes a bottom plate 32 and a handle 33 for easy pushing, the handle 33 is arranged at one end of the bottom plate 32 and is installed on the bottom plate 32 by screws, a level 311 is arranged on the mounting platform 31, a horizontal adjustment assembly 34 is installed between the bottom plate 32 and the mounting platform 31 to keep the mounting platform 31 horizontal, the horizontal adjustment assembly 34 not only can adjust the level of the mounting platform 31, but also can connect the bottom plate and the mounting platform 31. Specifically, the mounting platform 31 is a symmetrical structure, and the horizontal adjustment assembly 34 includes a main horizontal adjustment member 341 and two secondary horizontal adjustment members 342, wherein the main horizontal adjustment member 341 is located on the same straight line as the level 311 and on the center line of the length direction of the mounting platform 31, as shown by the dotted line. Figure 3 The two secondary horizontal adjustment members 342 are respectively located at the two symmetrical corner positions of the mounting platform 31.

[0042] Further, by observing the level meter 311, the operator can clearly observe whether the installation platform 31 is in a horizontal state, avoiding abnormal conditions caused by the uneven ground when disassembling the furnace tube. When the ground is not level, the installation platform 31 can be adjusted to be relatively level by adjusting the horizontal adjustment assembly 34 before disassembling the diffusion furnace tube.

[0043] Specifically, the bottom plate 32 is fixed with the installation platform 31 through the horizontal adjustment assembly 34. The specific structure of the horizontal adjustment assembly 34 is a screw, which is screwed through the installation platform 31 and the bottom plate 32. The screw is in interference fit with the installation platform 31 to realize axial rotation, and can rotate relative to the installation platform 31.

[0044] In this embodiment, the bottom plate 32 is rectangular, and four self-locking universal wheels 321 are arranged at the four corners of the bottom plate 32. The bottom plate 32 is screwed with the universal wheels 321.

[0045] Specifically, the sliding member 41 includes a sliding rail 411 and a sliding block 412 slidingly connected to the sliding rail 411. The sliding rail 411 is provided with an origin sensor 411a, a first sensor 411b and a second sensor 411c. The first sensor 411b and the second sensor 411c are respectively located at the two ends of the sliding rail 411. The sliding block 412 is provided with a sensing member 412a for sensing the origin sensor 411a, the first sensor 411b and the second sensor 411c. The sliding block 412 has an initial state and a limit state on the sliding rail 411. When the sliding block 412 is in the initial state, the sensing member 412a on the sliding block 412 corresponds to the origin sensor 411a. When the sliding block 412 is in the limit state, the sensing member 412a on the sliding block 412 corresponds to the first sensor 411b or the second sensor 411c.

[0046] When the sliding block 412 is in the initial state, the sensing member 412a on the sliding block 412 corresponds to the origin sensor 411a. Through the cooperation of the sensing member 412a and the origin sensor 411a, the operator can know the position of the sliding block 412 at this time. When the sliding block 412 is in the limit state, the sensing member 412a on the sliding block 412 corresponds to the first sensor 411b or the second sensor 411c. Since the first sensor 411b and the second sensor 411c are respectively located at the two ends of the sliding rail 411, it can be ensured that the sliding block 412 will not exceed the predetermined range during sliding. When the sensing member 412a corresponds to the first sensor 411b or the second sensor 411c, the operator can identify that the sliding block 412 has reached the limit of its sliding range, so that appropriate measures can be taken, such as stopping sliding, issuing an alarm, etc., to prevent the sliding block 412 from continuing to slide and possible failure.

[0047] Specifically, the origin sensor 411a, the first sensor 411b and the second sensor 411c are electrically connected with the control member 331, the control member 331 is provided on the moving mechanism 3, and the control member 331 is electrically connected with the driving member 42 to control the sliding of the sliding block 412 on the sliding rail 411.

[0048] Since the origin sensor 411a, the first sensor 411b and the second sensor 411c are electrically connected with the driving member 42, when the sliding block 412 slides on the sliding rail 411, the position of the sliding block 412 can be detected in real time through cooperation with the origin sensor 411a, the first sensor 411b and the second sensor 411c, and timely response is performed. According to the received position information, the operator adjusts the working state of the control member 331, thereby realizing the control of the sliding of the sliding block 412 on the sliding rail 411. This cooperation realizes the automation of the whole mechanism, improves the operation efficiency of the system, and reduces the errors caused by manual operation.

[0049] The origin sensor 411a, the first sensor 411b and the second sensor 411c described above are all photoelectric sensors.

[0050] Preferably, the control member 331 is provided on the handle 33.

[0051] By adopting the foregoing technical solutions, the handle 33 enables the operator to conveniently push the moving mechanism 3 without the need for other tools. The control member 331 is directly provided on the handle 33, and the operator can directly adjust the movement state of the sliding block 412 through the control member 331 on the handle 33 while pushing the moving mechanism 3, thereby improving the convenience and efficiency of operation.

[0052] In the embodiment, the start key and the return-to-origin key are provided, but in addition to the basic start function, stop keys, speed adjustment, direction control, emergency stop and the like can also be added. This multifunctionality enables the moving mechanism 3 to adapt to different application scenarios and requirements, thereby improving the versatility and practicality thereof.

[0053] The bottom surface of the one end of the mounting platform 31 away from the handle 33 is provided with a first positioning member 312, and the lower end of the machine table 1 is provided with a second positioning member 12 matched with the first positioning member 312. The first positioning member 312 and the second positioning member 12 are connected through fasteners.

[0054] The second positioning member 12 at the lower end of the machine table 1 cooperates with the first positioning member 312 to form stable positioning. The first positioning member 312 and the second positioning member 12 are fixedly connected through fasteners, thereby realizing the fixation between the mounting platform 31 and the machine table 1, which helps to keep the mounting platform 31 stable during the disassembly and assembly of the diffusion furnace pipe and avoids shaking or sliding of the mounting platform 31 during the disassembly and assembly.

[0055] Specifically, the first positioning member 312 comprises an abutting member 312a and guide limiting members 312b located on both sides of the abutting member 312a, and the two guide limiting members 312b and the abutting member 312a form an opening facing the second positioning member 12, the abutting member 312a is in abutment with the second positioning member 12 and is connected through a fastener.

[0056] The guide limiting members 312b enable the first positioning member 312 to be conveniently aligned with the second positioning member 12 during installation. The opening structure formed by the guide limiting members 312b and the abutting member 312a together provides clear guidance for installation, improves the accuracy of installation, helps to reduce installation errors, improves the overall precision of the system, improves installation efficiency, and reduces installation costs.

[0057] In another embodiment, the two guide limiting members 312b and the abutting member 312a form a C-shaped structure facing the opening of the second positioning member 12, similar to a horn structure, and the opening size of the first positioning member 312 is set to be slightly larger than the size of the second positioning member 12, which makes it more convenient to cooperate the two.

[0058] The first positioning member 312 and the second positioning member 12 are specifically connected through two screws.

[0059] In addition to the preferred embodiments described above, the utility model also has other embodiments, and all other embodiments obtained by those skilled in the art based on the embodiments in the utility model without creative labor belong to the scope of the utility model claimed.

Claims

1. A disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes, characterized in that, Mobile mechanisms, including installation platforms; A translation mechanism is installed on the mounting platform. The translation mechanism includes a slider and a drive component that drives the slider to move laterally. The support platform is used to support the vertically placed diffusion furnace tubes. The support platform is installed on the sliding component. The support platform is provided with a clearance hole with an opening on one side, which runs through the support platform from top to bottom. The vertical diffusion furnace tube is placed on the machine platform, which is equipped with a lifting mechanism that moves the vertical diffusion furnace tube up and down. A clearance hole is provided for the lifting mechanism to pass through so that the lifting mechanism can place the vertical diffusion furnace tube on the support platform.

2. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 1, characterized in that, The outer edge of the upper end of the clearance hole is provided with a placement groove for placing the diffusion furnace tube, and the placement groove is adapted to the bottom of the diffusion riser.

3. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 2, characterized in that, The wall of the placement groove extends upward and beyond the upper surface of the support platform to form a limiting part; or, the wall of the placement groove extends upward at even intervals along the circumference and beyond the upper surface of the support platform to form multiple limiting parts.

4. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 1, characterized in that, The opening of the clearance hole occupies less than 180° of the central angle of the clearance hole.

5. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 1, characterized in that, The slider includes a slide rail and a slider slidably connected to the slide rail. The slide rail is provided with an origin sensor, a first sensor, and a second sensor, which are located at opposite ends of the slide rail. The slider is provided with a sensing element for sensing the origin sensor, the first sensor, and the second sensor. The slider has an initial state and a limit state on the slide rail. When the slider is in the initial state, the sensing element on the slider corresponds to the origin sensor. When the slider is in the limit state, the sensing element on the slider corresponds to the first sensor or the sensing element of the second sensor.

6. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 5, characterized in that, The origin sensor, the first sensor, and the second sensor are electrically connected to the control unit. The moving mechanism is equipped with the control unit, which is electrically connected to the drive unit to control the sliding of the slider on the slide rail.

7. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 6, characterized in that, The moving mechanism includes a handle for easy pushing, with controls located on the handle.

8. The disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 7, characterized in that, The mounting platform has a first positioning component on the bottom surface at the end furthest from the handle, and a second positioning component that cooperates with the first positioning component is provided at the lower end of the machine. The first positioning component and the second positioning component are connected by fasteners.

9. A disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 8, characterized in that, The first positioning member includes an abutment and guide limiting members located on both sides of the abutment. The two guide limiting members and the abutment form an opening facing the second positioning member. The second positioning member is inserted into the opening, and the abutment abuts against the second positioning member and is connected by fasteners.

10. A disassembly and assembly device for disassembling and assembling vertical diffusion furnace tubes according to claim 1, characterized in that, The moving mechanism also includes a base plate, and a leveling adjustment component is installed between the base plate and the mounting platform to keep the mounting platform level. The mounting platform is equipped with a level, which is located on the center line of the length direction of the mounting platform.

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