Device for renovating outer wall of gas-guide tube

Abstract

A gas guide pipe outer wall renovating device comprises an outer wall renovating platform, a grinding wheel, a grinding motor, a guide wheel, a guide frame and a support, the grinding motor is fixed to the left side of the outer wall renovating platform, the grinding wheel is driven by the grinding motor to rotate with the front-back direction as the axis, and the guide frame is arranged on the right side of the outer wall renovating platform. The guide wheel is rotationally connected to the guide frame, the axis of the guide wheel is the front-back direction, the front end of the axis of the guide wheel is lower than the rear end of the axis of the guide wheel, and the support is fixed to the outer wall renovating platform in the front-back direction and located between the grinding wheel and the guide wheel. A gap is formed in the position, corresponding to the grinding wheel, of the left baffle, and a gap is formed in the position, corresponding to the guide wheel, of the right baffle. According to the scheme, the outer wall of the pipe body can form better roundness after being ground by the grinding wheel, so that the outer wall of the pipe body is renovated on the basis of ensuring the dimensional accuracy of the outer diameter of the pipe body.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of air guide pipe renovation, in particular to an air guide pipe outer wall renovation device. BACKGROUND

[0002] Chemical vapor deposition process needs to use quartz or siliceous air guide pipe to guide process gas into deposition cavity. When the pipe body of the air guide pipe is used for gas delivery, part of the reaction gas will deposit on the outer wall of the pipe body in the form of a film, and the thickness of the film is unevenly distributed along the length direction of the pipe, thereby causing the outer diameter of the air guide pipe to change and the assembly precision to be affected.

[0003] Considering the semiconductor chip manufacturing process, the assembly precision of the air guide pipe is required to be high, and the air guide pipe that does not meet the requirements can only be scrapped and replaced, which leads to a large consumption of pipe parts for semiconductor manufacturing and a high product cost, thereby resulting in a high use cost.

[0004] The existing renovation method is to perform sand blasting treatment on the outer part of the air guide pipe, but this method can only be used in the case where the thickness of the deposit on the outer wall of the air guide pipe is uniform, because sand blasting is a non-selective equivalent elimination and cannot guarantee the dimensional accuracy of the outer diameter of the pipe body after renovation. SUMMARY

[0005] The utility model aims at solving the problem that the outer wall of the pipe body of the air guide pipe will deposit a film and cause the outer diameter of the air guide pipe to change and the assembly precision to decrease as the use time increases in the prior art.

[0006] To solve the above problems, the utility model provides an air guide pipe outer wall renovation device, which comprises an outer wall renovation platform, a grinding wheel, a grinding motor, a guide wheel, a guide frame and a support. The grinding motor is fixed to the left side of the outer wall renovation platform. The grinding wheel is rotated by the grinding motor with the front and back directions as the axis. The guide frame is arranged on the right side of the outer wall renovation platform. The guide wheel is rotatably connected to the guide frame. The guide wheel has the front and back directions as the axis, and the front end of the guide wheel axis is lower than the rear end. The support is fixed to the outer wall renovation platform along the front and back directions and located between the grinding wheel and the guide wheel. The left side and the right side of the upper part of the support are respectively provided with a left baffle and a right baffle, and the pipe body can pass between the left baffle and the right baffle. The left baffle is provided with a gap corresponding to the position of the grinding wheel. The right baffle is provided with a gap corresponding to the position of the guide wheel.

[0007] Compared with the prior art, the above scheme supports the pipe body by the support, so that the pipe body is located between the left baffle and the right baffle, the grinding wheel can contact the pipe body through the gap of the left baffle, and the guide wheel can contact the pipe body through the gap of the right baffle. When the grinding motor drives the grinding wheel to rotate, the pipe body will rotate around its own axis. At the same time, since the guide wheel has the front and rear direction as the axis and the front end of the guide wheel axis is lower than the rear end, when the guide wheel is driven to rotate by the pipe body, the guide wheel will apply a forward force to the pipe body, so that the pipe body continuously moves forward, and the outer peripheral wall of the pipe body from the first end to the tail end is ground and renewed by the grinding wheel. Therefore, after the outer wall of the pipe body is ground by the grinding wheel, a good roundness can be formed, so that the renewal of the outer wall of the pipe body is realized on the basis of ensuring the size precision of the outer diameter of the pipe body.

[0008] In an improved scheme, further comprising an adjusting rail fixed to the right side of the outer wall renewal platform, and an adjusting screw rod arranged parallel to the adjusting rail, the adjusting rail is arranged in the left-right direction, the guide frame is slidingly connected to the adjusting rail, and the guide frame is provided with an adjusting screw hole screw-connected to the adjusting screw rod, so that the position of the guide frame is controlled by the adjusting screw rod, the distance between the guide wheel and the grinding wheel is adjusted, and different sizes of pipe bodies are adapted.

[0009] In an improved scheme, the guide frame comprises a receiving frame, a base frame and a height adjusting member, the adjusting screw hole is arranged at the lower part of the base frame, the upper side of the base frame is provided with an axis seat with the axis in the left-right direction, the guide wheel is rotationally connected to the upper side of the receiving frame with the front and rear direction as the axis, the lower side of the receiving frame is provided with a rotating shaft rotationally connected to the axis seat, and the receiving frame and the base frame are spaced apart, the height adjusting member is arranged between the base frame and the receiving frame and is used to control the distance between the front end of the receiving frame and the front end of the base frame, so that the angle of rotation of the receiving frame around the rotating shaft is controlled by the height adjusting member, and the effect that the front end of the guide wheel axis on the receiving frame is lower than the rear end is realized.

[0010] In an improved scheme, the height adjusting member is a pneumatic cylinder, the cylinder body of the height adjusting member is connected to the base frame, and the output end of the height adjusting member is upwardly arranged and rotationally connected to the front end of the receiving frame, so that the adjustment of the rotating angle of the receiving frame around the rotating shaft is realized by the extension and contraction of the output end of the height adjusting member.

[0011] In an improved scheme, the rotating shaft is arranged at the middle part of the front and rear direction of the receiving frame, so that the receiving frame is better rotated around the rotating shaft.

[0012] In an improved scheme, the upper side of the support is designed to be inclined with the left side higher than the right side, so that the pipe body can better fit to the guide wheel, that is, the effect that the pipe body is better pushed by the guide wheel to move forward is realized. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a whole schematic view of a gas guide pipe outer wall renewal device.

[0014] Figure 2 is a front view of a trachea outer wall refurbishing device;

[0015] Figure 3 is a top view of a trachea outer wall refurbishing device;

[0016] Figure 4 is a side view of a trachea outer wall refurbishing device along Figure 3 is a sectional view along the A-A sectional line.

[0017] Explanation of reference signs,

[0018] b1, outer wall refurbishing platform; b2, grinding wheel; b3, grinding motor; b4, guide wheel; b5, guide frame; b51, receiving frame; b511, rotating shaft; b52, base frame; b521, shaft seat; b522, adjusting screw hole; b53, height adjusting member; b6, support; b61, left baffle; b62, right baffle; b63, notch; b7, adjusting rail; b8, adjusting screw rod. DETAILED DESCRIPTION

[0019] It should be understood by those skilled in the art that the following embodiments are only used to explain the technical principles of the embodiments of the present application, and are not intended to limit the protection scope of the embodiments of the present application. Those skilled in the art can make adjustments as needed in order to adapt to specific application occasions.

[0020] In the description of the following embodiments, it should be noted that unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0021] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or it only means that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or it only means that the horizontal height of the first feature is less than that of the second feature.

[0022] The present application will be further described in detail below in conjunction with the drawings and specific embodiments.

[0023] As Figures 1-4The utility model discloses an embodiment provides a tracheal wall renovation device, including outer wall renovation platform b1, grinding wheel b2, grinding motor b3, guide pulley b4, guide frame b5 and support b6, grinding motor b3 is fixed in the left side of outer wall renovation platform b1, and grinding wheel b2 is rotated with the anteroposterior direction as the axis by grinding motor b3, guide frame b5 sets up in the right side of outer wall renovation platform b1, and guide pulley b4 is rotatably connected to guide frame b5, and guide pulley b4 is with the anteroposterior direction as the axis and the front end of guide pulley b4 axis is lower than the rear end, and support b6 is fixed in outer wall renovation platform b1 along the anteroposterior direction and is located between grinding wheel b2 and guide pulley b4, and the left side and the right side of support b6 upper part are equipped with left baffle b61 and right baffle b62 respectively, and the left baffle b61 and right baffle b62 can be supplied pipe body between, and the left baffle b61 is equipped with the gap b63 of the position of grinding wheel b2, and right baffle b62 is equipped with the gap b63 of the position of guide pulley b4.

[0024] The above-mentioned scheme is supported to the pipe body by support b6, so that the pipe body is located between left baffle b61 and right baffle b62, so that grinding wheel b2 can pass through the gap b63 of left baffle b61 and contact with the pipe body, and guide pulley b4 can pass through the gap b63 of right baffle b62 and contact with the pipe body, when grinding motor b3 drives grinding wheel b2 to rotate, the pipe body will rotate around its axis, at the same time, since guide pulley b4 is with the anteroposterior direction as the axis and the front end of guide pulley b4 axis is lower than the rear end, when guide pulley b4 is driven to rotate by the pipe body, guide pulley b4 will apply forward force to the pipe body, so that the pipe body moves forward constantly, so that the outer peripheral wall of the pipe body from the first end to the tail end is ground and renovated by grinding wheel b2, ensuring that the pipe body can form better roundness after being ground by grinding wheel b2, so as to realize the renovation of the outer wall of the pipe body.

[0025] As an improved scheme of the embodiment, it further includes an adjusting rail b7 fixed to the right side of the outer wall renovation platform b1, and an adjusting screw b8 arranged parallel to the adjusting rail b7, the adjusting rail b7 is arranged along the left-right direction, the guide frame b5 is slidably connected to the adjusting rail b7, and the guide frame b5 is provided with adjusting screw holes b522 screwed to the adjusting screw b8, so that the position of the guide frame b5 is controlled by the adjusting screw b8, the distance between the guide pulley b4 and the grinding wheel b2 is adjusted, and different sizes of pipe bodies are adapted.

[0026] In the embodiment, the guide frame b5 comprises a receiving frame b51, a base frame b52 and an adjusting member b53, the adjusting screw hole b522 is arranged at the lower part of the base frame b52, the upper side of the base frame b52 is provided with the shaft seat b521 along the left-right direction, the guide wheel b4 is rotationally connected to the upper side of the receiving frame b51 along the front-rear direction, the lower side of the receiving frame b51 is provided with the rotating shaft b511 rotationally connected to the shaft seat b521, and the receiving frame b51 and the base frame b52 are spaced apart, the adjusting member b53 is arranged between the base frame b52 and the receiving frame b51 and is used for controlling the spacing between the front end of the receiving frame b51 and the front end of the base frame b52, so as to control the rotating angle of the receiving frame b51 around the rotating shaft b511 through the adjusting member b53, and realize the effect that the front end of the guide wheel b4 on the receiving frame b51 is lower than the rear end.

[0027] More specifically, the adjusting member b53 is a cylinder, the cylinder body of the adjusting member b53 is connected to the base frame b52, and the output end of the adjusting member b53 is arranged upward and rotationally connected to the front end of the receiving frame b51, so as to realize the adjustment of the rotating angle of the receiving frame b51 around the rotating shaft b511 through the extension and contraction of the output end of the adjusting member b53. It should be understood that the adjusting member b53 can also be in other forms as long as it can control the rotating angle of the receiving frame b51 around the rotating shaft b511.

[0028] In the embodiment, the rotating shaft b511 is arranged at the middle part of the receiving frame b51 along the front-rear direction, so as to ensure better rotation of the receiving frame b51 around the rotating shaft b511.

[0029] In the embodiment, the upper side of the support frame b6 is designed to be inclined left high and right low, so that the pipe body can better fit the guide wheel b4, that is, the pipe body is better pushed by the guide wheel b4 to move forward.

[0030] It should be noted that in the description of the present application, the terms indicating the direction or position relationship are based on the direction or position relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or member must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application; all directional indications (such as up, down, left, right, front, back, inner, outer) are only used to explain the relative position relationship, movement condition and the like between components in a certain specific posture, and if the specific posture changes, the directional indications will also change accordingly.

[0031] In the description of the application, the description of the terms "one embodiment", "some embodiments", "in this embodiment", "specific example", or "some examples" and the like means that the specific features, mechanisms, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, mechanisms, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0032] The above description is merely a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An airway tube outer wall refurbishing device, characterized by, The outer wall renovation platform (b1), the grinding wheel (b2), the grinding motor (b3), the guide wheel (b4), the guide frame (b5) and the support (b6) are included. The grinding motor (b3) is fixed on the left side of the outer wall renovation platform (b1). The grinding wheel (b2) is rotated by the grinding motor (b3) with the front and back direction as the axis. The guide frame (b5) is arranged on the right side of the outer wall renovation platform (b1). The guide wheel (b4) is rotatably connected to the guide frame (b5). The guide wheel (b4) is rotatable with the front and back direction as the axis, and the front end of the guide wheel (b4) is lower than the rear end. The support (b6) is fixed on the outer wall renovation platform (b1) along the front and back direction and is located between the grinding wheel (b2) and the guide wheel (b4). The left side and the right side of the upper part of the support (b6) are respectively provided with the left baffle (b61) and the right baffle (b62), and the left baffle (b61) and the right baffle (b62) can pass through the pipe. The left baffle (b61) is provided with a gap (b63) corresponding to the position of the grinding wheel (b2). The right baffle (b62) is provided with a gap (b63) corresponding to the position of the guide wheel (b4).

2. The tracheal tube outer wall refurbishing device of claim 1, wherein, The adjusting rail (b7) fixed on the right side of the outer wall renovation platform (b1) and the adjusting screw (b8) arranged parallel to the adjusting rail (b7) are further included. The adjusting rail (b7) is arranged along the left and right directions. The guide frame (b5) is slidably connected to the adjusting rail (b7). The guide frame (b5) is provided with the adjusting screw hole (b522) which is screwed to the adjusting screw (b8).

3. The tracheal tube outer wall refurbishing device of claim 2, wherein, The guide frame (b5) includes the receiving frame (b51), the base frame (b52) and the height adjusting part (b53). The adjusting screw hole (b522) is arranged on the lower part of the base frame (b52). The upper side of the base frame (b52) is provided with the shaft seat (b521) with the axis along the left and right directions. The guide wheel (b4) is rotatably connected to the upper side of the receiving frame (b51) with the front and back direction as the axis. The lower side of the receiving frame (b51) is provided with the rotating shaft (b511) rotatably connected to the shaft seat (b521). The receiving frame (b51) and the base frame (b52) are spaced apart. The height adjusting part (b53) is arranged between the base frame (b52) and the receiving frame (b51) and is used for controlling the spacing between the front end of the receiving frame (b51) and the front end of the base frame (b52).

4. The tracheal tube outer wall refurbishing device of claim 3, wherein, The height adjusting part (b53) is a pneumatic cylinder. The cylinder body of the height adjusting part (b53) is connected to the base frame (b52). The output end of the height adjusting part (b53) is upwardly arranged and rotatably connected to the front end of the receiving frame (b51).

5. The tracheal tube outer wall refurbishing device of claim 3, wherein, The rotating shaft (b511) is arranged at the middle part of the receiving frame (b51) in the front and back direction.

6. The tracheal tube outer wall refurbishing device of any one of claims 1-5, wherein, The upper side of the support (b6) is designed as an inclined shape with the left side higher and the right side lower.

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