Polishing and positioning mechanism for furnace body

Abstract

The utility model discloses a furnace body polishing and positioning mechanism. The furnace body polishing and positioning mechanism comprises a positioning mechanism body, the positioning mechanism body comprises a bottom plate, two sets of transverse plates are arranged on the two sides of the bottom plate, hydraulic cylinders are arranged on the transverse plates, one ends of the hydraulic cylinders are connected with hydraulic rods, the ends, away from the hydraulic cylinders, of the hydraulic rods are connected with clamps, the clamps are in a c shape, and mounting plates are arranged at openings of the clamps; a plurality of limiting columns are arranged at the top ends of the mounting plates, a center plate is arranged in the middle of the bottom plate, a rotating rod is arranged on the center plate, the two sides of the rotating rod are rotationally connected with a first connecting rod and a second connecting rod respectively, rivets are arranged in the middle of the bottom ends of the mounting plates, and the first connecting rod and the second connecting rod are connected with the rivets at the bottom ends of the mounting plates on the two sides respectively. A supporting column is arranged on the center plate rotating rod, a furnace is arranged on the supporting column, positioning of the furnace is achieved, and the device can adjust the positions of limiting columns on the two sides according to the sizes of the furnaces so that the furnaces of different specifications and sizes can be clamped and positioned.

Description

Technical Field

[0001] This utility model belongs to the field of furnace body manufacturing technology, specifically relating to a furnace body grinding and positioning mechanism. Background Technology

[0002] A furnace body grinding and positioning mechanism is a device used to ensure the precise positioning and stability of various parts of a furnace body (such as a boiler, heating furnace, or melting furnace) during the manufacturing or maintenance process, thereby improving grinding efficiency, accuracy, and surface quality.

[0003] Plasma-enhanced chemical vapor deposition (PECVD) is a key technology used in semiconductor coating processes. It involves introducing a suitable amount of process gas into a high-vacuum furnace, and then using low-voltage radio frequency glow discharge at a specific temperature to induce a chemical reaction in the process gas, forming a thin film on the semiconductor surface. During the manufacturing of the semiconductor furnace body, after installing the heating elements, the outer wall of the furnace body needs to be polished. However, the large size of the furnace body makes it difficult to fix, resulting in low polishing efficiency. Utility Model Content

[0004] In view of the above situation and to overcome the defects of the existing technology, this utility model provides a furnace body grinding and positioning mechanism.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A furnace body grinding and positioning mechanism includes: a positioning mechanism comprising a base plate, two sets of horizontal plates on both sides of the base plate, a hydraulic cylinder on each horizontal plate, a hydraulic rod connected to one end of each hydraulic cylinder, and a clamp connected to the end of the hydraulic rod away from the hydraulic cylinder. The clamp is C-shaped, with a mounting plate at the opening of the clamp, several limiting posts at the top of the mounting plate, a center plate in the middle of the base plate, a rotating rod on the center plate, a first connecting rod and a second connecting rod rotatably connected to both sides of the rotating rod, a rivet at the bottom center of the mounting plate, the first connecting rod and the second connecting rod being connected to the rivets at the bottom of the mounting plates on both sides, a support column on the rotating rod of the center plate, and a furnace mounted on the support column.

[0007] Preferably, a rotating mechanism is provided on one side of the furnace. The rotating mechanism includes a motor, which is located at the bottom of the base plate. The motor passes through the base plate and is connected to a rotating shaft. A first gear is provided at the top of the rotating shaft, and a second gear is provided on one side of the first gear. The first gear and the second gear are meshed and connected. One side of the second gear is rotatably connected to the furnace.

[0008] Preferably, a frame is provided on one side of the first gear, and a movable plate is provided inside the frame. The movable plate has a plurality of limiting grooves on the side facing the first gear, and the limiting grooves are engaged with the first gear. A handle is provided on one side of the movable plate, and a plurality of springs are provided on the side of the movable plate near the handle. The two ends of the springs are respectively connected to the inner side of the frame and the outer side of the movable plate.

[0009] Preferably, the base plate has a sliding groove at the far end of the two horizontal plates on both sides, and the mounting plate has a groove at the connection with the sliding groove, and the mounting plate is slidably connected to the sliding groove through the groove.

[0010] Preferably, the surface of the limiting post is provided with several circular grooves.

[0011] Preferably, the limiting post is made of stainless steel.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] (1) This utility model moves the mounting plates towards each other by starting the hydraulic cylinder, thereby clamping the furnace in the middle with the limiting post on the mounting plate, thus positioning the furnace. Furthermore, this device can adjust the position of the limiting posts on both sides according to the size of the furnace, so as to clamp and position furnaces of different sizes.

[0014] (2) This utility model starts the motor to make the first gear and the second gear rotate. The rotation of the second gear drives the furnace to rotate, so that the furnace can rotate to change the grinding position during grinding, thereby improving the grinding efficiency.

[0015] (3) This utility model uses the upper limit groove of the moving plate to engage the first gear, so that the first gear and the second gear are completely locked and do not move, and the furnace remains fixed when the mounting plates on both sides move, thereby improving the accuracy of furnace positioning. Attached Figure Description

[0016] Figure 1 A first-view structural schematic diagram of the furnace body grinding and positioning mechanism provided by this utility model;

[0017] Figure 2 A second-view structural schematic diagram of the furnace body grinding and positioning mechanism provided by this utility model;

[0018] Figure 3 A cross-sectional structural schematic diagram of the furnace body grinding and positioning mechanism provided by this utility model;

[0019] Figure 4 A schematic diagram of the limiting column structure of the furnace body grinding and positioning mechanism provided by this utility model;

[0020] Figure 5A schematic diagram of the rotating mechanism of the furnace body grinding and positioning mechanism provided by this utility model;

[0021] The corresponding names of the reference numerals in the attached drawings are as follows: 100, positioning mechanism; 101, base plate; 102, horizontal plate; 103, hydraulic cylinder; 104, hydraulic rod; 105, clamp; 106, mounting plate; 107, limiting post; 108, furnace; 109, center plate; 110, support post; 111, rotating rod; 112, first connecting rod; 113, second connecting rod; 114, circular groove; 115, rivet; 116, sliding groove; 117, groove; 200, rotating mechanism; 201, motor; 202, rotating shaft; 203, first gear; 204, second gear; 205, frame; 206, moving plate; 207, limiting groove; 208, handle; 209, spring. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments. The embodiments of the present invention include, but are not limited to, the following embodiments.

[0023] First embodiment:

[0024] like Figure 1-5 As shown, the furnace body grinding and positioning mechanism provided by this utility model includes: a positioning mechanism 100, which includes a base plate 101, two sets of horizontal plates 102 on both sides of the base plate 101, a hydraulic cylinder 103 on the horizontal plate 102, a hydraulic rod 104 connected to one end of the hydraulic cylinder 103, and a clamp 105 connected to the end of the hydraulic rod 104 away from the hydraulic cylinder 103. The clamp 105 is C-shaped, and a mounting plate 106 is provided at the opening of the clamp 105. Several limiting posts 107 are provided at the top of the mounting plate 106. A center plate 109 is provided in the middle of the base plate 101, and a rotating rod 111 is provided on the center plate 109. The first connecting rod 112 and the second connecting rod 113 are rotatably connected to both sides of the rotating rod 111. A rivet 115 is provided in the middle of the bottom end of the mounting plate 106. The first connecting rod 112 and the second connecting rod 113 are connected to the first connecting rod 112 and the second connecting rod 113. The furnace 108 is mounted on the center plate 109 and the rotating rod 111 of the center plate 109. The furnace 108 is mounted on the supporting rod 110. When in use, the furnace 108 is placed on the supporting rod 110, and the hydraulic cylinders 103 on both sides of the base plate 101 are activated. The hydraulic cylinders 103 drive the clamp 105 to move through the hydraulic rod 104. The mounting plate 106 is located in the opening of the clamp 105. The movement of the clamp 105 drives the mounting plate 106 to move. When the mounting plate 106 on one side moves, under the action of the first connecting rod 112 and the second connecting rod 113, the mounting plate 106 on the other side moves towards the opposite mounting plate 106 until the limiting post 107 on the mounting plates 106 on both sides clamps the furnace 108 in the middle, thereby positioning the furnace 108.

[0025] This utility model uses the activation of the hydraulic cylinder 103 to move the mounting plate 106 towards each other, thereby causing the limiting post 107 on the mounting plate 106 to clamp the furnace 108 in the middle, thus positioning the furnace 108. Furthermore, this device can adjust the position of the limiting post 107 on both sides according to the different sizes of the furnace 108, so as to clamp and position furnaces 108 of different sizes.

[0026] Second embodiment:

[0027] like Figure 1 , Figure 5 As shown, a rotating mechanism 200 is provided on one side of the furnace 108. The rotating mechanism 200 includes a motor 201, which is located at the bottom end of the base plate 101. The motor 201 passes through the base plate 101 and is connected to a rotating shaft 202. A first gear 203 is provided at the top of the rotating shaft 202, and a second gear 204 is provided on one side of the first gear 203. The first gear 203 and the second gear 204 are meshed and connected. One side of the second gear 204 is rotatably connected to the furnace 108. When the furnace 108 is being polished and it is necessary to rotate the furnace 108 to change the polishing position, the motor 201 is started. The motor 201 drives the first gear 203 to rotate through the rotating shaft 202. The rotation of the first gear drives the second gear 204 to rotate, thereby causing the second gear 204 to drive the furnace 108 to rotate on the support column 110.

[0028] By starting the motor 201, the first gear 203 and the second gear 204 are rotated. The rotation of the second gear 204 drives the furnace 108 to rotate, so that the furnace 108 can rotate to change the grinding position during grinding, thereby improving grinding efficiency.

[0029] Third embodiment:

[0030] like Figure 5 As shown, a frame 205 is provided on one side of the first gear 203, and a movable plate 206 is provided inside the frame 205. The movable plate 206 facing the first gear 203 has several limiting grooves 207, which are engaged with the first gear 203. A handle 208 is provided on one side of the movable plate 206, and several springs 209 are provided on the side of the movable plate 206 near the handle 208. The two ends of the springs 209 are respectively connected to the inner side of the frame 205 and the outer side of the movable plate 206. When the furnace 108 does not need to be rotated, the motor 201 is turned off, the handle 208 is released, and the springs 209 on both sides drive the movable plate 206 to move towards the first gear 203, so that the limiting groove 207 on one side of the movable plate 206 is engaged with the first gear 203, thereby completely fixing the first gear 203 and the second gear 204. Under the engaging action of the first gear 203 and the limiting groove 207 on the movable plate 206, the furnace 108 remains fixed even when the mounting plates 106 on both sides move.

[0031] The first gear 203 is engaged by the upper limit groove 207 of the movable plate 206, so that the first gear 203 and the second gear 204 are completely locked and immobile, and the furnace 108 remains fixed when the mounting plates 106 on both sides move, thereby improving the accuracy of positioning the furnace 108.

[0032] Fourth embodiment:

[0033] like Figure 4 As shown, a sliding groove 116 is provided at the far end of the horizontal plates 102 on both sides of the base plate 101. A groove 117 is provided at the connection between the mounting plate 106 and the sliding groove 116. The mounting plate 106 is slidably connected to the sliding groove 116 through the groove 117. When the mounting plates 106 on both sides move, the bottom groove 117 moves on the sliding groove 116. The design of the groove 117 and the sliding groove 116 can effectively reduce the direct contact area between the moving parts, thereby reducing the friction.

[0034] Fifth embodiment:

[0035] like Figure 1 , Figure 2 As shown, the surface of the limiting post 107 is provided with several circular grooves 114. The circular grooves 114 increase the friction between the limiting post 107 and the furnace 108, so that the limiting posts 107 on both sides clamp the furnace 108 more firmly when they come into contact with the furnace 108.

[0036] In use, the furnace 108 is placed on the support column 110. The hydraulic cylinders 103 on both sides of the base plate 101 are activated. The hydraulic cylinders 103 drive the clamp 105 to move via the hydraulic rod 104. The mounting plate 106 is located in the opening of the clamp 105. The movement of the clamp 105 drives the mounting plate 106 to move. When one side of the mounting plate 106 moves, under the action of the first connecting rod 112 and the second connecting rod 113, the other side of the mounting plate 106 moves towards the opposite side of the mounting plate 106 until the limiting posts 107 on both sides of the mounting plate 106 clamp the furnace 108 in the middle, thus positioning the furnace 108. When grinding the furnace 108 and it is necessary to rotate the furnace 108 to change the grinding position, the motor 201 is started. The motor 201 drives the first gear 203 to rotate via the shaft 202. The rotation of the first gear drives the second gear 204 to rotate, thereby causing the furnace 108 to rotate on the support column 110. When it is not necessary to rotate the furnace 108, the motor 201 is turned off and the handle 208 is released, causing the springs 209 on both sides to move the moving plate 206 toward the first gear 203. The limiting groove 207 on one side of the moving plate 206 engages with the first gear 203, thereby completely fixing the first gear 203 and the second gear 204. Under the engaging action of the first gear 203 and the upper limit groove 207 of the moving plate 206, the furnace 108 remains fixed even when the mounting plates 106 on both sides move.

[0037] The above embodiments are merely one of the preferred embodiments of this utility model and should not be used to limit the scope of protection of this utility model. Any modifications or refinements made to the main design concept and spirit of this utility model that are not of substantial significance, but solve the same technical problem as this utility model, should be included within the scope of protection of this utility model.

Claims

1. A furnace body grinding and positioning mechanism, characterized in that, include: A positioning mechanism (100) includes a base plate (101). Two sets of horizontal plates (102) are provided on both sides of the base plate (101). A hydraulic cylinder (103) is provided on each horizontal plate (102). One end of the hydraulic cylinder (103) is connected to a hydraulic rod (104). The end of the hydraulic rod (104) away from the hydraulic cylinder (103) is connected to a clamp (105). The clamp (105) is C-shaped. An installation plate (106) is provided at the opening of the clamp (105). Several limiting posts (107) are provided at the top of the installation plate (106). The base plate... (101) A central plate (109) is provided in the middle, and a rotating rod (111) is provided on the central plate (109). The rotating rod (111) is rotatably connected to a first connecting rod (112) and a second connecting rod (113) on both sides respectively. A rivet (115) is provided in the middle of the bottom end of the mounting plate (106). The first connecting rod (112) and the second connecting rod (113) are respectively connected to the rivets (115) at the bottom ends of the mounting plates (106) on both sides. A support column (110) is provided on the rotating rod (111) of the central plate (109), and a furnace (108) is provided on the support column (110).

2. The furnace body grinding and positioning mechanism according to claim 1, characterized in that, A rotating mechanism (200) is provided on one side of the furnace (108). The rotating mechanism (200) includes a motor (201). The motor (201) is located at the bottom end of the base plate (101). The motor (201) passes through the base plate (101) and is connected to a rotating shaft (202). A first gear (203) is provided at the top of the rotating shaft (202). A second gear (204) is provided on one side of the first gear (203). The first gear (203) and the second gear (204) are meshed and connected. One side of the second gear (204) is rotatably connected to the furnace (108).

3. The furnace body grinding and positioning mechanism according to claim 2, characterized in that, A frame (205) is provided on one side of the first gear (203). A movable plate (206) is provided inside the frame (205). The movable plate (206) facing the first gear (203) has a plurality of limiting grooves (207). The limiting grooves (207) are engaged with the first gear (203). A handle (208) is provided on one side of the movable plate (206). A plurality of springs (209) are provided on the side of the movable plate (206) located on the handle (208). The two ends of the springs (209) are respectively connected to the inner side of the frame (205) and the outer side of the movable plate (206).

4. The furnace body grinding and positioning mechanism according to claim 2, characterized in that, The base plate (101) has a sliding groove (116) at the far end of the horizontal plates (102) on both sides. The mounting plate (106) is connected to the sliding groove (116) by a groove (117). The mounting plate (106) is slidably connected to the sliding groove (116) through the groove (117).

5. The furnace body grinding and positioning mechanism according to claim 4, characterized in that, The surface of the limiting post (107) is provided with several circular grooves (114).

6. The furnace body grinding and positioning mechanism according to claim 4, characterized in that, The limiting post (107) is made of stainless steel.

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