Ultrasonic treatment equipment for removing dry film

Abstract

The ultrasonic treatment equipment comprises an ultrasonic treatment tank, a lifting frame and sealing structures, treatment liquid is arranged in the ultrasonic treatment tank, the lifting frame is of a pipeline type structure, a plurality of through holes are evenly formed in the inner wall of the lifting frame, the sealing structures are arranged at openings in the two sides of the lifting frame, and the through holes are communicated with the through holes. The overall density of the sealing structure is smaller than the density of the treating fluid, and when the lifting frame is immersed in the treating fluid, the sealing structure floats so that the two ends of the lifting frame can be closed to form a closed cavity. By arranging the sealing structure, the two ends of the lifting frame can be automatically opened or closed, so that the lifting frame is automatically closed during ultrasonic treatment to prevent blanking, and is automatically opened when leaving the treatment liquid to facilitate discharging.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of ultrasonic equipment, in particular to an ultrasonic treatment equipment for dry film stripping. BACKGROUND

[0002] During the processing of a ceramic substrate, punching, etching, ultrasonic cleaning, film stripping and other processes are required. In the prior art, dry film covering is usually used to prevent the copper in the circuit part from being etched. After the circuit etching is completed, the dry film needs to be removed to finally form the ceramic substrate.

[0003] The existing film stripping equipment directly uses a specific solution to etch the film at a slow rate, and the process time is long, thereby affecting the product speed. Therefore, the ultrasonic treatment softening method can be used to accelerate the film stripping efficiency. However, the existing equipment usually needs manual operation during loading and unloading. Therefore, the existing ultrasonic equipment is optimized to adapt to the use requirement of the application that the ultrasonic is used for softening the dry film. SUMMARY

[0004] The application aims to provide an ultrasonic treatment equipment for dry film stripping.

[0005] To achieve the above purpose, the application adopts the technical scheme that an ultrasonic treatment equipment for dry film stripping comprises an ultrasonic treatment tank, a lifting frame and a sealing structure, the ultrasonic treatment tank is provided with a treatment liquid, the lifting frame is of a pipeline type structure, and a plurality of through holes are uniformly arranged on the inner wall of the lifting frame, the sealing structure is arranged at the opening of the lifting frame on both sides, the overall density of the sealing structure is less than the density of the treatment liquid, and when the lifting frame is immersed in the treatment liquid, the sealing structure floats to close the two ends of the lifting frame to form a closed chamber.

[0006] As a kind of preference, the sealing structure comprises a solid or hollow sealing plate made of a material with a density less than the treatment liquid and a limiting part for limiting the up and down sliding of the sealing plate at the two ends of the pipeline.

[0007] As a kind of preference, the sealing structure comprises a hollow sealing plate made of a material with a density greater than the treatment liquid and a limiting part for limiting the up and down sliding of the sealing plate at the two ends of the pipeline.

[0008] As a kind of preference, the limiting part comprises a pair of sliding rails arranged on both sides of the lifting frame, and sliding blocks are arranged on both sides of the sealing plate and slide in the sliding rails, so that the sealing plate is slidably arranged at the two ends of the lifting frame.

[0009] As a kind of preference, a loading slot is arranged at the center of the top of the lifting frame, and the length of the loading slot accounts for one-half to three-quarters of the length of the lifting frame.

[0010] As a preferred, the ultrasonic treatment equipment for removing dry film from the film also comprises a lifting part and a connecting frame, the lifting part is suitable for driving the connecting frame to lift; the lifting frame is rotatably installed on the connecting frame; when feeding, the lifting frame is tilted to one side to make the material fall out of the lifting frame.

[0011] As a preferred, the lifting part is set as a pneumatic cylinder, a motor is arranged between the lifting frame and the connecting frame, the motor is suitable for driving the lifting frame to rotate along the center of the lifting frame; the connecting frame is provided with a circular arc-shaped limiting groove with the center of the lifting frame as the center, a limiting rod is fixedly installed on the lifting frame, when the lifting frame rotates, the limiting rod slides in the limiting groove.

[0012] Compared with the prior art, the application has the following beneficial effects:

[0013] After the lifting frame is immersed in the treatment liquid, the sealing structure will automatically seal the lifting frame due to the buoyancy, at this time, when the ultrasonic treatment is carried out, the sample located at the edge of the lifting frame will not fall into the ultrasonic treatment tank, thereby preventing faults from occurring. The relatively uniformly arranged through holes on the wall surface of the lifting frame can make the vibration of the ultrasonic better enter the inner cavity of the lifting frame, and such densely arranged through holes can make the vibration amplitude of each part of the lifting frame relatively moderate and uniform to a certain extent, thereby ensuring that the dry film on the surface of the sample after treatment can be relatively uniformly softened, which is beneficial to the consistency of subsequent processing of the sample. After the ultrasonic treatment is completed, the sealing structure at both ends of the lifting frame automatically opens when the lifting frame leaves the treatment liquid, thereby facilitating the discharge. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is the overall structure schematic diagram of an embodiment of the application.

[0015] Figure 2 is Figure 1 is the front view of the connecting frame after slightly descending.

[0016] Figure 3 is the schematic diagram of the sealing structure.

[0017] Figure 4 is Figure 3 is the schematic diagram when closed.

[0018] In the figure: 1, connecting frame; 2, mounting part; 3, lifting frame; 4, feeding groove; 5, sealing plate; 6, motor; 7, ultrasonic treatment tank; 8, through hole; 9, sliding rail; 10, limiting groove. DETAILED DESCRIPTION

[0019] Hereinafter, the present application will be further described with reference to the specific embodiments, it should be noted that the following described embodiments or technical features can be combined arbitrarily to form new embodiments without conflict.

[0020] In the description of the present application, it should be noted that for orientation words, such as the terms "center", "transverse", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation and positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and cannot be understood as limiting the specific protection scope of the present application.

[0021] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence.

[0022] The terms "include" and "have" and any variations thereof in the specification and claims of the present application are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to only those steps or units clearly listed, but can include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0023] Embodiment:

[0024] Referring to Figures 1 to 4 The present embodiment proposes an ultrasonic treatment device for dry film stripping, which comprises an ultrasonic treatment tank 7, a lifting frame 3 and a sealing structure. The ultrasonic treatment tank 7 is provided with a treatment liquid. The lifting frame 3 is of a pipeline type structure. The sealing structure is arranged at the opening of the lifting frame 3. The overall density of the sealing structure is less than that of the treatment liquid. When the lifting frame 3 is immersed in the treatment liquid, the sealing structure floats to close the two ends of the lifting frame 3 to form a closed chamber.

[0025] The ultrasonic treatment device for dry film stripping proposed in the present embodiment is mainly used for dry film treatment on the surface of a ceramic substrate. Through solution immersion combined with ultrasonic action, the dry film is stripped, thereby facilitating subsequent stripping treatment. Since the overall density of the sealing structure is less than that of the treatment liquid, after the lifting frame 3 is immersed in the treatment liquid, the sealing structure will automatically seal the lifting frame 3 due to the influence of buoyancy. At this time, during ultrasonic treatment, the samples located at the inner edges of the lifting frame 3 will not fall into the ultrasonic treatment tank 7, thereby preventing faults from occurring. Obviously, the lifting frame 3 can be immersed in the treatment liquid to a certain depth, and the sealing structure will automatically seal the lifting frame 3. Figure 1As shown, the wall surface is relatively uniform and many through holes 8 are arranged, which can make the ultrasonic vibration enter the inner cavity of the lifting frame 3 during processing, and the dense arrangement of the through holes 8 can make the vibration amplitude of the lifting frame 3 relatively moderate and uniform, thereby ensuring that the dry film on the sample surface after processing can be softened relatively uniformly, which is beneficial to the consistency of subsequent processing of the sample. After ultrasonic treatment, the sealing structure at both ends of the lifting frame is automatically opened when the lifting frame leaves the treatment liquid, facilitating discharging.

[0026] The following presents two optional embodiments of the sealing structure.

[0027] One of the sealing structures includes a solid or hollow sealing plate 5 made of a material with a density less than that of the treatment liquid and a limiting part for limiting the up and down sliding of the sealing plate 5 at both ends of the pipeline. When the density of the material itself is less than that of the treatment liquid, the sealing plate 5 can have good buoyancy whether it is hollow or solid, thereby ensuring that both ends can be closed after the lifting frame 3 is immersed in the treatment liquid.

[0028] The second sealing structure includes a hollow sealing plate 5 made of a material with a density greater than that of the treatment liquid and a limiting part for limiting the up and down sliding of the sealing plate 5 at both ends of the pipeline. When the density of the material is greater than that of the treatment liquid, part of the structure needs to be hollow, which can also make the sealing plate 5 automatically close both ends of the lifting frame 3.

[0029] As shown in Figure 3 and Figure 4 , the limiting part includes a pair of sliding rails 9 arranged on both sides of the lifting frame 3, and the sealing plate 5 is provided with sliding blocks on both sides, which are slidably arranged in the sliding rails 9, so that the sealing plate 5 is slidably arranged at both ends of the lifting frame 3. The sliding blocks are not shown in the drawings, but do not affect understanding. Figure 3 As shown, the lifting frame 3 is in an open state at both ends, and Figure 4 is in a closed state after the lifting frame 3 is immersed in the treatment liquid.

[0030] As shown in Figure 3 , the top center of the lifting frame 3 is provided with a feeding slot 4, and the length of the feeding slot 4 accounts for one-half to three-fourths of the length of the lifting frame 3. The sample, i.e. the ceramic substrate, can be directly placed above the feeding slot 4. The feeding slot 4 is arranged to be as long as possible, so that the sample can be distributed as dispersed as possible in the horizontal state of the lifting frame 3, which is beneficial to the effect of ultrasonic treatment.

[0031] As shown in Figure 1 , the ultrasonic treatment equipment for dry film removal also includes a lifting part and a connecting frame 1, the connecting frame 1 includes a mounting part 2 at the bottom, and the lifting part is suitable for driving the connecting frame 1 to lift; the lifting frame 3 is rotatably installed on the connecting frame 1 (specifically at the position of the mounting part 2); when discharging, the lifting frame 3 is rotated to tilt to one side, so that the material falls out of the lifting frame 3.

[0032] The preferred lifting part is a cylinder, and a motor 6 is arranged between the lifting frame 3 and the connecting frame 1, and the motor 6 is suitable for driving the lifting frame 3 to rotate along the center of the lifting frame 3; the connecting frame 1 is provided with a circular arc-shaped limiting groove 10 with the center of the lifting frame 3 as the center, and a limiting rod is fixedly installed on the lifting frame 3, and when the lifting frame 3 rotates, the limiting rod slides in the limiting groove 10. The cylinder controls the lifting frame 3 to lift and lower. When the motor 6 rotates, the lifting frame 3 can rotate, and if the sealing plate 5 is opened when it is tilted, the material can be tilted and fallen out, and self-discharging is realized.

[0033] In order to make the lifting frame 3 rotate stably, the circular arc-shaped limiting groove 10 is arranged, and the limiting rod is arranged, and when the lifting frame 3 rotates, the cooperation of the limiting rod and the limiting groove 10 makes the rotating process stable. The limiting rod is located at the back of the lifting frame 3 and inside the limiting groove 10. Figure 2

[0034] The above describes the basic principles, main features and advantages of the present application. Those skilled in the art should understand that the present application is not limited to the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only the principles of the present application, and various changes and improvements can be made without departing from the spirit and scope of the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection claimed by the present application is defined by the appended claims and their equivalents.​

Claims

1. An ultrasonic treatment device for dry film removal, characterized in that, The device includes an ultrasonic treatment tank, a lifting frame, and a sealing structure. The ultrasonic treatment tank contains a treatment liquid. The lifting frame is a pipe-type structure with several through holes evenly distributed on its inner wall. The sealing structure is located at the openings on both sides of the lifting frame. The overall density of the sealing structure is less than the density of the treatment liquid. When the lifting frame is immersed in the treatment liquid, the sealing structure floats, causing the two ends of the lifting frame to close and form a closed chamber.

2. The ultrasonic treatment equipment for dry film removal as described in claim 1, characterized in that, The sealing structure includes a solid or hollow sealing plate made of a material with a density less than that of the treatment liquid, and a limiting part for restricting the sealing plate from sliding up and down at both ends of the pipe.

3. The ultrasonic treatment equipment for dry film removal as described in claim 1, characterized in that, The sealing structure includes a hollow sealing plate made of a material with a density greater than that of the treatment liquid, and a limiting part for restricting the sealing plate from sliding up and down at both ends of the pipe.

4. The ultrasonic treatment equipment for dry film removal as described in claim 2 or 3, characterized in that, The limiting part includes a pair of slide rails disposed on both sides of the lifting frame, and sliders are disposed on both sides of the sealing plate. The sliders are slidably disposed in the slide rails so that the sealing plate is slidably disposed at both ends of the lifting frame.

5. The ultrasonic treatment equipment for dry film removal as described in claim 4, characterized in that, The top center of the lifting frame has a feeding trough, the length of which is one-half to three-quarters of the length of the lifting frame.

6. The ultrasonic treatment equipment for dry film removal as described in claim 1, characterized in that, It also includes a lifting unit and a connecting frame, the lifting unit being adapted to drive the connecting frame to rise and fall; the lifting frame is rotatably mounted on the connecting frame; when unloading, the lifting frame is rotated to tilt to one side so that the material falls out of the lifting frame.

7. The ultrasonic treatment equipment for dry film removal as described in claim 6, characterized in that, The lifting part is configured as a cylinder, and a motor is provided between the lifting frame and the connecting frame. The motor is adapted to drive the lifting frame to rotate along the center of the lifting frame. The connecting frame is provided with an arc-shaped limiting groove with the center of the lifting frame as the center. A limiting rod is fixedly installed on the lifting frame. When the lifting frame rotates, the limiting rod slides in the limiting groove.

Images