Magnetic efficient filtering and recycling device for waste liquid

Abstract

The utility model discloses a magnetic high-efficiency filtering and recycling device for waste liquid. The magnetic high-efficiency filtering and recycling device comprises a shell, an upper housing for sealing is arranged on one side of the top of the shell, and a liquid inlet and a liquid outlet are formed in the shell; the filter screen filtering module is arranged in the shell and used for circularly conveying a filter screen transversely arranged in the shell, and the liquid inlet is located above the filter screen filtering module; the magnetic adsorption module is arranged in the shell, is positioned in the filter screen filtering module and is used for adsorbing metal particles in the waste liquid filtered by the filter screen filtering module. According to the filter screen filtering module disclosed by the utility model, the filter screen moves in a circulating transmission manner, so that after waste liquid enters the shell from the liquid inlet, large-particle metal is filtered by the filter screen; and the positive pole magnet and the negative pole magnet which are distributed in the magnetic adsorption module at intervals absorb small magnetic raw materials in the waste liquid during rotation, finally the filtered waste liquid flows out of the liquid outlet, metal films in the waste liquid are recycled, and the cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a recovery device especially a waste liquid magnetic high -efficient filter recovery device. BACKGROUND

[0002] In the semiconductor processing process, stripping process is an indispensable process. Stripping process is a method of using photoresist to form a patterned structure on the surface of a wafer. After different process treatments such as coating, exposure, and development, the wafer obtains a photoresist mask layer pattern. Then a metal thin film is prepared on the mask layer. Finally, the mask layer and the metal thin film formed on the mask layer are stripped clean using a solvent.

[0003] When the photoresist is washed away, the top metal thin film is stripped and washed together with the underlying photoresist to form waste liquid. Thus, the waste liquid contains metal thin film, which includes large particle-sized noble metals such as gold, silver, and platinum, and small particle-sized magnetic raw materials. If these waste materials are directly discharged, it will cause great waste and increase the manufacturing cost to some extent. SUMMARY

[0004] The utility model aims at overcoming the prior art's shortcomings and provides a waste liquid magnetic high -efficient filter recovery device, which can adsorb large particle metal and small particle magnetic raw materials, has good filtering effect, reduces cost, and is convenient and labor-saving.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of a waste liquid magnetic high -efficient filter recovery device, which comprises:

[0006] A shell is provided with an upper housing on one side of the top for sealing, and the shell is provided with an inlet and an outlet;

[0007] A filter screen filtering module is arranged in the shell to circulate the filter screen horizontally arranged in the shell. The inlet is located above the filter screen filtering module;

[0008] A magnetic adsorption module is arranged in the shell and located in the filter screen filtering module to adsorb and filter small particle magnetic raw materials from the waste liquid after filtering out large particle metal by the filter screen filtering module.

[0009] Further, the filter screen filtering module comprises a rotary drive unit. The rotary drive unit drives a transmission shaft unit arranged horizontally in the shell. The transmission shaft unit drives a feeding roller located outside the transmission shaft unit to rotate. One side of the feeding roller is provided with two oppositely arranged and rotatable rotating discs. A plurality of bearing rollers and a plurality of tensioning units are arranged in sequence from the bottom to the top of the shell along the outside of the two rotating discs.

[0010] Wherein, the filter screen is sent out from the feeding roller, then transmitted to two rotating discs after being supported by a plurality of supporting rollers and being tensioned by a plurality of tension units in turn, and then returned to the feeding roller.

[0011] Further, the outer side of the two rotating discs is further provided with a plurality of scraper units for scraping off large metal particles on the filter screen.

[0012] Further, the filter screen filtering module is entirely concave.

[0013] Further, the magnetic adsorption module comprises:

[0014] A magnet mounting roller;

[0015] A driving mechanism connected with the magnet mounting roller for driving the magnet mounting roller to rotate;

[0016] A plurality of positive and negative poles of magnets are distributed on the outer circumferential surface of the magnet mounting roller, and the plurality of positive and negative poles of magnets account for 50-75% of the outer circumferential area of the magnet mounting roller.

[0017] Further, the magnet mounting roller is further provided with two adjusting devices arranged on both sides of the magnet mounting roller for adjusting the position of the magnet mounting roller; the adjusting device comprises a bearing seat arranged in a housing; the bearing seat is provided with a rotatable adjusting shaft, one end of the adjusting shaft is connected with the roller shaft, the middle part of the adjusting shaft is provided with a shaft sleeve, and the adjusting spring is sleeved on both sides of the shaft sleeve of the adjusting shaft.

[0018] Further, the magnet mounting roller is further provided with a roller above the magnet mounting roller, and a gap is left between the magnet mounting roller and the roller; the roller is connected with a driven driving part; one end of the driven driving part is connected with the driving mechanism, and the other end of the driven driving part is connected with the roller for synchronously driving the roller to rotate through the driven driving part when the driving mechanism drives the magnet mounting roller to rotate.

[0019] Further, the material of the roller is resin.

[0020] Further, the driving structure comprises a driving motor; the driving motor drives the roller shaft to rotate through a chain and a driving side chain; the roller shaft is sleeved with the magnet mounting roller; the two ends of the magnet mounting roller are mounted by flanges, and the flanges are further provided with bearings.

[0021] Further, the liquid inlet is located at the top of the housing, and the liquid outlet is located at the lower part of the housing.

[0022] By means of the technical scheme, the present application has the following advantages compared with the prior art:

[0023] The waste liquid magnetic high-efficiency filtering and recycling device of the present application moves the filter screen in a circulating transmission mode through the filter screen filtering module, so that the waste liquid is filtered by the filter screen after entering the shell from the liquid inlet; then the positive and negative magnets in the magnetic adsorption module are used to perform secondary filtering on the waste liquid after the small-particle magnetic raw materials are adsorbed when rotating, and finally the waste liquid flows out from the lower liquid outlet, the overall filtering efficiency is high, the large-particle metals and small-particle magnetic raw materials in the waste liquid can be recycled well, the cost is reduced, and the operation is convenient and effective. BRIEF DESCRIPTION OF DRAWINGS

[0024] The technical scheme of the present application will be further described below in combination with the drawings:

[0025] Figure 1 It is a front view of an embodiment of the present application;

[0026] Figure 2 It is an internal structure diagram of the left side in an embodiment of the present application;

[0027] Figure 3 It is an internal structure diagram of the right side in an embodiment of the present application;

[0028] Figure 4 It is a structure schematic view of the magnetic adsorption module in an embodiment of the present application;

[0029] Figure 5 It is a structure schematic view of the magnet mounting roller and the adjusting device connected in an embodiment of the present application;

[0030] Figure 6 It is a structure schematic view of the magnet mounting roller and the positive and negative magnets connected in an embodiment of the present application;

[0031] Wherein: the shell 1, the upper cover 2, the filter screen filtering module 3, the magnetic adsorption module 4, the scraper unit 5, the adjusting device 6, the filter screen 7, the liquid inlet 10, the liquid outlet 11, the rotating drive unit 30, the transmission shaft unit 31, the feeding roller 32, the rotating disc 33, the bearing roller 34, the tensioning unit 35, the filter screen skirt 36, the magnet mounting roller 40, the driving mechanism 41, the positive magnet 42, the negative magnet 43, the roller 44, the driven driving part 45, the bearing with seat 60, the adjusting shaft 61, the bearing 63, the adjusting spring 64, the magnet 80. DETAILED DESCRIPTION

[0032] In order to enable personnel in the technical field to better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor should belong to the scope of protection of the present application.

[0033] The utility model provides a kind of waste liquid magnetic efficient filtration recovery device, to solve the problem of large particle metal and magnetic raw materials in existing technology in waste liquid cannot be effectively filtered and recycled, improve production cost.

[0034] For the convenience of understanding, the specific process in the embodiments of the present application will be described below, please refer to Figures 1 to 3 The waste liquid magnetic efficient filtration recovery device in the embodiments of the present application includes a shell 1, an upper cover 2, a filter screen filtration module 3 and a magnetic adsorption module 4. The top side of the shell 1 is provided with an upper cover 2 for sealing, and the shell 1 and the upper cover 2 form a cavity for placing the filter screen filtration module 3 and the magnetic adsorption module 4. The shell 1 is provided with a liquid inlet 10 and a liquid outlet 11, through which the waste liquid enters and flows out. The filter screen filtration module 3 is arranged in the shell 1 to circulate the filter screen 7 horizontally arranged in the shell 1, and the liquid inlet 10 is located above the filter screen filtration module 3. The magnetic adsorption module 4 is arranged in the shell and inside the filter screen filtration module 3 to adsorb and filter the metal particles in the waste liquid filtered by the filter screen filtration module 3.

[0035] The waste liquid magnetic efficient filtration recovery device of the utility model, after waste liquid enters from liquid inlet 10, first pass through filter screen filtration module 3 and carry out first filtration to large particle metal, again pass through magnetic adsorption module 4 and carry out secondary adsorption filtration to small particle magnetic raw material in waste liquid, to be able to efficiently filter and adsorb large particle metal and small particle magnetic raw material in waste liquid, reduce production cost, convenient operation, satisfy use demand.

[0036] Based on Figure 1 And Figure 3In the embodiment, the filter screen filtering module 3 comprises a rotary driving unit 30, which can be a motor or other driving component; the rotary driving unit 30 drives a transmission shaft unit 31 transversely arranged in the shell 1 to drive; the transmission shaft unit 31 drives a feeding roller 32 outside the transmission shaft unit 31 to rotate; one side of the transmission shaft unit 31 is provided with two oppositely arranged rotary discs 33 which can rotate; two bearing rollers 34 and a plurality of tension units 35 are sequentially arranged from the bottom to the top of the shell 1 along the outside of the two rotary discs 33; the filter screen 7 is distributed along the feeding roller, the bearing roller 34, the tension unit 35 and the rotary disc 33, so that the filter screen 7 is transversely arranged in the shell 1.

[0037] In operation, the rotary driving unit 30 drives the feeding roller 32 to rotate through the transmission shaft unit 31, so that the filter screen 7 is sent out from the feeding roller 32, then carried by the two bearing rollers 34 and moved from the bottom to the top to the two oppositely arranged tension units 35 on the shell 1, and then enters the two transmission discs 33 through the tension units 35 and returns to the feeding roller 32, so that the filter screen 7 is transversely arranged in the shell 1; the waste liquid enters the shell 1 and is filtered by the filter screen 7 for the first time to remove large particles of metal, so that the large particles of metal in the waste liquid are filtered on the filter screen, and the waste liquid continues to flow downward to the magnetic adsorption module 4. Here, the filter screen 7 is in a circulating transmission state to filter the large particles of metal, which can avoid the blockage of the filter screen and has a good filtering effect.

[0038] In the embodiment, the filter screen 7 is a multifilament filter screen, which has a good filtering effect.

[0039] In addition, in order to ensure the relative stability of the filter screen 7 during transmission, a filter screen skirt 36 is arranged on one side of the filter screen 7 to stabilize the position of the filter screen 7.

[0040] Secondly, a plurality of scraper units 5 are arranged on the outside of the two rotary discs 33, which can scrape the large particles of metal on the surface of the filter screen 7 on the rotary disc 33, so that the filter screen 7 can maintain normal filtering effect and the large particles of metal are left on the bottom of the shell for subsequent collection; meanwhile, a plurality of scraper units 5 are arranged to scrape the large particles of metal on the upper end of the rotary disc 33.

[0041] Thirdly, the filter screen filtering module 3 has an inner concave shape, so that the magnetic adsorption module 4 is arranged in the filter screen filtering module 3, thereby realizing secondary adsorption filtering of the waste liquid by the filter screen 7 and the magnetic adsorption module 4 to realize double filtering.

[0042] Based on Figures 4 to 6In the embodiment, the magnetic adsorption module 4 comprises a magnet mounting roller 40, a driving mechanism 41, positive magnets 42 and negative magnets 43. The driving mechanism 41 is connected with the magnet mounting roller 40 to drive the magnet mounting roller 40 to rotate. The driving mechanism 41 comprises a driving motor 410. The driving motor 410 drives the roller shaft 415 to rotate through a chain 411 and a driving side chain 412. The magnet mounting roller 40 is sleeved on the roller shaft 415. The magnet mounting roller 40 is installed through flanges 413 at both ends. Bearings 414 are further provided outside the flanges 413. When the driving motor 410 rotates, the bearings 414 can drive the magnet mounting roller 40 to rotate.

[0043] The outer surface of the magnet mounting roller 40 is provided with a plurality of spaced positive magnets 42 and negative magnets 43. One side of the positive magnets 42 and the negative magnets 43 is arc-shaped to match the magnet mounting roller 40. A separation 44 is further provided between two adjacent positive magnets 42 and negative magnets 43 to separate and install them. After the positive magnets 42 and the negative magnets 43 rotate with the magnet mounting roller 40, they can cyclically adsorb small particle magnetic raw materials in the waste liquid.

[0044] When the waste liquid enters the filtering range of the magnetic adsorption module 4, the positive magnets 42 and the negative magnets 43 adsorb small particle magnetic raw materials in the waste liquid, thereby performing secondary filtration and recovery of the waste liquid.

[0045] In addition, the plurality of positive magnets 42 and negative magnets 43 are not completely distributed on the outer circumferential surface of the magnet mounting roller 40, but have a certain margin to facilitate replacement or installation of the magnets in the later stage. In the embodiment, the plurality of positive magnets 42 and negative magnets 43 account for 50-75% of the outer circumferential area of the magnet mounting roller 40. The specific situation can be adjusted according to the actual situation.

[0046] Further, in order to adjust the position of the magnet mounting roller 40 in the shell 1 in real time, an adjusting device 6 is further provided on both sides of the magnet mounting roller 40. The adjusting device 6 comprises a bearing with seat 60 provided in the shell 1. One end of an adjusting shaft 61 is rotatably provided in the bearing with seat 60, and the other end of the adjusting shaft 61 is connected with the roller shaft 415. A shaft sleeve 63 is provided in the middle of the adjusting shaft 61. Adjusting springs 64 are sleeved on both sides of the shaft sleeve 63 on the adjusting shaft.

[0047] Thus, when the motor 410 drives the magnet-attached roller 40 to rotate, the two adjusting springs 64 drive the magnet-attached roller 40 to adjust the compression and release of the position, so that the gap between the positive and negative magnets 42 and 43 on the outer surface of the magnet-attached roller 40 and the roller 44 changes in real time, so as to achieve the optimal state of the filtering position of the magnetic adsorption module 4.

[0048] Further, the upper portion of the magnet-attached roller 40 is further provided with the roller 44, and a certain gap is left between the positive and negative magnets 42 and 43 on the upper surface of the magnet-attached roller 40. The roller 44 is connected with the driven driving component 45. One end of the driven driving component 45 is connected with the roller shaft 416 in the driving mechanism 41, and the other end is connected with the roller 44. Thus, when the motor 410 drives the magnet-attached roller 40 to rotate through the roller shaft 415, the driven driving component 45 is also driven to rotate synchronously, and the driven driving component 45 drives the roller 44 to rotate synchronously.

[0049] When the roller 44 rotates, it can contact the adsorption surface of the positive and negative magnets 42 and 43 on the magnet-attached roller 40 below, rotate and clean the small-particle magnetic raw materials adsorbed on the upper surface of the positive and negative magnets, so as to ensure that the positive and negative magnets 42 and 43 can be in a normal working state, avoid too many small-particle magnetic raw materials from affecting the adsorption operation of the magnets, and reduce the filtering effect.

[0050] Further, the material of the roller 44 is resin, which has good heat resistance, strong fatigue resistance, excellent corrosion resistance, and long service life. Of course, the roller 44 can also be made of other materials.

[0051] Secondly, in the embodiment, the liquid inlet 10 is located at the top of the shell 1, and the liquid outlet 11 is located at the left side of the lower portion of the shell 1. Thus, the waste liquid falls from the top and finally flows out from the lower portion, so that the filtering efficiency is high, and the large-particle metals and small-particle magnetic raw materials filtered can be left at the bottom of the shell for subsequent recycling.

[0052] In actual work, the waste liquid enters the containing cavity formed by the shell 1 and the upper cover shell 2 from the liquid inlet 10 at the top of the shell 1. At this time, the filter screen filtering module 3 is in operation, and the rotary driving unit 30 drives the feeding roller 32 to rotate. When the feeding roller 32 rotates, the filter screen 7 is continuously circulated between the feeding roller 32, the bearing roller 34, the tensioning unit 35, and the rotating disc 33, so as to perform the first filtering and recycling of the large-particle metals in the waste liquid entering from the liquid inlet 10.

[0053] Then the waste liquid enters into the magnetic adsorption module 4, the driving mechanism 41 drives the magnet mounting roller 40 to roll, so that the waste liquid can contact the positive magnet 42 and the negative magnet 43 rotating in the magnetic adsorption module 4, the positive magnet 42 and the negative magnet 43 adsorb the small particle magnetic raw materials in the waste liquid, after the adsorption is completed, the secondary filtration of the waste liquid is realized, finally, the waste liquid flows out from the liquid outlet 11, and the large particle metal and the small particle magnetic raw materials are left in the shell, so that subsequent collection is facilitated.

[0054] In conclusion, the waste liquid magnet high-efficiency filtering device formed by the filter screen and the positive and negative magnets realizes double filtration of the waste liquid, and the large particle metal and the small particle magnetic raw materials are subjected to secondary filtration and recovery, so that the practical use demand is met.

[0055] The above-described embodiments are only used to illustrate the technical solutions of the present application, rather than limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A waste liquid magnetic high-efficiency filtration and recovery device, characterized in that, The utility model provides a kind of magnetic adsorption filter device, including: Shell, the top side of the shell is equipped with upper cover for sealing, the shell is opened with liquid inlet and liquid outlet; Filter screen filtering module is arranged in the shell, to be circulated transmission to filter screen transversely arranged in the shell;Wherein, the liquid inlet is located above the filter screen filtering module; Magnetic adsorption module is arranged in the shell, and is located in the filter screen filtering module, to carry out small particle magnetic raw material adsorption filtering to waste liquid after large particle metal is filtered out by the filter screen filtering module.

2. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 1, characterized in that: The filter screen filtering module includes a rotary drive unit;The rotary drive unit drives the transmission shaft unit transmission transversely arranged in the shell;The transmission shaft unit drives the feeding roller rotating outside the transmission shaft unit;One side of the feeding roller is equipped with two oppositely arranged and rotatable rotating discs;A plurality of bearing idlers and a plurality of tensioning units are sequentially arranged from below to the top of the shell along the outside of the two rotating discs; Wherein, filter screen is sent out from the feeding roller, and then transmitted to the two rotating discs after being supported by a plurality of bearing idlers and tensioned by a plurality of tensioning units in sequence and then returned to the feeding roller.

3. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 2, characterized in that: The outside of the two rotating discs is also equipped with a plurality of scraper units to scrape off large particle metal on the filter screen.

4. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 1, characterized in that: The filter screen filtering module is concave as a whole.

5. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 1, characterized in that, The magnetic adsorption module includes: Magnet installation drum; Driving mechanism, connected with the magnet installation drum, to drive the magnet installation drum to rotate; Positive and negative poles of magnet, a plurality of positive and negative poles of magnet are distributed on the outer circumference of the magnet installation drum, and a plurality of positive and negative poles of magnet account for 50-75% of the outer circumferential area of the magnet installation drum.

6. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 5, characterized in that: It also includes two adjusting devices arranged on both sides of the magnet installation drum to adjust the position of the magnet installation drum;The adjusting device includes a bearing with seat arranged in the shell;The bearing with seat is equipped with a rotatable adjusting shaft, and the other end of the adjusting shaft is connected with the drum shaft;The middle part of the adjusting shaft is equipped with a shaft sleeve;The adjusting spring is sleeved on both sides of the shaft sleeve on the adjusting shaft.

7. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 5, characterized in that: The top of the magnet installation drum is also equipped with a drum, and a gap is left between the magnet installation drum and the drum;The drum is connected with a driven driving part;One end of the driven driving part is connected with the driving mechanism, and the other end is connected with the drum, to drive the drum to rotate synchronously through the driven driving part when the driving mechanism drives the magnet installation drum to rotate.

8. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 7, characterized in that: The material of the drum is resin.

9. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 5, characterized in that: The driving mechanism includes a driving motor;The driving motor drives the drum shaft to rotate through chain and driving side chain;The drum shaft is equipped with a magnet installation drum;The two ends of the magnet installation drum are installed by flange, and the outer side of the flange is also equipped with a bearing.

10. The waste liquid magnetic high-efficiency filtration and recovery device according to claim 1, characterized in that: The liquid inlet is located at the top of the shell, and the liquid outlet is located at the lower part of the shell.

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