Vibration damper and vibration damping system

Abstract

The utility model relates to a shock absorber and a shock absorption system, and belongs to the technical field of precise shock absorption. The shock absorber comprises a bottom plate and a top plate which are oppositely arranged at an interval, and a sensor assembly arranged between the bottom plate and the top plate; the sensor assembly comprises an installation support, a sensor and a shielding structure corresponding to the sensor, the installation support is fixed to the bottom plate, the sensor is installed on the installation support and configured to detect movement of the top plate in the preset direction, and the shielding structure at least partially surrounds the sensor so as to shield electromagnetic interference of the sensor; therefore, the electromagnetic interference of external signals on the displacement sensor in the shock absorber can be reduced, the accuracy of the detection result of the displacement sensor is improved, and the purpose of improving the reliability of the shock absorber is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision damping, in particular to a damper and a damping system. BACKGROUND

[0002] With the continuous improvement of the precision of super-precision machining equipment and measuring instruments, the vibration of the working environment tends to be of smaller amplitude and lower frequency, and thus more stringent requirements are put forward for the damping performance of the damping table. The traditional passive vibration isolation technology is composed of mass-spring-damper, which cannot meet the damping requirements of super-precision equipment due to the inherent contradiction between low-frequency vibration transmissibility and high-frequency vibration attenuation rate. Therefore, it is urgent to improve the current situation by using some new technologies and methods.

[0003] Active damping is an important technology to solve the above problems. The active damping system is generally composed of passive vibration isolation elements and active actuators, such as an active damper composed of an air spring and a voice coil motor in parallel, an active damper composed of a vibration isolation rubber and a piezoelectric ceramic, and an active damper composed of an air spring and a pneumatic actuator.

[0004] However, the above active damping system has the problem of low reliability. CONTENT OF THE INVENTION

[0005] The purpose of the present application is to provide a damper and a damping system to improve the reliability of the existing active damping system.

[0006] The damper provided by the embodiments of the present application comprises a bottom plate and a top plate arranged opposite to each other, and a sensor assembly arranged between the bottom plate and the top plate. The sensor assembly comprises a mounting bracket, a sensor, and a shielding structure corresponding to the sensor. The mounting bracket is fixed to the bottom plate, the sensor is mounted on the mounting bracket and is configured to detect the movement of the top plate in a preset direction, and the shielding structure at least partially surrounds the sensor to shield the sensor from electromagnetic interference.

[0007] The number of sensors is multiple, and the number of shielding structures is multiple. Each shielding structure corresponds to at least one sensor and at least partially surrounds the corresponding sensor to shield the corresponding sensor from electromagnetic interference. The multiple sensors include a first sensor and a second sensor. The first sensor is configured to detect the movement of the top plate in a first preset direction, and the second sensor is configured to detect the movement of the top plate in a second preset direction. One of the second preset direction and the first preset direction is horizontal, and the other is vertical.

[0008] The sensor assembly further comprises a sensing sheet corresponding to the sensor, and the sensing sheet is connected to the top plate; the mounting bracket comprises a connecting plate corresponding to the sensor, the connecting plate and the sensing sheet are oppositely arranged along a preset direction, and the sensor extends into a region between the connecting plate and the sensing sheet, and the length of the sensor extending into the region is adjustable.

[0009] The shielding structure is arranged on a side of the connecting plate away from the sensing sheet, and the shielding structure is a hollow structure, and at least part of the sensor is accommodated in the hollow structure.

[0010] The outer side wall of the sensor is provided with a first thread, the inner side wall of the hollow structure is provided with a second thread, the second thread is matched with the first thread, and the hollow structure is connected with the part of the sensor accommodated in the hollow structure through the first thread and the second thread.

[0011] The outer side wall of the hollow structure is provided with a screwing table corresponding to the second thread.

[0012] The connecting plate has a first surface facing the sensing sheet and a second surface away from the sensing sheet, the first surface of the connecting plate is provided with a positioning hole penetrating through the connecting plate, the hollow structure has opposite first and second ends, and the first end of the hollow structure is provided with a first opening; the first sensor has opposite first and second ends, the first end of the first sensor extends into the region between the connecting plate and the sensing sheet through the positioning hole, and the second end of the first sensor extends into the hollow structure through the first opening.

[0013] The sensor assembly further comprises at least two nuts corresponding to the sensor; the outer side wall of the sensor is provided with a third thread matched with the nut, the nut is connected to the outer side wall of the sensor through the third thread, and the sensor and the positioning hole are connected through the at least two nuts.

[0014] The second end of the hollow structure is provided with a second opening; the sensor assembly further comprises a signal transmission line corresponding to the sensor, at least part of the signal transmission line is located outside the hollow structure, and the signal transmission line is electrically connected to the part of the sensor accommodated in the hollow structure through the second opening.

[0015] The application further provides a damping system comprising the damper.

[0016] The application has the beneficial effects that the damper and the damping system provided by the application, the damper is applied to the damping system and comprises a bottom plate and a top plate arranged in relative spacing and a sensor assembly arranged between the bottom plate and the top plate, the sensor assembly comprises a mounting bracket, a sensor and a shielding structure corresponding to the sensor, wherein the mounting bracket is fixed with the bottom plate, the sensor is mounted on the mounting bracket and is configured to detect the movement of the top plate in a preset direction, and the shielding structure at least partially surrounds the sensor to shield the sensor from electromagnetic interference, so that the electromagnetic interference of external signals on the displacement sensor in the damper can be reduced, the accuracy of the detection result of the displacement sensor is improved, and the reliability of the damper is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] The technical solutions and other beneficial effects of the application will be apparent from the following detailed description of the specific embodiments of the application in combination with the drawings.

[0018] Figure 1 is a perspective structural schematic view of the damper provided by the embodiment of the application;

[0019] Figure 2 is a front view structural schematic view of the damper provided by the embodiment of the application;

[0020] Figure 3 is a right view structural schematic view of the damper provided by the embodiment of the application;

[0021] Figure 4 is a perspective structural schematic view of the shielding structure from one viewing angle provided by the embodiment of the application;

[0022] Figure 5 is a perspective structural schematic view of the shielding structure from another viewing angle provided by the embodiment of the application;

[0023] Figure 6 is a perspective structural schematic view of the mounting bracket provided by the embodiment of the application;

[0024] Figure 7 is another perspective structural schematic view of the damper provided by the embodiment of the application;

[0025] REFERENCE SIGNS:

[0026] 1 - damper; 10 - bottom plate; 20 - top plate; 30 - sensor assembly; 31 - mounting bracket; 311 - connecting plate; 311A - first connecting plate; 311B - second connecting plate; 312 - positioning hole; 313 - fixing plate; 32 - sensor; 32A - first sensor; 32B - second sensor; 33 - shielding structure / hollow structure; 33A - first shielding structure; 33B - second shielding structure; 330 - screwing platform; 331 - first opening; 332 - second opening; 34 - inductive sheet; 34A - first inductive sheet; 34B - second inductive sheet; 35 - nut; 36 - signal transmission line; 40 - motor assembly. DETAILED DESCRIPTION

[0027] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. The examples of the embodiments are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application. In addition, it should be understood that the specific embodiments described herein are only used to explain the present application and cannot be used to limit the present application.

[0028] In the following description, the second component being connected to the first component can include an embodiment in which the second component is directly connected to the first component, and can also include an embodiment in which the second component is connected to the first component through an additional component, such that the second component is not directly connected to the first component.

[0029] In the following description, the second component being connected to the first component can include an embodiment in which the second component is directly connected to the first component, and can also include an embodiment in which the second component is connected to the first component through an additional component, such that the second component is not directly connected to the first component.

[0030] In describing the structure of a component, when one layer, one region is referred to as being "on" or "above" another layer, another region, it can mean being directly on the other layer, the other region, or other layers or regions can be included therebetween. And, if the component is flipped, the one layer, the one region will be "under" or "below" the other layer, the other region. In addition, the features, structures or characteristics described hereinafter can be combined in any suitable manner in one or more embodiments.

[0031] In addition, the direction terms mentioned in the embodiments of the present application, such as [up], [down], [front], [back], [left], [right], [inward], [outward], [side] and the like, are only the directions of the attached drawings. Therefore, the direction terms used are used to illustrate and understand the embodiments of the present application, and not to limit the embodiments of the present application. In each figure, similar structures are represented by the same reference numerals. For the sake of clarity, each part in the drawings is not drawn to scale. In addition, some related parts can not be shown in the drawings.

[0032] The following detailed description will be made in conjunction with specific embodiments, and it should be noted that the serial numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0033] Please refer to Figures 1 to 3 , Figure 1 is a perspective structural schematic diagram of a shock absorber provided by the embodiments of the present application, Figure 2 is a front structural schematic diagram of a shock absorber provided by the embodiments of the present application, Figure 3 is a right structural schematic diagram of a shock absorber provided by the embodiments of the present application. As Figures 1 to 3 shown, the shock absorber 1 includes a bottom plate 10 and a top plate 20 arranged opposite to each other, and a sensor assembly 30 arranged between the bottom plate 10 and the top plate 20, wherein the sensor assembly 30 is fixed with the top plate 20 and can be used to detect the movement of the top plate 20.

[0034] Specifically, the sensor assembly 30 can include a mounting bracket 31, a sensor 32 and a shielding structure 33 corresponding to the sensor 32. Wherein, the mounting bracket 31 is fixed with the bottom plate 10. The sensor 32 is mounted on the mounting bracket 31 and is configured to detect the movement of the top plate 20 in a preset direction. And, the shielding structure 33 at least partially surrounds the sensor 32 to shield the electromagnetic interference of the sensor 32, so as to reduce the electromagnetic interference of the sensor 32 in the shock absorber 1 by external signals, to improve the accuracy of the detection result of the sensor 32, and to achieve the purpose of improving the reliability of the shock absorber 1.

[0035] In the present embodiment, as Figures 1 to 3 shown, the number of sensors 32 can be one or more, and each sensor 32 can correspond to a preset direction, and can be specifically configured to detect the movement of the top plate 20 in the preset direction corresponding thereto. The number of shielding structures 33 can also be one or more, and each shielding structure 33 can correspond to at least one sensor 32, and can specifically at least partially surround the sensor 32 corresponding thereto to shield the electromagnetic interference of the sensor 32 corresponding thereto.

[0036] Specifically, the sensor 32 can be a first sensor 32A or a second sensor 32B. The first sensor 32A can be configured to detect the movement of the top plate 20 in a first preset direction, and the second sensor 32B can be configured to detect the movement of the top plate 20 in a second preset direction.

[0037] Further, the first preset direction and the second preset direction can be perpendicular to each other, and one of the first preset direction and the second preset direction can be horizontal, and the other of the first preset direction and the second preset direction can be vertical. In other words, the first sensor 32A can be a horizontal displacement sensor 32A, and the second sensor 32B can be a vertical displacement sensor 32B, where the horizontal displacement sensor 32A is configured to detect the movement of the top plate 20 in the horizontal direction, and the vertical displacement sensor 32B is configured to detect the movement of the top plate 20 in the vertical direction.

[0038] It should be noted that the horizontal direction (for example, the X direction or the Y direction in the drawings) in the embodiments of the present application can refer to any direction parallel to the horizontal plane (for example, a plane parallel to the X direction and the Y direction in the drawings), and the vertical direction (for example, the Z direction in the drawings) in the embodiments of the present application can refer to any direction perpendicular to the horizontal plane.

[0039] In some embodiments, as shown in Figures 1 to 3 The number of sensors 32 can be multiple (for example, two), and the number of shielding structures 33 can also be multiple (for example, two). Further, the sensors 32 and the shielding structures 33 can correspond one-to-one, that is, the number of the two can be equal, and each sensor 32 can correspond to an independent shielding structure 33 for shielding electromagnetic interference.

[0040] In some specific embodiments, as shown in Figures 1 to 3 The plurality of sensors 32 can include a first sensor 32A and a second sensor 32B. Further, the first sensor 32A can correspond to an independent shielding structure 33 (i.e., a first shielding structure 33A) for shielding electromagnetic interference, and the second sensor 32B can also correspond to an independent shielding structure 33 (i.e., a second shielding structure 33B) for shielding electromagnetic interference.

[0041] Specifically, the first shielding structure 33A can at least partially surround the first sensor 32A to shield the first sensor 32A from electromagnetic interference, and the second shielding structure 33B can at least partially surround the second sensor 32B to shield the second sensor 32B from electromagnetic interference.

[0042] In some embodiments, as shown in Figures 1 to 3As shown, the sensor assembly 30 can further include a sensing sheet 34 corresponding to the sensor 32, and the sensing sheet 34 is connected to the top plate 20. The mounting bracket 31 can include a connecting plate 311 corresponding to the sensor 32.

[0043] Specifically, for each sensor 32, the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be arranged in relative spacing along the preset direction corresponding to the sensor 32, and the sensor 32 can extend into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the connecting plate 311 corresponding to the sensor 32, and the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 is adjustable, so that the distance between the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be adjusted by adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32.

[0044] Specifically, for each sensor 32, the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be arranged in relative spacing along the preset direction corresponding to the sensor 32, and the sensor 32 can extend into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the connecting plate 311 corresponding to the sensor 32, and the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 is adjustable, so that the distance between the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be adjusted by adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32.

[0045] Specifically, for each sensor 32, the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be arranged in relative spacing along the preset direction corresponding to the sensor 32, and the sensor 32 can extend into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the connecting plate 311 corresponding to the sensor 32, and the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 is adjustable, so that the distance between the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be adjusted by adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32.

[0046] Specifically, for each sensor 32, the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be arranged in relative spacing along the preset direction corresponding to the sensor 32, and the sensor 32 can extend into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the connecting plate 311 corresponding to the sensor 32, and the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 is adjustable, so that the distance between the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be adjusted by adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32.

[0047] Specifically, in the above embodiment in which the sensor assembly 30 includes the first sensor 32A and the second sensor 32B, as shown, the connecting plate 311 corresponding to the first sensor 32A (i.e., the first connecting plate 311A) and the sensing sheet 34 corresponding to the first sensor 32A (i.e., the first sensing sheet 34A) can be arranged in relative spacing along the first preset direction, and the connecting plate 311 corresponding to the second sensor 32B (i.e., the second connecting plate 311B) and the sensing sheet 34 corresponding to the second sensor 32B (i.e., the second sensing sheet 34B) can be arranged in relative spacing along the second preset direction. Figures 1 to 3 Specifically, for each sensor 32, the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be arranged in relative spacing along the preset direction corresponding to the sensor 32, and the sensor 32 can extend into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the connecting plate 311 corresponding to the sensor 32, and the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 is adjustable, so that the distance between the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 can be adjusted by adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32.

[0048] Exemplarily, the first connecting plate 311A and / or the second connecting plate 311B can be connected on the side (i.e. the upper side) of the bottom plate 10 facing the top plate 20. Specifically, as shown in Figure 3 the first connecting plate 311A can be directly connected to the side (i.e. the upper side) of the bottom plate 10 facing the top plate 20 by welding or by screws, and the second connecting plate 311B can be connected to the first connecting plate 311A to realize that the second connecting plate 311B is connected to the bottom plate 10 through the first connecting plate 311A, so that the second connecting plate 311B is not directly connected to the bottom plate 10.

[0049] And, in particular implementation, as shown in Figure 3 the first connecting plate 311A and the second connecting plate 311B can be an integrally formed structure, and the first connecting plate 311A and the second connecting plate 311B can be connected together in an L shape. In this way, the horizontal displacement sensor 32A and the vertical displacement sensor 32B share the same L-shaped connecting plate, thereby helping to improve the space utilization of the shock absorber 1.

[0050] Exemplarily, as shown in Figure 3 the mounting bracket 31 can further include a fixed plate 313, which can be fixedly connected with the bottom plate 10 by welding or by screws, thereby realizing that the mounting bracket 31 is fixed with the bottom plate 10 through the fixed plate 313. Specifically, the first connecting plate 311A can be connected to the fixed plate 313 to realize that the first connecting plate 311A is connected to the bottom plate 10 through the fixed plate 313, so that the first connecting plate 311A is not directly connected to the bottom plate 10.

[0051] And, in particular implementation, as shown in Figure 3 the first connecting plate 311A, the second connecting plate 311B and the fixed plate 313 can be an integrally formed structure, and the first connecting plate 311A, the second connecting plate 311B and the fixed plate 313 can be connected together in a C shape, thereby further improving the space utilization of the shock absorber 1.

[0052] Exemplarily, as shown in Figure 3 the first sensing sheet 34A and / or the second sensing sheet 34B can be fixedly connected on the side (i.e. the lower side) of the top plate 20 facing the bottom plate 10 by welding, or can be fixedly connected on the lower side of the top plate 20 by screws. Specifically, as shown in Figure 3As shown, the second sensing element 34B can be directly connected to the top plate 20 on the side (i.e., the lower side) facing the bottom plate 10 by welding or by screws, and the first sensing element 34A can be connected to the second sensing element 34B, so that the first sensing element 34A is connected to the top plate 20 through the second sensing element 34B, thereby making the first sensing element 34A not directly connected to the top plate 20.

[0053] Furthermore, in specific implementations, the first sensing element 34A and the second sensor 32B can be integrally formed, and they can be connected together in an L-shape. This allows the horizontal displacement sensor 32A and the vertical displacement sensor 32B to share the same L-shaped sensing element, thereby improving the space utilization of the vibration damper 1.

[0054] In some specific embodiments, such as Figures 1 to 5 As shown, for each sensor 32, its corresponding shielding structure 33 can be disposed on the side of its corresponding connecting plate 311 away from its corresponding sensing sheet 34, and its corresponding shielding structure 33 can be a hollow structure 33, and the sensor 32 can be at least partially housed in its corresponding hollow structure 33, so as to ensure that the shielding structure 33 corresponding to the sensor 32 can play the role of shielding the sensor 32 from electromagnetic interference.

[0055] Specifically, for each sensor 32, a first thread may be provided on the outer side wall of the sensor 32, and a second thread may be provided on the inner side wall of the hollow structure 33 corresponding to the sensor 32. The second thread is adapted to the first thread. Furthermore, the hollow structure 33 corresponding to the sensor 32 can be connected to the portion of the sensor 32 housed within the hollow structure 33 through the first thread and the second thread. This allows the hollow structure 33 corresponding to the sensor 32 to be sleeved and fixed outside the sensor 32, or the hollow structure 33 corresponding to the sensor 32 to be covered and fixed outside the sensor 32.

[0056] Furthermore, in specific implementation, such as Figures 1 to 5 As shown, the outer wall of the hollow structure 33 corresponding to the area of ​​the second thread can be provided with a screwing table 330, so that the hollow structure 33 can be screwed and fixed to the outer wall of its corresponding sensor 32 by rotating the screwing table 330, or the hollow structure 33 can be loosened and removed from the outer wall of its corresponding sensor 32 by rotating the screwing table 330.

[0057] For example, the second thread may be provided at the end of the hollow structure 33, and the rotating platform 330 may be provided protrudingly around the outer wall of the hollow structure 33.

[0058] Exemplarily, as shown in Figure 5 The inner diameter of the hollow structure 33 at the position corresponding to the screwing platform 330 (or the second thread) can be smaller than the inner diameter of the hollow structure 33 at other positions except the position corresponding to the screwing platform 330 (or the second thread), so as to facilitate the screwing fixation between the hollow structure 33 and the corresponding sensor 32.

[0059] Exemplarily, the shape of the hollow structure 33 can be a polygonal prism, a cylinder, an elliptic cylinder, a circular truncated cone, or a circular cone, etc.

[0060] In some embodiments, as shown in Figures 1 to 6 For each sensor 32, the corresponding connecting plate 311 can have a first surface facing the corresponding sensing sheet 34 and a second surface away from the corresponding sensing sheet 34, and the first surface of the corresponding connecting plate 311 can be provided with a positioning hole 312 penetrating through the corresponding connecting plate 311, and the hollow structure 33 corresponding to the sensor 32 can have opposite first and second ends, and the first end of the hollow structure 33 corresponding to the sensor 32 can be provided with a first opening 331, that is, the hollow structure 33 corresponding to the sensor 32 can be a hollow structure with at least one open end, such as a cylinder with one closed end and one open end or a cylinder with two open ends.

[0061] Specifically, for each sensor 32, the first end of the sensor 32 can pass through the positioning hole 312 on the corresponding connecting plate 311 and extend into the region between the corresponding connecting plate 311 and the corresponding sensing sheet 34, and the second end of the sensor 32 can pass through the first opening 331 of the corresponding hollow structure 33 and extend into the corresponding hollow structure 33.

[0062] And for each sensor 32, the first end of the sensor 32 can be connected with the positioning hole 312 on the corresponding connecting plate 311, so that the sensor 32 is mounted on the mounting bracket 31.

[0063] In some specific embodiments, as shown in Figures 1 to 6As shown, the sensor assembly 30 can further include a plurality of nuts 35, and for each sensor 32, the sensor 32 can correspond to at least two nuts 35, and a third thread can be provided on the outer sidewall of the sensor 32, the third thread being adapted to the nuts 35 corresponding to the sensor 32, and the nuts 35 corresponding to the sensor 32 can be connected to the outer sidewall of the sensor 32 through the third thread, and the sensor 32 and the positioning hole 312 on the connecting plate 311 corresponding to the sensor 32 can be connected through the at least two nuts 35 corresponding to the sensor 32.

[0064] Specifically, for each sensor 32, in the process of installing the sensor 32 on the mounting bracket 31, the two nuts 35 corresponding to the sensor 32 can be used to fix and connect the sensor 32 and the positioning hole 312 on the connecting plate 311 corresponding to the sensor 32 on the opposite sides of the connecting plate 311 corresponding to the sensor 32, and then the positions of the two nuts 35 corresponding to the sensor 32 on the outer sidewall of the sensor 32 can be adjusted by rotating the two nuts 35 corresponding to the sensor 32, so as to achieve the purpose of adjusting the length of the sensor 32 extending into the area between the connecting plate 311 corresponding to the sensor 32 and the sensing sheet 34 corresponding to the sensor 32 through the positioning hole 312 on the connecting plate 311 corresponding to the sensor 32.

[0065] In some specific embodiments, as Figures 1 to 6 As shown, for each sensor 32, the second end of the hollow structure 33 corresponding to the sensor 32 can be provided with a second opening 332, that is, the hollow structure 33 corresponding to the sensor 32 can be a hollow structure with openings at opposite ends, such as a cylinder with openings at both ends, and the second opening 332 can be used to expose the part of the sensor 32 accommodated in the hollow structure 33 corresponding to the sensor 32. For example, after the second end of the sensor 32 extends into the hollow structure 33 corresponding to the sensor 32 through the first opening 331 of the hollow structure 33 corresponding to the sensor 32, the second end of the sensor 32 can further extend out of the hollow structure 33 corresponding to the sensor 32 through the second opening 332 of the hollow structure 33 corresponding to the sensor 32, so as to facilitate the output of the detection result of the sensor 32.

[0066] Specifically, as Figures 1 to 5As shown, the sensor assembly 30 can further include signal transmission lines 36 corresponding to the sensors 32. Specifically, for each sensor 32, its corresponding signal transmission line 36 can be used to transmit the detection result of the sensor 32, and / or can be used to provide working voltage to the sensor 32. Moreover, for each sensor 32, its corresponding signal transmission line 36 can be at least partially located outside the hollow structure 33 corresponding to the sensor 32, and its corresponding signal transmission line 36 can be electrically connected to the part of the sensor 32 located inside the hollow structure 33 corresponding to the sensor 32 through the second opening 332 of the hollow structure 33 corresponding to the sensor 32, or can be electrically connected to the part of the sensor 32 extending outside the hollow structure 33 corresponding to the sensor 32 through the second opening 332 of the hollow structure 33 corresponding to the sensor 32.

[0067] In some embodiments, as shown, Figure 7 As shown, the damper 1 can further include a motor assembly 40 and a spring damping assembly (not shown in the figure) disposed between the bottom plate 10 and the top plate 20. The motor assembly 40 can include a stator and a rotor, and one of the stator and the rotor can be fixed to the bottom plate 10, and the other can be fixed to the top plate 20. One end (i.e., the top end) of the spring damping assembly is fixed to the top plate 20, and the other end (i.e., the bottom end) of the spring damping assembly is fixed to the bottom plate 10.

[0068] Specifically, the number of spring damping assemblies included in the damper 1 can be multiple, for example, can be four, and the four spring damping assemblies can be arranged at the four corner positions of the damper 1, respectively.

[0069] Specifically, the damper 1 can further include a controller (not shown in the figure), and the controller can control the operation of the motor assembly 40 according to the detection result of the sensor assembly 30.

[0070] Exemplarily, the spring damping assembly can include a spring, an upper limit structure, and a lower limit structure. The lower limit structure is fixedly connected to the bottom plate 10, the upper limit structure is located on the side of the lower limit structure away from the bottom plate 10 and is arranged in spaced relation to the lower limit structure, and the upper limit structure is fixedly connected to the top plate 20. The spring is vertically arranged between the upper limit structure and the lower limit structure, so that the vertical damping function can be realized by the spring damping assembly.

[0071] In the above embodiments, the damper 1 can be used as a damping table for damping semiconductor equipment and / or precision equipment such as precision machine tools.

[0072] It can be known from the above that the damper provided in the embodiment comprises a bottom plate and a top plate arranged in opposite directions and a sensor assembly arranged between the bottom plate and the top plate, the sensor assembly comprises a mounting bracket, a sensor and a shielding structure corresponding to the sensor, wherein the mounting bracket is fixed to the bottom plate, the sensor is mounted on the mounting bracket and is configured to detect the movement of the top plate in a preset direction, and the shielding structure at least partially surrounds the sensor to shield the sensor from electromagnetic interference, so that the electromagnetic interference of an external signal on the displacement sensor in the damper can be reduced, the accuracy of the detection result of the displacement sensor is improved, and the reliability of the damper is improved.

[0073] The embodiment of the present application also provides a damping system, which comprises the damper of any of the above-mentioned embodiments.

[0074] Specifically, the damping system can further comprise a load, and the load can be fixed above the top plate of the damper, so that the damping of the load can be achieved.

[0075] Exemplarily, the load can be a semiconductor device, a precision machine tool or other precision equipment.

[0076] It should be noted that the damping system provided in the embodiment of the present application can achieve the beneficial effects of any of the dampers provided in the embodiments of the present application due to the provision of the damper provided in the embodiments of the present application, and the details are described in the above embodiments, which will not be repeated here.

[0077] The above only describes the preferred embodiments of the present application and is not used to limit the present application, and any modifications, equivalent replacements and improvements made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vibration damper, characterized in that, Includes a base plate and a top plate arranged at relative intervals, and a sensor assembly disposed between the base plate and the top plate: The sensor assembly includes a mounting bracket, a sensor, and a shielding structure corresponding to the sensor. The mounting bracket is fixed to the base plate, the sensor is mounted on the mounting bracket and configured to detect the movement of the top plate in a preset direction, and the shielding structure at least partially surrounds the sensor to shield it from electromagnetic interference.

2. The vibration damper according to claim 1, characterized in that, The number of sensors is multiple, and the number of shielding structures is multiple. Each shielding structure corresponds to at least one sensor and at least partially surrounds its corresponding sensor to shield it from electromagnetic interference. Furthermore, the plurality of sensors include a first sensor and a second sensor, wherein the first sensor is configured to detect the movement of the top plate in a first preset direction, the second sensor is configured to detect the movement of the top plate in a second preset direction, and one of the second preset direction and the first preset direction is horizontal and the other is vertical.

3. The vibration damper according to claim 1, characterized in that, The sensor assembly also includes a sensing element corresponding to the sensor, the sensing element being connected to the top plate; The mounting bracket includes a connecting plate corresponding to the sensor. The connecting plate and the sensing element are spaced apart from each other along the preset direction. The sensor extends into the area between the connecting plate and the sensing element through the connecting plate, and the length of the sensor extending into the area between the connecting plate and the sensing element is adjustable.

4. The vibration damper according to claim 3, characterized in that, The shielding structure is located on the side of the connecting plate away from the sensing sheet, and the shielding structure is a hollow structure, with at least a portion of the sensor housed within the hollow structure.

5. The vibration damper according to claim 4, characterized in that, The sensor has a first thread on its outer sidewall and a second thread on its inner sidewall. The second thread is adapted to the first thread, and the hollow structure is connected to the portion of the sensor housed within the hollow structure via the first thread and the second thread.

6. The vibration damper according to claim 5, characterized in that, The outer wall of the hollow structure is provided with a rotating platform corresponding to the area of ​​the second thread.

7. The vibration damper according to claim 4, characterized in that, The connecting plate has a first surface facing the sensing sheet and a second surface facing away from the sensing sheet. A positioning hole is formed on the first surface of the connecting plate, and the positioning hole penetrates the connecting plate. The hollow structure has a first end and a second end opposite to each other, and the first end of the hollow structure has a first opening; The sensor has a first end and a second end, with the first end of the sensor extending through the positioning hole into the area between the connecting plate and the sensing sheet, and the second end of the sensor extending through the first opening into the hollow structure.

8. The vibration damper according to claim 7, characterized in that, The sensor assembly further includes at least two nuts corresponding to the sensor; a third thread is provided on the outer side wall of the sensor, the third thread is adapted to the nut, the nut is connected to the outer side wall of the sensor through the third thread, and the sensor and the positioning hole are connected through the at least two nuts.

9. The vibration damper according to claim 7, characterized in that, The hollow structure has a second opening at its second end; the sensor assembly also includes a signal transmission line corresponding to the sensor, at least a portion of which is located outside the hollow structure, and the signal transmission line passes through the second opening and is electrically connected to the portion of the sensor housed within the hollow structure.

10. A vibration reduction system, characterized in that, Includes the vibration damper as described in any one of claims 1 to 9.

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