Wafer basket

Abstract

The utility model discloses a wafer basket. The wafer basket is used for storing wafers and comprises a frame body, the frame body is provided with a top plate, a pair of opposite side walls and a cross beam, the side wall on one side is provided with a first groove, the side wall on the other opposite side is provided with a second groove in a matched mode, and the first groove and the second groove are arranged in a one-to-one matched mode and are the same in height. The first groove and the second groove are combined to be inserted into a tray, the two sides of the cross beam are fixed to the side walls respectively, at least one positioning hole is formed in the cross beam, a positioning column is embedded into the positioning hole, the side, away from the cross beam, of the positioning column is fixed to the top plate, and the positioning column is used for clamping the inserted tray. Therefore, by improving the structure of the frame body, the tray is ensured to be reliably inserted into the clamping groove, the tray is prevented from shaking / rotating in the frame body through positioning of the positioning column, the wafers on the tray are prevented from penetrating out, and the risk that the wafers are damaged in the transmission process is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, in particular to a wafer basket. BACKGROUND

[0002] At present, during wafer processing (such as transfer), the wafer is usually placed in a basket, and then transferred by a transmission device such as a robot. The wafer is usually placed in a tray, and then the tray is placed in the basket together with the wafer. Usually, a slot / slot is arranged in the basket, and the tray is inserted into the slot. As shown in the figure, the tray 20 is inserted into the slot 10a of the basket 10, and then transferred. In this case, the tray 20 shakes in the slot 10a, and even causes the risk of the wafer being carried on the tray 20 or running out of the tray 20. Thus, when the tray (together with the wafer) is transferred to the next process, the positioning is not accurate, which increases the time for taking the tray. Sometimes, the wafer 30 carried on the tray 20 falls during the transfer process, which causes damage to the wafer. Figure 1

[0003] Therefore, a new wafer basket is needed. CONTENT OF THE INVENTION

[0004] In order to overcome the above-mentioned defects, the purpose of the present application is to provide a new wafer basket for storing a tray and a wafer, which can reliably place the tray and avoid the risk of shaking.

[0005] In order to achieve the above purpose, the present application adopts the following technical solutions:

[0006] A wafer basket, comprising a frame,

[0007] The frame has a top plate, oppositely arranged first and second side walls, and a cross beam,

[0008] The first side wall is provided with a first groove, and the second side wall opposite to the first side wall is provided with a matching second groove. The first groove and the second groove are one-to-one matched. The combination of the first groove and the second groove accommodates the inserted tray.

[0009] The two sides of the cross beam are respectively fixed to the bottom sides of the first and second side walls, and are arranged opposite to the top plate. The cross beam is provided with at least one positioning hole. The positioning hole is embedded with a positioning column, and the side of the positioning column away from the cross beam is fixed to the top plate for clamping the inserted tray. Such design can improve the wafer placing and taking accuracy in the wafer basket, and avoid the shaking / rotation of the wafer in the frame through the positioning part, avoid the wafer on it from being pulled out, and reduce the risk of damage to the wafer during transmission.

[0010] In a preferred embodiment, the positioning hole is circular, and the diameter is between 2-10 cm. ​

[0011] In a preferred embodiment, the positioning hole is square, with a side length of 2-10 cm.

[0012] In a preferred embodiment, the top plate is provided with a handle on the side away from the crossbeam.

[0013] In a preferred embodiment, the outer side of the first and second side walls is respectively provided with a protrusion.

[0014] In a preferred embodiment, the crossbeam is provided with two positioning holes at intervals, with positioning columns respectively embedded in the positioning holes, and the positioning columns are fixed to the top plate on the side away from the crossbeam.

[0015] In a preferred embodiment, the crossbeam is provided with a through hole on each side, and a connecting piece passes through the through hole to fix the crossbeam to the first or second side wall.

[0016] In a preferred embodiment, the number of slots on the first or second side wall is 2-30.

[0017] In a preferred embodiment, the wafer basket contains a tray, and the tray is provided with a recess on one side, which is used to match the positioning column. Preferably, the recess is V-shaped, U-shaped, L-shaped, C-shaped, or at least partially V-shaped, U-shaped, L-shaped, or C-shaped.

[0018] In a preferred embodiment, the tray is a graphite tray.

[0019] Advantages:

[0020] The wafer basket provided in the present application improves the structure of the frame body, ensures that the tray can be reliably inserted into the slot, and avoids shaking / rotation of the tray in the frame body through the positioning part, avoids the wafer on the tray from being pulled out, and reduces the risk of damage to the wafer during transmission. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0022] Figure 1 It is a structural schematic diagram of the existing wafer basket.

[0023] Figure 2 It is a structural schematic diagram of the wafer basket of the embodiment of the present application from one perspective.

[0024] Figure 3Another perspective view of the wafer basket of the embodiment of the present application.

[0025] Figure 4 For Figure 2 A schematic view of a tray partially extracted from the middle of the wafer basket.

[0026] Figure 5 For Figure 4 A schematic view of the wafer basket from another perspective.

[0027] Figure 6 For Figure 4 A schematic view of the wafer basket with the crossbeam hidden. DETAILED DESCRIPTION

[0028] The above solutions will be further described in conjunction with specific embodiments. It should be understood that these embodiments are used to illustrate the present application and do not limit the scope of the present application. The implementation conditions used in the embodiments can be further adjusted according to the specific manufacturer's conditions, and the implementation conditions not mentioned are usually the conditions in the conventional experiments.

[0029] The present application provides a wafer basket. The wafer basket is used to store wafers (such as wafers made of silicon, silicon carbide, gallium nitride, and diamond) and includes a frame. The frame has a top plate, a pair of oppositely arranged side walls, and a crossbeam. A first groove is arranged on one side wall, and a matching second groove is arranged on the opposite side wall. The first groove and the second groove are one-to-one matched and have the same height. The combination of the first groove and the second groove is used to insert a tray. The two sides of the crossbeam are fixed to the side walls. The crossbeam is provided with at least one positioning hole. The positioning hole is embedded in a positioning column. The side of the positioning column away from the crossbeam is fixed to the top plate. The positioning column is used to clamp the inserted tray. In this way, through the improvement of the frame structure, the tray can be reliably inserted into the clamping groove and positioned by the positioning column to avoid shaking / rotation in the frame, to avoid the wafers on the tray from being pulled out, and to reduce the risk of damage to the wafers during transmission.

[0030] Next, the wafer basket of the embodiment of the present application will be described in detail in conjunction with the accompanying Figures 2-6 The wafer can be made of silicon, gallium nitride, silicon carbide, or gallium oxide. The size of the wafer is between 4-12 inches (such as the diameter of the wafer is 4 inches, 6 inches, 8 inches, or 12 inches).

[0031] The wafer basket 100 comprises a frame 110, specifically the frame has a top plate 110c, oppositely arranged first side wall 110a, second side wall 110b and crossbeam 140, the first side wall 110a is provided with first groove 110a1, and the second side wall 110b opposite to the first side wall 110a is provided with matching second groove 110b1, and the first groove 110a1 and the second groove 110b1 are arranged one by one and have the same height (z direction), the combination of the first groove 110a1 and the second groove 110b1 is inserted into the tray 130. The first groove 110a1 and the second groove 110b1 are collectively referred to as grooves.

[0032] The two sides of the crossbeam 140 are respectively fixed to the bottom side of the first side wall 110a and the second side wall 110b (collectively referred to as side wall), and the crossbeam is provided with at least one positioning hole 142, the positioning hole 142 is embedded in the positioning column 120, and the side of the positioning column 120 away from the crossbeam 140 is fixed to the top plate 110c, the positioning column 120 is used for clamping (the positioning column 120 plays a limiting role) the tray 130 inserted from the front a side (the recess is V-shaped, U-shaped, L-shaped, C-shaped or at least partially V-shaped, U-shaped, L-shaped or C-shaped), and the tray 130 is placed with a wafer 150, the wafer can be a silicon substrate, a gallium nitride substrate, a silicon carbide substrate, a sapphire substrate and a diamond substrate, etc., and the size can be between 4-12 inches.

[0033] In this way, by improving the structure of the frame, it is ensured that the tray 130 can be reliably inserted into the clamping groove / recess and positioned by the positioning column to avoid shaking / rotation in the frame, and the wafer 150 on it is prevented from being pulled out, thereby reducing the risk of damage to the wafer during transmission. Preferably, the positioning hole is a through hole. The positioning hole is circular, and the diameter is between 2-10 cm. The positioning hole is square (such as square), and the side length is between 2-10 cm. One side of the positioning column is fixed to the top plate, and the other side is embedded in the positioning hole. During assembly, one side of the positioning column can be fixed to the top plate and then the other side is embedded in the positioning hole, and finally the crossbeam (such as through a connecting piece) is fixed to the side wall.

[0034] In an embodiment, the top plate is provided with a handle portion, which facilitates manual picking.

[0035] In an embodiment, the side wall is provided with a protruding portion (such as a protrusion), which facilitates the connection with the mechanical hand and realizes the transfer to the preset position by the mechanical hand.

[0036] In an embodiment, the crossbeam is provided with two positioning holes 142 at intervals, and the positioning columns are respectively embedded therein, and the side of the positioning column away from the crossbeam is fixed to the top plate, and the positioning column is used for clamping the inserted tray 130.

[0037] In an embodiment, the two sides of the crossbeam are fixed to the side walls by connectors (e.g. bolts).

[0038] In an embodiment, the two sides of the crossbeam are provided with through holes 141, and the connectors (e.g. bolts) pass through the through holes 141 and fix the crossbeam 140 to the side walls.

[0039] In an embodiment, the number of slots on one side wall is between 2-30 (e.g. 25).

[0040] In an embodiment, the tray is a graphite tray (one side of the tray has a recess 130a for matching with a positioning column, and the positioning column is used to position the tray so that it cannot shake / rotate in the basket).

[0041] In an embodiment, referring to Figure 6 and in combination with Figure 2 The inner side of the oppositely arranged first side wall 110a and second side wall 110b is provided with a blocking part 111, which is combined with the positioning column to fix the tray 130. After the tray 130 is inserted into the slot, it is recessed in a V shape, U shape, L shape, C shape or at least partially in a V shape, U shape, L shape or C shape, and the positioning column is positioned via the blocking part 111, so as to reduce the risk of damage to the wafer during transportation. Preferably, a thin film coating or a silicon carbide coating or a tantalum coating is arranged on the surface of the graphite tray.

[0042] In this application, the terms "upper", "lower", "inner", "middle" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0043] The above embodiments are only for illustrating the technical concept and characteristics of the application, and the purpose is to enable those skilled in the art to understand the content of the application and implement it, and cannot limit the protection scope of the application. Any equivalent transformation or modification made in the spirit and essence of the application should be covered within the protection scope of the application.

Claims

1. A wafer basket for storing wafers, characterized by, The frame body comprises a top plate, a first sidewall, a second sidewall and a crossbeam, The first sidewall is provided with a first groove, and the second sidewall opposite to the first sidewall is provided with a second groove matching the first groove, The first groove and the second groove are arranged one by one in matching manner, and the combination of the first groove and the second groove is used to accommodate the inserted tray, The crossbeam is fixed to the bottom side of the first sidewall and the second sidewall respectively, and is arranged opposite to the top plate, The crossbeam is provided with at least one positioning hole, the positioning hole is embedded into the positioning column, and the positioning column is fixed to the top plate away from the crossbeam, and is used to clamp the inserted tray.

2. The wafer basket according to claim 1, wherein The positioning hole is circular, and the diameter is between 2-10cm.

3. The wafer basket according to claim 1, wherein The positioning hole is square, and the side length is between 2-10cm.

4. The wafer basket according to claim 1, wherein The top plate is provided with a handle part away from the crossbeam.

5. The wafer basket according to claim 1, wherein The outer side of the first sidewall and the second sidewall is respectively provided with a protruding part.

6. The wafer basket according to claim 1, wherein The crossbeam is provided with two positioning holes at intervals, and the positioning column is embedded into the positioning hole respectively, and the positioning column is fixed to the top plate away from the crossbeam.

7. The wafer basket according to claim 1, wherein The crossbeam is provided with a through hole on both sides respectively, and the connecting piece passes through the through hole to fix the crossbeam to the first sidewall or the second sidewall.

8. The wafer basket according to claim 1, wherein The number of the insertion slots on the first sidewall or the second sidewall is between 2-30.

9. The wafer basket according to claim 1, wherein The tray is accommodated in the wafer basket, and the tray is provided with a recess on one side, the recess is used to match the positioning column, and the recess is V-shaped, U-shaped, L-shaped, C-shaped or at least partially V-shaped, U-shaped, L-shaped or C-shaped.

10. The wafer basket according to claim 9, wherein The tray is a graphite tray.

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