Semiconductor cleaning mechanical arm

Abstract

The utility model discloses a semiconductor cleaning mechanical arm which comprises a supporting plate, the bottom end of the supporting plate is connected with moving wheels, the top end of the supporting plate is connected with a top plate, the bottom end of the top plate is connected with a plurality of guide rods, and the bottom ends of the guide rods are connected with the side wall of the supporting plate. The side walls of the multiple guide rods are movably connected with a movable plate, the side wall of the front end of the movable plate is connected with two symmetrically-distributed supporting plates, first inserting holes are formed in the side walls of the supporting plates, and the top ends of the supporting plates are connected with hydraulic cylinders. The upper limiting screw ring is screwed upwards, the lower limiting screw ring is screwed downwards, the distance between the top end of the bottom plate and the top end of the fixing frame is adjusted according to the height of the mechanical arm base, the distance is made to be equal to the height of the mechanical arm base, and therefore the situation that the top end of the fixing frame is opposite to the position above the top end of the mechanical arm base is avoided. And therefore, the interference to the movement of the mechanical arm above the mechanical arm base is avoided.

Description

Technical Field

[0001] This utility model relates to the field of robotic arm lifting devices, and in particular to a semiconductor cleanroom robotic arm. Background Technology

[0002] Semiconductor cleanroom robotic arms are commonly used for cleaning semiconductor products. They have a wide range of applications and significantly save manpower. The use of cleanroom robots is increasing in modern product manufacturing, greatly enhancing their practicality. However, cleanroom robots often require lifting and lowering operations during use.

[0003] Semiconductor cleanroom robotic arms are used in cleanroom cleaning. Common cleanroom robotic arms are usually placed together with a base, which is generally connected to a lifting platform to facilitate the lifting and lowering of the robotic arm. However, the current lifting platform structure is relatively complex. When fixing the robotic arm base, it occupies the space above the base, thus interfering with the robotic arm's own range of motion. Therefore, a semiconductor cleanroom robotic arm is needed that can easily clamp the robotic arm base without occupying the space above the base. Utility Model Content

[0004] The purpose of this utility model is to overcome the defect that the lifting device occupies the space above the base when clamping the robotic arm base, and to provide a semiconductor cleanroom robotic arm.

[0005] The technical solution to achieve the above objective is as follows: a semiconductor cleanroom robotic arm, comprising a support plate, a movable wheel connected to the bottom end of the support plate, a top plate connected to the top end of the support plate, multiple guide rods connected to the bottom end of the top plate, the bottom ends of the multiple guide rods connected to the side wall of the support plate, a movable plate movably connected to the side wall of the multiple guide rods, two symmetrically distributed support plates connected to the front side wall of the movable plate, a first insertion hole opened in the side wall of the support plate, a hydraulic cylinder connected to the top end of the support plate, the output end of the hydraulic cylinder connected to the movable plate, a clamping mechanism mounted on the support plate, and a fixing mechanism mounted on the clamping mechanism.

[0006] Preferably, the support plate is L-shaped, and the movable wheel is a locking universal wheel.

[0007] Preferably, the sidewall of the moving plate is provided with a plurality of circular holes, and the sidewall of the circular holes is movably connected to the guide rod.

[0008] Preferably, the side wall of the support plate is connected to a push handle.

[0009] Preferably, the clamping mechanism includes a fixed frame, second insertion holes, screw holes, support blocks, support screws, limiting screw rings, a base plate, limiting screws, and pressure blocks. Multiple second insertion holes are provided at the bottom of the outer side wall of the fixed frame. Screw holes are provided at the top of all four side walls of the fixed frame. A set of vertically distributed support blocks are connected to the four corner side walls of the fixed frame. Support screws are connected to the side walls of the support blocks. Two vertically distributed limiting screw rings are threadedly connected to the side walls of the support screws. The side walls of the base plate are movably connected to the support screws. Limit screws are threadedly connected to the side walls of the screw holes. One end of the limiting screw is connected to a pressure block.

[0010] Preferably, the pressure block is made of rubber, and the four corner sidewalls of the base plate are provided with through holes. The sidewall of the support screw passes through the through holes, and a square hole is provided at the center of the top of the base plate. The base plate is located between the upper and lower limiting screw rings.

[0011] Preferably, the fixing mechanism includes a limiting rod and a nut, and both ends of the limiting rod are threaded with nuts.

[0012] Preferably, the sidewalls of both the first and second insertion holes are connected to the limiting rod by insertion, and the two ends of the limiting rod are provided with threads.

[0013] The beneficial effects of this utility model are:

[0014] 1) Tighten the upper limiting screw ring upwards and the lower limiting screw ring downwards. Adjust the distance between the top of the base plate and the top of the fixing frame according to the height of the robotic arm base, so that the distance is equal to the height of the robotic arm base. This prevents the top of the fixing frame from being above the top of the robotic arm base, thus avoiding interference with the movement of the robotic arm located above the robotic arm base. Then, tighten the upper and lower limiting screw rings toward the base plate so that the two limiting screw rings can clamp the base plate. Then, rotate the limiting screw to move the pressure block toward the side wall of the robotic arm base so that the pressure blocks around the perimeter can clamp the robotic arm base, thereby achieving a convenient fixation effect for the robotic arm base.

[0015] 2) Start the hydraulic cylinder, which drives the moving plate to move up and down. The moving plate moves up and down along the guide rod through the round hole, avoiding deviation in the direction of movement. The moving plate drives the support plate to move up and down. The clamping mechanism is fixed to the support plate through the fixing mechanism. Then the support plate drives the clamping mechanism to move up and down. The clamping mechanism clamps and fixes the robot arm base, thereby achieving the lifting effect of the robot arm base. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0017] Figure 2This is a bottom view structural diagram of this utility model;

[0018] Figure 3 This is a schematic diagram of the cross-sectional structure of the guide rod of this utility model;

[0019] Figure 4 This is a top view schematic diagram of the robotic arm base of this utility model;

[0020] Figure 5 This is a schematic diagram of the cross-sectional structure of the mounting frame of this utility model;

[0021] Figure 6 This is a schematic diagram of the support plate structure of this utility model;

[0022] Figure 7 This is a top view of the mounting frame structure of this utility model;

[0023] Figure 8 This is a schematic diagram of the limiting screw structure of this utility model;

[0024] Figure 9 This is a schematic diagram of the insertion rod structure of this utility model.

[0025] Icon labels:

[0026] 1. Support plate; 2. Moving wheel; 3. Push handle; 4. Top plate; 5. Guide rod; 6. Hydraulic cylinder; 7. Moving plate; 8. Round hole; 9. Support plate; 10. First insertion hole; 11. Clamping mechanism; 1101. Fixing frame; 1102. Second insertion hole; 1103. Screw hole; 1104. Support block; 1105. Support screw; 1106. Limiting screw ring; 1107. Base plate; 1108. Limiting screw; 1109. Pressure block; 12. Fixing mechanism; 1201. Limiting rod; 1202. Nut; 13. Robotic arm base. Detailed Implementation

[0027] The technical solution of this utility model will now be clearly and completely described in conjunction with the accompanying drawings. In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] The present invention will be further described below with reference to the accompanying drawings.

[0029] Reference Appendix Figure 1-9 A semiconductor cleanroom robotic arm includes a support plate 1, with a push handle 3 connected to the side wall of the support plate 1. The support plate 1 is L-shaped. The moving wheels 2 are locking universal wheels. The bottom end of the support plate 1 is connected to the moving wheels 2, and the top end of the support plate 1 is connected to a top plate 4. The bottom end of the top plate 4 is connected to multiple guide rods 5, the bottom ends of which are connected to the side wall of the support plate 1. A movable plate 7 is movably connected to the side wall of the guide rods 5. Multiple circular holes 8 are formed on the side wall of the movable plate 7, and the side wall of the circular holes 8 is connected to... The guide rod 5 is movably connected, and the front side wall of the moving plate 7 is connected to two symmetrically distributed support plates 9. The side wall of the support plate 9 is provided with a first insertion hole 10. The top of the support plate 1 is connected to a hydraulic cylinder 6. The output end of the hydraulic cylinder 6 is connected to the moving plate 7. A clamping mechanism 11 is installed on the support plate 9, and a fixing mechanism 12 is installed on the clamping mechanism 11. The push handle 3 can easily push the support plate 1. The support plate 1 can be easily moved under the action of the moving wheel 2, thereby realizing the effect of moving all the devices located on the support plate 1.

[0030] When the hydraulic cylinder 6 is activated, the hydraulic cylinder 6 drives the movable plate 7 to move up and down. The movable plate 7, through the round hole 8, can move up and down along the guide rod 5, preventing deviation in the direction of movement of the movable plate 7. The movable plate 7 drives the support plate 9 to move up and down. The clamping mechanism 11 is fixed on the support plate 9 by the fixing mechanism 12. Then, the support plate 9 drives the clamping mechanism 11 to move up and down. The clamping mechanism 11 clamps and fixes the robotic arm base 13, thereby achieving the lifting effect of the robotic arm base 13.

[0031] Reference Appendix Figure 1-9The clamping mechanism 11 includes a fixed frame 1101, second insertion holes 1102, screw holes 1103, support blocks 1104, support screws 1105, limiting screw rings 1106, a base plate 1107, limiting screws 1108, and pressure blocks 1109. Multiple second insertion holes 1102 are provided at the bottom of the outer side wall of the fixed frame 1101. Screw holes 1103 are provided at the upper ends of all four side walls of the fixed frame 1101. A set of vertically distributed support blocks 1104 are connected to the four corner side walls of the fixed frame 1101. Support screws 1105 are connected to the side walls of the support blocks 1104. Two vertically distributed limiting screw rings 1106 are threadedly connected to the side walls of the support screws 1105. The side walls of the base plate 1107 are movably connected to the support screws 1105. Screw holes 1104, 1105, and 1106 are also provided. The side wall of the 3 is threadedly connected to a limiting screw 1108. One end of the limiting screw 1108 is connected to a pressure block 1109, which is made of rubber. The four corner side walls of the base plate 1107 are provided with through holes. The side wall of the support screw 1105 passes through the through holes. A square hole is provided at the center of the top of the base plate 1107. The base plate 1107 is located between the upper and lower limiting screw rings 1106. The fixing mechanism 12 includes a limiting rod 1201 and a nut 1202. Both ends of the limiting rod 1201 are threadedly connected to the nut 1202. The side walls of the first insertion hole 10 and the second insertion hole 1102 are inserted into the limiting rod 1201. The two ends of the limiting rod 1201 are provided with threads. The top of the pressure block 1109 does not exceed the top of the fixing frame 1101.

[0032] Place the fixed frame 1101 between the two support plates 9, align the second insertion hole 1102 and the first insertion hole 10, insert the limiting rod 1201 through the second insertion hole 1102 and the first insertion hole 10 to support and limit the fixed frame 1101, and screw nuts 1202 on both ends of the limiting rod 1201 so that the nuts 1202 are tightly attached to the outer side of the support plate 9, so that the nuts 1202 on both sides of the support plate 9 can clamp the support plate 9 and prevent the limiting rod 1201 from falling off, thereby fixing the fixed frame 1101 to the support plate 9. Then, turn the upper limiting screw ring 1106 upward and the lower limiting screw ring 1106 downward. Adjust the top of the base plate 1107 and the top of the fixed frame 1101 according to the height of the robotic arm base 13. The end spacing is set so that it is equal to the height of the robotic arm base, thereby preventing the top of the fixed frame 1101 from being higher than the top of the robotic arm base 13, thus avoiding interference with the movement of the robotic arm located above the robotic arm base 13. Then, the upper and lower limiting screw rings 1106 are screwed toward the base plate 1107 respectively, so that the two limiting screw rings 1106 can clamp the base plate 1107. Then, the limiting screw 1108 is rotated to drive the pressure block 1109 to move toward the side wall of the robotic arm base 13, so that the pressure blocks 1109 around the perimeter can clamp the robotic arm base 13, thereby achieving a convenient fixing effect for the robotic arm base 13. The screw hole 1103 is located at the upper end of the side wall of the fixed frame 1101 to maximize the clamping of the pressure block 1109 on the upper end of the robotic arm base 13.

[0033] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A semiconductor cleanroom robotic arm, comprising a support plate (1), characterized in that, The bottom end of the support plate (1) is connected to a movable wheel (2), the top end of the support plate (1) is connected to a top plate (4), the bottom end of the top plate (4) is connected to multiple guide rods (5), the bottom ends of the multiple guide rods (5) are connected to the side wall of the support plate (1), the side wall of the multiple guide rods (5) is movably connected to a movable plate (7), the front side wall of the movable plate (7) is connected to two symmetrically distributed support plates (9), the side wall of the support plate (9) is provided with a first insertion hole (10), the top end of the support plate (1) is connected to a hydraulic cylinder (6), the output end of the hydraulic cylinder (6) is connected to the movable plate (7), the support plate (9) is equipped with a clamping mechanism (11), and the clamping mechanism (11) is equipped with a fixing mechanism (12).

2. The semiconductor cleanroom robotic arm according to claim 1, characterized in that, The support plate (1) is L-shaped, and the moving wheel (2) is made of a locking universal wheel.

3. The semiconductor cleanroom robotic arm according to claim 1, characterized in that, The side wall of the moving plate (7) is provided with a plurality of round holes (8), and the side wall of the round holes (8) is movably connected to the guide rod (5).

4. A semiconductor cleanroom robotic arm according to claim 1, characterized in that, The side wall of the support plate (1) is connected to a push handle (3).

5. A semiconductor cleanroom robotic arm according to claim 1, characterized in that, The clamping mechanism (11) includes a fixed frame (1101), a second insertion hole (1102), a screw hole (1103), a support block (1104), a support screw (1105), a limiting screw ring (1106), a base plate (1107), a limiting screw (1108), and a pressure block (1109). The bottom of the outer side wall of the fixed frame (1101) is provided with multiple second insertion holes (1102), and the upper ends of the four side walls of the fixed frame (1101) are all provided with screw holes (1103). Each of the four corner sidewalls is connected to a set of vertically distributed support blocks (1104). The sidewalls of the support blocks (1104) are connected to support screws (1105). The sidewalls of the support screws (1105) are threaded with two vertically distributed limiting screw rings (1106). The sidewalls of the base plate (1107) are movably connected to the support screws (1105). The sidewalls of the screw holes (1103) are threaded with limiting screws (1108). One end of the limiting screws (1108) is connected to a pressure block (1109).

6. A semiconductor cleanroom robotic arm according to claim 5, characterized in that, The pressure block (1109) is made of rubber block. The four corner sidewalls of the base plate (1107) are provided with through holes. The sidewall of the support screw (1105) passes through the through holes. A square hole is provided at the center of the top of the base plate (1107). The base plate (1107) is located between the upper and lower limiting screw rings (1106).

7. A semiconductor cleanroom robotic arm according to claim 5, characterized in that, The fixing mechanism (12) includes a limiting rod (1201) and a nut (1202), and both ends of the limiting rod (1201) are threaded with nuts (1202).

8. A semiconductor cleanroom robotic arm according to claim 7, characterized in that, The sidewalls of the first insertion hole (10) and the second insertion hole (1102) are both connected to the limiting rod (1201) by insertion, and the two ends of the limiting rod (1201) are provided with threads.

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