Vertical film magazine storage bin

Abstract

The utility model relates to a vertical type wafer box storage bin which is characterized in that the vertical type wafer box storage bin comprises a stock bin, a bearing table is arranged in the stock bin and comprises a rotating shaft which is arranged in the vertical direction and can rotate, a plurality of bearing plates are fixedly arranged on the periphery of the rotating shaft in a sleeved mode, and the bearing plates are arranged in the vertical direction at intervals. A plurality of partition plates are arranged on the periphery of the rotating shaft and are uniformly distributed along the circumference, the partition plates are used for connecting the bearing plates and dividing the bearing plates into a plurality of placing areas for placing the wafer boxes, symmetrical material ports are formed in the peripheral wall of the stock bin, and movable sliding doors are arranged at the material ports. And the sliding door moves to open or close the material port. The utility model has the following advantage and effect: the number of stored film boxes can be increased.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, concretely relates to a vertical wafer box storage bin. BACKGROUND

[0002] Semiconductor refers to the material of the conductivity performance between conductor and insulator at room temperature, and the material needs to be prepared in advance in the PSS etching process, so the staff usually prepares the wafer in advance and places it in the wafer box storage bin, so that the wafer can be taken later.

[0003] For example, the Chinese patent technical document with the publication number CN218705512U discloses a wafer preparation box assembly, which comprises a box body assembly for accommodating wafers, a box door assembly rotatably arranged on one side of the box body assembly, and a gas guide assembly partially embedded in the box body assembly and away from one side of the box door assembly. The box body assembly is embedded with a preparation cabin for accommodating wafers. The gas guide assembly includes a connecting part extending along the top end of the box body assembly and a gas guide pipeline extending along the bottom end of the connecting part. The connecting part is used to guide the gas outside the box body assembly into the gas guide pipeline.

[0004] In the above technical solution, the gas guide pipeline is in communication with the preparation cabin. By sequentially injecting nitrogen into the connecting part and the gas guide assembly, the nitrogen can sequentially enter the gas guide pipeline connected with the connecting part and be guided into the preparation cabin through the gas guide pipeline. This allows the nitrogen to circulate in the preparation cabin and come into contact with the surface of the wafer, thereby reducing the contact between air and the wafer and preventing particles in the air from adhering to the surface of the wafer, ensuring the cleanliness of the wafer surface during placement.

[0005] However, in the above technical solution, the wafer box for placing the wafer is mainly placed on the material supporting frame arranged in the vertical direction and spaced from each other. Only the wafer box can be stored in the axial direction, so there is a certain limitation on the storage quantity of the wafer box. SUMMARY

[0006] In view of the deficiencies of the prior art, the utility model aims to provide a vertical wafer box storage bin, which can improve the storage quantity of the wafer box.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a vertical wafer box storage bin, which comprises a material bin, a bearing table is arranged in the material bin, the bearing table comprises a rotating shaft arranged in the vertical direction and rotatable, a bearing plate is fixedly sleeved on the outer periphery of the rotating shaft, the bearing plate is a plurality of and arranged in the vertical direction and spaced from each other, a partition plate is arranged on the outer periphery of the rotating shaft, the partition plate is a plurality of and evenly distributed in the circumferential direction, the partition plate is used for connecting the bearing plates and separating them into a plurality of placing areas for placing the wafer box, a symmetrical material opening is arranged on the peripheral wall of the material bin, a movable sliding door is arranged at the material opening, and the sliding door is opened or closed by moving.

[0008] The utility model further sets up: the outside of storehouse is equipped with drive cylinder, the outside of sliding door is equipped with connecting flange, the output of drive cylinder is connected with connecting flange, the output of drive cylinder is moved through telescopic and drives the movement to move.

[0009] The utility model further sets up: the inside of sliding door is equipped with detachable guide wheel, the inside of storehouse is equipped with detachable slide rail, the guide wheel is coupled in slide rail, and can constitute the guide cooperation between both.

[0010] The utility model further sets up: the bearing plate is located at the limit block that places area is equipped with, the limit block is used for positioning the sheet box.

[0011] The utility model further sets up: the pivot is hollow structure, the pivot is located at the air outlet hole that places area is equipped with, the air outlet hole is a plurality of, the pivot top end extends to the storehouse outside as extension end, the extension end is equipped with the air inlet hole that communicates with the inner wall of pivot.

[0012] The utility model further sets up: the bearing plate is located at the sheet box induction sensor that places area is equipped with, the sheet box induction sensor is used for detecting whether the sheet box is placed in the corresponding place area.

[0013] The utility model further sets up: the inside of storehouse is equipped with the bearing platform position sensor, the outer periphery of bearing platform is equipped with the positioning rod that extends towards bearing platform position sensor, and the bearing platform position sensor is used for judging the rotation angle of bearing platform.

[0014] Compared with prior art, the utility model has the beneficial effects that:

[0015] Since the bearing platform in the storehouse is composed of a plurality of bearing plates spaced apart from each other along the vertical direction, and each bearing plate is connected by a partition plate and is divided into a plurality of placing areas for placing sheet boxes, the placing areas can be spaced apart along the axial and radial directions, so that the sheet boxes can be stored axially and radially, thereby increasing the storage capacity of the sheet boxes. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the whole structure schematic diagram (one) of the utility model;

[0017] Figure 2 It is the whole structure schematic diagram (two) of the utility model;

[0018] Figure 3 It is the specific structure schematic diagram of bearing platform in the utility model;

[0019] Figure 4 The connecting relationship between the guide wheel and the slide rail in the utility model is a schematic view.

[0020] Figure 5 The transverse cross section structure of the utility model is a schematic view. DETAILED DESCRIPTION

[0021] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0022] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0023] As Figures 1 to 5 The utility model discloses a vertical sheet box storage bin, including stock bin 1, be equipped with the bearing platform 2 in the stock bin 1, and the bearing platform 2 includes the rotation shaft 21 that sets up along the vertical direction and can rotate, and the both ends of rotation shaft 21 are connected through the bearing with the stock bin 1 and constitute the rotation, and the outer periphery of rotation shaft 21 is equipped with the partition 23 that separates, and the partition 23 that separates is multiple and distributes evenly according to the circumference, and the partition 23 that separates is used to connect each bearing plate 22, because the bearing platform 2 in the stock bin 1 is composed of multiple bearing plates 22 that set up along the vertical direction and are spaced apart from each other, and each bearing plate 22 is connected by the partition 23 that separates and is separated into multiple placement areas for placing sheet boxes, so that the placement area can be spaced apart along the axial direction and the radial direction respectively, so that the sheet box can be stored axially and radially to improve the storage quantity of the sheet box.

[0024] Furthermore, the silo 1 is provided with symmetrical material outlets 101 on the peripheral wall, and a driving motor 300 is installed at the bottom of the silo 1 to drive the rotation of the rotating shaft 21, so that the driving motor 300 drives the rotating shaft 21 to rotate, thereby driving the rotating of the bearing table 2, so that each placement area can be rotated to the position opposite to the material outlet 101, and thus the material outlet 101 on one side is used as the material inlet, and the material outlet 101 on the other side is used as the material outlet, and corresponding taking and placing mechanical hands are provided, so as to improve the convenience of taking and placing the sheet boxes.

[0025] In addition, a movable sliding door 3 is arranged at the material outlet 101, and the sliding door 3 is opened or closed by moving, so that the material outlet 101 is closed by the sliding door 3, thereby reducing the invasion of dust particles from the material outlet 101 into the silo 1, so as to protect the cleanliness of the inside of the silo 1, and the outside of the sliding door 3 is connected with the output end of the driving cylinder 4 outside the silo 1 through the connecting flange 31, so that the sliding door 3 is driven to move by the extension and retraction of the output end of the driving cylinder 4.

[0026] In the embodiment, a detachable guide wheel 5 is further arranged inside the sliding door 3, and a detachable slide rail 6 is arranged inside the silo 1, the guide wheel 5 is installed on the sliding door 3, and when the sliding door 3 moves, the guide wheel 5 can be coupled to the slide rail 6 and form a guide fit therebetween, so as to guide the movement of the sliding door 3 and ensure the stability of the sliding door 3 during movement, and in the embodiment, the detachable structure between the guide wheel 5 and the sliding door 3 is that the support of the guide wheel 5 and the sliding door 3 are provided with corresponding threaded holes, so that the locking pieces are screwed in or out to form a threaded fit, thereby achieving the detachable connection between the guide wheel 5 and the sliding door 3, and in addition, a base 100 is installed inside the silo 1, and the base 100 is detachably connected with the silo 1 through threaded connection, and a base plate 200 is vertically fixed on the base 100, and the base plate 200 is used to connect the slide rail 6, that is, the base plate 200 and the slide rail 6 are provided with corresponding threaded holes, so that the threaded connection between the base plate 200 and the slide rail 6 can achieve the detachable connection between the slide rail 6 and the silo 1, thereby facilitating the overall assembly.

[0027] In the embodiment, limit blocks 7 are arranged at the positions where the bearing plates 22 are located, and the area surrounded by the limit blocks 7 can position the sheet boxes when the sheet boxes are placed in the placement areas, and the limit blocks 7 can prevent the sheet boxes from deviating during the rotation of the bearing table 2 by abutting against the outer periphery of the sheet boxes.

[0028] In the embodiment, the rotating shaft 21 is hollow, and the rotating shaft 21 is provided with a plurality of air outlet holes 211 at the placement area, and the rotating shaft 21 extends to outside of the material bin 1 as an extension end 212, and the extension end 212 is provided with air inlet holes 213 communicated with the inner wall of the rotating shaft 21, so that the extension end 212 can be connected with a blowing device, so that ammonia gas can be sent into the rotating shaft 21 and sent out from the air outlet holes 211 to each placement area, so that the ammonia gas can circulate in the material bin 1 to reduce the contact between air and wafers and prevent particulate matters in the air from adhering to the surface of the wafers, and further ensure the cleanliness of the surface of the wafers during placement.

[0029] In the embodiment, the carrying plate 22 is provided with a film cassette sensing sensor 8 at the placement area, and the film cassette sensing sensor 8 is used to detect whether a film cassette is placed in the corresponding placement area, so that the storage information of the film cassette can be managed through the data feedback of the film cassette sensing sensor 8, and the carrying plate 22 is provided with a downwardly recessed mounting hole, and the film cassette sensing sensor 8 is embedded in the mounting hole.

[0030] In the embodiment, the material bin 1 is provided with a carrying table position sensor 10 inside, and the carrying table 2 is provided with a positioning rod 9 extending towards the carrying table position sensor 10, so that the positioning rod 9 can fall into the sensing range of the carrying table position sensor 10, and the positioning rod 9 can be used as a reference, and the number of times that the positioning rod 9 is detected by the carrying table position sensor 10 during a single rotation of the carrying table 2 can be used to judge the rotation angle of the carrying table 2, so that the motion information of the carrying table 2 can be monitored.

[0031] The specific embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and those skilled in the art can make non-creative contribution modifications to the embodiment according to the needs after reading the specification, but as long as the modifications are within the scope of the claims of the utility model, they are protected by the patent law.

Claims

1. A vertical sheet cassette storage magazine, characterized by Including the silo, the silo is equipped with a bearing table, the bearing table includes the rotating shaft which is arranged along the vertical direction and can rotate, the rotating shaft is equipped with a bearing plate outside the circumference, the bearing plate is multiple and is arranged along the vertical direction and is spaced from each other, the rotating shaft is equipped with a partition plate outside the circumference, the partition plate is multiple and is evenly distributed according to the circumference, the partition plate is used to connect each bearing plate, and is separated into multiple placing areas for placing the cassette, the silo is equipped with the symmetry of the material port on the wall, the material port is equipped with movable sliding door, the sliding door is opened or closed by moving the material port.

2. A vertical sheet cassette storage according to claim 1, characterized in that, The outside of the silo is equipped with a drive cylinder, the sliding door is equipped with a connecting flange, the output end of the drive cylinder is connected with the connecting flange, the output end of the drive cylinder is moved by stretching and retracting to drive the movement to move.

3. A vertical sheet cassette storage according to claim 2, characterized in that, The inside of the sliding door is equipped with a detachable guide wheel, the inside of the silo is equipped with a detachable slide rail, the guide wheel is coupled to the slide rail, and the guide wheel can be guided between the two.

4. The vertical sheet container storage according to claim 1, wherein, The bearing plate is equipped with a limiting block at the placing area, and the limiting block is used for positioning the cassette.

5. A vertical sheet cassette storage according to claim 1, wherein The rotating shaft is a hollow structure, the rotating shaft is equipped with a gas outlet at the placing area, the gas outlet is multiple, the top end of the rotating shaft extends to the outside of the silo as an extension end, and the extension end is equipped with a gas inlet communicated with the inner wall of the rotating shaft.

6. A vertical sheet cassette storage according to claim 4, wherein The bearing plate is equipped with a cassette sensing sensor at the placing area, and the cassette sensing sensor is used for detecting whether the cassette is placed in the corresponding placing area.

7. A vertical sheet cassette storage according to claim 1, wherein The inside of the silo is equipped with a bearing table position sensor, the bearing table is equipped with a positioning rod extending towards the bearing table position sensor, and the bearing table position sensor is used for judging the rotating angle of the bearing table.

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