Laser engraving equipment

Abstract

The utility model discloses laser engraving equipment, which comprises a laser device, a laser light source, a laser light source and a laser light source, the diffractive optical element is arranged on a light path of the laser, and the diffractive optical element is used for shaping the laser into a preset shape; the laser galvanometer is arranged on a light path of the laser, the laser galvanometer is used for driving the laser in the preset shape to move on a to-be-machined part in the preset direction, so that the laser forms a plurality of light spots on the to-be-machined part, and at least one set of two adjacent light spots are partially overlapped. According to the method, the step-shaped groove can be machined only through one-time laser engraving, so that the engraving time can be shortened, and the machining efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of laser processing equipment technology, and in particular to a laser engraving device. Background Technology

[0002] In the manufacturing process of solar cells, some parts of the cell material need to be etched. During the etching process, under the action of wet chemical reagents, a groove structure with a certain depth can be etched by laser.

[0003] Some etching requirements necessitate specific groove structures, such as stepped grooves. However, stepped grooves require at least two laser engraving operations to complete, which increases engraving time and reduces processing efficiency. Utility Model Content

[0004] In view of the above-mentioned shortcomings in the related technologies, this application provides a laser engraving device to solve the problem that step-shaped grooves in the related technologies require at least two laser engravings to be completed.

[0005] To address the aforementioned technical problems, in a first aspect, this application provides a laser engraving device, which includes:

[0006] A laser, the laser being used to emit laser light;

[0007] A diffractive optical element is disposed in the optical path of the laser, and the diffractive optical element is used to shape the laser into a preset shape;

[0008] A laser galvanometer is disposed in the optical path of the laser. The laser galvanometer is used to drive the laser of the preset shape to move along a preset direction on the workpiece, so that the laser forms multiple light spots on the workpiece, and at least one set of two adjacent light spots partially overlap.

[0009] In one possible implementation of the first aspect, the diffractive optical element is provided with a first ridge and a plurality of second ridges;

[0010] The first texture is a trapezoidal ring, and each of the second textures is disposed inside the first texture, so that the diffractive optical element shapes the laser into a trapezoid.

[0011] In one possible implementation of the first aspect, the first texture is a right-angled trapezoidal ring.

[0012] In one possible implementation of the first aspect, the light spot is trapezoidal, and the light spot includes two parallel and spaced-apart base sides;

[0013] The preset direction is perpendicular to the length direction of the bottom edge.

[0014] In a possible implementation of the first aspect, the first texture includes an upper bottom segment and a lower bottom segment that are parallel and spaced apart, an inclined segment connecting the upper bottom segment and the lower bottom segment, and a first direction perpendicular to the length direction of both the upper bottom segment and the lower bottom segment;

[0015] The length of the upper bottom segment is less than the length of the lower bottom segment. The projection of the inclined segment onto the lower bottom segment along the first direction is the first projection segment, and the length of the first projection segment ranges from 1μm to 32μm.

[0016] In a possible implementation of the first aspect, the first texture includes an upper bottom segment and a lower bottom segment that are parallel and spaced apart, an inclined segment connecting the upper bottom segment and the lower bottom segment, and a first direction perpendicular to the length direction of both the upper bottom segment and the lower bottom segment;

[0017] The length of the upper bottom segment is less than the length of the lower bottom segment. The projection of the upper bottom segment onto the lower bottom segment along the first direction is the second projection segment, and the length of the second projection segment ranges from 20μm to 400μm.

[0018] In a possible implementation of the first aspect, the first texture includes an upper bottom segment and a lower bottom segment that are parallel and spaced apart, and an inclined segment connecting the upper bottom segment and the lower bottom segment;

[0019] The direction perpendicular to the length of both the upper and lower bottom segments is the first direction, and the angle between the length direction of the inclined segment and the first direction is in the range of 0°-10°.

[0020] In one possible implementation of the first aspect, the first texture is an annular recess, and the depth of the first texture ranges from 0.05 μm to 10 μm.

[0021] In one possible implementation of the first aspect, the second texture is in the shape of a square ring, and multiple second textures are arranged at the same center and at intervals.

[0022] In one possible implementation of the first aspect, the overlap rate of two adjacent light spots is greater than or equal to 50%.

[0023] Compared with related technologies, this application has at least the following beneficial effects:

[0024] In this application, when using a laser engraving device to process stepped grooves on a workpiece, the laser emits a single laser beam. Simultaneously, because a diffractive optical element is positioned in the laser's optical path, the emitted laser beam is shaped into a predetermined shape with uniform energy distribution. Furthermore, since a laser galvanometer is also positioned in the laser's optical path, the laser beam of the predetermined shape can be driven to move along a predetermined direction on the workpiece, thereby creating multiple laser spots on the workpiece.

[0025] More importantly, since at least one set of two adjacent light spots partially overlap on the workpiece, high overlap and low overlap regions of light spots can be formed on the workpiece. Since the laser energy of the high overlap region is relatively high and the laser energy of the low overlap region is relatively low, the high overlap region can carve deep grooves on the workpiece, and the low overlap region can carve shallow grooves on the workpiece. Furthermore, since the overlapping and non-overlapping parts of two adjacent light spots are adjacent, that is, the high overlap region and the low overlap region are adjacent, the deep grooves and shallow grooves are also connected, thus forming a stepped groove.

[0026] As can be seen from the above, the laser engraving equipment in this application can process stepped grooves in just one laser engraving operation, thereby reducing engraving time and improving processing efficiency. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 A schematic diagram of the laser engraving equipment provided in the embodiments of this application;

[0029] Figure 2 A schematic diagram of the light spots distributed on the workpiece to be processed, provided in an embodiment of this application;

[0030] Figure 3 A schematic diagram of a groove on a workpiece to be processed, provided in an embodiment of this application;

[0031] Figure 4 A schematic diagram of two adjacent light spots provided in an embodiment of this application;

[0032] Figure 5 A schematic diagram of a diffractive optical element provided in an embodiment of this application;

[0033] Figure 6This is a schematic diagram of the first texture provided in an embodiment of this application.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1-Laser;

[0036] 2-Diffractive optical element; 21-First ridge; 211-Upper bottom section; 212-Lower bottom section; 213-Sloping section; 22-Second ridge;

[0037] 3-Laser galvanometer;

[0038] 4-Workpiece to be processed; 41-Groove; 411-Deep groove; 412-Shallow groove;

[0039] 5 - Spot; 51 - High overlap region; 52 - Low overlap region; 521 - First region; 522 - Second region; 53 - Bottom edge. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0041] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0042] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0043] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0044] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0045] As described in the background section of this application, in the manufacturing process of solar cells, it is necessary to carve some parts of the cell material. During carving, under the action of wet chemical reagents, a groove structure with a certain depth can be carved by laser.

[0046] Some etching requirements necessitate specific groove structures, such as stepped grooves. However, stepped grooves require at least two laser engraving operations to complete, which increases engraving time and reduces processing efficiency.

[0047] Example 1

[0048] In view of the above-mentioned problems, this application provides a laser engraving device to solve the problem that in the related art, stepped grooves require at least two laser engravings to complete.

[0049] The technical solution of this application will be further described below with reference to specific embodiments and accompanying drawings:

[0050] like Figure 1 As shown, the laser engraving equipment includes a laser 1, a diffractive optical element 2, and a laser galvanometer 3. The laser 1 is used to emit laser light, and the diffractive optical element 2 is positioned in the laser's optical path to shape the laser light into a preset shape.

[0051] The laser galvanometer 3 is disposed on the optical path of the laser. The laser galvanometer 3 is used to drive the laser of the preset shape to move along the preset direction on the workpiece 4 to form multiple light spots 5 on the workpiece 4, and at least one set of two adjacent light spots 5 partially overlap.

[0052] In this application, when using a laser engraving device to process a stepped groove 41 on the workpiece 4, such as Figure 1As shown, laser 1 emits a laser beam once. Simultaneously, because diffractive optical element 2 is positioned in the laser's optical path, the laser beam emitted by laser 1 can be shaped into a predetermined shape with uniform energy distribution through diffractive optical element 2. Furthermore, since laser galvanometer 3 is also positioned in the laser's optical path, the laser beam of the predetermined shape can be driven to move along a predetermined direction on the workpiece 4, thereby forming multiple laser spots 5 on the workpiece 4 (e.g., ...). Figure 2 (As shown).

[0053] More importantly, since at least one set of two adjacent light spots 5 on the workpiece 4 partially overlap, therefore, as Figure 2 and Figure 4 As shown, a high overlap region 51 and a low overlap region 52 of the laser spot 5 can be formed on the workpiece 4. Since the laser energy of the high overlap region 51 of the laser spot 5 is relatively high, and the laser energy of the low overlap region 52 is relatively low, therefore... Figure 3 As shown, the high overlap region 51 can carve a deep groove 411 on the workpiece 4, and the low overlap region 52 can carve a shallow groove 412 on the workpiece 4. Since the overlapping and non-overlapping parts of two adjacent light spots 5 are adjacent, that is, the high overlap region 51 and the low overlap region 52 are adjacent, the deep groove 411 and the shallow groove 412 are also connected. Thus, the deep groove 411 and the shallow groove 412 can form a stepped groove 41.

[0054] As can be seen from the above, the laser engraving equipment in this application can process the stepped groove 41 in just one laser engraving, thereby reducing the engraving time and improving the processing efficiency.

[0055] In a preferred embodiment, any two adjacent light spots 5 partially overlap, which facilitates the processing of a longer groove 41.

[0056] As for the laser galvanometer 3, since the laser galvanometer 3 is existing technology, the structure of the laser galvanometer 3 will not be described in detail in this embodiment.

[0057] For diffractive optical element 2, further, as Figure 5 As shown, the diffractive optical element 2 has a first ridge 21 and multiple second ridges 22. The first ridge 21 is a trapezoidal ring, and each of the second ridges 22 is disposed inside the first ridge 21, so that the diffractive optical element 2 shapes the laser into a trapezoidal shape.

[0058] When shaping the laser using diffractive optical element 2, the shape of the outermost ridge on diffractive optical element 2 determines the shape of the laser after shaping. Therefore, the first ridge 21 is set as a trapezoidal ring, so that the laser after being shaped by diffractive optical element 2 is trapezoidal, and consequently, the laser spot formed on the workpiece 4 is also trapezoidal (e.g., Figure 2 and Figure 4 (As shown). During the engraving process, compared to circular or other irregularly shaped light spots, the boundary of the trapezoidal light spot 5 is more conducive to controlling the start and end positions of the engraving, thereby reducing edge blurring and irregular peeling of materials, making the edges of the engraved groove 41 neater and meeting the requirements of high-precision processing.

[0059] In addition, since the trapezoid is a regular shape, setting the first texture 21 as a trapezoidal ring is beneficial to the processing of the first texture 21 on the diffractive optical element 2.

[0060] In other embodiments, the first texture 21 can also be a rectangular ring or a parallelogram ring, etc. The shape of the first texture 21 is flexible and can be set according to actual needs. This application embodiment does not make specific limitations in this regard.

[0061] Furthermore, such as Figure 5 As shown, the first texture 21 is a right-angled trapezoidal ring.

[0062] This design simplifies the structure of the first texture 21 to a certain extent, which in turn facilitates the processing of the first texture 21 on the diffractive optical element 2.

[0063] Furthermore, such as Figure 5 As shown, the second texture 22 is in the shape of a square ring, and multiple second textures 22 are arranged at the same center and at intervals.

[0064] With this configuration, when the laser passes through the diffractive optical element 2 each time, it will be subjected to the same optical effect due to the regularity and fixity of the second texture 22. This ensures the stability of the laser shape after shaping, thereby achieving a stable and repeatable engraving effect and improving product consistency.

[0065] In other embodiments, the second texture 22 may also be in the form of a circular ring, a pentagonal ring, or a hexagonal ring, etc. The shape of the second texture 22 is flexible and can be set according to actual needs.

[0066] Furthermore, the first texture 21 is an annular recess, and the depth of the first texture 21 ranges from 0.05μm to 10μm.

[0067] This design allows the diffractive optical element 2 to be adapted to lasers of different energies by setting the depth of the first texture 21 within this range. For lower-energy lasers, a shallower recess can prevent excessive diffraction that could lead to excessive energy dispersion. Because lower-energy lasers have limited intensity, if the recess is too deep, the laser may lose too much energy as it passes through, making effective engraving impossible. Conversely, for high-energy lasers, appropriately increasing the recess depth can better utilize the laser energy, allowing it to act more concentratedly on the battery material after shaping, achieving efficient engraving.

[0068] On the other hand, this depth range is easier to achieve in manufacturing processes. When manufacturing diffractive optical element 2, a depth range of 0.05μm-10μm can be manufactured relatively accurately using existing precision processing techniques (such as photolithography, etching, etc.).

[0069] In this embodiment, the depth of the first texture 21 can be any value within the range of 0.05μm, 10μm, or 0.05μm-10μm. The depth setting of the first texture 21 is flexible and can be set according to actual needs. This embodiment does not impose any specific limitations on this.

[0070] In a preferred embodiment, the diffractive optical element 2 has a back surface opposite to the laser 1. Both the first ridge 21 and the second ridge 22 are disposed on the back surface, and both the first ridge 21 and the second ridge 22 are grooves etched onto the back surface. The depth of the second ridge 22 ranges from 0.05 μm to 10 μm. The first ridge 21 and multiple second ridges 22 are concentrically arranged and spaced apart, with the spacing between adjacent ridges ranging from 1 μm to 1000 μm.

[0071] With this configuration, since both the first texture 21 and the second texture 22 can be set on the diffractive optical element 2 by means of engraving, it is to a certain extent convenient to set the first texture 21 and the second texture 22 on the diffractive optical element 2.

[0072] In other embodiments, the first texture 21 and the second texture 22 may also be composed of photoresist patterns or micro / nano structure arrays, and the structural configuration of the first texture 21 and the second texture 22 is more flexible.

[0073] Furthermore, such as Figure 4 As shown, the light spot 5 is trapezoidal, and the light spot 5 includes two parallel and spaced-apart base edges 53, as described above in the preset direction (e.g., Figure 2 and Figure 4 The X direction in the middle) is perpendicular to the length direction of the bottom edge 53 (e.g. Figure 2 and Figure 4 Y direction in ).

[0074] With this setting, such as Figure 2 As shown, each light spot 5 is along Figure 2 The regions are arranged sequentially along the X direction, thereby arranging multiple highly overlapping regions 51 sequentially along the X direction, and making the low-overlapping region 52 include multiple first regions 521 and two second regions 522.

[0075] Among them, such as Figure 2 and Figure 4 As shown, multiple high-overlap regions 51 can be used to carve multiple interconnected deep grooves 411 along the X direction on the workpiece 4. Multiple first regions 521 are located on one side of the multiple high-overlap regions 51 in the Y direction, and the multiple first regions 521 are arranged sequentially along the X direction. These multiple first regions 521 can be used to carve multiple deep grooves 411 along the X direction on the workpiece 4. Figure 3 Shallow trenches 412. Since multiple deep trenches 411 and multiple shallow trenches 412 are arranged sequentially along the X direction, the length direction of trenches 41 also extends along the X direction.

[0076] The two second regions 522 are located on both sides of the X direction of the multiple highly overlapping regions 51, and the second regions 522 can also be engraved on the workpiece 4 to form shallow grooves at both ends of the length direction of the groove 41 (not shown in the figure).

[0077] As can be seen from the above, setting the preset direction perpendicular to the length direction of the bottom edge 53 is beneficial for carving a long, stepped groove 41 on the workpiece 4.

[0078] In other embodiments, if a shorter groove 41 is to be engraved on the workpiece 4, the aforementioned preset direction can also be aligned with the length direction of the bottom edge 53 (e.g., Figure 2 and Figure 4 It extends in the same direction as the Y direction. With this setting, since the length of the groove 41 is relatively short, the engraving time can be reduced and the work efficiency can be improved.

[0079] Furthermore, the overlap rate of two adjacent light spots 5 is greater than or equal to 50%.

[0080] With this setting, such as Figure 2 and Figure 4 As shown, since the formula for calculating the overlap rate of two adjacent light spots 5 is (b1-a1) / b1, therefore (b1-a1) / b1≥50%, that is, a1≤b1 / 2, c1≥b1 / 2, and thus d1≤L1 / 2. Wherein, as... Figure 3 As shown, the size of d1 is related to the width d2 of the shallow trench 412, that is, d1 is related to the width of the step of the stepped trench 41, and the greater the overlap, the smaller d1 and the smaller the width d2 of the shallow trench 412. Figure 2As shown, the size of L2 is related to the width a2 of the deep trench 411, and the greater the overlap rate, the larger L2 is, and the larger the width a2 of the deep trench 411 is.

[0081] As can be seen from the above analysis, setting the overlap rate of two adjacent light spots 5 to be greater than or equal to 50% can control the width d2 of the shallow groove 412 and the width a2 of the deep groove 411 within a suitable range. This allows the deep groove 411 to have a larger width a2, while also preventing the width d2 of the shallow groove 412 from being too large, which in turn facilitates the processing of the groove 41 of the required size.

[0082] In addition, such as Figure 3 As shown, since the height b2 of shallow groove 412 and the height c2 of deep groove 411 are related to the overlap rate, and the larger the overlap rate, the larger b2 and c2 are, setting the overlap rate of two adjacent light spots 5 to be greater than or equal to 50% is beneficial to ensure that the engraving depth can be strictly in accordance with the design requirements and to facilitate the processing of grooves 41 of the required depth.

[0083] Furthermore, such as Figure 6 As shown, the first texture 21 includes an upper bottom section 211 and a lower bottom section 212 that are parallel and spaced apart, and an inclined section 213 connecting the upper bottom section 211 and the lower bottom section 212. The direction perpendicular to the length direction of both the upper bottom section 211 and the lower bottom section 212 is the first direction (e.g., Figure 6 (in the X direction).

[0084] The length of the upper bottom segment 211 is less than the length of the lower bottom segment 212. The projection of the inclined segment 213 onto the lower bottom segment 212 along the first direction is the first projection segment. The length L3 of the first projection segment is in the range of 1μm-32μm.

[0085] With this configuration, since the size of the light spot 5 is to a certain extent the same as the size of the first texture 21, that is, L3 = L1 to a certain extent, and since the overlap rate of two adjacent light spots 5 is greater than or equal to 50%, it can be calculated that L3 ≥ 2·d2, that is, d2 ≤ L3 / 2. Therefore, setting the range of the length L3 of the first projection segment to 1μm-32μm makes the range of the width d2 of the shallow groove 412 less than or equal to 0.5μm-16μm, which is beneficial for further processing the shallow groove 412 of the required width.

[0086] In a preferred embodiment, the width d2 of the shallow trench 412 ranges from 0.3 μm to 10 μm.

[0087] This configuration, during mass production of batteries, makes quality control easier, ensuring that the width of each shallow trench 412 is within the specified range. This helps avoid battery performance degradation due to non-compliance with shallow trench 412 width requirements, thereby improving battery consistency and reliability.

[0088] In this embodiment, the length L3 of the first projection segment can be any value within the range of 1μm, 32μm, or 1μm-32μm. The length L3 is set flexibly and can be set according to actual needs. This embodiment does not impose any specific limitations on this.

[0089] In this embodiment, the width d2 of the shallow trench 412 can be any value within the range of 0.3μm, 10μm, or 0.3μm-10μm. The size of the width d2 is set flexibly. Specifically, it can be set according to actual needs. This embodiment does not impose any specific limitations on this.

[0090] Furthermore, such as Figure 6 As shown, the upper bottom segment 211 is along the first direction (e.g. Figure 6 The projection of the X direction in the middle onto the lower bottom segment 212 is the second projection segment, and the length L4 of the second projection segment ranges from 20μm to 400μm.

[0091] With this configuration, since the size of the light spot 5 is to some extent the same as the size of the first texture 21, the length L4 of the second projection segment is related to the width a2 of the deep groove 411, and L4 ≥ a2. Therefore, the range of the length L4 of the second projection segment is set to 20μm-400μm, so that the value of a2 is less than or equal to 20μm-400μm, which facilitates the further processing of the deep groove 411 with the required width.

[0092] In a preferred embodiment, the width a2 of the deep trench 411 ranges from 20μm to 400μm.

[0093] This configuration, during mass production of batteries, makes quality control easier, ensuring that the width of each deep trench 411 is within the specified range. This helps avoid battery performance degradation due to non-compliance with deep trench 411 width requirements, thereby improving battery consistency and reliability.

[0094] In this embodiment, the length L4 of the second projection segment can be any value within the range of 20μm, 400μm, or 20μm-400μm. The length L4 is set flexibly and can be set according to actual needs. This embodiment does not impose any specific limitations on this.

[0095] In this embodiment, the width a2 of the deep trench 411 can be any value within the range of 20μm, 400μm, or 20μm-400μm. The size of the width a2 is set flexibly. Specifically, it can be set according to actual needs. This embodiment does not impose any specific limitations on this.

[0096] Furthermore, the length direction of the inclined segment 213 (e.g.) Figure 6 (direction A in the middle) and the first direction (such as...) Figure 6 The angle between the X direction and the X direction is in the range of 0°-10°.

[0097] This configuration allows the length L3 of the first projection segment to be controlled within a certain range, thereby indirectly controlling the width d2 of the shallow trench 412 within a certain range. This helps to prevent the width d2 of the shallow trench 412 from being too large, which in turn helps to prevent the width of the stepped trench 41 from being too large. This, in turn, helps to prevent the removal of too much material from the battery and helps to ensure the stability of the battery performance.

[0098] In this embodiment of the application, the angle between the length direction of the inclined segment 213 and the first direction can be 10° or any value within the range of 0°-10°. The size of this angle is set flexibly. Specifically, it can be set according to actual needs. This embodiment of the application does not make specific limitations on this.

[0099] For laser 1, the scanning speed of laser 1 is in the range of 0m / s-50m / s, the power is in the range of 10W-100W, and the frequency is in the range of 100KHZ-1000KHZ.

[0100] Setting the scanning speed of laser 1 in the range of 0m / s-50m / s provides flexibility in controlling the engraving precision, while the power range of 10W-100W and the frequency range of 100KHz-1000KHz allow the laser energy to be adjusted according to different engraving needs.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A laser engraving device, characterized in that, include: A laser, the laser being used to emit laser light; A diffractive optical element is disposed in the optical path of the laser, and the diffractive optical element is used to shape the laser into a preset shape; A laser galvanometer is disposed in the optical path of the laser. The laser galvanometer is used to drive the laser of the preset shape to move along a preset direction on the workpiece, so that the laser forms multiple light spots on the workpiece, and at least one set of two adjacent light spots partially overlap.

2. The laser engraving equipment according to claim 1, characterized in that, The diffractive optical element is provided with a first ridge and multiple second ridges; The first texture is a trapezoidal ring, and each of the second textures is disposed inside the first texture, so that the diffractive optical element shapes the laser into a trapezoid.

3. The laser engraving equipment according to claim 2, characterized in that, The first pattern is a right-angled trapezoidal ring.

4. The laser engraving equipment according to claim 2 or 3, characterized in that, The light spot is trapezoidal, and the light spot includes two parallel and spaced-apart base sides; The preset direction is perpendicular to the length direction of the bottom edge.

5. The laser engraving equipment according to claim 4, characterized in that, The first texture includes an upper bottom section and a lower bottom section that are parallel and spaced apart, an inclined section connecting the upper bottom section and the lower bottom section, and a first direction that is perpendicular to the length direction of both the upper bottom section and the lower bottom section; The length of the upper bottom segment is less than the length of the lower bottom segment. The projection of the inclined segment onto the lower bottom segment along the first direction is the first projection segment, and the length of the first projection segment ranges from 1μm to 32μm.

6. The laser engraving equipment according to claim 4, characterized in that, The first texture includes an upper bottom section and a lower bottom section that are parallel and spaced apart, an inclined section connecting the upper bottom section and the lower bottom section, and a first direction that is perpendicular to the length direction of both the upper bottom section and the lower bottom section; The length of the upper bottom segment is less than the length of the lower bottom segment. The projection of the upper bottom segment onto the lower bottom segment along the first direction is the second projection segment, and the length of the second projection segment ranges from 20μm to 400μm.

7. The laser engraving equipment according to claim 4, characterized in that, The first texture includes an upper bottom section and a lower bottom section that are parallel and spaced apart, and an inclined section connecting the upper bottom section and the lower bottom section; The direction perpendicular to the length of both the upper and lower bottom segments is the first direction, and the angle between the length direction of the inclined segment and the first direction is in the range of 0°-10°.

8. The laser engraving equipment according to claim 2 or 3, characterized in that, The first texture is an annular recess, and the depth of the first texture ranges from 0.05μm to 10μm.

9. The laser engraving equipment according to claim 2 or 3, characterized in that, The second texture is in the shape of a square ring, and multiple second textures are arranged at the same center and at intervals.

10. The laser engraving equipment according to any one of claims 1-3, characterized in that, The overlap rate between two adjacent light spots is greater than or equal to 50%.

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