Cleaning and coating mechanism, cleaning and coating equipment and laser processing device

Abstract

The utility model discloses a cleaning and coating mechanism, cleaning and coating equipment and a laser processing device, and the cleaning and coating mechanism comprises a spraying head assembly which at least comprises a first cleaning liquid spraying head and a gluing spraying head; and the spraying driving piece is in transmission connection with the output end of the spraying head assembly through a swing rod so as to drive the spraying head assembly to swing. When a material sheet is cleaned, the spraying driving piece drives the first cleaning liquid spraying head and the gluing spraying head to swing in a reciprocating mode, the first cleaning liquid spraying head sprays cleaning liquid, and the gluing spraying head does not work; when the material sheet is glued, the spraying driving piece drives the first cleaning liquid spray head and the gluing spray head to swing in a reciprocating mode, the gluing spray head sprays glue liquid, and the first cleaning liquid spray head does not work. According to the cleaning and coating mechanism, one spraying driving piece is adopted to drive the first cleaning liquid spraying head and the gluing spraying head to act at the same time, one spraying driving piece is omitted, the size of the cleaning and coating mechanism is reduced, and occupied space is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and more specifically, to a cleaning and coating mechanism, a cleaning and coating equipment, and a laser processing device. Background Technology

[0002] Wafer laser processing is a key step in the semiconductor manufacturing process, used to cut individual chips from a wafer, providing a basis for subsequent packaging and testing.

[0003] Laser processing equipment generally includes a hopper, a transport mechanism, a cleaning and coating device, and processing components. The hopper stores the sheet material to be processed; the transport mechanism transfers the sheet material between the hopper, the cleaning and coating device, and the processing components; the cleaning and coating device cleans and coats the sheet material; and the processing components process the coated sheet material, such as cutting or grooving it using a laser.

[0004] The cleaning and coating apparatus includes a cleaning and coating tank and a cleaning and coating mechanism. A rotatable placement platform is installed inside the cleaning and coating tank, on which the sheet to be coated is placed, and the platform rotates the sheet. The cleaning and coating mechanism first sprays a cleaning solution to clean the sheet, and then sprays adhesive to complete the coating process. In existing technology, the cleaning solution spraying mechanism and the adhesive coating mechanism are two independent mechanisms. During cleaning, the cleaning solution spraying mechanism drives the corresponding nozzle to oscillate back and forth to complete the cleaning action; during adhesive coating, the adhesive coating mechanism drives the corresponding nozzle to oscillate back and forth to complete the adhesive coating action. This design results in a large cleaning and coating apparatus, occupying a large space, and the cleaning solution spraying mechanism and the adhesive coating mechanism are also prone to interference.

[0005] Therefore, how to reduce the size of the cleaning and coating mechanism is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0006] In view of this, the purpose of this utility model is to provide a cleaning and coating mechanism to reduce the size of the cleaning and coating mechanism;

[0007] Another objective of this invention is to provide a cleaning and coating equipment and a laser processing device having the aforementioned cleaning and coating mechanism.

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] A cleaning and coating mechanism, comprising:

[0010] A spray head assembly, the spray head assembly including at least a first cleaning fluid spray head and an adhesive spray head;

[0011] A spraying drive component is connected to the output end of the spraying head assembly via a swing rod to drive the spraying head assembly to swing.

[0012] Optionally, in the above-mentioned cleaning and coating mechanism, the spray head assembly further includes a second cleaning fluid nozzle, wherein the spray direction of the first cleaning fluid nozzle is perpendicular to the material sheet, and the spray direction of the second cleaning fluid nozzle forms an acute angle with the material sheet.

[0013] Optionally, in the above-mentioned cleaning and coating mechanism, the first cleaning fluid nozzle is a cleaning fluid atomizing nozzle that sprays atomized cleaning fluid;

[0014] The second cleaning fluid nozzle is a cleaning fluid jet nozzle that sprays a jet of cleaning fluid.

[0015] Optionally, in the above-described cleaning and coating mechanism, the spray head assembly further includes:

[0016] The first mounting block is fixed to the end of the swing rod, and the first cleaning fluid nozzle and the adhesive spray nozzle are respectively fixed to both sides of the first mounting block;

[0017] The second mounting block is fixed to the swing rod or the first mounting block, the second cleaning fluid nozzle is fixed to the second mounting block, and the second cleaning fluid nozzle is located between the first cleaning fluid nozzle and the adhesive spray nozzle.

[0018] Optionally, in the above-described cleaning and coating mechanism, the medium inlet of the adhesive nozzle includes an adhesive inlet and an anti-clogging inlet; and / or,

[0019] The media inlet of the first cleaning fluid nozzle includes a cleaning fluid inlet and a compressed air inlet.

[0020] Optionally, in the above-mentioned cleaning and coating mechanism, the swing rod is an integral bent rod structure.

[0021] Optionally, the above-mentioned cleaning and coating mechanism further includes a spraying lifting device, wherein the spraying drive is disposed at the output end of the spraying lifting device to drive the spraying drive to perform lifting actions.

[0022] The cleaning and coating mechanism provided by this utility model connects a first cleaning liquid nozzle and an adhesive spray nozzle to the same spraying drive unit via a swing rod, allowing one spraying drive unit to simultaneously drive the first cleaning liquid nozzle and the adhesive spray nozzle to swing. During cleaning of the sheet material, the spraying drive unit drives the first cleaning liquid nozzle and the adhesive spray nozzle to swing back and forth, with the first cleaning liquid nozzle spraying cleaning liquid and the adhesive spray nozzle not working. During adhesive application to the sheet material, the spraying drive unit drives the first cleaning liquid nozzle and the adhesive spray nozzle to swing back and forth, with the adhesive spray nozzle spraying adhesive and the first cleaning liquid nozzle not working. This utility model uses a single spraying drive unit to drive the first cleaning liquid nozzle and the adhesive spray nozzle to operate simultaneously, eliminating the need for a separate spraying drive unit, reducing the size of the cleaning and coating mechanism, and reducing space occupation.

[0023] A cleaning and coating apparatus, comprising:

[0024] Cleaning the glue application bucket, including cleaning the bucket body;

[0025] The placement platform system includes a placement platform disposed inside the cleaning and coating barrel and a placement platform drive unit disposed outside the cleaning and coating barrel. The placement platform drive unit is connected to the placement platform through a transmission component to drive the placement platform to rotate.

[0026] The cleaning and coating mechanism is as described in any of the preceding embodiments, wherein the spray head assembly is located inside the cleaning and coating tank body, and the spray driving component is located outside the cleaning and coating tank body.

[0027] Optionally, in the above-mentioned cleaning and coating equipment, the inner wall of the cleaning and coating tank has an outwardly recessed hidden space, and when the cleaning and coating mechanism is not in operation, the spray head assembly is hidden within the hidden space; and / or,

[0028] The side wall of the cleaning and coating bucket is provided with a drainage mist pipe communicating with the cleaning and coating bucket body; and / or,

[0029] The bottom wall of the cleaning and coating bucket is provided with a drainage pipe communicating with the cleaning and coating bucket body; and / or,

[0030] The inner wall of the cleaning and coating bucket is lined with a sponge layer.

[0031] Optionally, in the above-mentioned cleaning and coating equipment, a baffle is provided in the hidden space, which is used to cover the spray nozzle of the adhesive spray head.

[0032] The cleaning and coating equipment provided by this utility model has all the technical effects of the above-mentioned cleaning and coating mechanism, and will not be described in detail here.

[0033] A laser processing apparatus, comprising the cleaning and coating equipment as described in any of the preceding claims.

[0034] The laser processing device provided by this utility model has all the technical effects of the above-mentioned cleaning and coating equipment, and will not be described in detail here. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the cleaning and coating mechanism disclosed in an embodiment of the present utility model;

[0037] Figure 2 This is a schematic diagram of the cleaning equipment disclosed in an embodiment of the present utility model from one angle.

[0038] Figure 3 This is a schematic diagram of the cleaning equipment disclosed in an embodiment of the present utility model from another angle;

[0039] Figure 4 This is a front view of the cleaning equipment disclosed in an embodiment of this utility model;

[0040] Figure 5 for Figure 4 Sectional view along line AA;

[0041] Figure 6 This is a partial cross-sectional view of the cleaning equipment disclosed in an embodiment of this utility model.

[0042] The meanings of the various reference numerals in the figure are as follows:

[0043] 100-Cleaning and coating mechanism; 110-Spraying drive component; 120-Spray head assembly; 121-First cleaning fluid nozzle; 122-Glue application nozzle; 123-Second cleaning fluid nozzle; 124-First mounting block; 125-Second mounting block; 130-Spraying lifting device; 140-Swing rod;

[0044] 200-Cleaning glue-applying bucket; 201-Cleaning glue-applying bucket body; 2011-Hidden space; 202-Base; 203-Support beam; 204-Drainage mist pipe; 205-Drainage pipe; 206-Water curtain installation platform; 207-Water curtain opening and closing device; 2071-First slider; 2072-Second slider; 2073-Connecting arm; 2074-Water curtain push-pull drive component; 208-Sponge layer; 209-Blocking plate; 210-Vibration isolation component;

[0045] 300 - Placement stage system; 310 - Placement stage drive; 320 - Placement stage. Detailed Implementation

[0046] The core of this utility model is to provide a cleaning and coating mechanism to reduce the size of the cleaning and coating mechanism;

[0047] Another core aspect of this utility model is to provide a cleaning and coating equipment and a laser processing device having the above-mentioned cleaning and coating mechanism.

[0048] Hereinafter, embodiments will be described with reference to the accompanying drawings. Furthermore, the embodiments shown below do not limit the scope of the utility model as described in the claims. Additionally, the complete contents of the structures represented in the embodiments below are not limited to those necessary for the solution of the utility model as described in the claims. It should be noted that, for ease of description, only the parts relevant to the utility model are shown in the drawings. Unless otherwise specified, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0049] like Figure 1 and 2 As shown, the cleaning and coating mechanism 100 disclosed in this embodiment of the present invention includes a spray head assembly 120 and a spray driving component 110. The cleaning and coating mechanism 100 is installed after the cleaning and coating tank 200, with the spray head assembly 120 located inside the cleaning and coating tank body 201 of the cleaning and coating tank 200, and the spray driving component 110 located outside the cleaning and coating tank body 201.

[0050] The spray head assembly 120 includes at least a first cleaning fluid nozzle 121 and an adhesive application nozzle 122. The spray driving component 110 is connected to the output end of the spray head assembly 120 via a swing rod 140 to drive the spray head assembly 120 to swing. The output end of the spray head assembly 120 passes through the bottom plate assembly of the cleaning and adhesive application tank body 201 and is sealed to the bottom plate assembly. The spray driving component 110 can be any drive device capable of outputting rotary motion, not limited to motors, rotary air pumps, etc. The swing rod 140 can be a one-piece bent rod structure or a machined structure; this is not limited herein.

[0051] The cleaning and coating mechanism 100 provided by this utility model connects a first cleaning liquid nozzle 121 and an adhesive spray nozzle 122 to the same spraying drive unit 110 via a swing rod, allowing one spraying drive unit 110 to simultaneously drive the first cleaning liquid nozzle 121 and the adhesive spray nozzle 122 to swing. During cleaning of the sheet material, the spraying drive unit 110 drives the first cleaning liquid nozzle 121 and the adhesive spray nozzle 122 to swing back and forth, with the first cleaning liquid nozzle 121 spraying cleaning liquid and the adhesive spray nozzle 122 not operating. During adhesive application to the sheet material, the spraying drive unit 110 drives the first cleaning liquid nozzle 121 and the adhesive spray nozzle 122 to swing back and forth, with the adhesive spray nozzle 122 spraying adhesive and the first cleaning liquid nozzle 121 not operating. This utility model uses one spraying drive unit 110 to drive the first cleaning liquid nozzle 121 and the adhesive spray nozzle 122 to operate simultaneously, eliminating the need for a separate spraying drive unit 110, reducing the size of the cleaning and coating mechanism, and reducing space occupation.

[0052] In a specific embodiment of this utility model, the spray head assembly 120 may further include a second cleaning fluid nozzle 123. The spray direction of the first cleaning fluid nozzle 121 is perpendicular to the material sheet, and the spray direction of the second cleaning fluid nozzle 123 forms an acute angle with the material sheet. In this embodiment, both the first cleaning fluid nozzle 121 and the second cleaning fluid nozzle 123 can spray cleaning fluid, and the two nozzles can be used simultaneously or only one of them can be used. The first cleaning fluid nozzle 121 can be a cleaning fluid atomizing nozzle that sprays atomized cleaning fluid; the second cleaning fluid nozzle 123 can be a cleaning fluid jet nozzle that sprays a liquid jet cleaning fluid.

[0053] Because the first cleaning fluid nozzle 121 and the second cleaning fluid nozzle 123 have different spray angles, their cleaning effects also differ. The cleaning fluid sprayed from the second cleaning fluid nozzle 123 acts on the material sheet at an acute angle. Because its force component parallel to the material sheet is greater, it is easier to wash away the dirt on the surface of the material sheet. However, due to the inclined spray, its impact force is smaller than that of the vertical spray. Therefore, by combining the second cleaning fluid nozzle 123 and the first cleaning fluid nozzle 121, the advantages of both spray angles can be taken into account, resulting in a better cleaning effect on the material sheet.

[0054] In a specific embodiment of this utility model, the spray head assembly 120 may further include a first mounting block 124 and a second mounting block 125. The first mounting block 124 is fixed to the end of the swing arm 140, specifically by fasteners. Similarly, the second mounting block 125 can also be fixed to the swing arm 140 by fasteners. It should be noted that the second mounting block 125 can also be fixed to the first mounting block 124.

[0055] The first cleaning fluid nozzle 121 and the adhesive spray nozzle 122 are respectively fixed to both sides of the first mounting block 124, and the second cleaning fluid nozzle 123 is fixed to the second mounting block 125, with the second cleaning fluid nozzle 123 located between the first cleaning fluid nozzle 121 and the adhesive spray nozzle 122. It should be noted that the installation method of the first cleaning fluid nozzle 121, the adhesive spray nozzle 122, and the cleaning fluid tilting nozzle 123 on the swing rod 140 is not limited to the method described above using the first mounting block 124 and the second mounting block 125. Alternatively, the first cleaning fluid nozzle 121, the adhesive spray nozzle 122, and the cleaning fluid tilting nozzle 123 can be fixed together and then fixed to the swing rod 140. This embodiment does not limit the fixing method of the three nozzles on the swing rod 140, as long as the three nozzles can be swung by the swing rod 140 to complete the corresponding cleaning and adhesive application work.

[0056] The media inlet of the adhesive spray nozzle 122 includes an adhesive inlet and an anti-clogging inlet. The adhesive inlet is used to connect to the adhesive pump to achieve the function of spraying adhesive liquid. The anti-clogging inlet can be connected to a cleaning fluid pump so that after the adhesive is sprayed, cleaning fluid is pumped in through the anti-clogging inlet. The cleaning fluid washes away any adhesive residue stuck to the nozzle of the adhesive spray nozzle 122, preventing the nozzle from clogging after the adhesive dries and affecting its use.

[0057] The first cleaning fluid nozzle 121 has a media inlet including a cleaning fluid inlet and a compressed air inlet. The cleaning fluid inlet is used to connect to a cleaning fluid pump to achieve the function of spraying cleaning fluid, and the compressed air inlet can be connected to a compressed air source or compressor. During the drying process after the sheet is cleaned, compressed air can be introduced through the compressed air inlet to spray compressed air onto the sheet. Combined with the centrifugal drying process of the placement table system 300, the drying process of the sheet can be accelerated.

[0058] Furthermore, the cleaning and coating mechanism 100 may also include a spraying lifting device 130, and a spraying drive 110 is disposed at the output end of the spraying lifting device 130 to drive the spraying drive 110 to perform lifting actions.

[0059] like Figures 2-6 As shown in the figure, this utility model embodiment also discloses a cleaning and coating device, which includes a cleaning and coating tank 200, a placement platform system 300, and a cleaning and coating mechanism 100. The cleaning and coating tank 200 includes a cleaning and coating tank body 201.

[0060] The placement platform system 300 includes a placement platform 320 disposed inside the cleaning and coating tank 200 and a placement platform drive unit 310 disposed outside the cleaning and coating tank 200. The placement platform drive unit 310 is connected to the placement platform 320 via a transmission component to drive the placement platform 320 to rotate, and the transmission component is sealed to the bottom of the cleaning and coating tank body 201. The placement platform 320 typically includes a ceramic suction cup to fix the material sheet, thereby maintaining the stability of the material sheet when the placement platform 320 drives the material sheet to rotate. The placement platform system 300 is the same as the prior art, and will not be described in detail here.

[0061] The cleaning and coating mechanism 100 is the same as that disclosed in the above embodiment. The spray head assembly 120 is located inside the cleaning and coating tank body 201, and the spray driving component 110 is located outside the cleaning and coating tank body 201. The cleaning and coating equipment disclosed in this embodiment, having the aforementioned cleaning and coating mechanism 100, possesses all the technical effects of the aforementioned cleaning and coating mechanism 100, which will not be elaborated upon further here.

[0062] When applying adhesive to the sheet, the sheet is first rotated by the placement stage 320, and then the spraying drive 110 drives the spray head assembly 120 to swing back and forth between the center and the edge of the sheet. At the same time, cleaning liquid is sprayed through the first cleaning liquid nozzle 121 to clean the sheet and remove impurities from the surface of the sheet before applying adhesive.

[0063] After cleaning, the first cleaning fluid nozzle 121 stops spraying cleaning fluid, and the placement table 320 drives the material sheet to rotate at high speed to dry the cleaning fluid on the surface of the material sheet through centrifugal force. At the same time as drying, the first cleaning fluid nozzle 121 sprays compressed air to accelerate the drying process. After the material sheet is dry, the spraying drive 110 drives the spraying head assembly 120 to oscillate back and forth between the center and edge of the material sheet, while simultaneously spraying adhesive through the adhesive spray nozzle 122 to complete the adhesive application.

[0064] To avoid the influence of the spray head assembly 120 on the loading and unloading of the coating sheet, in this embodiment, as follows: Figure 3 As shown, the inner wall of the cleaning and coating tank 201 has an outwardly recessed hidden space 2011. When the cleaning and coating mechanism 100 is not in operation, the spray head assembly 120 is hidden in the hidden space 2011 to make room above the placement platform 320. When the spray head assembly 120 needs to spray cleaning fluid and adhesive, it is driven to the working position by the spray driving component 110.

[0065] After the adhesive is applied, the adhesive nozzle 122 needs to be sprayed with cleaning fluid to clean the nozzle and prevent the adhesive from sticking to the nozzle and affecting its use. During the cleaning process of the adhesive nozzle 122, cleaning fluid needs to be sprayed, and some adhesive will also be flushed out. If the spraying area is too large, it will contaminate the placement table 320 and even the material sheet on the placement table 320.

[0066] like Figure 6 As shown, based on this, in this embodiment, a baffle 209 is provided in the hidden space 2011 to block the glue nozzle of the spray head assembly 120. When cleaning the glue spray head 122, the spray head assembly 120 can be swung to the position of the baffle 209 by the spray driving component 110, and then the cleaning liquid is sprayed to clean the glue nozzle. The sprayed cleaning liquid and glue are blocked by the baffle 209 to prevent them from splashing over a larger area. There should be a gap between the bottom of the baffle 209 and the bottom of the hidden space 2011 so that the sprayed cleaning liquid can flow into the cleaning glue tank body 201 through the gap and be drained away.

[0067] When cleaning the adhesive spray nozzle 122, the spray head assembly 120 can be swung to the position of the baffle 209 by the spray driving component 110, and then the spray lifting device 130 drives the spray head assembly 120 to descend, so that the adhesive nozzle of the adhesive spray nozzle 122 is lowered into the baffle 209. Then, cleaning fluid is sprayed to clean the adhesive nozzle, which can completely prevent the sprayed cleaning fluid and adhesive from spreading to the outside. When the spray head assembly 120 is needed, the spray lifting device 130 needs to drive the spray driving component 110 to rise, and then swing it towards the upper part of the placement platform 320 to prevent collision with the baffle 209.

[0068] When cleaning and / or applying adhesive to the sheet material, the cleaning liquid and / or adhesive sprayed from the cleaning and coating tank will fill the interior of the cleaning and coating tank body 201. If the top opening of the cleaning and coating tank body 201 is not covered, the scattered cleaning liquid and / or adhesive will float out of the cleaning and coating tank body 201, which will affect the life of the equipment and pollute the environment.

[0069] like Figure 1 and Figure 2 As shown, to prevent the cleaning liquid and / or adhesive from overflowing the cleaning and coating tank 201, in this embodiment, the cleaning and coating tank may further include a water curtain assembly disposed at the top opening of the cleaning and coating tank 201. The water curtain assembly can both block and open the top opening of the cleaning and coating tank 201. During operation, the water curtain assembly can seal the top opening of the cleaning and coating tank 201 to prevent the cleaning liquid and / or adhesive from overflowing. When loading or unloading sheet materials, the water curtain assembly is opened to allow the sheet materials to be loaded or unloaded through the top opening of the cleaning and coating tank 201.

[0070] Furthermore, the water curtain assembly may include a water curtain mounting platform 206, a water curtain opening and closing device 207, and the water curtain itself. The water curtain mounting platform 206 is located on the top outer side of the cleaning and coating tank body 201, and serves as a mounting base for the water curtain opening and closing device 207. It should be noted that the water curtain mounting platform 206 must be positioned on the top outer side of the cleaning and coating tank body 201 and must not obstruct the top opening of the cleaning and coating tank body 201.

[0071] The water curtain opening and closing device 207 includes a water curtain push-pull drive component 2074 and a water curtain connector connected to the output end of the water curtain push-pull drive component 2074. It should be noted that the water curtain push-pull drive component 2074 can be a cylinder, using the reciprocating linear motion output by the cylinder to drive the water curtain connector to reciprocate. One end of the water curtain is fixed to the water curtain connector, and the water curtain's movement is achieved by pulling one end of the water curtain through the water curtain connector.

[0072] It should be noted that one end of the water curtain is fixed to the water curtain connector, and the other end can be wound around a spring roller. The spring roller is fixed to one end of the water curtain mounting platform 206. When the water curtain is pulled towards the other end of the water curtain mounting platform 206 by the water curtain connector, the spring roller rotates to release the water curtain wound on it (the spring roller stores energy), allowing the water curtain to block the top opening of the cleaning glue-coating bucket 201. When the water curtain is opened, the water curtain connector drives one end of the water curtain to move towards the spring roller, and the spring roller resets and reverses to wind and store the water curtain. In addition, the water curtain can also be a folding louvered structure (i.e., a wave-shaped structure). One end of the water curtain is fixed to one end of the water curtain installation platform 206. When the water curtain is closed, it can be pulled to the other end of the water curtain installation platform 206 through the water curtain connector, so that the water curtain is flattened and covers the top opening of the cleaning glue-coating tank 201. When the water curtain is opened, the water curtain connector moves one end of the water curtain to fold it and store it at one end of the water curtain installation platform 206. The water curtain can also be a plate-shaped structure. Moving the plate-shaped structure, when it moves to the top opening of the cleaning glue-coating tank 201, it covers the top opening of the cleaning glue-coating tank 201. When the top opening of the cleaning glue-coating tank 201 is removed, the top opening is exposed.

[0073] The water curtain connector may include a first slider 2071, a second slider 2072, and a connecting arm 2073, with the connecting arm 2073 connecting the first slider 2071 and the second slider 2072. The water curtain mounting platform 206 has slide rails on both sides that respectively slide in cooperation with the first slider 2071 and the second slider 2072. One of the first slider 2071 and the second slider 2072 is connected to the output end of the water curtain push-pull drive component 2074, and the water flow is fixed on the connecting arm 2073.

[0074] After the sheet cleaning is completed, the mist of cleaning fluid and / or adhesive liquid inside the coating tank 201 fails to settle for an extended period and continues to disperse to the outside even after the water curtain is turned on. Based on this,

[0075] In this embodiment, a drainage mist pipe 204 communicating with the cleaning adhesive coating tank 201 is provided on the side wall of the cleaning adhesive coating tank 201. Before the water curtain is turned on, the mist inside the cleaning adhesive coating tank 201 can be drained through the drainage mist pipe 204 before the water curtain is turned on. Those skilled in the art will understand that the drainage mist pipe 204 should be connected to a negative pressure device to remove the mist inside the cleaning adhesive coating tank 201 by means of negative pressure.

[0076] The bottom wall of the cleaning adhesive coating tank 201 is provided with a drain pipe 205 that communicates with the tank body 201. The drain pipe 205 is used to drain the cleaning liquid discharged during the cleaning process. A sponge layer 208 can be attached to the inner wall of the cleaning adhesive coating tank 201. The sponge layer 208 can absorb some of the water mist generated during the cleaning process, and at the same time, the sponge layer 208 also has a sound-absorbing effect, which can reduce the noise during the cleaning process.

[0077] like Figure 4 As shown, the cleaning and coating tank body 201 can be supported on the base 202 by the support beam 203, and a vibration isolation component 210 is provided between the support beam 203 and the cleaning and coating tank body 201. By setting the vibration isolation component 210, vibration can be effectively reduced and isolated, and the vibration generated by the cleaning and coating tank 200 can be prevented from affecting the processing platform of the laser processing device.

[0078] This utility model embodiment also discloses a laser processing apparatus, which includes the cleaning equipment disclosed in the above embodiment. Since it incorporates the aforementioned cleaning equipment, it possesses all the technical effects of the above-described cleaning equipment, and will not be repeated here.

[0079] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "a," and / or "the" are not specifically singular and may include the plural. Generally, the terms "comprising" and "including" only indicate the inclusion of expressly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements. An element defined by the phrase "comprising an..." does not exclude the presence of other identical elements in the process, method, product, or apparatus that includes the element.

[0080] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0081] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0082] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A cleaning and coating mechanism, characterized in that, include: The spray head assembly (120) includes at least a first cleaning fluid nozzle (121) and an adhesive nozzle (122). A spraying drive (110) is connected to the output end of the spraying head assembly (120) via a swing rod (140) to drive the spraying head assembly (120) to swing.

2. The cleaning and coating mechanism as described in claim 1, characterized in that, The spray head assembly (120) further includes a second cleaning fluid nozzle (123), wherein the spray direction of the first cleaning fluid nozzle (121) is perpendicular to the material sheet, and the spray direction of the second cleaning fluid nozzle (123) is at an acute angle to the material sheet.

3. The cleaning and coating mechanism as described in claim 2, characterized in that, The first cleaning fluid nozzle (121) is a cleaning fluid atomizing nozzle that sprays atomized cleaning fluid; The second cleaning fluid nozzle (123) is a cleaning fluid jet nozzle that sprays out a jet of cleaning fluid.

4. The cleaning and coating mechanism as described in claim 2, characterized in that, The spray head assembly (120) also includes: The first mounting block (124) is fixed to the end of the swing rod (140), and the first cleaning fluid nozzle (121) and the adhesive nozzle (122) are respectively fixed to both sides of the first mounting block (124); The second mounting block (125) is fixed to the swing rod (140) or the first mounting block (124), the second cleaning fluid nozzle (123) is fixed to the second mounting block (125), and the second cleaning fluid nozzle (123) is located between the first cleaning fluid nozzle (121) and the adhesive spray nozzle (122).

5. The cleaning and coating mechanism as described in claim 1, characterized in that, The media inlet of the adhesive spray nozzle (122) includes an adhesive inlet and an anti-clogging inlet; and / or, The media inlet of the first cleaning fluid nozzle (121) includes a cleaning fluid inlet and a compressed air inlet; and / or, The swing rod (140) is an integral bent rod structure.

6. The cleaning and coating mechanism according to any one of claims 1-5, characterized in that, It also includes a spraying lifting device (130), wherein the spraying drive (110) is disposed at the output end of the spraying lifting device (130) to drive the spraying drive (110) to perform lifting action.

7. A cleaning and coating device, characterized in that, include: Cleaning the glue application bucket (200), including cleaning the bucket body (201); The placement platform system (300) includes a placement platform (320) disposed inside the cleaning and coating bucket body (201) and a placement platform drive (310) disposed outside the cleaning and coating bucket body (201). The placement platform drive (310) is connected to the placement platform (320) through a transmission component to drive the placement platform (320) to rotate. The cleaning and coating mechanism (100) is as described in any one of claims 1-6, wherein the spray head assembly (120) is located inside the cleaning and coating tank body (201), and the spray driving component (110) is located outside the cleaning and coating tank body (201).

8. The cleaning and coating equipment as described in claim 7, characterized in that, The inner wall of the cleaning and coating tank body (201) has an outwardly recessed hidden space (2011). When the cleaning and coating mechanism (100) is not in operation, the spray head assembly (120) is hidden within the hidden space (2011); and / or, The side wall of the cleaning and coating bucket (201) is provided with a drainage mist pipe (204) communicating with the cleaning and coating bucket (201); and / or, The bottom wall of the cleaning and coating bucket (201) is provided with a drain pipe (205) communicating with the cleaning and coating bucket (201); and / or, The inner wall of the cleaning and coating bucket (201) is covered with a sponge layer (208).

9. The cleaning and coating equipment as described in claim 8, characterized in that, The hidden space (2011) is provided with a baffle (209) for covering the nozzle of the glue spraying head (122).

10. A laser processing apparatus, characterized in that, Includes the cleaning and coating equipment as described in any one of claims 7-9.

Images