High-temperature-resistant quartz boat
By designing arc-shaped grooves and support columns for the placement grooves in the quartz boat, combined with a U-shaped handle and a heat-resistant layer, the compatibility problem of round and square silicon wafers was solved, achieving stable placement and operational safety in high-temperature environments.
Patent Information
- Application Number
- CN202423171856.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-12-02
- Estimated Expiration
- 2034-12-23
AI Technical Summary
Existing quartz boats cannot accommodate both round and square silicon wafers simultaneously, resulting in reduced compatibility.
A support column with arc-shaped grooves and placement grooves was designed, along with a U-shaped handle and a heat-resistant layer, to achieve stable fixation and high-temperature protection for round and square silicon wafers.
It enables stable placement of round and square silicon wafers in high-temperature environments, preventing rolling and displacement, and providing ease of operation and safety.
Smart Images
Figure CN223624950U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of quartz product technology, and in particular to a high-temperature resistant quartz boat. Background Technology
[0002] A quartz boat is a container made of quartz material, typically shaped like a small boat or a shallow dish. It is mainly used in various experimental or industrial production processes to carry, transport, and handle materials, often for the transfer and processing of silicon wafers. During processing, the quartz boat and silicon wafers need to be placed in a high-temperature environment.
[0003] Quartz boats are mainly made of quartz material and are generally shaped like boats or rectangles, which are suitable for placing materials. They have a part for carrying materials. When processing silicon wafers, the silicon wafers to be processed need to be placed inside the quartz boat and then transferred to a high-temperature environment for heat treatment.
[0004] In the prior art, some quartz boats require replacement with different quartz boats during actual use because the silicon wafers placed on them are round or square, which reduces the adaptability of the device. Therefore, in order to address the above-mentioned problems, a high-temperature resistant quartz boat is proposed. Utility Model Content
[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a high-temperature resistant quartz boat, which aims to improve the problem that existing technologies cannot simultaneously place circular or square silicon wafers.
[0006] To achieve the above objectives, this utility model provides the following technical solution: a high-temperature resistant quartz boat, comprising two support plates, with a gripping component fixedly connected to the far side of each of the two support plates, and two support columns 1 fixedly connected to the near side of the two support plates. Multiple arc-shaped grooves 1 are formed on the outer surface of one end of each support column 1. Two support columns 2 are fixedly connected to the near side of the two support plates, with multiple arc-shaped grooves 2 formed on the outer surface of one end of each support column 2. A circular silicon wafer is slidably connected inside the arc-shaped groove 1. Multiple placement grooves 1 are formed on the outer surface of the other end of each support column 1. Multiple placement grooves 2 are formed on the outer surface of the other end of each support column 2. A square silicon wafer is slidably connected inside the placement groove 2. A handle is fixedly connected to the outside of each support plate, and a heat-resistant layer 2 is fixedly connected to the outside of the handle.
[0007] As a further description of the above technical solution:
[0008] The grip assembly includes a U-shaped handle, the outside of which is fixedly connected to the outside of the support plate, and a heat-resistant layer is fixedly connected to the outside of the U-shaped handle.
[0009] As a further description of the above technical solution:
[0010] The first support column is made of silicon dioxide, and the second support column is made of silicon dioxide.
[0011] As a further description of the above technical solution:
[0012] The grip is made of silicon dioxide, and the second heat-resistant layer is made of aluminum oxide.
[0013] As a further description of the above technical solution:
[0014] The outer side of the square silicon wafer is slidably connected to the inside of the second support column, and the outer side of the circular silicon wafer is slidably connected to the inside of the second support column.
[0015] As a further description of the above technical solution:
[0016] The outer side of the square silicon wafer is slidably connected to the inside of the placement groove one, and the outer side of the square silicon wafer is slidably connected to the inside of the support column one.
[0017] As a further description of the above technical solution:
[0018] The U-shaped handle is made of silicon dioxide, and the heat-resistant layer is made of aluminum oxide.
[0019] As a further description of the above technical solution:
[0020] The outer side of the circular silicon wafer is slidably connected to the inside of the second arc-shaped groove, and the outer side of the circular silicon wafer is slidably connected to the inside of the first support column.
[0021] This utility model has the following beneficial effects:
[0022] 1. In this utility model, the circular silicon wafer can be accurately and stably placed by the arc-shaped groove one of the support column one and the arc-shaped groove two of the support column two, effectively preventing it from rolling or shifting, and ensuring that the circular silicon wafer is always in the ideal position during the high-temperature processing. At the same time, the placement groove one and the placement groove two provide good limiting and fixing effects for the square silicon wafer.
[0023] 2. In this utility model, the heat-resistant layer two at the handle provides reliable high-temperature protection for the operator. When frequently operating the quartz boat to move in and out of high-temperature equipment, the operator can safely hold the handle to perform the work, avoiding the risk of burns, improving the convenience and safety of operation, and also conforming to ergonomic design, which is conducive to stable operation for a long time. Attached Figure Description
[0024] Figure 1This is a perspective view of a high-temperature resistant quartz boat proposed in this utility model;
[0025] Figure 2 This is a schematic diagram of a support column structure for a high-temperature resistant quartz boat proposed in this utility model.
[0026] Figure 3 This is a schematic diagram of the support column structure of a high-temperature resistant quartz boat proposed in this utility model.
[0027] Figure 4 This is a schematic diagram of the grip structure of a high-temperature resistant quartz boat proposed in this utility model.
[0028] Legend:
[0029] 1. Support plate; 2. U-shaped handle; 3. Heat-resistant layer one; 4. Support column one; 5. Arc groove one; 6. Support column two; 7. Arc groove two; 8. Circular silicon wafer; 9. Placement groove one; 10. Placement groove two; 11. Square silicon wafer; 12. Handle; 13. Heat-resistant layer two. Detailed Implementation
[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0031] Reference Figures 1 to 2 As shown, one embodiment of this utility model provides a high-temperature resistant quartz boat, comprising two support plates 1. Each support plate 1 has a gripping assembly fixedly connected to its opposite side. The gripping assembly includes a U-shaped handle 2, which is fixedly connected to the outside of the support plate 1. The U-shaped handle 2 facilitates the operator's application of force, allowing for easy lifting or movement of the entire quartz boat. A heat-resistant layer 3 is fixedly connected to the outside of the U-shaped handle 2. The heat-resistant layer 3 is tightly adhered to the surface of the U-shaped handle 2, effectively blocking heat transfer in high-temperature environments and preventing structural changes or damage to the U-shaped handle 2 due to high temperatures.
[0032] Two support columns 1 are fixedly connected to adjacent sides of the two support plates 1. Multiple arc-shaped grooves 5 are formed on the outer side of one end of each support column 1. These grooves 5 are evenly distributed on the support column 1 and have smooth walls, providing a stable placement position and good contact surface for the circular silicon wafer 8. Two support columns 2 are fixedly connected to adjacent sides of the two support plates 1. Multiple arc-shaped grooves 2 7 are formed on the outer side of one end of each support column 2. These arc-shaped grooves 2 7 correspond to the arc-shaped grooves 1 5 and work together to support the circular silicon wafer 8, ensuring its precise placement between the two support plates 1.
[0033] Reference Figures 1 to 3 As shown, a circular silicon wafer 8 is slidably connected inside the arc-shaped groove 5. The circular silicon wafer 8 can slide smoothly within the arc-shaped groove 5, facilitating installation and position adjustment. The external part of the circular silicon wafer 8 is slidably connected inside the arc-shaped groove 7. Through cooperation with the arc-shaped groove 7, the position of the circular silicon wafer 8 is further stabilized, preventing its displacement in the horizontal direction. The external part of the circular silicon wafer 8 is slidably connected inside the support column 4. The internal space of the support column 4 provides a certain amount of space to accommodate the circular silicon wafer 8, thus restricting its movement in the vertical direction as well.
[0034] Multiple placement slots 9 are formed on the outer side of the other end of support column 4. The shape and depth of placement slots 9 are adapted to the square silicon wafer 11, which can accurately limit the position of the square silicon wafer 11. Multiple placement slots 10 are formed on the outer side of the other end of support column 6. Placement slots 10 and placement slots 9 cooperate with each other to create a stable placement area for the square silicon wafer 11. The square silicon wafer 11 is slidably connected inside placement slot 10. The square silicon wafer 11 can be placed stably and finely adjusted within placement slot 10.
[0035] The square silicon wafer 11 is externally slidably connected to the inside of the placement groove 9. Through contact with the placement groove 9, the position of the square silicon wafer 11 is further fixed, preventing it from shaking. The square silicon wafer 11 is externally slidably connected to the inside of the support pillar 4. The internal structure of the support pillar 4 provides vertical constraint for the square silicon wafer 11. The square silicon wafer 11 is externally slidably connected to the inside of the support pillar 6. The support pillar 6 works in conjunction with the support pillar 4 to ensure the stable placement of the square silicon wafer 11 within the quartz boat.
[0036] Reference Figure 1 and Figure 4 As shown, a handle 12 is fixedly connected to the outside of the support plate 1. The handle 12 provides the operator with an additional point of leverage, making it easier to operate the quartz boat. A heat-resistant layer 13 is fixedly connected to the outside of the handle 12. The heat-resistant layer 13 tightly wraps around the handle 12, effectively insulating it in high-temperature environments to protect the operator's hands and maintain the structural integrity of the handle 12 so that it will not be damaged by high temperatures during frequent use.
[0037] Working principle: The support plate 1 serves as the basic structure of the entire quartz boat, providing stable support. The U-shaped handle 2 is installed on the support plate 1, facilitating the operator's handling and movement of the quartz boat. The heat-resistant layer 3 covers the surface of the U-shaped handle 2, providing high-temperature protection and ensuring the structural stability of the U-shaped handle 2 in high-temperature environments.
[0038] Support column 4 and support column 6 are vertically installed on adjacent sides of the two support plates 1. One end of support column 4 is provided with an arc-shaped groove 5, and one end of support column 6 is provided with an arc-shaped groove 7. The circular silicon wafer 8 can be placed on the arc-shaped grooves 5 and 7. Through the design of the arc-shaped grooves, the circular silicon wafer 8 can be stably supported, keeping it in a fixed position inside the quartz boat and preventing it from rolling or shifting during operation.
[0039] The other end of the support column 1 4 is provided with a placement groove 1 9 and the other end of the support column 2 6 is provided with a placement groove 2 10. The square silicon wafer 11 can be placed in the placement groove 1 9 and the placement groove 2 10. The size of the placement groove 1 9 and the placement groove 2 10 matches the square silicon wafer 11, which plays a role in limiting and fixing the square silicon wafer 11, ensuring that the square silicon wafer 11 is neatly placed in the quartz boat and will not shake randomly.
[0040] The handle 12 facilitates the operator's handling of the quartz boat, and a second heat-resistant layer 13 is added to the handle 12. When the quartz boat is in a high-temperature environment, the second heat-resistant layer 13 can effectively insulate against the high temperature, preventing the operator from being burned when handling the quartz boat. It also protects the handle 12 from damage due to high temperature, ensuring its normal use and facilitating various operations of the quartz boat, such as placing or removing it from high-temperature equipment.
[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A high-temperature resistant quartz boat, comprising two support plates (1), characterized in that: A gripping assembly for holding is fixedly connected to the far side of each of the two support plates (1). Two support columns (4) are fixedly connected to the near side of the two support plates (1). Multiple arc-shaped grooves (5) are opened on the outer side of one end of each support column (4). Two support columns (6) are fixedly connected to the near side of the two support plates (1). Multiple arc-shaped grooves (7) are opened on the outer side of one end of each support column (6). A circular silicon wafer (8) is slidably connected inside the arc-shaped groove (5). Multiple placement grooves (9) are opened on the outer side of the other end of each support column (4). Multiple placement grooves (10) are opened on the outer side of the other end of each support column (6). A square silicon wafer (11) is slidably connected inside the placement groove (10). A handle (12) is fixedly connected to the outside of each support plate (1). A heat-resistant layer (13) is fixedly connected to the outside of the handle (12).
2. The high-temperature resistant quartz boat according to claim 1, characterized in that: The gripping assembly includes a U-shaped handle (2), the outside of which is fixedly connected to the outside of the support plate (1), and a heat-resistant layer (3) is fixedly connected to the outside of the U-shaped handle (2).
3. The high-temperature resistant quartz boat according to claim 1, characterized in that: The material of the first support column (4) is silicon dioxide, and the material of the second support column (6) is silicon dioxide.
4. The high-temperature resistant quartz boat according to claim 1, characterized in that: The grip (12) is made of silicon dioxide, and the heat-resistant layer (13) is made of aluminum oxide.
5. A high-temperature resistant quartz boat according to claim 1, characterized in that: The square silicon wafer (11) is slidably connected to the inside of the second support column (6), and the circular silicon wafer (8) is slidably connected to the inside of the second support column (6).
6. A high-temperature resistant quartz boat according to claim 1, characterized in that: The square silicon wafer (11) is slidably connected to the inside of the placement groove (9) and the square silicon wafer (11) is slidably connected to the inside of the support column (4).
7. A high-temperature resistant quartz boat according to claim 2, characterized in that: The U-shaped handle (2) is made of silicon dioxide, and the heat-resistant layer (3) is made of aluminum oxide.
8. A high-temperature resistant quartz boat according to claim 1, characterized in that: The outer side of the circular silicon wafer (8) is slidably connected to the inside of the arc groove (7), and the outer side of the circular silicon wafer (8) is slidably connected to the inside of the support column (4).