Condensing device and vacuum coating equipment

Abstract

The utility model discloses a condensing device and vacuum coating equipment. The condensing device comprises a condensing assembly and a protection assembly. The condensation assembly comprises a condensation piece, and the condensation piece extends in the preset direction. The protection assembly comprises a protection cover and a driving part, the protection cover extends in the preset direction, the central axis of the protection cover coincides with the central axis of the condensation part, the condensation part is covered with the protection cover, the inner wall of the protection cover and the condensation part are arranged in a spaced mode, and the driving part is connected with the protection cover and used for driving the protection cover to move in the preset direction. The condensing device can reduce the possibility of generating condensed frost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a condensing device and a vacuum coating equipment. BACKGROUND

[0002] In the vacuum coating equipment, a condensing device needs to be arranged in the vacuum chamber to condense the water vapor in the vacuum chamber into liquid, thereby shortening the time of vacuumizing, but in the traditional vacuum coating equipment, when the vacuum chamber is broken, a large amount of air will enter the vacuum chamber, thereby causing a large amount of water vapor to be condensed into ice frost in the condensing device, and the ice frost on the condensing device will affect the vacuumizing speed of the next cycle, thereby affecting the vacuumizing efficiency. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the purpose of the present application is to overcome the deficiencies in the prior art, and provide a condensing device which can reduce the possibility of generating condensing ice frost.

[0004] The present application also provides a vacuum coating equipment.

[0005] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows:

[0006] According to the condensing device of the first aspect of the present application, the condensing device comprises a condensing assembly comprising a condensing piece, the condensing piece is arranged along a preset direction, a protection assembly comprising a protection cover and a driving piece, the protection cover is arranged along the preset direction, and the central axis of the protection cover coincides with the central axis of the condensing piece, the protection cover is arranged on the condensing piece, and the inner wall of the protection cover is arranged spaced apart from the condensing piece, the driving piece is connected with the protection cover, and is used for driving the protection cover to move along the preset direction.

[0007] The condensing device of the present application has the following advantages:

[0008] In the embodiment, the condensing component is used to condense the water vapor in the vacuum chamber of the vacuum coating equipment into liquid, so as to shorten the time of vacuumizing. Since the protective cover is arranged on the condensing component, the driving component is connected with the protective cover and is used to drive the protective cover to move along the preset direction, so that the protective cover can be driven by the driving component to move along the preset direction away from the condensing component during the vacuumizing process of the vacuum coating equipment, so that the condensing component is exposed outside the protective cover, so that the condensing component can condense water vapor. When it is necessary to break the vacuum of the vacuum chamber, the protective cover can be driven by the driving component to move along the preset direction towards the condensing component, so that the condensing component is arranged in the protective cover, so that the condensing component is isolated from the outside by the protective cover, so that the condensing component can continuously be in a vacuum environment, so as to avoid a large amount of water vapor being condensed into ice on the condensing component after the vacuum chamber is broken, so as to reduce the influence on the vacuumizing speed. Further, since the central axis of the protective cover coincides with the central axis of the condensing component, and the inner wall of the protective cover is spaced apart from the condensing component, when the protective cover moves along the preset direction, interference between the protective cover and the condensing component can be avoided.

[0009] According to the condensing device of the first aspect of the present application, the protective assembly further comprises a plurality of guide components, the plurality of guide components are arranged around the condensing component in a circumferential direction, each guide component extends along the preset direction, and each guide component is slidably connected with the protective cover, and the protective cover moves relative to the guide components along the preset direction.

[0010] According to the condensing device of the first aspect of the present application, the condensing assembly further comprises a fixing component, the fixing component extends along the preset direction, the condensing component is wound around the fixing component along the preset direction, and the protective cover is arranged outside the fixing component.

[0011] According to the condensing device of the first aspect of the present application, the fixing component comprises a first fixing part, a second fixing part and a plurality of winding parts, the first fixing part and the second fixing part are arranged in a spaced manner along the preset direction, the winding parts extend along the preset direction, and the two ends of the winding parts along the preset direction are connected with the first fixing part and the second fixing part respectively, the winding parts are arranged around the preset direction, the condensing component is sequentially wound on the winding parts along the preset direction, and the condensing component extends in a spiral manner along the preset direction.

[0012] According to the condensing device of the first aspect of the present application, the protective assembly further comprises a sealing component, the sealing component is arranged at one end of the condensing assembly away from the protective cover along the preset direction, and the driving component drives the protective cover to move towards the sealing component along the preset direction, so that the protective cover is sealingly connected with the sealing component.

[0013] According to the condensing device of the first aspect of the present application, the distance between the condensing component and the inner side wall of the protective cover is L, which satisfies L≥10mm.

[0014] According to the vacuum coating device of the second aspect of the present application, the condensing assembly and the protective cover of the condensing device are arranged in the vacuum cavity, so that the water vapor in the vacuum cavity can be condensed into liquid by the condensing component, thereby shortening the time of vacuumizing. When the vacuum chamber needs to be broken, the condensing component can be protected by the protective cover, so that the condensing component can continuously be in the vacuum environment, avoiding the influence of the large amount of water vapor condensed into ice on the condensing component after the vacuum chamber is broken, thereby improving the efficiency of vacuumizing.

[0015] The vacuum coating device of the present application has the following advantages:

[0016] In the vacuum coating device of the present application, the condensing assembly and the protective cover of the condensing device are arranged in the vacuum cavity, so that the water vapor in the vacuum cavity can be condensed into liquid by the condensing component, thereby shortening the time of vacuumizing. When the vacuum chamber needs to be broken, the condensing component can be protected by the protective cover, so that the condensing component can continuously be in the vacuum environment, avoiding the influence of the large amount of water vapor condensed into ice on the condensing component after the vacuum chamber is broken, thereby improving the efficiency of vacuumizing.

[0017] According to the vacuum coating device of the second aspect of the present application, the vacuum cavity includes a first chamber and a second chamber, the first chamber is in communication with the second chamber, and the second chamber protrudes from the first chamber along the preset direction. The condensing component of the condensing assembly is arranged in the second chamber, and the condensing component is arranged in the second chamber to define a guide space. The protective cover is arranged in the guide space along the preset direction.

[0018] According to the vacuum coating device of the second aspect of the present application, the vacuum chamber is provided with a first avoiding hole, the first avoiding hole is arranged at one end of the second chamber away from the first chamber along the preset direction, and the first avoiding hole is in communication with the second chamber. The sealing member of the condensing device is connected with the vacuum chamber and is arranged at the first avoiding hole. The sealing member is provided with a second avoiding hole, the second avoiding hole is in communication with the first avoiding hole, and the condensing component is at least partially arranged in the second chamber, the first avoiding hole and the second avoiding hole in sequence and protrudes from the second avoiding hole.

[0019] According to the vacuum coating device of the second aspect of the present application, the condensing assembly further comprises a heat insulating member, one end of the heat insulating member is fixedly connected with the cavity wall of the second chamber, and the other end of the heat insulating member is fixedly connected with the fixing member of the condensing device. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those of ordinary skill in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0021] Figure 1 A perspective structural schematic diagram of the vacuum coating device in the present application is shown;

[0022] Figure 2 A sectional structural schematic diagram of the vacuum coating device in the present application is shown;

[0023] Figure 3 A perspective structural schematic diagram of the condensing device in the present application is shown; Figure 2 An enlarged structural schematic diagram of A in the present application is shown;

[0024] Figure 4 A perspective structural schematic diagram of the condensing device in the present application is shown;

[0025] Figure 5 A perspective structural schematic diagram of the protection assembly in the present application is shown;

[0026] Figure 6 A perspective structural schematic diagram of the condensing assembly in the present application is shown.

[0027] Main element symbol explanation:

[0028] 10 - condensing device;

[0029] 110 - condensing assembly; 111 - condensing piece; 112 - fixing piece; 1121 - first fixing part; 1122 - second fixing part; 1123 - winding part; 113 - heat insulation piece;

[0030] 120 - protection assembly; 121 - protection cover; 122 - driving piece; 123 - guiding piece; 124 - sealing piece; 1241 - second avoiding hole; 125 - fixing seat; 1251 - guiding limiting hole;

[0031] 20 - vacuum chamber;

[0032] 210 - vacuum cavity; 211 - first chamber; 212 - second chamber; 213 - guiding space;

[0033] 220 - first avoiding hole;

[0034] x - preset direction. DETAILED DESCRIPTION

[0035] Embodiments of the present application are described below in detail with reference to examples thereof illustrated in the accompanying drawings, wherein like or similar elements across the various figures are denoted by like or similar reference numerals, and any reference to the application herein is to be interpreted as a reference to the claims and any equivalents thereto. The embodiments described below are examples only, and are not to be construed as limiting the present application.

[0036] In the description of the present application, it is to be understood that the orientations or positional relationships denoted by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like are based on the orientations or positional relationships shown in the drawings, and are merely intended to facilitate the description of the present application and simplify the description, and are not intended to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the present application.

[0037] In addition, the terms "first", "second", etc. are used only for descriptive purposes and are not to be construed as indicating or implying relative importance or an indicated number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0038] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing", and the like should be interpreted broadly, for example, can be fixed connection, can also be detachable connection, or can be integrated; can be mechanical connection, can also be electrical connection; can be direct connection, can also be indirect connection through an intermediate medium, or can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "over", and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under", and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] Reference Figures 1 to 3As shown, the condensing device 10 related to the embodiments of the present application comprises a condensing assembly 110 and a protection assembly 120.

[0041] Specifically, the condensing assembly 110 comprises a condensing piece 111, which is arranged to extend along a preset direction x; the protection assembly 120 comprises a protection cover 121 and a driving piece 122, the protection cover 121 is arranged to extend along the preset direction x, and the central axis of the protection cover 121 coincides with the central axis of the condensing piece 111, the protection cover 121 covers the condensing piece 111, and the inner wall of the protection cover 121 is arranged to be spaced apart from the condensing piece 111, and the driving piece 122 is connected with the protection cover 121 and is used to drive the protection cover 121 to move along the preset direction x.

[0042] It should be noted that the preset direction x is Figure 1 the direction indicated by x.

[0043] It should be noted that the condensing piece 111 will not produce frost in a vacuum state, which means that there are almost no gas molecules in the system, so the condenser surface will not form frost as easily as in ordinary atmospheric conditions. The condenser in a vacuum state mainly condenses gas or vapor by heat exchange with external air, rather than by condensation of water vapor to form frost.

[0044] In the present embodiment, the condensing piece 111 is used to condense the water vapor in the vacuum chamber 20 of the vacuum coating equipment into liquid, thereby shortening the vacuum pumping time. Since the protection cover 121 covers the condensing piece 111, and the driving piece 122 is connected with the protection cover 121 and is used to drive the protection cover 121 to move along the preset direction x, during the vacuum pumping process of the vacuum coating equipment, the protection cover 121 can be driven by the driving piece 122 to move along the preset direction x away from the condensing piece 111, so that the condensing piece 111 is exposed outside the protection cover 121, thereby enabling the condensing piece 111 to condense water vapor. When it is necessary to break the vacuum of the vacuum chamber 20, the protection cover 121 can be driven by the driving piece 122 to move along the preset direction x towards the condensing piece 111, so that the condensing piece 111 is covered in the protection cover 121, so as to isolate the condensing piece 111 from the outside through the protection cover 121, so that the condensing piece 111 can continuously be in a vacuum environment, avoiding a large amount of water vapor condensing into frost on the condensing piece 111 after the vacuum chamber 20 is broken, reducing the impact on the vacuum pumping speed. Further, since the central axis of the protection cover 121 coincides with the central axis of the condensing piece 111, and the inner wall of the protection cover 121 is arranged to be spaced apart from the condensing piece 111, when the protection cover 121 moves along the preset direction x, interference between the protection cover 121 and the condensing piece 111 can be avoided.

[0045] Referring to Figure 4 andFigure 5 As shown in the figure, the protection assembly 120 further comprises a plurality of guides 123, which are arranged around the condensing element 111 in the circumferential direction of the condensing element 111, each of the guides 123 extends along the preset direction x, and each of the guides 123 is in sliding connection with the protection cover 121, and the protection cover 121 moves along the preset direction x relative to the guides 123.

[0046] In the embodiment, since the plurality of guides 123 are arranged around the condensing element 111 in the circumferential direction of the condensing element 111, and each of the guides 123 extends along the preset direction x, when the driving element 122 drives the protection cover 121 to move along the preset direction x, the plurality of guides 123 can guide the movement of the protection cover 121, so that the protection cover 121 can move along the preset direction x, and the protection cover 121 can avoid colliding with the condensing element 111 during the movement.

[0047] Referring to Figure 6 As shown in the figure, the condensing assembly 110 further comprises a fixing element 112, which extends along the preset direction x, the condensing element 111 is wound around the fixing element 112 along the preset direction x, and the protection cover 121 is arranged outside the fixing element 112.

[0048] In the embodiment, the fixing element 112 can fix and shape the condensing element 111, so that the protection cover 121 can be coaxially arranged with the condensing element 111, so that the protection cover 121 can be arranged outside the condensing element 111, and the protection cover 121 can avoid colliding with the condensing element 111 during the movement.

[0049] Specifically, in the embodiment, the plurality of guides 123 are arranged around the fixing element 112 in the circumferential direction of the fixing element 112, so that the protection cover 121 can be arranged outside the fixing element 112.

[0050] Continuing to refer to Figure 6 As shown in the figure, the fixing element 112 comprises a first fixing part 1121, a second fixing part 1122, and a plurality of winding parts 1123, the first fixing part 1121 and the second fixing part 1122 are arranged in the circumferential direction of the fixing element 112, each of the winding parts 1123 extends along the preset direction x, and the two ends of each of the winding parts 1123 along the preset direction x are connected with the first fixing part 1121 and the second fixing part 1122 respectively, the plurality of winding parts 1123 are arranged around the preset direction x, the condensing element 111 is sequentially wound around the plurality of winding parts 1123 along the preset direction x, and the condensing element 111 extends along the preset direction x in a spiral manner.

[0051] In this embodiment, since the first fixing part 1121 and the second fixing part 1122 are spaced apart along a preset direction x, and the winding parts 1123 all extend along the preset direction x, and the two ends of the winding parts 1123 along the preset direction x are respectively connected to the first fixing part 1121 and the second fixing part 1122, the multiple winding parts 1123 can be fixed by the first fixing part 1121 and the second fixing part 1122. Since the multiple winding parts 1123 are arranged around the preset direction x, the condenser 111 is wound around the multiple winding parts 1123 in sequence around the preset direction x and extends spirally along the preset direction x. Therefore, the condenser 111 can be fixed by the multiple winding parts 1123 so that the condenser 111 can extend spirally along the preset direction x, thereby satisfying the length and surface area requirements of condensation and shortening the space occupied by the condenser 111 in the vacuum chamber 20.

[0052] Specifically, in this embodiment, the condenser 111 is a condenser tube. The condenser tube is wound on the winding part 1123 to form a spiral condenser coil, so that the condenser 111 can meet the requirements of condensation length and surface area, and shorten the space occupied by the condenser 111 in the vacuum chamber 20.

[0053] Reference Figure 2 as well as Figure 4 As shown, the protection component 120 also includes a seal 124, which is disposed at the end of the condensation component 110 away from the protective cover 121 along a preset direction x. The driving component 122 drives the protective cover 121 to approach the seal 124 along the preset direction x so that the protective cover 121 and the seal 124 are sealed together.

[0054] In this embodiment, when the driving member 122 drives the protective cover 121 to approach the sealing member 124 along the preset direction x, the protective cover 121 and the sealing member 124 can be sealed together. In this way, the protective cover 121 can be sealed by the sealing member 124, so that the condenser 111 can be sealed inside the protective cover 121. This allows the condenser 111, which is covered inside the protective cover 121, to remain in a vacuum environment, so as to prevent a large amount of water vapor from condensing into frost on the condenser 111 after the vacuum chamber 20 is broken.

[0055] Reference Figure 3 As shown, the distance between the condenser 111 and the inner wall of the protective cover 121 is L, which satisfies: L≥10mm.

[0056] Specifically, in the embodiment, when the condensing member 111 is wound on the winding portion 1123, the condensing member 111 is wound inside the winding portion 1123, at this time, the winding portion 1123 is arranged closer to the protective cover 121 than the condensing member 111, therefore, the spacing between the condensing member 111 and the inner side wall of the protective cover 121 is the spacing between the winding portion 1123 and the inner side wall of the protective cover 121, in addition, in other embodiments, when the condensing member 111 is wound on the winding portion 1123, the condensing member 111 is wound outside the winding portion 1123, at this time, the condensing member 111 is arranged closer to the protective cover 121 than the winding portion 1123, therefore, the spacing between the condensing member 111 and the inner side wall of the protective cover 121 is the spacing between the circumferential surface of the condensing member 111 in the spiral shape and the inner side wall of the protective cover 121.

[0057] In the embodiment, if the spacing L between the condensing member 111 and the inner side wall of the protective cover 121 is < 10 mm, the spacing between the condensing member 111 and the protective cover 121 is too small, when the protective cover 121 moves along the preset direction x, the possibility of interference between the protective cover 121 and the condensing member 111 occurs, when the spacing L between the condensing member 111 and the inner side wall of the protective cover 121 is ≥ 10 mm, the spacing between the condensing member 111 and the protective cover 121 can meet the needs of the movement of the protective cover 121 along the preset direction x, and the possibility of interference between the protective cover 121 and the condensing member 111 during the movement of the protective cover 121 along the preset direction x can be reduced.

[0058] Referring to FIGS. 1 to 3, Figure 1 and Figure 2 The vacuum coating device provided by the embodiment of the present application comprises a vacuum chamber 20 and the condensing device 10.

[0059] Specifically, the vacuum chamber 20 is provided with a vacuum cavity 210; the condensing assembly 110 and the protective cover 121 of the condensing device 10 are arranged in the vacuum cavity 210, and the driving member 122 of the condensing device 10 is connected with the vacuum chamber 20 and is used to drive the protective cover 121 to move in the vacuum cavity 210 along the preset direction x.

[0060] In the vacuum coating device of the present application, since the condensing assembly 110 and the protective cover 121 of the condensing device 10 are arranged in the vacuum cavity 210, the water vapor in the vacuum cavity 210 can be condensed into liquid by the condensing member 111, thereby shortening the time of vacuumizing, and when the vacuum chamber 20 needs to be broken, the protective cover 121 can protect the condensing member 111, so that the condensing member 111 can continuously be in a vacuum environment, thereby avoiding a large amount of water vapor being condensed into frost on the condensing member 111 after the vacuum chamber 20 is broken, reducing the influence on the vacuumizing speed, and enabling the vacuum coating device of the present application to have a higher vacuumizing efficiency.

[0061] Specifically, in the present embodiment, when the protective cover 121 moves along the preset direction x away from the condensing component 111, the vacuum degree in the vacuum cavity 210 needs to be below 3 Pa first, at this time, the water vapor in the vacuum cavity 210 is relatively less, and the condensing component 111 is less affected.

[0062] Referring to Figure 2 As shown in the figure, the vacuum cavity 210 includes a first chamber 211 and a second chamber 212, the first chamber 211 communicates with the second chamber 212, and the second chamber 212 protrudes from the first chamber 211 along the preset direction x. The condensing component 111 of the condensing assembly 110 is accommodated in the second chamber 212, and the condensing component 111 is arranged spaced apart from the cavity wall of the second chamber 212 to define a guide space 213. The protective cover 121 is arranged along the preset direction x in the guide space 213.

[0063] In the present embodiment, the coated component can be placed in the first chamber 211 to perform vacuum coating on the coated component. At the same time, since the second chamber 212 protrudes from the first chamber 211 along the preset direction x, the condensing component 111 can be accommodated in the second chamber 212. Further, since the condensing component 111 is arranged spaced apart from the cavity wall of the second chamber 212 to define the guide space 213, the protective cover 121 can be arranged in the guide space 213 along the preset direction x. Further, the movement of the protective cover 121 along the preset direction x is guided through the guide space 213 to ensure the accuracy of the movement of the protective cover 121.

[0064] Specifically, in the present embodiment, the first chamber 211 is provided with an air exhaust port, and the second chamber 212 is arranged close to the air exhaust port. The gas flow at the air exhaust port is fast, so that the condensing component 111 can capture the water vapor in the vacuum cavity 210 faster to improve the condensing efficiency and shorten the vacuumizing time.

[0065] Specifically, in the present embodiment, referring to Figure 4 and Figure 5As shown, the protection assembly 120 further comprises a fixing base 125 arranged in the vacuum cavity 210 and connected to the cavity wall of the vacuum cavity 210, each guide piece 123 is connected to the fixing base 125 to fix the guide piece 123 through the fixing base 125, the fixing base 125 is provided with a guide limiting hole 1251 in communication with the guide space 213 and arranged at one end of the second chamber 212 close to the first chamber 211 along the preset direction x, the protection cover 121 is arranged in the guide space 213 and the guide limiting hole 1251, and when the protection cover 121 moves along the preset direction x away from the condensing piece 111, the protection cover 121 can abut against the edge of the guide limiting hole 1251 to further guide and limit the protection cover 121 through the guide limiting hole 1251, so that the protection cover 121 can move along the preset direction x within the preset range.

[0066] Referring to Figure 2 As shown, the vacuum chamber 20 is provided with a first avoiding hole 220 arranged at one end of the second chamber 212 away from the first chamber 211 along the preset direction x and in communication with the second chamber 212, the sealing piece 124 of the condensing device 10 is connected to the vacuum chamber 20 and arranged at the first avoiding hole 220, the sealing piece 124 is provided with a second avoiding hole 1241 in communication with the first avoiding hole 220, and the condensing piece 111 is arranged in the second chamber 212, the first avoiding hole 220 and the second avoiding hole 1241 in sequence and protrudes from the second avoiding hole 1241.

[0067] In this embodiment, the first avoiding hole 220 can be sealed by the sealing piece 124 to ensure the sealing of the vacuum cavity 210, and since the second avoiding hole 1241 of the sealing piece 124 is in communication with the first avoiding hole 220 of the vacuum chamber 20, the condensing piece 111 is arranged in the second chamber 212, the first avoiding hole 220 and the second avoiding hole 1241 in sequence and protrudes from the second avoiding hole 1241, so that at least part of the condensing piece 111 can be exposed outside the vacuum chamber 20 through the second chamber 212, the first avoiding hole 220 and the second avoiding hole 1241 to connect with an external device, thereby realizing the condensing function of the condensing piece 111.

[0068] Referring to Figure 4 and Figure 6 As shown, the condensing assembly 110 further comprises a heat insulation piece 113, one end of the heat insulation piece 113 is fixedly connected to the cavity wall of the second chamber 212, and the other end of the heat insulation piece 113 is fixedly connected to the fixing piece 112 of the condensing device 10.

[0069] In the embodiment, one end of the heat insulation piece 113 is fixedly connected with the cavity wall of the second cavity 212, and the other end of the heat insulation piece 113 is fixedly connected with the fixing piece 112 of the condensing device 10. In this way, the fixing piece 112 can be fixed in the second cavity 212 through the heat insulation piece 113, so as to fix the condensing piece 111 in the second cavity 212, and the condensing piece 111 can be thermally insulated through the heat insulation piece 113, so as to avoid the heat on the cavity wall of the second cavity 212 from being transferred to the condensing piece 111 during vacuum coating, and reduce the influence on the condensing performance of the condensing piece 111.

[0070] Specifically, in the embodiment, the heat insulation piece 113 is made of a material with poor thermal conductivity, such as polytetrafluoroethylene, polyether ether ketone, ceramic, and the like.

[0071] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, different embodiments or examples described in the present specification and the features of different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0072] Although the embodiments of the present application have been shown and described above, it should be understood that the above embodiments are exemplary and should not be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. A condensing apparatus characterized by comprising: include: A condensation assembly includes a condenser element that extends along a predetermined direction. A protective component includes a protective cover and a driving member. The protective cover extends along the preset direction, and the central axis of the protective cover coincides with the central axis of the condenser. The protective cover covers the condenser, and the inner wall of the protective cover is spaced apart from the condenser. The driving member is connected to the protective cover and is used to drive the protective cover to move along the preset direction.

2. The condensing apparatus according to claim 1, wherein The protective component further includes a plurality of guide members, which are arranged around the condenser at circumferential intervals. Each guide member extends along the preset direction and is slidably connected to the protective cover. The protective cover moves relative to the guide members along the preset direction.

3. The condensing apparatus of claim 1, wherein The condensation assembly also includes a fixing member, which extends along the preset direction. The condensation component is wound around the fixing member in the preset direction, and the protective cover is provided over the fixing member.

4. The condensing apparatus of claim 3, wherein The fastener includes a first fastening part, a second fastening part, and a plurality of winding parts. The first fastening part and the second fastening part are spaced apart along the preset direction. The winding parts all extend along the preset direction, and the two ends of the winding parts along the preset direction are respectively connected to the first fastening part and the second fastening part. The plurality of winding parts are arranged around the preset direction. The condenser is wound sequentially around the plurality of winding parts around the preset direction and extends spirally along the preset direction.

5. The condensing apparatus of claim 1 wherein, The protective component further includes a seal, which is disposed at one end of the condensation component away from the protective cover along the preset direction. The driving component drives the protective cover to approach the seal along the preset direction so that the protective cover and the seal are sealed together.

6. The condensing apparatus of claim 1 wherein, The distance between the condenser and the inner wall of the protective cover is L, which satisfies: L≥10mm.

7. A vacuum coating apparatus, characterized by include: Vacuum chamber, equipped with a vacuum cavity; The condensation device according to any one of claims 1-6, wherein the condensation component and the protective cover of the condensation device are both disposed in the vacuum chamber, and the driving component of the condensation device is connected to the vacuum chamber and is used to drive the protective cover to move in the vacuum chamber along the preset direction.

8. The vacuum coating apparatus according to claim 7, wherein The vacuum chamber includes a first chamber and a second chamber. The first chamber is connected to the second chamber, and the second chamber protrudes from the first chamber along the preset direction. The condenser of the condensation assembly is housed in the second chamber. The condenser is spaced apart from the cavity wall of the second chamber to define a guide space. The protective cover passes through the guide space along the preset direction.

9. The vacuum coating apparatus according to claim 8, wherein The vacuum chamber is provided with a first avoiding hole, which is arranged at one end of the second chamber away from the first chamber along the preset direction and communicates with the second chamber; a sealing member of the condensing device is connected with the vacuum chamber and covers the first avoiding hole; the sealing member is provided with a second avoiding hole, which communicates with the first avoiding hole; and the condensing member is at least partially arranged in the second chamber, the first avoiding hole and the second avoiding hole in sequence and protrudes from the second avoiding hole.

10. The vacuum coating apparatus according to claim 8, wherein The condensing assembly further comprises a heat insulation member, one end of which is fixedly connected with a cavity wall of the second chamber, and the other end of which is fixedly connected with the fixing member of the condensing device.

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