Fixing jig and laser processing equipment

Abstract

The utility model provides a fixing jig and laser processing equipment. The fixing jig comprises a supporting piece, a fixing piece and a dust suction piece, and a boss is arranged on the top face of the supporting piece; the supporting piece is further provided with a dust suction channel and is provided with a dust inlet and a dust outlet which are communicated with the dust suction channel, the dust inlet is located in the top face of the supporting piece, and the dust outlet is located in the side face of the supporting piece. The fixing piece is arranged on the top face of the supporting piece and used for fixing the workpiece to the boss. The dust extraction piece is connected with the supporting piece and communicates with the dust outlet. When the fixing jig is used for supporting and fixing the panel, the boss provides a supporting effect for the panel, the fixing piece provides a fixing effect for the panel so that the panel can be fixed to the boss, the dust suction piece sucks dust particles generated in the panel machining process from the dust inlet through the dust suction channel and sucks the dust particles out of the dust outlet, and the dust particles are sucked out of the dust outlet through the dust suction channel. Therefore, dust particles are prevented from remaining on the supporting piece.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of processing dust removal, and more particularly to a fixing jig and a laser processing device. BACKGROUND

[0002] After the semiconductor brittle workpiece such as a panel is processed by laser, dust particles will inevitably be generated, and if not cleaned in time, the dust particles heated by laser will be attached to the surface of the workpiece, and in the subsequent movement process of the workpiece, the dust particles will easily rub against the workpiece, causing damage to the workpiece.

[0003] The related technology discloses a fixing jig for fixing a panel during panel processing, but due to the unreasonable structure of the fixing jig, the dust particles generated during the processing process cannot be effectively cleaned, which leads to the attachment of the dust particles to the surface of the panel and easy rubbing against the workpiece. CONTENT OF THE UTILITY MODEL

[0004] The application provides a fixing jig which can effectively clean the dust particles generated during the processing of a panel.

[0005] The technical scheme adopted by the application is as follows: a fixing jig is provided, which comprises a supporting piece, a fixing piece and a dust extraction piece, the top surface of the supporting piece is provided with a boss, the supporting piece is further provided with a dust extraction channel, the supporting piece has a dust inlet and a dust outlet which communicate with the dust extraction channel, the dust inlet is located on the top surface of the supporting piece, and the dust outlet is located on the side surface of the supporting piece, the fixing piece is arranged on the top surface of the supporting piece and is used for fixing a workpiece on the boss, and the dust extraction piece is connected to the supporting piece and communicates with the dust outlet.

[0006] Further, the supporting piece is provided with a plurality of bosses, and the plurality of bosses are arranged at intervals.

[0007] Further, the positions of the plurality of bosses are arranged in a central symmetry.

[0008] Further, the dust inlet is arranged along the processing track of the workpiece and is opposite to the processing track of the workpiece along the supporting direction of the boss.

[0009] Further, the fixing piece comprises an adsorption part and a supporting part, the adsorption part is arranged on the top surface of the supporting piece and is used for adsorbing and fixing a workpiece, and the supporting part is arranged on the supporting piece around the adsorption part along the edge of the adsorption part and is arranged flush with the top surface of the boss.

[0010] Further, the fixing member comprises a plurality of the adsorption portions, and the plurality of the adsorption portions are arranged in a central symmetry; the support member is further provided with an air passage, and the plurality of the adsorption portions are in communication with the air passage; and a port of the air passage is arranged at an edge of the support member, and is used for connecting a negative pressure source.

[0011] Further, the support portion is made of plastic material, and the boss is made of metal material; and the support portion is detachably arranged on the support member.

[0012] Further, the support member comprises a base and a mounting seat; the base is arranged horizontally; the mounting seat is adjustably connected with the base, and is used for adjusting the levelness of the mounting seat; the boss, the dust inlet and the fixing member are arranged on the mounting seat; the dust outlet is arranged at one end of the base along the horizontal direction; and the dust extraction member is connected with the base.

[0013] Further, the base is provided with an air inlet at the other end opposite to the dust outlet along the horizontal direction; and the air inlet is in communication with the dust outlet and is arranged oppositely.

[0014] The application further provides a laser processing device, which comprises a laser processing mechanism and the fixing jig as any of the above.

[0015] When the fixing jig is used for supporting a fixed panel, the boss provides support for the panel, the fixing member provides fixation for the panel, so as to fix the panel on the boss, and the dust extraction member sucks the dust particles generated in the processing of the panel into the dust inlet through the dust extraction passage, and sucks the dust particles out of the dust outlet, so as to avoid the dust particles remaining on the support member.

[0016] Further, compared with the scheme that the support member of the fixing jig in the related art is completely attached to the panel to support and fix the panel, the boss in the fixing jig of the application is arranged in a protruding manner, so as to separate the panel from the dust inlet by a certain distance, so that the air flow generated in the suction process of the dust extraction member can flow between the panel and the support member, thereby facilitating the dust particles generated in the processing of the panel to be sucked into the dust inlet, and more favorably improving the cleaning effect of the dust particles. Meanwhile, the surface of the boss is relatively small compared with the support member, so that it is more difficult for the dust particles to enter between the boss and the panel.

[0017] The dust outlet of the dust extraction passage is arranged at the edge of the support member, so that a larger space can be provided for the arrangement of the dust extraction member, and meanwhile, it is also favorable for the dust particles to be directly discharged out of the support member. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0019] Figure 1 A perspective structural schematic diagram of the fixing jig provided in the embodiments of the present application is shown in FIG. 1.

[0020] Figure 2 A perspective structural schematic diagram of the fixing jig provided in the embodiments of the present application is shown in FIG. 1. Figure 1 A sectional structural schematic diagram along the A-A line in FIG. 1.

[0021] Figure 3 An exploded structural schematic diagram of the fixing jig provided in the embodiments of the present application is shown in FIG. 4.

[0022] In the drawings, various reference signs represent the following items:

[0023] 10, fixing jig; 11, support piece; 111, boss; 112, dust extraction channel; 1121, dust inlet; 1122, dust outlet; 113, air duct; 1131, port; 114, base; 1141, air inlet; 115, mounting seat; 116, fixing plate; 12, fixing piece; 121, adsorption part; 122, support part; 13, dust extraction piece. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects of the present application more clearly understood, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0025] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0026] It should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0027] In addition, the terms "first", "second", etc. are used only for descriptive purposes and are not to be construed as indicating or implying relative importance or an ordered ranking of the indicated technical features. Thus, features defined with "first", "second" etc. can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly and specifically limited.

[0028] Please refer to Figures 1 to 3 The fixing jig 10 provided by the embodiments of the present application will be described. The fixing jig 10 provided by the embodiments of the present application includes a support piece 11, a fixing piece 12 and a dust extraction piece 13. The top surface of the support piece 11 is provided with a boss 111, and the support piece 11 acts on the workpiece through the support of the boss 111. The support piece 11 is also provided with a dust extraction channel 112, and the support piece 11 has a dust inlet 1121 and a dust outlet 1122 which are connected to the dust extraction channel 112. The dust inlet 1121 is located on the top surface of the support piece 11, and the dust outlet 1122 is located on the side surface of the support piece 11. The fixing piece 12 is arranged on the top surface of the support piece 11 and is used to fix the workpiece on the boss 111. The dust extraction piece 13 is connected to the support piece 11 and is in communication with the dust outlet 1122.

[0029] The fixing jig 10 provided by the embodiments of the present application can be any workpiece that meets the use conditions, and is not limited to semiconductor brittle workpieces such as panels. In the embodiments of the present application, the workpiece is taken as a panel as an example. When used to support and fix the panel, the boss 111 provides support for the panel, the fixing piece 12 provides fixation for the panel, and the dust extraction piece 13 sucks the dust particles generated during the machining of the panel into the dust inlet 1121 through the dust extraction channel 112 and sucks them out from the dust outlet 1122, so as to avoid the dust particles from remaining on the support piece 11.

[0030] Further, compared with the scheme in which the support piece 11 of the fixing jig 10 in the related art is completely attached to the panel for support and fixation, the boss 111 in the fixing jig 10 of the embodiments of the present application is arranged in a protruding manner, which can separate the panel from the dust inlet 1121 by a certain distance, so that the airflow generated during the suction process of the dust extraction piece 13 can flow between the panel and the support piece 11, thereby facilitating the dust particles generated during the machining of the panel to be sucked into the dust inlet 1121 and more favorably improving the cleaning effect of the dust particles. At the same time, the table surface of the boss 111 is relatively small compared with the support piece 11, so that it is more difficult for the dust particles to enter between the boss 111 and the panel.

[0031] Among them, the dust outlet 1122 of the dust extraction channel 112 is arranged at the edge of the support piece 11, so that a larger space can be provided for the arrangement of the dust extraction piece 13, and at the same time, it is also conducive to directly discharging the dust particles out of the support piece 11.

[0032] It should be noted that the protrusions 111, the dust inlet 1121 and the fixing member 12 of the embodiments of the present application are all arranged on the same side of the support member 11, and of course do not interfere with each other. The fixing member 12 is a loose fixing mode for the panel, which can be understood as follows: when the panel is placed on the protrusions 111 in the required position state, the fixing member 12 is connected to the panel, thereby fixing the panel relative to the support member 11; when the panel needs to be removed after being processed, the fixing member 12 is disconnected from the panel, so that the panel can be moved. The fixing member 12 can be a pressing type to fix the panel, or can be an adsorption type, etc., which can meet the needs.

[0033] Please refer to Figure 1 Further, in the above embodiments, the support member 11 is provided with a plurality of protrusions 111, and the plurality of protrusions 111 are arranged at intervals. With respect to the structure of the sealed protrusions 111, for example, a closed annular protrusion 111 structure, the sealing property between the protrusions 111 of this type and the panel and the structural sealing property of the protrusions 111 have an obstructing effect on the airflow generated by the dust extraction member 13 during the suction process, thereby also obstructing the dust extraction. The intervals between the plurality of protrusions 111 of the embodiments of the present application can be more conducive to the flow of the airflow generated by the dust extraction member 13 during the suction process between the panel and the support member 11.

[0034] The position distribution of the plurality of protrusions 111 is arranged with reference to the structure of the panel, and the embodiments of the present application are specifically arranged with the positions of the plurality of protrusions 111 being centrally symmetric and the table surfaces being horizontally flush. The panel is arranged in a rectangular structure, and the panel is horizontally placed on the plurality of protrusions 111. The symmetric center of the panel is arranged on the plurality of protrusions 111 in a state of being collinear with the symmetric center of the plurality of protrusions 111 along the vertical direction. In this way, the panel is symmetrically supported by the plurality of protrusions 111, which is conducive to the stability of the panel structure.

[0035] Further, the fixing member 12 of the above embodiments is arranged in an adsorption fixing manner, and is specifically arranged in a suction disc adsorption manner. Compared with the pressing fixing manner, the adsorption action can effectively reduce the hard contact force on the panel, thereby protecting the panel. At the same time, if dust particles generated by the processing of the panel abnormally enter between the suction disc and the panel, the dust particles can also be adsorbed and removed by the adsorption action of the suction disc, thereby avoiding the attachment of the dust particles on the panel.

[0036] Please refer to Figure 1 and Figure 2 The fixing member 12 specifically can include an adsorption part 121 and a support part 122. The adsorption part 121 is arranged on the top surface of the support member 11, and is used for adsorbing and fixing the workpiece. The support part 122 is arranged around the adsorption part 121 along the edge of the adsorption part 121 on the support member 11, and is arranged flush with the table surface of the protrusion 111.

[0037] The adsorption part 121 is taken as an example of adopting a suction cup, and the support part 122 is taken as an example of adopting a ring-shaped protruding structure, and the adsorption part 121 is arranged on the inner side of the ring. Specifically, the support surface of the support part 122 is horizontally coplanar with the mesa surface of the boss 111, that is, flush, so as to provide horizontal support for the panel. The support part 122 is mainly used to provide support for the panel in the vicinity of the adsorption part 121, which can effectively offset the deformation of the panel caused by the adsorption of the adsorption part 121 to the panel, so as to help the panel to maintain a horizontal state after being fixed, thereby helping to ensure the machining precision of the panel. The support part 122 is arranged around the adsorption part 121 along the edge of the adsorption part 121, which can more accurately and efficiently offset the deformation of the panel caused by the adsorption of the adsorption part 121 to the panel, and can also hinder dust particles generated by the machining of the panel from entering the space between the adsorption part 121 and the panel.

[0038] Further, the support part 122 of the above-mentioned embodiment is taken as an example of being detachably arranged on the support piece 11. Specifically, the detachable manner can be to adopt clamping, threaded connection, or to indirectly realize detachable connection by using an intermediate piece. The embodiment of the application specifically takes the fixed plate 116 as an intermediate piece to realize detachable connection between the support part 122 and the support piece 11 as an example. The fixed plate 116 is fixedly connected with the support piece 11, and the support part 122 is connected with the fixed plate 116 by plugging in the vertical direction. In this way, the difficulty and cost of directly connecting the support part 122 with the support piece 11 can be reduced, and the fixed plate 116 can also provide structural reinforcement for the support part 122.

[0039] More specifically, the support part 122 of the above-mentioned embodiment is taken as an example of being made of plastic material, and the boss 111 is taken as an example of being made of metal material. Among them, the metal has guaranteed planeness in processing, so the boss 111 made of metal material can effectively guarantee the flatness of the panel placement. Specifically, aluminum, iron or stainless steel can be used, and the embodiment of the application takes aluminum as an example, so as to have relatively light quality, moderate strength and easy processing. The support part 122 made of plastic material can support the panel, and compared with metal material, the plastic has lower hardness, so as to help reduce the risk of scratching the panel.

[0040] Please refer to Figure 1Further, the fixing member 12 can include one adsorption part 121 and one corresponding support part 122, or include multiple adsorption parts 121 and multiple corresponding support parts 122. The embodiment of the present application takes the example that the fixing member 12 includes multiple adsorption parts 121 and multiple corresponding support parts 122, wherein each support part 122 surrounds an adsorption part 121, and the multiple adsorption parts 121 are arranged in a central symmetry, and the symmetry center of the multiple adsorption parts 121 and the symmetry center of the multiple bosses 111 are collinear in the vertical direction, so that the panel is subjected to symmetrical adsorption force when being adsorbed, thereby ensuring the stability of the force of the panel structure.

[0041] The support member 11 is further provided with an air passage 113, and the multiple adsorption parts 121 are in communication with the air passage 113. The port 1131 of the air passage 113 is arranged at the edge of the support member 11, and is used for connecting a negative pressure source. It can be understood that the air passage 113 integrates the multiple adsorption parts 121, and synchronously connects the multiple adsorption parts 121 to the negative pressure source, thereby facilitating synchronous control of the multiple adsorption parts 121. The shape and structure of the air passage 113 are not limited, and the air passage 113 can simultaneously communicate with the multiple adsorption parts 121. The structure of the air passage 113 can be integrally arranged or formed by splicing, according to actual needs. The port 1131 of the air passage 113 is arranged at the edge of the support member 11, which can more conveniently connect the negative pressure source.

[0042] Further, in the above embodiment, the dust inlet 1121 is arranged along the pre-processing track of the panel, and the dust inlet 1121 is opposite to the pre-processing track of the panel in the vertical direction. It can be understood that the panel is horizontally placed on the boss 111, the to-be-processed track of the panel is determined, that is, the dust inlet 1121 extends along the direction of the to-be-processed track of the panel and is located below the to-be-processed track of the panel. In this way, during the processing of the panel along the to-be-processed track, the dust particles generated under the action of gravity and the dust extraction member 13 can be effectively sucked into the dust inlet 1121.

[0043] Please refer to Figure 1 and Figure 3 Further, in the above embodiment, the support member 11 can include a base 114 and a mounting seat 115. The base 114 is horizontally arranged, and the mounting seat 115 is adjustably connected with the base 114, and is used for adjusting the levelness of the mounting seat 115.

[0044] The base 114 of the support 11 is horizontally fixed to provide a stable foundation for the structure of the support 11, and the mounting seat 115 is arranged at the upper end of the base 114 and is connected in a manner that can adjust the levelness. For example, the base 114 and the mounting seat 115 are both rectangular structures, and the adjustable manner uses a plurality of jacks. Each corner of the mounting seat 115 is movably connected to a corner of the base 114, and at least one jack is arranged at each corner. The jack is screwed to the mounting seat 115 in the vertical direction and can be retracted, and the upper surface of the base 114 can be abutted. By adjusting the jacks corresponding to the four corners of the mounting seat 115, the levelness of the mounting seat 115 can be adjusted, and the levelness of the fixed panel can be adjusted to achieve the effect of adjusting the machining precision of the panel.

[0045] It should be noted that the mounting seat 115 and the base 114 of the adjustable connection arrangement have a certain gap in different directions. This gap is another reason for the adjustable connection of the mounting seat 115 and the base 114. When the dust extraction member 13 is extracting dust, the gap can generate airflow flowing into the support 11, thereby helping to lift and extract dust particles in all directions.

[0046] The boss 111, the dust inlet 1121, and the fixing member 12 are arranged in the mounting seat 115 to act on the panel, and the dust outlet 1122 is arranged at one end of the base 114 in the horizontal direction. The dust extraction channel 112 is arranged in a structure that combines a vertical section and a horizontal section. The dust extraction channel 112 in the vertical section can be arranged as an open port. The size of the open port is such that it can completely receive the plurality of dust inlets 1121 to collect dust particles sucked in by the plurality of dust inlets 1121. At the same time, the dust extraction channel 112 in the vertical section can also use the gravity effect of the dust particles to fully collect the dust particles, thereby enabling the dust extraction member 13 to suck cleanly.

[0047] Please refer to Figure 1 and Figure 3 . Furthermore, the base 114 has an air inlet 1141 at the other end opposite the dust outlet 1122 in the horizontal direction. The air inlet 1141 is in communication with and opposite the dust outlet 1122. That is, the air inlet 1141 and the dust outlet 1122 are opposite in a straight line. In this way, when the dust extraction member 13 is driven to suck, the air inlet 1141 and the dust outlet 1122 are arranged opposite each other, which can generate airflow from the air inlet 1141 to the dust outlet 1122, thereby helping to increase the airflow for dust extraction and improving the cleaning effect of the dust particles.

[0048] The embodiment of the present application further provides a laser processing device (not shown in the figure), comprising a laser processing mechanism (not shown in the figure) and the fixing jig 10 in any of the above embodiments, and the laser processing mechanism (not shown in the figure) is used for laser processing of the panel fixed on the support 11. Specifically, the laser processing mechanism (not shown in the figure) is arranged above the fixing jig 10, and the laser processing mechanism (not shown in the figure) is movable in the horizontal direction relative to the fixing jig 10, so as to process the panel on the support 11.

[0049] The laser processing device (not shown in the figure) of the embodiment of the present application comprises the fixing jig 10 in any of the above embodiments, and has the beneficial effects brought by the fixing jig 10 in any of the above embodiments, which will not be repeated here.

[0050] The above only describes the preferred embodiment of the present application, and is not used to limit the present application, and any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A fixing jig characterized by comprising: The application relates to a laser processing device. The support is provided with a plurality of bosses on the top surface. The support is further provided with a dust extraction channel, and the support is provided with a dust inlet and a dust outlet which are communicated with the dust extraction channel. The dust extraction member is connected with the support and communicated with the dust outlet. The support is provided with a plurality of bosses. The positions of the bosses are centrally symmetric.

2. The fixture of claim 1, wherein The dust inlet is arranged along the machining track of the workpiece and opposite to the machining track of the workpiece along the supporting direction of the boss.

3. The fixture of claim 2, wherein The fixing member comprises an adsorption part and a supporting part.

4. The fixture of claim 1, wherein The supporting part is arranged around the adsorption part along the edge of the adsorption part.

5. The fixture of any one of claims 1-4, wherein, The supporting part is made of plastic material, and the boss is made of metal material. The supporting part can be detachably arranged on the support.

6. The fixture of claim 5, wherein The support comprises a base and a mounting seat. The mounting seat is adjustably connected with the base.

7. The fixture of claim 5, wherein The boss, the dust inlet and the fixing member are arranged on the mounting seat.

8. The fixture of claim 1, wherein The dust outlet is arranged on one end of the base along the horizontal direction. The dust extraction member is connected with the base.

9. The fixture of claim 8, wherein The base is provided with an air inlet on the other end opposite to the dust outlet along the horizontal direction.

10. A laser processing apparatus characterized by comprising: The laser processing device comprises a laser processing mechanism and the fixing jig. The laser processing mechanism is used for laser processing of the workpiece fixed on the support.

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