Positioning tool

Abstract

The utility model discloses a positioning tool which is used for enabling an annular workpiece in a reaction cavity to be coaxial with the reaction cavity. Comprising a fixing unit, a first moving unit and a second moving unit, the fixing unit is arranged at the opening of the reaction cavity, the first moving unit penetrates through the fixing unit, and the second moving unit is connected with the first moving unit; the first moving unit can drive the second moving unit to move in the axial direction, and the second moving unit can move in the radial direction. During use, after an annular workpiece is placed in a reaction cavity, the fixing unit is placed at an opening of the reaction cavity, then the first moving unit moves in the vertical direction, the bottom end of the second moving unit connected with the first moving unit is just as high as the annular workpiece, and then the second moving unit moves in the radial direction; and meanwhile, the annular workpiece is pushed to be coaxial with the reaction cavity. Therefore, the technical problem that the airflow field and the radio frequency field in the reaction cavity are affected due to the fact that coaxiality positioning cannot be carried out after the annular workpiece is manually placed in the reaction cavity is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technical field especially relates to a positioning tool. BACKGROUND

[0002] The reaction cavity is a key equipment in semiconductor manufacturing, which is used for various chemical reactions and physical treatment. In the prior art, due to process requirements, the in-cavity components in the semiconductor equipment have no matching relationship in the reaction cavity, and the in-cavity components are generally placed in the reaction cavity by manual. This method must have errors, especially when the in-cavity component is a ring-shaped workpiece, the coaxiality of the ring-shaped workpiece and the reaction cavity cannot be guaranteed, that is, the positioning of the ring-shaped workpiece cannot be achieved, which will affect the airflow field and radio frequency field in the reaction cavity. SUMMARY

[0003] The embodiment of the utility model provides a positioning tool, solve the technical problem that the airflow field and radio frequency field in the reaction cavity are affected because the positioning of the coaxiality cannot be carried out after the ring-shaped workpiece is placed in the reaction cavity by manual.

[0004] In order to solve the above problems, according to one aspect of the present application, the embodiment of the utility model provides a positioning tool, the positioning tool is used for positioning the ring-shaped workpiece in the reaction cavity, so that the ring-shaped workpiece is coaxial with the reaction cavity;The positioning tool comprises a fixing unit, a first moving unit and a second moving unit, the fixing unit is arranged at the opening of the reaction cavity, the first moving unit passes through the fixing unit, and the second moving unit is connected with the first moving unit;The first moving unit can drive the second moving unit to move along the axial direction to realize the positioning of different heights in the reaction cavity, and the second moving unit can move along the radial direction to realize the positioning of the ring-shaped workpiece at the height.

[0005] In some embodiments, the ring-shaped workpiece comprises at least two upper and lower workpiece units;The second moving unit comprises an upper positioning module and a lower positioning module, the top end of the upper positioning module and the lower positioning module is connected with the first moving unit, the bottom end of the upper positioning module and the lower positioning module is located in the annular space of the ring-shaped workpiece, and the bottom of the lower positioning module is lower than the bottom of the upper positioning module, so that the upper positioning module can fix the lower workpiece unit when positioning the upper workpiece unit.

[0006] In some embodiments, the first moving unit comprises a first driving member, a first body and n radiation bars, the output end of the first driving member extends into the reaction cavity through the first body and the fixed unit in sequence, the n radiation bars extend around the outside of the first body, wherein n is an even number not less than 6; and among the n radiation bars, n / 2 radiation bars arranged at intervals form a first group of radiation modules and are connected with the upper positioning module, and the other n / 2 radiation bars arranged at intervals form a second group of radiation modules and are connected with the lower positioning module.

[0007] In some embodiments, the upper positioning module comprises a second driving member, n / 2 upper sliders and upper connecting rods, the n / 2 upper sliders are correspondingly sleeved on the radiation bars of the first group of radiation modules, the second driving member is connected with the upper end of the upper sliders, the bottom of the upper sliders is connected with the upper connecting rods, and the end of the upper connecting rods has a first protrusion outward in the radial direction.

[0008] In some embodiments, the lower positioning module comprises a third driving member, n / 2 lower sliders and lower connecting rods, the n / 2 lower sliders are correspondingly sleeved on the radiation bars of the second group of radiation modules, the third driving member is connected with the upper end of the lower sliders, the bottom of the lower sliders is connected with the lower connecting rods, and the end of the lower connecting rods has a second protrusion outward in the radial direction.

[0009] In some embodiments, the opening of the reaction cavity has a step; the fixed unit comprises a fixed ring and n guide rails, the fixed ring is located on the step, the n guide rails radiate from the center to the edge of the fixed ring in the radial direction, and the guide rails correspond to the radiation bars one by one in the upward and downward directions, the guide rails are provided with tracks, and the upper connecting rods and the lower connecting rods are inserted into the corresponding tracks one by one and at intervals.

[0010] In some embodiments, the n radiation bars are six, and the six radiation bars are uniformly distributed in the circumferential direction.

[0011] In some embodiments, the positioning tool further comprises a distance sensing unit arranged at the bottom of the first moving unit, for sensing whether the distance between the first moving unit and the inner surface of the workpiece unit around is equal.

[0012] In some embodiments, the distance sensing unit comprises a first sensing module and a second sensing module; the first sensing module is synchronous with the height of the upper positioning module and corresponds to the radiation strips in the first group of radiation modules one by one, for sensing the distance from the inner wall of the workpiece unit located above; the second sensing module is synchronous with the height of the lower positioning module and corresponds to the radiation strips in the second group of radiation modules one by one, for sensing the distance from the inner wall of the workpiece unit located below.

[0013] In some embodiments, the first sensing module and the second sensing module each comprise three ranging sensors.

[0014] Compared with the prior art, the reaction chamber has at least the following beneficial effects:

[0015] The positioning tool provided by the utility model is used for positioning the annular workpiece in the reaction chamber, and makes the annular workpiece coaxial with the reaction chamber; the positioning tool comprises a fixing unit, a first moving unit and a second moving unit, the fixing unit is arranged at the opening of the reaction chamber, the first moving unit passes through the fixing unit, and the second moving unit is connected with the first moving unit; the first moving unit can drive the second moving unit to move along the axial direction to realize positioning at different heights in the reaction chamber, and the second moving unit can move along the radial direction to realize positioning of the annular workpiece at the height.

[0016] In use, after the annular workpiece is placed in the reaction chamber, the fixing unit is placed at the opening of the reaction chamber, then the first moving unit moves in the vertical direction, so that the bottom end of the second moving unit connected therewith is just at the same height as the annular workpiece, and then the second moving unit moves along the radial direction; specifically, the end portion of the second moving unit can push the annular workpiece, and if the center of the annular workpiece deviates to the right side, the end portion of the second moving unit acts on the left side wall inside the annular workpiece and pushes it to the left. It can be seen that the positioning tool provided by the embodiment realizes positioning of the annular workpiece through mutual cooperation between the fixing unit, the first moving unit and the second moving unit, so that the annular workpiece can be coaxial with the reaction chamber, and the technical problem that the gas flow field and the radio frequency field in the reaction chamber are affected due to the inability to position the coaxiality after the annular workpiece is placed in the reaction chamber by artificial operation is solved.

[0017] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, and the contents of the specification can be implemented, the following preferred embodiments of the utility model are described in detail with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor on the premise of not paying creative labor.

[0019] Figure 1 is a structural schematic view of a positioning tool provided by the embodiments of the present application;

[0020] Figure 2 is a front view of a positioning tool provided by the embodiments of the present application;

[0021] Figure 3 is Figure 2 is a sectional view along the A-A direction;

[0022] Figure 4 is a cooperation view of a first moving unit and a second moving unit in a positioning tool provided by the embodiments of the present application;

[0023] Figure 5 is a cooperation view of a reaction cavity and an annular workpiece in a positioning tool provided by the embodiments of the present application;

[0024] Figure 6 is a cooperation view of a reaction cavity and a fixing unit in a positioning tool provided by the embodiments of the present application;

[0025] Figure 7 is a top view of a positioning tool provided by the embodiments of the present application;

[0026] Reference signs:

[0027] 1, reaction cavity; 2, annular workpiece; 21, workpiece unit; 3, fixing unit; 31, fixing ring; 32, guide rail; 33, track; 4, first moving unit; 41, first driving member; 42, first body; 43, radiation strip; 5, second moving unit; 51, upper positioning module; 52, lower positioning module; 511, second driving member; 512, upper sliding block; 513, upper connecting rod; 514, first protrusion; 521, third driving member; 522, lower sliding block; 523, lower connecting rod; 524, second protrusion; 6, distance sensing unit; 61, first sensing module; 62, second sensing module; 7, heating disc. DETAILED DESCRIPTION

[0028] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0029] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0032] Example 1

[0033] This embodiment provides a positioning fixture, such as Figures 1-7 As shown, the positioning fixture is used to position the annular workpiece 2 in the reaction chamber 1, so that the annular workpiece 2 is coaxial with the reaction chamber 1. The positioning fixture includes a fixing unit 3, a first moving unit 4, and a second moving unit 5. The fixing unit 3 is disposed at the opening of the reaction chamber 1. The first moving unit 4 passes through the fixing unit 3, and the second moving unit 5 is connected to the first moving unit 4. The first moving unit 4 can drive the second moving unit 5 to move axially to achieve positioning at different heights within the reaction chamber 1, and the second moving unit 5 can move radially to achieve positioning of the annular workpiece 2 at that height.

[0034] The general outline of the reaction cavity 1 is a hollow columnar structure, and the inner bottom surface has a heating disc 7, and the inside has an annular workpiece 2, which needs to be coaxial with the reaction cavity 1, that is, the center of the annular workpiece 2 and the center of the reaction cavity 1 should be located on the same vertical line. In this embodiment, the fixing unit 3 is arranged at the opening of the reaction cavity 1, which is used to provide support for the first moving unit 4; the first moving unit 4 can move in the vertical direction, thereby driving the end of the second moving unit 5 to be the same height as the annular workpiece 2 that needs to be positioned; the second moving unit 5 can move in the radial direction, thereby making the end thereof act on the inner surface of the annular workpiece 2, so that the annular workpiece 2 is coaxial with the reaction cavity 1.

[0035] In specific use, after the annular workpiece 2 is placed in the reaction cavity 1, the fixing unit 3 is placed at the opening of the reaction cavity 1, then the first moving unit 4 moves in the vertical direction, so that the bottom end of the second moving unit 5 connected thereto is just the same height as the annular workpiece 2, and then the second moving unit 5 moves in the radial direction. Specifically, the end of the second moving unit 5 can push the annular workpiece 2, and if the center of the annular workpiece 2 deviates to the right, the end of the second moving unit 5 acts on the left wall inside the annular workpiece 2 to push it to the left. As can be seen, the positioning tool provided in this embodiment realizes the positioning of the annular workpiece 2 through the cooperation between the fixing unit 3, the first moving unit 4 and the second moving unit 5, so that the annular workpiece 2 can be coaxial with the reaction cavity 1, thereby solving the technical problem that the gas flow field and the radio frequency field in the reaction cavity are affected due to the inability to position the coaxiality after the annular workpiece is placed in the reaction cavity by manual operation.

[0036] In specific embodiments, as shown in Figure 5 the annular workpiece 2 includes at least two workpiece units 21 arranged one above the other; the second moving unit 5 includes an upper positioning module 51 and a lower positioning module 52, the top ends of the upper positioning module 51 and the lower positioning module 52 are connected with the first moving unit 4, the bottom ends of the upper positioning module 51 and the lower positioning module 52 are located in the annular space of the annular workpiece 2, and the bottom of the lower positioning module 52 is lower than the bottom of the upper positioning module 51, so that when the upper positioning module 51 positions the workpiece unit 21 located above, the lower positioning module 52 can fix the workpiece unit 21 located below.

[0037] Since there is friction between adjacent workpiece units 21, when one layer of workpiece units 21 is moved, the workpiece units 21 adjacent to the workpiece units 21 to be moved will be moved due to the friction. Therefore, the present embodiment is provided with two sets of positioning modules, i.e., the upper positioning module 51 and the lower positioning module 52. One set of positioning modules is used to realize coaxial positioning of the workpiece units 21, and the other set of positioning modules is used to ensure that the workpiece units 21 adjacent to the workpiece units 21 to be moved are fixed. Specifically, if a plurality of workpiece units 21 are stacked together, the lowermost layer is layer A, and the layers above are layer B, layer C, layer D, and so on. Then, the lowermost layer, i.e., layer A, is centered by the lower positioning module 52. After layer A is centered, layer B needs to be centered. The upper positioning module 51 is used to center layer B. At this time, the lower positioning module 52 still keeps the position of layer A unchanged. The purpose is that when layer B is centered, layer A will not be taken away from the centering position due to friction. After layer B is centered, layer C needs to be centered. At this time, the upper positioning module 51 and the lower positioning module 52 move up by the height of one workpiece unit 21. Then, the lower positioning module 52 supports layer B to keep it unchanged, and the upper positioning module 51 centers layer C. The above process is repeated until the travel distance is sufficient, and an infinite number of workpiece units in a stacked form can be centered.

[0038] In order to clearly explain the present embodiment, it is assumed that the annular workpiece 2 includes three workpiece units 21, i.e., a first workpiece unit, a second workpiece unit, and a third workpiece unit from bottom to top. In the working process, the lower positioning module 52 works first to realize positioning of the first workpiece unit. Then, the lower positioning module 52 keeps unchanged, and the upper positioning module 51 works to realize positioning of the second workpiece unit. Then, the upper positioning module 51 and the lower positioning module 52 move upward by the thickness of one workpiece unit, so that the lower positioning module 52 is in the same height as the second workpiece unit, and the second workpiece unit is fixed by the lower positioning module 52. At this time, the upper positioning module 51 is aligned with the third workpiece unit, and can act on the third workpiece unit to make it coaxial with the reaction chamber 1.

[0039] In specific embodiments, as shown in Figure 1 and Figure 4 The first moving unit 4 includes a first driving member 41, a first body 42, and n radiation strips 43. The output end of the first driving member 41 extends into the reaction chamber 1 through the first body 42 and the fixed unit 3 in sequence. The n radiation strips 43 extend outward along the outside of the first body 42. n is an even number not less than 6. In the n radiation strips 43, n / 2 radiation strips 43 arranged at intervals form a first set of radiation modules and are connected with the upper positioning module 51. The other n / 2 radiation strips 43 arranged at intervals form a second set of radiation modules and are connected with the lower positioning module 52.

[0040] The first driving member 41 is an electric motor, which acts on the first body 42 and can drive the first body 42 to move up and down, and further drive the radiation bars 43 connected with the first body 42 to move up and down, and further drive the upper positioning module 51 and the lower positioning module 52 connected with the radiation bars 43 to move up and down, so as to realize the centering positioning of the workpiece monomer 21 without height.

[0041] In order to more clearly explain the embodiment, it is assumed that the radiation bars 43 have 6 radiation bars, i.e. n is 6, and along the clockwise or counterclockwise direction, they are sequentially the first radiation bar, the second radiation bar, the third radiation bar, the fourth radiation bar, the fifth radiation bar and the sixth radiation bar, then the first radiation bar, the third radiation bar and the fifth radiation bar form a first radiation module and are connected with the upper positioning module 51, and the second radiation bar, the fourth radiation bar and the sixth radiation bar form a second radiation module and are connected with the lower positioning module 52. That is to say, the radiation bars corresponding to the upper positioning module 51 and the lower positioning module 52 are cross-spaced, and this arrangement makes the second moving unit 5 be able to be in contact with the inner wall of the workpiece monomer 21 relatively uniformly during the centering or positioning of the workpiece monomer 21, so as to cover the workpiece monomer 21 with a larger area as much as possible, and ensure the stability of the centering or positioning of the workpiece monomer 21.

[0042] In specific embodiments, as shown in Figure 4 The upper positioning module 51 includes a second driving member 511, an upper sliding block 512 and an upper connecting rod 513, the number of the upper sliding blocks 512 is n / 2, each of which is sleeved on a radiation bar 43 of the first group of radiation modules, the second driving member 511 is connected with the upper end of the upper sliding block 512, the bottom of the upper sliding block 512 is connected with the upper connecting rod 513, and the end of the upper connecting rod 513 has a first protrusion 514 outward in the radial direction.

[0043] The second driving component 511 is a motor, the output of which is connected to the upper slider 512. For clarity, the aforementioned radial strips 43 are continued to have six: a first radial strip, a second radial strip, a third radial strip, a fourth radial strip, a fifth radial strip, and a sixth radial strip. Corresponding to the number of radial strips 43, there are three upper sliders 512, which are respectively fitted onto the first, third, and fifth radial strips. Each upper slider 512 has a corresponding upper connecting rod 513 connected to its lower end, and each upper connecting rod 513 has a first protrusion 514 facing the inner wall of the workpiece unit 21 at its lower end. Under the action of the second driving member 511, the upper slider 512 can move along the radial strip 43, thereby driving the upper connecting rod 513 to move radially. When the upper connecting rod 513 moves outward, the three first protrusions 514 can act on the inner wall of the workpiece unit 21, either fixing it or centering it. When the upper connecting rod 513 moves inward, the three first protrusions 514 move away from the workpiece unit 21. At this time, the second moving unit 5 can move up and down so that it acts on different workpiece units 21.

[0044] In a specific embodiment, such as Figure 4 As shown, the lower positioning module 52 includes a third driving member 521, a lower slider 522, and a lower connecting rod 523. The number of lower sliders 522 is n / 2, and they are fitted one-to-one on the radiation strips 43 of the second group of radiation modules. The third driving member 521 is connected to the upper end of the lower slider 522, and the lower slider 522 is connected to the bottom of the lower connecting rod 523. The end of the lower connecting rod 523 has a second protrusion 524 that extends radially outward.

[0045] The third driving component 521 is a motor, the output of which is connected to the lower slider 522. For clarity, the aforementioned radial strips 43 are continued to have six: a first radial strip, a second radial strip, a third radial strip, a fourth radial strip, a fifth radial strip, and a sixth radial strip. Corresponding to the number of radial strips 43, there are three lower sliders 522, which are respectively fitted onto the second, fourth, and sixth radial strips. Each lower slider 522 has a corresponding lower connecting rod 523 connected to its lower end, and each lower connecting rod 523 has a second protrusion 524 facing the inner wall of the workpiece unit 21 at its lower end. Under the action of the third driving member 521, the lower slider 522 can move along the radial strip 43, thereby driving the lower connecting rod 523 to move radially. When the lower connecting rod 523 moves outward, the three second protrusions 524 can act on the inner wall of the workpiece unit 21, either fixing it or centering it. When the lower connecting rod 523 moves inward, the three second protrusions 524 move away from the workpiece unit 21. At this time, the second moving unit 5 can move up and down so that it acts on different workpiece units 21.

[0046] In specific embodiments, the opening of the reaction cavity 1 has a step; as Figure 1 and Figure 6 As shown in the drawings, the fixing unit 3 includes a fixing ring 31 and guide rails 32, the fixing ring 31 is located on the step, the guide rails 32 have n, n guide rails 32 radially radiate from the center to the edge of the fixing ring 31, and the guide rails 32 correspond one-to-one to the upper and lower radiation strips 43, the guide rails 32 are provided with tracks 33, and the upper connecting rods 513 and the lower connecting rods 523 are inserted into the corresponding tracks 33 one-to-one and at intervals. More specifically, the track 33 is a groove provided on the guide rail 32, and the track 33 can ensure the accuracy of the movement of the upper connecting rod 513 and the lower connecting rod 523; the fixing ring 31 is arranged so that the entire fixing unit 3 can be stably placed on the step of the reaction cavity 1. One end of the n guide rails 32 is located on the fixing ring 31, and the other end of the n guide rails 32 intersects with the connecting block at the center of the fixing ring 31, wherein the first driving member 41 passes through the connecting member, which provides support for the first driving member 41.

[0047] In specific embodiments, the radiation strip 43 has six, and the six radiation strips 43 are uniformly distributed in the circumferential direction.

[0048] To move a circle in each direction radially, i.e., the above-mentioned annular workpiece unit 21, at least three radial thrusts in the circumferential direction of 360 degrees, spaced 120 degrees apart, are required, so the embodiment limits the radiation strip 43 to have six, in the clockwise or counterclockwise direction, in order: first radiation strip, second radiation strip, third radiation strip, fourth radiation strip, fifth radiation strip, and sixth radiation strip, then in the first radiation strip, third radiation strip, and fifth radiation strip, the interval between two adjacent radiation strips is 120 degrees, and in the second radiation strip, fourth radiation strip, and sixth radiation strip, the interval between two adjacent radiation strips is 120 degrees. In this way, the workpiece unit 21 can be moved smoothly on the basis of cost savings.

[0049] In specific embodiments, the positioning tool further includes a distance sensing unit 6, as shown in Figure 3 and Figure 4 The distance sensing unit 6 is arranged at the bottom of the first moving unit 4, and is used to sense whether the distance between the inner surface of the workpiece unit 21 around it is equal.

[0050] The distance sensing unit 6 comprises a first sensing module 61 and a second sensing module 62; the first sensing module 61 is synchronous with the height of the upper positioning module 51 and corresponds to the radiation strip 43 in the first group of radiation modules one by one, for sensing the distance from the inner wall of the workpiece unit 21 located above; the second sensing module 62 is synchronous with the height of the lower positioning module 52 and corresponds to the radiation strip 43 in the second group of radiation modules one by one, for sensing the distance from the inner wall of the workpiece unit 21 located below.

[0051] Specifically, the first sensing module 61 can sense the distance from the inner wall of the workpiece unit 21 located above, and then adjust the position of the workpiece unit 21 through the upper positioning module 51; the adjustment mode can be selected according to the needs, for example, a controller is set, which receives the data of the first sensing module 61 and compares it with the preset data, and if it does not meet the requirements, the second driving part 511 is controlled to act. Of course, when the first sensing module 61 comprises three distance measuring sensors, the controller can also compare the detection data of the three distance measuring sensors, and if they are not the same, the second driving part 511 is controlled to act until the detection data of the three distance measuring sensors are the same. Of course, the distance measuring sensor can also fit the coaxial deviation size and direction according to the detection data, and then the second driving part 511 works according to the deviation size and direction to realize the coaxiality of the reaction chamber 1 and the workpiece unit 21.

[0052] The second sensing module 62 has the same working mode as the first sensing module 61.

[0053] In specific embodiments, the first sensing module 61 and the second sensing module 62 each comprise three distance measuring sensors. Distance measuring sensors are a commonly used sensor that can measure the distance between an object and the sensor. In this embodiment, it is used to measure the distance between the sensor and the inner wall of the workpiece unit 21. According to different technical implementation modes, distance measuring sensors can be divided into various types, each type having its unique working principle.

[0054] The positioning tool provided in this embodiment realizes the positioning of the annular workpiece 2 through the cooperation between the fixing unit 3, the first moving unit 4, the second moving unit 5 and the distance sensing unit 6, so that it can be coaxial with the reaction chamber 1, solving the technical problem that after the annular workpiece is placed in the reaction chamber by manual operation, the airflow field and the radio frequency field in the reaction chamber are affected due to the inability to position the coaxiality.

[0055] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, and any skilled person in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present application, and these modifications or replacements should be encompassed within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A positioning fixture, characterized by, The positioning tool is used for positioning an annular workpiece in a reaction cavity, so that the annular workpiece is coaxial with the reaction cavity; the positioning tool comprises a fixing unit, a first moving unit and a second moving unit, the fixing unit is arranged at an opening of the reaction cavity, the first moving unit passes through the fixing unit, and the second moving unit is connected with the first moving unit; the first moving unit can drive the second moving unit to move axially to realize positioning at different heights in the reaction cavity, and the second moving unit can move radially to realize positioning of the annular workpiece at the height.

2. The positioning tool of claim 1, wherein The annular workpiece comprises at least two workpiece units arranged one above another; the second moving unit comprises an upper positioning module and a lower positioning module, top ends of the upper positioning module and the lower positioning module are connected with the first moving unit, bottom ends of the upper positioning module and the lower positioning module are located in an annular space of the annular workpiece, and the bottom of the lower positioning module is lower than the bottom of the upper positioning module, so that the upper positioning module can position the workpiece unit located above, and the lower positioning module can fix the workpiece unit located below when positioning the workpiece unit located above.

3. The positioning tool of claim 2, wherein The first moving unit comprises a first driving member, a first body and n radiation strips, an output end of the first driving member extends into the reaction cavity through the first body and the fixing unit in sequence, the n radiation strips are evenly distributed along the outer side of the first body, and n is an even number not less than 6; and in the n radiation strips, n / 2 radiation strips arranged at intervals form a first group of radiation modules and are connected with the upper positioning module, and the other n / 2 radiation strips arranged at intervals form a second group of radiation modules and are connected with the lower positioning module.

4. The positioning tool of claim 3, wherein The upper positioning module comprises a second driving member, n / 2 upper sliding blocks and an upper connecting rod, the n / 2 upper sliding blocks are correspondingly sleeved on the radiation strips of the first group of radiation modules, the second driving member is connected with the upper ends of the upper sliding blocks, the bottom of each upper sliding block is connected with the upper connecting rod, and the end of the upper connecting rod has a first protrusion outward in the radial direction.

5. The positioning tool of claim 4, wherein, The lower positioning module comprises a third driving member, n / 2 lower sliding blocks and a lower connecting rod, the n / 2 lower sliding blocks are correspondingly sleeved on the radiation strips of the second group of radiation modules, the third driving member is connected with the upper ends of the lower sliding blocks, the bottom of each lower sliding block is connected with the lower connecting rod, and the end of the lower connecting rod has a second protrusion outward in the radial direction.

6. The positioning tool of claim 5, wherein, The opening of the reaction cavity has a step; the fixing unit comprises a fixing ring and n guide rails, the fixing ring is located on the step, the n guide rails are radially arranged from the center to the edge of the fixing ring, the guide rails correspond to the radiation strips one by one in the upward and downward directions, and the guide rails are provided with tracks; and the upper connecting rod and the lower connecting rod are correspondingly and intermittently inserted into the corresponding tracks.

7. The positioning tool of claim 3, wherein The n radiation strips are six, and the six radiation strips are evenly distributed in the circumferential direction.

8. The positioning tool of claim 3, wherein, The positioning tool further comprises a distance sensing unit arranged at the bottom of the first moving unit for sensing whether the distance between the first moving unit and the inner surface of the workpiece unit around is equal.

9. The positioning fixture of claim 8, wherein, The distance sensing unit comprises a first sensing module and a second sensing module; the first sensing module is synchronous with the height of the upper positioning module and corresponds to the radiation strips in the first group of radiation modules one by one for sensing the distance between the first sensing module and the inner wall of the workpiece unit above; the second sensing module is synchronous with the height of the lower positioning module and corresponds to the radiation strips in the second group of radiation modules one by one for sensing the distance between the second sensing module and the inner wall of the workpiece unit below.

10. The positioning fixture of claim 9, wherein, The first sensing module and the second sensing module each comprise three distance measuring sensors.

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