Boat structure and carrying device

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to a boat structure and a carrying device, and solves the problem that the side edge of a sheet material has a winding plating phenomenon due to the fact that the side edge of the sheet material is exposed outside. The boat structure comprises a first side plate, a second side plate, a third side plate and a cover plate which are vertically arranged, the third side plate is connected with the first side plate and the second side plate to define a containing space with a side opening, and the cover plate is detachably connected with the first side plate and the second side plate and used for closing or opening the side opening. The first side plate and the second side plate are each provided with a first clamping groove facing the containing space, the first clamping grooves can contain the first side edge or the second side edge of the sheet-shaped material, the third side plate is provided with a second clamping groove facing the containing space, the second clamping groove can contain the third side edge of the sheet-shaped material, and the cover plate can make contact with the fourth side edge of the sheet-shaped material. And the four side edges of the sheet material are prevented from being exposed outside, so that the winding plating phenomenon of the side edges of the sheet material is reduced.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a boat structure and a carrying device. BACKGROUND

[0002] The production process of semiconductor or photovoltaic products usually includes texturing, cleaning, diffusion, laser, oxidation, plating, screen sintering, etc., which are usually carried out in a reaction furnace.

[0003] At present, the boat structure is widely used to carry products in the industry, but the boat structure of the related art usually uses multiple grooved rods to support the point of the side edge of the product, and the side edge of the product is exposed. Therefore, when the product is subjected to the plating process, the side edge of the product is prone to wrap plating. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the embodiments of the present disclosure provide a boat structure and a carrying device, which solve the problem that the side edge of the sheet-shaped material is prone to wrap plating due to the exposure of the side edge of the sheet-shaped material.

[0005] In a first aspect, the embodiments of the present disclosure provide a boat structure configured to carry sheet-shaped materials, the boat structure comprising: a first side plate vertically arranged; a second side plate arranged opposite to the first side plate; a third side plate vertically arranged and connected to the first side plate and the second side plate to form a containing space with a side opening, the side opening being arranged opposite to the third side plate, the sheet-shaped materials entering or leaving the containing space through the side opening; a cover plate detachably connected to the first side plate and the second side plate respectively and configured to close or open the side opening; wherein one side of the first side plate close to the containing space and one side of the second side plate close to the containing space both have at least one first clamping groove facing the containing space, the first clamping groove extending along a first direction and configured to accommodate a first side edge or a second side edge of at least one sheet-shaped material, one side of the third side plate close to the containing space has at least one second clamping groove facing the containing space, the second clamping groove extending along a second direction and configured to accommodate a third side edge of at least one sheet-shaped material, wherein the cover plate can contact a fourth side edge of at least one sheet-shaped material when the cover plate closes the side opening, wherein the first direction intersects with the vertical direction, and the second direction intersects with the vertical direction and the first direction respectively.

[0006] In some embodiments, the first side plate comprises: a first main side plate vertically arranged; at least two first clamping plates vertically spaced apart and connected to a side of the first main side plate close to the accommodation space, the first clamping plates being horizontally arranged and extending along the first direction, and the first clamping slots being formed between adjacent two first clamping plates; the second side plate comprises: a second main side plate arranged opposite to the first main side plate; and at least two first clamping plates vertically spaced apart and connected to a side of the second main side plate close to the accommodation space; the third side plate comprises: a third main side plate vertically arranged and connected to the first main side plate and the second main side plate; and at least two second clamping plates vertically spaced apart and connected to a side of the third main side plate close to the accommodation space, the second clamping plates being horizontally arranged and extending along the second direction, and the second clamping slots being formed between adjacent two second clamping plates.

[0007] In some embodiments, the shape of the cross section of the first clamping plate comprises: a rectangle or a triangle; and / or, the shape of the cross section of the second clamping plate comprises: a rectangle or a triangle; wherein the lower side wall of the first clamping slot is configured to carry the sheet material, and the lower side wall of the second clamping slot is configured to carry the sheet material; and wherein, in the case that the shape of the cross section of the first clamping plate and the shape of the cross section of the second clamping plate are both triangles, the included angle between adjacent two first clamping plates is an acute angle, and the included angle between adjacent two second clamping plates is an acute angle.

[0008] In some embodiments, the first clamping slot and the second clamping slot located on the same horizontal plane are configured to carry at least one piece of the sheet material; in the case that the shape of the cross section of the first clamping plate and the shape of the cross section of the second clamping plate are both rectangles, the distance between the first or second side edge and the bottom of the first clamping slot ranges from 0.1 mm to 3 mm; and / or, the distance between the upper surface of the uppermost sheet material and the upper side wall of the first clamping slot ranges from 0.1 mm to 4 mm; in the case that the shape of the cross section of the first clamping plate and the shape of the cross section of the second clamping plate are both triangles, the size of the opening of the first clamping slot or the opening of the second clamping slot in the vertical direction ranges from 0.5 mm to 3.5 mm; and / or, the size of the first clamping slot or the second clamping slot in the horizontal direction is less than or equal to 5 mm.

[0009] In some embodiments, the boat structure further comprises: a top plate connected to the first side plate, the second side plate and the third side plate, one end of the top plate close to the side opening has a through hole penetrating through the top plate in the vertical direction; a bottom plate arranged opposite to the top plate and connected to the first side plate, the second side plate and the third side plate, one end of the bottom plate close to the side opening has a receiving groove arranged opposite to the through hole; wherein the bottom end of the cover plate can pass through the through hole and be placed in the receiving groove, and the top end of the cover plate is located in the through hole.

[0010] In some embodiments, two first clamping grooves and one second clamping groove located in the same horizontal plane can carry two pieces of the sheet-shaped material.

[0011] In some embodiments, the first side plate, the second side plate and the third side plate each have a plurality of air inlet channels, the air inlet channels being in communication with the containing space and the outside of the boat structure, and the process gas can enter the containing space through the air inlet channels.

[0012] In some embodiments, the cover plate has a plurality of air inlets, the plurality of air inlets being arranged in the vertical direction, and the process gas can enter the containing space through the air inlets.

[0013] In some embodiments, the boat structure further comprises: at least two boat ears arranged on the first main side plate and the second main side plate, respectively.

[0014] In a second aspect, embodiments of the present disclosure provide a carrying device, comprising: the boat structure of the first aspect, configured to carry sheet-shaped materials; and a cover plate taking and placing structure, configured to grasp the cover plate of the boat structure, place the cover plate at the side opening of the boat structure to close the side opening, or take the cover plate away from the side opening to open the side opening.

[0015] The boat structure provided by the embodiments of the present disclosure carries the sheet-shaped material by using the first clamping groove and the second clamping groove, and shields the first side edge, the second side edge and the third side edge of the sheet-shaped material, respectively, and then shields the fourth side edge of the sheet-shaped material by using the cover plate, so that the four side edges of the sheet-shaped material are avoided from being exposed, thereby reducing the edge wrap phenomenon of the side edges of the sheet-shaped material. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 Fig. 1 shows a structural schematic diagram of a boat structure and a sheet-shaped material provided by an embodiment of the present disclosure.

[0017] Figure 2 Fig. 2 shows a structural schematic diagram of a boat structure and a sheet-shaped material provided by another embodiment of the present disclosure. Figure 1 Fig. 3 shows a partial enlarged view of the boat structure and the sheet-shaped material in the A area.

[0018] Figure 3 A partial enlarged view of the boat structure and the sheet material in the B area is shown. Figure 1 A partial enlarged view of the boat structure and the sheet material in the B area is shown.

[0019] Figure 4 A structural schematic diagram of the sheet material and the boat structure without the cover plate is shown.

[0020] Figure 5 A partial enlarged view of the boat structure and the sheet material in the B area is shown. Figure 4 A partial enlarged view of the boat structure and the sheet material in the B area is shown.

[0021] Figure 6 A front view of the first clamping groove and the sheet material is shown.

[0022] Figure 7 A front view of the first clamping groove and the sheet material is shown.

[0023] Figure 8 A structural schematic diagram of the boat structure is shown.

[0024] Figure 9 A structural schematic diagram of the boat structure is shown.

[0025] Reference signs:

[0026] 1, handling device; 10, boat structure; 101, side opening; 1001, accommodating space; 1002, air inlet channel; 100, first side plate; 110, first main side plate; 120, first clamping plate; 200, second side plate; 210, second main side plate; 102, first clamping groove; 1021, lower side wall of the first clamping groove; 1022, groove bottom of the first clamping groove; 1023, upper side wall of the first clamping groove; 300, third side plate; 310, third main side plate; 320, second clamping plate; 301, second clamping groove; 3010, lower side wall of the second clamping groove; 400, cover plate; 401, bottom end of the cover plate; 402, top end of the cover plate; 4001, air inlet; 500, top plate; 501, through hole; 600, bottom plate; 601, receiving groove; 700, boat ear; X1, first direction; X2, second direction; 20, cover plate taking and placing structure; 2, sheet material; 2001, first side edge; 2002, second side edge; 2003, third side edge; 2004, fourth side edge; 2005, upper surface of the sheet material. DETAILED DESCRIPTION

[0027] With reference to the drawings and the embodiments of the present disclosure, the technical solutions in the embodiments of the present disclosure will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments of the present disclosure. Based on the embodiments of the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present disclosure.

[0028] Figure 1 Fig. 1 shows a structural schematic diagram of a boat structure and a sheet material provided by an embodiment of the present disclosure. Figure 2 Fig. 2 shows a structural schematic diagram of a boat structure and a sheet material provided by an embodiment of the present disclosure. Figure 1 Fig. 3 shows a partial enlarged view of the boat structure and the sheet material in an A area. Figure 3 Fig. 4 shows a structural schematic diagram of a boat structure and a sheet material provided by an embodiment of the present disclosure. Figure 1 Fig. 5 shows a partial enlarged view of the boat structure and the sheet material in a B area. Figure 4 Fig. 6 shows a structural schematic diagram of a sheet material and a boat structure not including a cover plate provided by an embodiment of the present disclosure. Figure 5 Fig. 7 shows a structural schematic diagram of a sheet material and a boat structure not including a cover plate provided by an embodiment of the present disclosure. Figure 4 Fig. 8 shows a partial enlarged view of the sheet material and the boat structure not including a cover plate in a C area. Figure 1 As shown in Fig. 1, the boat structure 10 is configured to carry the sheet material 2. The boat structure 10 includes a first side plate 100, a second side plate 200, a third side plate 300, and a cover plate 400. The first side plate 100 is vertically arranged, the second side plate 200 is arranged opposite to the first side plate 100, the third side plate 300 is vertically arranged and connected to the first side plate 100 and the second side plate 200 to enclose a containing space 1001 having a side opening 101. The side opening 101 is arranged opposite to the third side plate 300, and the sheet material 2 enters or exits the containing space 1001 through the side opening 101. The cover plate 400 is detachably connected to the first side plate 100 and the second side plate 200 respectively, and is configured to close or open the side opening 101.

[0029] The side of the first side plate 100 close to the containing space 1001 and the side of the second side plate 200 close to the containing space 1001 each have at least one first clamping groove 102 facing the containing space 1001, the first clamping groove 102 extends along a first direction X1, and the first clamping groove 102 is configured to accommodate a first side edge 2001 or a second side edge 2002 of at least one sheet material 2. The side of the third side plate 300 close to the containing space 1001 has at least one second clamping groove 301 facing the containing space 1001, the second clamping groove 301 extends along a second direction X2, and the second clamping groove 301 is configured to accommodate a third side edge 2003 of at least one sheet material 2. In the case that the cover plate 400 closes the side opening 101, the cover plate 400 can be in contact with a fourth side edge 2004 of at least one sheet material 2. The first direction X1 intersects with the vertical direction, and the second direction X2 intersects with the vertical direction and the first direction X1 respectively.

[0030] The boat structure 10 bears the sheet material 2 by using the first clamping groove 102 and the second clamping groove 301, and shields the first side edge 2001, the second side edge 2002 and the third side edge 2003 of the sheet material 2 respectively, and shields the fourth side edge 2004 of the sheet material 2 by using the cover plate 400, so that the four side edges of the sheet material 2 are avoided from being exposed, thereby reducing the edge plating phenomenon of the sheet material 2.

[0031] Exemplarily, the first side plate 100 has a first screw joint part, the second side plate 200 has a second screw joint part, and the cover plate 400 has a third screw joint part, and the third screw joint part is screwed with the first screw joint part and the second screw joint part respectively, so as to realize the detachable connection of the cover plate 400 with the first side plate 100 and the second side plate 200 respectively.

[0032] Exemplarily, the first side plate 100 has a first clamping joint part, the second side plate 200 has a second clamping joint part, and the cover plate 400 is clamped with the first clamping joint part and the second clamping joint part respectively, so as to realize the detachable connection of the cover plate 400 with the first side plate 100 and the second side plate 200 respectively.

[0033] Exemplarily, the sheet material 2 can be a silicon wafer, a battery plate, a glass substrate, etc.

[0034] Exemplarily, the shape of the vertical section of the cover plate 400 can be a rectangle, a parallelogram, other polygons or irregular shapes.

[0035] Exemplarily, the first direction X1 is perpendicular to the vertical direction, and the second direction X2 is perpendicular to the vertical direction and the first direction X1 respectively.

[0036] In some embodiments, as shown in Figures 1 to 5 The first side plate 100 includes a first main side plate 110 and at least two first clamping plates 120 arranged in the vertical direction. The first main side plate 110 is vertically arranged, the first clamping plate 120 is connected to the side of the first main side plate 110 close to the accommodating space 1001, the first clamping plate 120 is horizontally arranged and extends along the first direction X1, and the first clamping groove 102 is formed between the adjacent two first clamping plates 120. The second side plate 200 includes a second main side plate 210 and at least two first clamping plates 120 arranged in the vertical direction. The second main side plate 210 is arranged opposite to the first main side plate 110, and the first clamping plate 120 is connected to the side of the second main side plate 210 close to the accommodating space 1001. The third side plate 300 includes a third main side plate 310 and at least two second clamping plates 320 arranged in the vertical direction. The third main side plate 310 is vertically arranged and connected to the first main side plate 110 and the second main side plate 210.

[0037] The second clamping plate 320 is connected to the side of the third main side plate 310 close to the accommodation space 1001, the second clamping plate 320 is horizontally arranged and extends along the second direction X2, and a second clamping groove 301 is formed between two adjacent second clamping plates 320.

[0038] Exemplarily, the shape of the vertical section of the first main side plate 110 can be rectangular, trapezoidal, other polygonal or irregular shape. Exemplarily, the shape of the vertical section of the second main side plate 210 can be rectangular, trapezoidal, other polygonal or irregular shape. Exemplarily, the shape of the vertical section of the third main side plate 310 can be rectangular, trapezoidal, other polygonal or irregular shape.

[0039] Exemplarily, the first clamping plate 120 is in an integral structure with the first main side plate 110. Exemplarily, the first clamping plate 120 is detachably connected to the side of the first main side plate 110 close to the accommodation space 1001.

[0040] Exemplarily, the first clamping plate 120 is in an integral structure with the second main side plate 210. Exemplarily, the first clamping plate 120 is detachably connected to the side of the second main side plate 210 close to the accommodation space 1001.

[0041] Exemplarily, the second clamping plate 320 is in an integral structure with the third main side plate 310. Exemplarily, the second clamping plate 320 is detachably connected to the side of the third main side plate 310 close to the accommodation space 1001.

[0042] Exemplarily, the first main side plate 110, the second main side plate 210 and the third main side plate 310 are in an integral structure. Exemplarily, the third main side plate 310 is detachably connected to the first main side plate 110 and the second main side plate 210 respectively.

[0043] Exemplarily, the first clamping plate 120 of the first side plate 100, the first clamping plate 120 of the second side plate 200 and the second clamping plate 320 of the third side plate 300 are arranged in pairs on the same horizontal plane.

[0044] In some embodiments, as shown in Figures 1 to 7 The shape of the cross section of the first clamping plate 120 includes: a rectangle or a triangle. The shape of the cross section of the second clamping plate 320 includes: a rectangle or a triangle. The lower side wall 1021 of the first clamping groove is configured to carry the sheet material 2, and the lower side wall 3010 of the second clamping groove is configured to carry the sheet material 2. In the case where the shape of the cross section of the first clamping plate 120 and the shape of the cross section of the second clamping plate 320 are both triangles, the included angle between two adjacent first clamping plates 120 is an acute angle, and the included angle between two adjacent second clamping plates 320 is an acute angle.

[0045] In some embodiments, the first card slot 102 and the second card slot 301 located at the same horizontal plane are configured to carry at least one sheet material 2. In the case where the cross section of the first card plate 120 and the second card plate 320 is rectangular, the distance between the first side edge 2001 or the second side edge 2002 and the bottom 1022 of the first card slot is in the range of 0.1mm to 3mm.

[0046] In some embodiments, the distance between the upper surface 2005 of the uppermost sheet material and the upper side wall 1023 of the first card slot is in the range of 0.1mm to 4mm.

[0047] By reasonably setting the distance between the side edge of the sheet material 2 and the bottom 1022 of the first card slot, and the distance between the upper surface 2005 of the uppermost sheet material and the upper side wall 1023 of the first card slot, the process gas entering the first card slot 102 and the second card slot 301 can be reduced as much as possible, thereby reducing the winding phenomenon of the side edge of the sheet material 2 as much as possible, and facilitating the taking and placing of the sheet material 2. In addition, it can also avoid the damage of the sheet material 2 caused by friction between the sheet material 2 and the first card slot 102 during the process of taking and placing the sheet material 2.

[0048] In some embodiments, in the case where the cross section of the first card plate 120 and the second card plate 320 is triangular, the size of the opening of the first card slot 102 or the opening of the second card slot 301 in the vertical direction is in the range of 0.5mm to 3.5mm.

[0049] In some embodiments, the size of the first card slot 102 or the second card slot 301 in the horizontal direction is less than or equal to 5mm.

[0050] The upper side wall and the lower side wall of the above-mentioned card slot can clamp the side edge of the sheet material 2 to stably carry the sheet material 2, thereby avoiding the shaking of the sheet material 2 caused by the impact of air flow during the process. In addition, by reasonably setting the size of the opening of the first card slot 102 and the opening of the second card slot 301 in the vertical direction, and the size of the first card slot 102 or the second card slot 301 in the horizontal direction, the sheet material 2 can enter the card slot, while reducing the risk of falling of the sheet material 2; it is also convenient for processing and cleaning of the card slot.

[0051] In some embodiments, as Figure 1 , Figure 8 and Figure 9As shown, the boat structure 10 further comprises a top plate 500 and a bottom plate 600. The top plate 500 is connected to the first side plate 100, the second side plate 200 and the third side plate 300. An end of the top plate 500 close to the side opening 101 has a through hole 501 penetrating the top plate 500 in the vertical direction. The bottom plate 600 is arranged opposite to the top plate 500 and is connected to the first side plate 100, the second side plate 200 and the third side plate 300. An end of the bottom plate 600 close to the side opening 101 has a receiving groove 601 arranged opposite to the through hole 501. The bottom end 401 of the cover plate can pass through the through hole 501 and be placed in the receiving groove 601, and the top end 402 of the cover plate is located in the through hole 501.

[0052] The mounting mode of the cover plate 400 is simple and reliable.

[0053] Exemplarily, the top plate 500 is in an integral structure with the first side plate 100, the second side plate 200 and the third side plate 300. Exemplarily, the top plate 500 is detachably connected to the first side plate 100, the second side plate 200 and the third side plate 300, respectively.

[0054] Exemplarily, the shape of the horizontal section of the top plate 500 can be rectangular, parallelogram, trapezoidal, other polygonal or irregular shape. Exemplarily, the shape of the horizontal section of the bottom plate 600 can be rectangular, parallelogram, trapezoidal, other polygonal or irregular shape.

[0055] In some embodiments, as Figures 1 to 7 As shown, two first clamping grooves 102 and one second clamping groove 301 located in the same horizontal plane can carry two pieces of sheet-shaped material 2.

[0056] Through the above arrangement, the film coating efficiency of the film coating device on the sheet-shaped material 2 can be improved.

[0057] In addition, in the case where the cross sections of the first clamping plate 120 and the second clamping plate 320 are both rectangular, by reasonably setting the distance range between the side edge of the sheet-shaped material 2 and the groove bottom 1022 of the first clamping groove, and the distance range between the upper surface 2005 of the uppermost sheet-shaped material and the upper side wall 1023 of the first clamping groove, the size of the gap generated between two pieces of sheet-shaped material 2 due to the impact of air flow during the process can be reduced as much as possible, so as to reduce the process gas entering between the two pieces of sheet-shaped material 2 as much as possible, thereby reducing the around-coating phenomenon of the non-coating surface of the sheet-shaped material 2 as much as possible.

[0058] In addition, in the case that the cross-sectional shape of the first clamping plate 120 and the second clamping plate 320 is triangular, the upper side wall and the lower side wall of the clamping groove can clamp the side edges of the sheet-shaped material 2 to stably carry two pieces of sheet-shaped material 2 and can keep the two pieces of sheet-shaped material 2 in a completely close state during the process to maximize the avoidance of process gas entering between the two pieces of sheet-shaped material 2, thereby minimizing the around-plating phenomenon of the non-plating surface of the sheet-shaped material 2.

[0059] In some embodiments, the first side plate 100, the second side plate 200, and the third side plate 300 each have a plurality of gas inlet channels 1002 that communicate the containing space 1001 with the outside of the boat structure 10, and process gas can enter the containing space 1001 through the gas inlet channels 1002.

[0060] For example, the gas inlet channel 1002 extends from the first main side plate 110 of the first side plate 100 to the first clamping plate 120 to communicate with the containing space 1001. The gas inlet channel 1002 extends from the second main side plate 210 of the second side plate 200 to the first clamping plate 120 to communicate with the containing space 1001. The gas inlet channel 1002 extends from the third main side plate 310 of the third side plate 300 to the second clamping plate 320 to communicate with the containing space 1001. Process gas flows into each gas inlet channel 1002 from the outside of the boat structure 10, and flows into the containing space 1001 above or below the sheet-shaped material 2 carried by each first clamping groove 102 and each second clamping groove 301, and flows to the sheet-shaped material 2, further improving the uniformity of the distribution of process gas in the containing space 1001.

[0061] For example, as shown in Figure 8 and Figure 9 , the gas inlet channels 1002 of the first side plate 100 and the second side plate 200 extend along the first direction X1.

[0062] For example, the gas inlet channels 1002 of the third side plate 300 extend along the second direction X2.

[0063] For example, the plurality of gas inlet channels 1002 of the first side plate 100 and the second side plate 200 are arranged in the first direction, and the plurality of gas inlet channels 1002 of the third side plate 300 are arranged in the second direction X2.

[0064] In some embodiments, as shown in Figure 8 and Figure 9 , the cover plate 400 has a plurality of gas inlets 4001 arranged in the vertical direction, and process gas can enter the containing space 1001 through the gas inlets 4001, thereby further improving the uniformity of the distribution of process gas in the containing space 1001.

[0065] Exemplarily, the air inlet 4001 extends along the second direction X2.

[0066] In some embodiments, the boat structure 10 further comprises at least two boat ears 700, which are respectively arranged on the first main side plate 110 and the second main side plate 210.

[0067] Exemplarily, as shown in Figure 1 , Figure 4 and Figure 9 , the boat structure 10 comprises two boat ears 700, which are symmetrically arranged on the first main side plate 110 and the second main side plate 210.

[0068] Figure 8 Fig. 1 shows a schematic diagram of a carrying device according to an embodiment of the present disclosure. As shown in Fig. 1, the carrying device 1 comprises the boat structure 10 and the cover plate taking and placing structure 20 mentioned in the above embodiments, and the boat structure 10 is configured to carry the sheet material 2. The cover plate taking and placing structure 20 is configured to grab the cover plate 400 of the boat structure 10, place the cover plate 400 on the side opening 101 of the boat structure 10 to close the side opening 101, or take the cover plate 400 away from the side opening 101 to open the side opening 101. Figure 8 Exemplarily, the cover plate taking and placing structure 20 can comprise a driving assembly and a grabbing assembly, and the grabbing assembly is connected with the driving assembly so that the driving assembly drives the grabbing assembly to move. The grabbing assembly is configured to grab the cover plate 400. Exemplarily, the driving assembly can be a linear module, a mechanical arm, etc. Exemplarily, the grabbing assembly can be a clamping jaw, a mechanical hand, etc.

[0069] In the embodiments of the present disclosure, if not specifically limited, the form of connection can be detachable connection through bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, it can be connected in a non-detachable manner through welding, bonding, etc.

[0070] In the description, “an embodiment”, “one embodiment”, etc. means that the described embodiment can include a specific feature, structure or property, but not necessarily every embodiment includes the specific feature, structure or property. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or property is described in combination with an embodiment, it is within the knowledge of those skilled in the art to realize such feature, structure or property in combination with other embodiments which are explicitly or implicitly described.

[0071]

[0072] ​It should be understood that "on," "above," and "on top of" in the disclosure should be interpreted in the broadest context possible so that "on" means not only "directly on" but also includes the meaning of "on" with intervening features or layers therebetween, and "above" or "on top of" includes not only the meaning of "above" or "on top of" but also the meaning of "above" or "on top of" with no intervening features or layers therebetween (i.e., directly on).

[0073] In addition, spatially relative terms, such as "beneath", "below", "lower", "above", "upper" and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. The devices can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0074] It should be noted that, in the present document, the terms "comprising", "comprises" or any other variation thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without more limitations, an element defined by the statement "comprising a" does not exclude the existence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0075] The above description is merely that of the preferred embodiments of the present disclosure and is not intended to limit the present disclosure. Any modification, equivalent replacement and the like within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A boat structure, characterized by, The boat structure is configured to carry sheet materials, and the boat structure comprises: a first side plate vertically arranged; a second side plate oppositely arranged relative to the first side plate; a third side plate vertically arranged and connected to the first side plate and the second side plate to enclose a containing space with a side opening, the side opening being oppositely arranged relative to the third side plate, and the sheet materials being in and out of the containing space through the side opening; a cover plate detachably connected to the first side plate and the second side plate respectively and configured to close or open the side opening; wherein one side of the first side plate close to the containing space and one side of the second side plate close to the containing space are both provided with at least one first clamping groove facing the containing space, the first clamping groove extending along a first direction and configured to accommodate a first side edge or a second side edge of at least one sheet of the sheet materials, and one side of the third side plate close to the containing space is provided with at least one second clamping groove facing the containing space, the second clamping groove extending along a second direction and configured to accommodate a third side edge of at least one sheet of the sheet materials, wherein the cover plate can be in contact with a fourth side edge of at least one sheet of the sheet materials when the cover plate closes the side opening, and the first direction intersects with the vertical direction, and the second direction intersects with the vertical direction and the first direction respectively.

2. The boat structure according to claim 1, wherein the first side plate comprises: a first main side plate vertically arranged; at least two first clamping plates vertically and spaced apart and connected to one side of the first main side plate close to the containing space, the first clamping plates being horizontally arranged and extending along the first direction, and the first clamping groove being formed between adjacent two first clamping plates; the second side plate comprises: a second main side plate oppositely arranged relative to the first main side plate; at least two first clamping plates vertically and spaced apart and connected to one side of the second main side plate close to the containing space; the third side plate comprises: a third main side plate vertically arranged and connected to the first main side plate and the second main side plate; at least two second clamping plates vertically and spaced apart and connected to one side of the third main side plate close to the containing space, the second clamping plates being horizontally arranged and extending along the second direction, and the second clamping groove being formed between adjacent two second clamping plates.

3. The boat structure according to claim 2, wherein a shape of a cross section of the first clamping plate comprises a rectangle or a triangle; and / or a shape of a cross section of the second clamping plate comprises a rectangle or a triangle; wherein a lower side wall of the first clamping groove is configured to carry the sheet materials, and a lower side wall of the second clamping groove is configured to carry the sheet materials wherein, when the shape of the cross section of the first clamping plate and the shape of the cross section of the second clamping plate are both triangles, an included angle between adjacent two first clamping plates is an acute angle, and an included angle between adjacent two second clamping plates is an acute angle.

4. The boat structure of claim 3, wherein The first clamping groove and the second clamping groove located in the same horizontal plane are configured to carry at least one sheet of the sheet materials. In the case that the cross-sectional shape of the first and second clamping plates is rectangular, the distance between the first or second side edge and the bottom of the first clamping slot is in the range of 0.1mm to 3mm; and / or the distance between the upper surface of the uppermost sheet material and the upper side wall of the first clamping slot is in the range of 0.1mm to 4mm; In the case that the cross-sectional shape of the first and second clamping plates is triangular, the size of the opening of the first or second clamping slot in the vertical direction is in the range of 0.5mm to 3.5mm; and / or the size of the first or second clamping slot in the horizontal direction is less than or equal to 5mm.

5. The boat structure according to any one of claims 1 to 4, characterized in that, Further comprising: a top plate connecting the first, second and third side plates, one end of the top plate near the side opening having a through hole penetrating through the top plate in the vertical direction; a bottom plate arranged opposite to the top plate and connecting the first, second and third side plates, one end of the bottom plate near the side opening having a receiving slot arranged opposite to the through hole; wherein the bottom end of the cover plate can pass through the through hole and be placed in the receiving slot, and the top end of the cover plate is located in the through hole.

6. The boat structure according to any one of claims 2 to 4, characterized in that, Two first clamping slots and one second clamping slot located in the same horizontal plane can carry two sheet materials.

7. The boat structure of claim 6, wherein The first, second and third side plates each have a plurality of gas inlet channels, which communicate the receiving space with the outside of the boat structure, and the process gas can enter the receiving space through the gas inlet channels.

8. The boat structure of claim 7, wherein The cover plate has a plurality of gas inlets, which are arranged in the vertical direction, and the process gas can enter the receiving space through the gas inlets.

9. The boat structure of claim 8, wherein, Further comprising: at least two boat ears arranged on the first and second main side plates, respectively.

10. A handling device, characterized in that comprising: the boat structure according to any one of claims 1 to 9, configured to carry sheet materials; a cover plate taking and placing structure configured to grab the cover plate of the boat structure, place the cover plate in the side opening of the boat structure to close the side opening, or take the cover plate away from the side opening to open the side opening.

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