Gas delivery pipeline and semiconductor manufacturing equipment

Abstract

The utility model provides a gas delivery pipeline and semiconductor manufacturing equipment. The gas delivery pipeline comprises an outer pipe and an inner pipe, the outer pipe is sleeved outside the inner pipe; the inner pipe is provided with a corrugated pipe section, a first straight pipe section and a second straight pipe section, the two ends of the corrugated pipe section are connected with the first straight pipe section and the second straight pipe section respectively, and the first straight pipe section and the second straight pipe section are used for being detachably connected with the quick-release connectors respectively. At least the corrugated pipe section and the outer pipe are made of PFA materials or PTFE materials. According to the configuration, the corrugated pipe section and the outer pipe are at least made of engineering plastics such as PFA or PTFE instead of original stainless steel, so that the content of residues on the inner wall of the corrugated pipe section is reduced, and the situation that the inner wall of a pipeline is corroded due to the fact that the residues make contact with external steam to form strong acid substances in the process of maintaining the process chamber is avoided; meanwhile, by arranging the two layers of pipelines, the leakage-proof performance of the gas conveying pipeline is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor manufacturing, especially a gas conveying pipeline and semiconductor manufacturing equipment. BACKGROUND

[0002] Taking a dry etching equipment as an example, due to the requirement of process cavity maintenance, a gas pipeline assembly capable of quick disassembly needs to be designed to enable the process cavity to be smoothly disassembled and ensure the smooth progress of equipment cleaning.

[0003] The existing quick-disassembly gas pipeline is mainly made of stainless steel. Since the quick-disassembly gas pipeline has a section of bellows, there are usually residues in the uneven area inside the bellows and the connection area between the pipeline and the joint in the connection area between the bellows and the straight pipe. During the maintenance of the process cavity, the quick-disassembly pipeline may come into contact with water vapor in the air when it is disassembled, thereby forming acidic substances and corroding the inner wall of the gas pipeline, affecting the service life and air tightness requirement of the gas pipeline.

[0004] Therefore, how to reduce the residues on the inner wall of the pipeline and avoid corrosion of the inner wall of the pipeline has become a technical problem to be solved by those skilled in the art. SUMMARY

[0005] The utility model aims at providing a gas conveying pipeline and semiconductor manufacturing equipment to solve the problem of residues on the inner wall of the existing gas pipeline and corrosion of the inner wall of the pipeline after reaction with water vapor.

[0006] To achieve the above-mentioned purpose, the utility model provides a gas conveying pipeline, which comprises an outer pipe and an inner pipe.

[0007] The outer pipe is sleeved outside the inner pipe.

[0008] The inner pipe has a section of bellows, a first straight pipe section and a second straight pipe section, both ends of the section of bellows are connected with the first straight pipe section and the second straight pipe section respectively, and the first straight pipe section and the second straight pipe section are used for detachable connection with quick-disassembly joints.

[0009] At least the material of the section of bellows and the outer pipe comprises PFA material or PTFE material.

[0010] Optionally, the material of the first straight pipe section and the second straight pipe section comprises SUS316L EP type stainless steel, PFA material or PTFE material.

[0011] Optionally, the first straight pipe section and the second straight pipe section are made of SUS316L EP stainless steel, and the gas conveying pipeline further comprises a protective sleeve, which is sleeved outside the corrugated pipe section and between the corrugated pipe section and the outer pipe.

[0012] Optionally, the protective sleeve is welded to the outer walls of the first straight pipe section and the second straight pipe section.

[0013] Optionally, the wall thickness of the corrugated pipe section is greater than the wall thickness of the first straight pipe section and the second straight pipe section.

[0014] Optionally, the first straight pipe section and the second straight pipe section are made of PFA material or PTFE material, and the gas conveying pipeline further comprises a clamping sleeve assembly, and the first straight pipe section and the second straight pipe section are connected to the quick release joint through the clamping sleeve assembly.

[0015] Optionally, the clamping sleeve assembly comprises a metal insert, a joint body, a fastener, a first clamping ring and a second clamping ring.

[0016] The joint body is provided with a threaded section, the fastener is connected to the joint body through the threaded section, and the first clamping ring and the second clamping ring are arranged inside the fastener and used for extruding the first straight pipe section and the second straight pipe section when the fastener is connected to the joint body.

[0017] The metal insert is located at the connection position of the first straight pipe section and the second straight pipe section and the joint body, and the metal insert is coaxially arranged with the first straight pipe section and the second straight pipe section when the metal insert is inserted into the first straight pipe section and the second straight pipe section, so as to enhance the rigidity of the first straight pipe section and the second straight pipe section.

[0018] Optionally, a metal ring is arranged at any protrusion of the corrugated pipe section, for enhancing the rigidity of the corrugated pipe section.

[0019] Optionally, the connection mode of the corrugated pipe section and the first straight pipe section and the second straight pipe section comprises welding connection, threaded fastening connection or gluing.

[0020] In order to achieve the above purpose, the utility model also provides a semiconductor manufacturing equipment, which comprises a process chamber and a gas conveying pipeline as described above.

[0021] One end of the gas conveying pipeline is connected to the process chamber through a quick release joint, and the other end is connected to a supply device through the quick release joint, so as to convey process gas to the process chamber.

[0022] The gas delivery pipeline is detachably connected with the quick release joint, so as to be disconnected from the quick release joint when the process chamber is cleaned.

[0023] Compared with the existing gas pipeline, the gas delivery pipeline and the semiconductor manufacturing equipment provided by the application have the following advantages:

[0024] The gas delivery pipeline provided by the application reduces the content of residues on the inner wall of the corrugated pipe section by replacing the material of the corrugated pipe section and the outer pipe from the original stainless steel to PFA or PTFE engineering plastics, thereby avoiding the corrosion of the inner wall of the pipeline by strong acid substances formed by contact with external water vapor during maintenance of the process chamber. At the same time, the application improves the leakproof performance of the gas delivery pipeline by providing two layers of pipelines.

[0025] Further, the application connects the first straight pipe section, the second straight pipe section and the quick release joint by using the sleeve assembly, and then improves the air tightness of the gas delivery pipeline by extruding the pipe wall through the first clasp ring and the second clasp ring.

[0026] Further, the application thickens the wall thickness of the corrugated pipe section or sets a metal ring at any protrusion of the corrugated pipe section to increase the rigidity of the corrugated pipe section, thereby improving the service life and safety performance of the gas delivery pipeline. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 is a schematic view of the existing gas pipeline;

[0028] Figure 2 is a schematic view of the first gas delivery pipeline provided by the embodiment of the application;

[0029] Figure 3 is a schematic view of the second gas delivery pipeline provided by the embodiment of the application;

[0030] Figure 4 is a sectional view of the existing gas pipeline;

[0031] Figure 5 is a sectional view of the first inner pipe provided by the embodiment of the application;

[0032] Figure 6 is a sectional view of the second inner pipe provided by the embodiment of the application;

[0033] Figure 7 is a sectional view of the third inner pipe provided by the embodiment of the application;

[0034] Figure 8 is a structural schematic view of the sleeve assembly provided by the embodiment of the application;

[0035] Figure 9 A cross-sectional view of the sleeve assembly is provided for the embodiments of the present application.

[0036] Wherein, the explanation of each reference sign is as follows:

[0037] 1 - corrugated pipe; 2 - straight pipe;

[0038] 10 - inner pipe; 100 - corrugated pipe section; 110 - first straight pipe section; 120 - second straight pipe section;

[0039] 20 - outer pipe; 30 - protective sleeve; 40 - quick release joint;

[0040] 50 - sleeve assembly; 500 - joint body; 510 - metal insert; 520 - fastener; 530 - first clasp; 540 - second clasp; 550 - threaded section;

[0041] 60 - metal ring. DETAILED DESCRIPTION

[0042] In order to make the purpose, advantages and characteristics of the present application more clear, the present application will be further described in detail below in combination with the drawings and specific embodiments. It should be noted that the drawings are all very simplified and not drawn in proportion, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present application. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing needs to be different, and sometimes different proportions are used.

[0043] As used in this specification, the singular forms "a," "an" and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "and / or" means "and", "or" or both. The term "at least two" generally means "two or more" unless the context clearly dictates otherwise. The terms "first," "second," "third," etc. are used only to describe one member of a group and do not, unless the context clearly dictates otherwise, indicate or imply relative importance or a number of such members. Thus, features with "first," "second" or "third" limitations can include one or at least two of such features, either expressly or implicitly. The terms "one end" and "the other end," as well as "proximal" and "distal," generally refer to two parts that are opposite to each other, which not only includes the end points, but also the terms "mounting," "connecting," "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral; it can be direct connection, or indirect connection through intermediate medium; it can be internal connection of two elements or interaction relationship between two elements. In addition, as used in this specification, a component disposed on another component generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two components, and the two components can be directly or indirectly connected, coupled, cooperated or transmitted through an intermediate component, and cannot be understood as indicating or implying the spatial positional relationship between the two components, i.e. one component can be in any position inside, outside, above, below or one side of another component, unless the context clearly indicates otherwise. The terms "up", "down", "top", "bottom" are generally relative positional relationships arranged according to the direction of gravity; the terms "vertical direction" and "vertical direction" generally refer to the direction along the gravity, which is generally perpendicular to the ground, and the terms "horizontal direction" and "horizontal plane direction" generally refer to the direction parallel to the ground; the specific meanings of the above terms in this specification can be understood according to the specific circumstances by those skilled in the art.

[0044] The utility model discloses a gas conveying pipeline and semiconductor manufacturing equipment, to solve the problem that the inner wall of the existing gas pipeline has residual substances, and the inner wall of the pipeline is corroded after reacting with water vapor.

[0045] Please refer to Figure 1The existing gas pipeline includes a corrugated pipe 1 and two straight pipes 2, and the corrugated pipe 1 and the straight pipes 2 are made of SUS316L EP type stainless steel. In use, the corrugated pipe 1 and the straight pipes 2 are always isolated from the atmosphere. However, during maintenance of the process chamber, the corrugated pipe 1 and the straight pipes 2 need to be disassembled for a long time, which causes the gas pipeline to be exposed to the atmosphere for a long time and to contact water vapor in the environment. The gas pipeline may transport some special gases (such as chlorine and hydrogen bromide). When the above-mentioned gases flow through the corrugated pipe 1 and the connecting part of the corrugated pipe 1 and the straight pipe 2, residues may be formed on the inner wall of the gas pipeline. After the residues contact the water vapor in the environment, strong acids such as hydrochloric acid or hydrobromic acid are formed, which corrodes the stainless steel, forms iron chloride or iron bromide deposits, and reduces the service life and safety performance of the gas pipeline. Based on this, the embodiment provides a gas delivery pipeline and a semiconductor manufacturing equipment. By replacing the material of the corrugated pipe section from the original stainless steel to a smooth-surfaced PFA (Perfluoroalkoxy, tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer) or PTFE (Polytetrafluoroethylene, polytetrafluoroethylene), the residues on the inner wall of the pipeline are reduced, and the reaction with water vapor to produce strong acid to corrode the inner wall of the pipeline is avoided.

[0046] Please refer to Figures 2-3The utility model provides a kind of gas conveying pipeline, comprising: outer tube 20 and inner tube 10;Outer tube 20 is sleeved in the outside of inner tube 10;Inner tube 10 has bellows section 100, first straight pipe section 110 and second straight pipe section 120, the both ends of bellows section 100 are connected with first straight pipe section 110 and second straight pipe section 120 respectively, and first straight pipe section 110 and second straight pipe section 120 are used for being detachably connected with quick release joint 40 respectively;Wherein, at least the material of bellows section 100 and outer tube 20 includes: PFA material or PTFE material.The skilled in the art can understand that engineering plastics (PFA material or PTFE material in the embodiment) have good corrosion resistance and high temperature resistance, and compared with stainless steel material, surface is more smooth, and when process gas flows through pipeline made of engineering plastics, its inner wall can more reduce the residue of process gas.It needs to be explained that in the embodiment, outer tube 20 is sleeved in the outside of inner tube 10, and the material of outer tube 20 is smooth-surface engineering plastics, for example, PFA material or PTFE material, which is sleeved in the outside of inner tube 10, when leakage occurs at the connecting part of bellows section 100 and first straight pipe section 110 or second straight pipe section 120, process gas can still be prevented from leaking into the environment, improve the sealing performance of gas conveying pipeline, also avoid the pollution that process gas may cause when leaking into the environment;And because the stiffness of engineering plastics is weaker than that of original stainless steel, the bending performance of gas conveying pipeline can be improved.In other embodiments, the material of at least bellows section 100 and outer tube 20 can also be PP (Polypropylene), PE (Polyethylene), PVC (Polyvinyl Chloride), PEEK (Peek Materials), PVDF (Polyvinylidene Fluoride), Vespel and other engineering plastic materials.

[0047] Meanwhile, since bellows section 100 mainly bears the role of bending in inner tube 10, first straight pipe section 110 and second straight pipe section 120 are smoother than bellows section 100, so the residue amount of process gas in first straight pipe section 110 and second straight pipe section 120 is lower than that in bellows section 100, in Figure 2 and Figure 3In the shown example, the material of the bellows section 100 located at least in the inner tube 10 is changed from original stainless steel to smooth-surface PFA material or PTFE material. The smooth-walled bellows section 100 can reduce the residue of process gas, and thus the residue of process gas on the entire inner wall of the inner tube 10 will be greatly reduced. In this way, when the process chamber needs to be maintained, the residue of acidic substances generated by the reaction of the gas delivery pipeline with the moisture in the environment after the gas delivery pipeline is disassembled will be greatly reduced, thereby avoiding corrosion of the gas delivery pipeline, prolonging the service life of the gas delivery pipeline, and reducing the production and maintenance cost of the semiconductor machine.

[0048] Please continue to refer to Figures 2-3 The material of the first straight tube section 110 and the second straight tube section 120 includes SUS316L EP type stainless steel, PFA material or PTFE material. Figure 2 In the shown example, the bellows section 100 is replaced with smooth-surface engineering plastic material, and the first straight tube section 110 and the second straight tube section 120 continue to maintain the existing design and are made of SUS316L EP type stainless steel. The above scheme needs to focus on the sealing performance of the connection part of the bellows section 100, the first straight tube section 110 and the second straight tube section 120, and the stiffness difference between the engineering plastic material and the stainless steel material when connected. Figure 3 In the shown example, the entire inner tube 10 is replaced with engineering plastic material. Since the materials of the bellows section 100, the first straight tube section 110 and the second straight tube section 120 are the same, the above scheme needs to focus on the air tightness of the connection part of the first straight tube section 110, the second straight tube section 120 and the quick-release connector 40 when connected.

[0049] Please refer to Figure 2 The material of the first straight tube section 110 and the second straight tube section 120 is SUS316L EP type stainless steel, and the gas delivery pipeline further includes a protective sleeve 30. The protective sleeve 30 is sleeved outside the bellows section 100 and located between the bellows section 100 and the outer tube 20. It should be noted that Figure 2 In the shown example, the material of the bellows section 100 is different from that of the first straight tube section 110 and the second straight tube section 120, and has a certain stiffness difference. Therefore, a protective sleeve 30 made of metal material needs to be separately added to the bellows section 100 to protect the bellows section 100 from breaking when subjected to external impact. The protective sleeve 30 can be a metal mesh formed by metal wires or a sleeve made of metal. Of course, in some other embodiments, the material of the protective sleeve 30 can also be other materials with higher stiffness than engineering plastic, and the present embodiment does not limit this.

[0050] Further, the protective sleeve 30 is welded to the outer wall of the first straight tube section 110 and the second straight tube section 120. Please continue to refer toFigure 2 The length of the protective sleeve 30 along the axial direction of the gas conveying pipeline is slightly longer than the length of the corrugated pipe section 100 along the axial direction of the gas conveying pipeline. Since the protective sleeve 30, the first straight pipe section 110 and the second straight pipe section 120 are all made of metal, the two ends of the protective sleeve 30 can be directly welded to the outer walls of the first straight pipe section 110 and the second straight pipe section 120. In other embodiments, the connection mode of the protective sleeve 30 with the first straight pipe section 110 and the second straight pipe section 120 can also be modified to be glued, clamped, or the like, according to the material, which is not limited in the embodiment.

[0051] Please refer to Figure 2 , Figures 4-5 As an optional embodiment, the wall thickness of the corrugated pipe section 100 is greater than the wall thickness of the first straight pipe section 110 and the second straight pipe section 120. In Figure 4 the prior art, since the corrugated pipe and the straight pipe are both made of stainless steel, the wall thicknesses of the corrugated pipe and the straight pipe are both T, while in Figure 2 the exemplary embodiment, since the material of the corrugated pipe section 100 is engineering plastic, the rigidity of the corrugated pipe section 100 is lower than that of the first straight pipe section 110 and the second straight pipe section 120. In order to prevent the gas conveying pipeline from being damaged at the corrugated pipe section 100 during use, the wall thickness of the corrugated pipe section 100 can be increased to 1.5T-2T (as shown in Figure 5 ), so as to ensure the sealing property of the gas conveying pipeline.

[0052] Please refer to Figure 3 and Figures 8-9 The materials of the first straight pipe section 110 and the second straight pipe section 120 are PFA or PTFE, and the gas conveying pipeline further comprises a sleeve assembly 50, and the first straight pipe section 110 and the second straight pipe section 120 are connected to the quick release connector 40 through the sleeve assembly 50. In Figure 3 the exemplary embodiment, the material of the entire inner pipe 10 is smooth engineering plastic, so the inner wall of the entire gas conveying pipeline is smoother than that of the prior art, and is less likely to form residues. At the same time, since the rigidity of the engineering plastic is lower than that of the quick release connector 40, in order to ensure the airtightness requirement of the connection part of the first straight pipe section 110 and the second straight pipe section 120 with the quick release connector 40, the sleeve assembly 50 shown in Figures 8-9 is used to realize the connection of the first straight pipe section 110 and the second straight pipe section 120 with the quick release connector 40, respectively.

[0053] Further, the sleeve assembly 50 comprises a metal insert 510, a joint body 500, a fastener 520, a first clasp 530 and a second clasp 540; the joint body 500 is provided with a threaded section 550, the fastener 520 is connected with the joint body 500 through the threaded section 550, the first clasp 530 and the second clasp 540 are arranged inside the fastener 520, and are used to extrude the first straight pipe section 110 and the second straight pipe section 120 when the fastener 520 is connected with the joint body 500; the metal insert 510 is located at the connecting position of the first straight pipe section 110 and the second straight pipe section 120 and the joint body 500, and is coaxially arranged with the first straight pipe section 110 and the second straight pipe section 120 when the metal insert 510 is inserted into the inside of the first straight pipe section 110 and the second straight pipe section 120, so as to enhance the rigidity of the first straight pipe section 110 and the second straight pipe section 120. It should be noted that, in the prior art, as shown in Figure 1 , since the gas conveying pipeline and the quick release joint 40 are both made of stainless steel, the connection between the straight pipe and the quick release joint 40 is usually achieved by welding or fusion. When the exemplary embodiment shown in Figure 3 is used, the material of the gas conveying pipeline is changed to engineering plastic, and in order to ensure the air tightness requirement between the two materials, the sleeve assembly 50 is used to achieve the connection.

[0054] As an optional embodiment, please refer to Figures 8-9 , the first clasp 530 and the second clasp 540 are arranged inside the fastener 520, the fastener 520 is connected with the joint body 500 through the threaded section 550, and a certain pressure is provided to the first clasp 530 and the second clasp 540, so that the first straight pipe section 110 and the second straight pipe section 120 are deformed under the pressure, thereby achieving the sealing effect. It should be noted that, since the rigidity of the inner pipe 10 made of engineering plastic is low, even if the air tightness requirement is met at the beginning due to the pressure of the first clasp 530 and the second clasp 540, once the inner pipe 10 is subjected to external force again, it is likely to deform again, thereby causing the air tightness to fail. At this time, the metal insert 510 needs to be inserted into the connecting position of the first straight pipe section 110, the second straight pipe section 120 and the quick release joint 40, so as to enhance the rigidity of the inner pipe 10 and ensure that the gas conveying pipeline will not deform due to external force during use, thereby preventing leakage.

[0055] Please refer to Figure 3 , Figure 6 and Figure 7 , the metal ring 60 is arranged at any protrusion of the corrugated pipe section 100, and is used to enhance the rigidity of the corrugated pipe section 100. As can be understood by those skilled in the art, due to the difference in rigidity between engineering plastic and stainless steel, certain measures need to be taken to enhance the rigidity of the inner pipe 10 made of engineering plastic. For example Figure 3For example, the inner tube 10 is made of engineering plastic, and the corrugated tube segment 100 can be provided with a metal solid ring at each protrusion as shown in Figure 6 , so as to improve the rigidity of the corrugated tube segment 100, while the wall thickness of the corrugated tube segment 100 can be kept as T. Since the concave part of the corrugated tube segment 100 is a space for avoiding bending of the corrugated tube segment 100, the bending performance of the corrugated tube segment 100 will not be affected even if the metal ring 60 is added at the protrusion, while the wall thickness of the first straight tube segment 110 and the second straight tube segment 120 is increased to 1.5T-2T. Figure 7 In the example shown in Figure 2 , only the corrugated tube segment 100 is replaced by engineering plastic, and the wall thickness of the first straight tube segment 110 and the second straight tube segment 120 can be kept as T since they are still made of stainless steel. The wall thickness of the corrugated tube segment 100 can be increased to 1.5T-2T as shown in Figure 5 , or kept as T as shown in Figure 6 , and a metal ring 60 is added at each protrusion to increase the rigidity, so as to improve the service life and safety performance of the gas conveying pipeline.

[0056] In an optional embodiment, the connection mode of the corrugated tube segment 100 with the first straight tube segment 110 and the second straight tube segment 120 includes welding connection, threaded fastening connection or gluing. It should be noted that when the materials of the corrugated tube segment 100, the first straight tube segment 110 and the second straight tube segment 120 are different, the connection mode can be selected as threaded fastening connection, and a sealing ring is used for sealing, or gluing is used. When the materials of the corrugated tube segment 100, the first straight tube segment 110 and the second straight tube segment 120 are the same, the connection mode can be selected as welding, gluing or threaded fastening connection, and the present embodiment does not limit the connection mode.

[0057] In another embodiment, the utility model also provides a semiconductor manufacturing equipment, it includes: process chamber (not shown in the figure) and gas delivery pipeline as described above, one end of gas delivery pipeline is connected with process chamber through quick release joint 40, the other end is connected with supply equipment through quick release joint 40 to deliver process gas to process chamber, gas delivery pipeline is detachably connected with quick release joint 40 to disconnect the connection with quick release joint 40 when cleaning process chamber. Thus, by using the above-mentioned gas delivery pipeline, at least the material of the bellows section 100 and the outer tube 20 is replaced from the original stainless steel to the smooth-surfaced PFA or PTFE engineering plastic, the content of residues on the inner wall of the bellows section 100 is reduced, thereby avoiding the corrosion of the inner wall of the pipeline by strong acid substances formed by contacting with external moisture during the maintenance of the process chamber, and the service life of the gas delivery pipeline is improved, and the maintenance cost of the semiconductor manufacturing equipment is reduced.

[0058] In summary, in the gas delivery pipeline and the semiconductor manufacturing equipment provided in the embodiments of the utility model, the gas delivery pipeline comprises: an outer tube and an inner tube; the outer tube is sleeved outside the inner tube; the inner tube has a bellows section, a first straight tube section and a second straight tube section, both ends of the bellows section are connected with the first straight tube section and the second straight tube section respectively, and the first straight tube section and the second straight tube section are used for being detachably connected with the quick release joint respectively; wherein, at least the material of the bellows section and the outer tube comprises: PFA material or PTFE material.

[0059] Thus, by replacing at least the material of the bellows section and the outer tube from the original stainless steel to PFA or PTFE engineering plastic, the content of residues on the inner wall of the bellows section is reduced, thereby avoiding the corrosion of the inner wall of the pipeline by strong acid substances formed by contacting with external moisture during the maintenance of the process chamber; at the same time, the present application improves the leakproof performance of the gas delivery pipeline by arranging two layers of pipelines.

[0060] Further, by using the clamping sleeve assembly to connect the first straight tube section, the second straight tube section and the quick release joint, and then by the extrusion of the first clamping ring and the second clamping ring on the pipe wall, the air tightness of the gas delivery pipeline is improved.

[0061] Further, by thickening the wall thickness of the bellows section or arranging a metal ring at any protrusion of the bellows section to increase the rigidity of the bellows section, the service life and safety performance of the gas delivery pipeline are improved.

[0062] The above description is only a description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way, and any modification or modification made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A gas delivery conduit, characterized by, The gas delivery pipeline comprises: an outer tube and an inner tube; the outer tube is sleeved outside the inner tube; the inner tube has a bellows section, a first straight tube section and a second straight tube section, two ends of the bellows section are connected with the first straight tube section and the second straight tube section respectively, and the first straight tube section and the second straight tube section are respectively used for detachably connecting with quick-release joints; at least the material of the bellows section and the outer tube comprises PFA material or PTFE material.

2. The gas delivery conduit of claim 1, wherein, The material of the first straight tube section and the second straight tube section comprises SUS316L EP type stainless steel, PFA material or PTFE material.

3. The gas delivery conduit of claim 2, wherein, The material of the first straight tube section and the second straight tube section is SUS316L EP type stainless steel, and the gas delivery pipeline further comprises a protective sleeve, the protective sleeve is sleeved outside the bellows section and is located between the bellows section and the outer tube.

4. The gas delivery conduit of claim 3, wherein, The protective sleeve is welded with the outer walls of the first straight tube section and the second straight tube section.

5. The gas delivery conduit of claim 3, wherein, The wall thickness of the bellows section is greater than the wall thickness of the first straight tube section and the second straight tube section.

6. The gas delivery conduit of claim 2, wherein, The material of the first straight tube section and the second straight tube section is PFA material or PTFE material, and the gas delivery pipeline further comprises a clamping sleeve assembly, the first straight tube section and the second straight tube section are connected with the quick-release joints through the clamping sleeve assembly respectively.

7. The gas delivery conduit of claim 6, wherein, The clamping sleeve assembly comprises a metal insert, a joint body, a fastener, a first clamping ring and a second clamping ring; the joint body is provided with a threaded section, the fastener is connected with the joint body through the threaded section, the first clamping ring and the second clamping ring are arranged inside the fastener, and are used for extruding the first straight tube section and the second straight tube section when the fastener is connected with the joint body; the metal insert is located at the connecting position of the first straight tube section and the second straight tube section and the joint body, and is coaxially arranged with the first straight tube section and the second straight tube section when the metal insert is inserted into the first straight tube section and the second straight tube section, so as to enhance the rigidity of the first straight tube section and the second straight tube section.

8. The gas delivery conduit of claim 3 or 6, wherein, Any protrusion of the bellows section is provided with a metal ring, which is used for enhancing the rigidity of the bellows section.

9. The gas delivery conduit of claim 3 or 6, wherein, The connecting mode of the bellows section and the first straight tube section and the second straight tube section comprises welding connection, threaded fastening connection or glue joint.

10. A semiconductor manufacturing apparatus, characterized by comprising: The gas delivery pipeline comprises: a process chamber and the gas delivery pipeline as claimed in any one of claims 1-9; one end of the gas delivery pipeline is connected with the process chamber through a quick-release joint, and the other end is connected with a supply device through the quick-release joint, so as to deliver process gas to the process chamber; the gas delivery pipeline is detachably connected with the quick-release joint, so as to disconnect the connection with the quick-release joint when the process chamber is cleaned.

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