Nitrogen heating device, nitrogen purging system and vacuum pump

Abstract

The utility model provides a nitrogen heating device, a nitrogen purging system and a vacuum pump. The nitrogen heating device comprises a shell and a plurality of heating pieces; a plurality of fixing grooves penetrating through the length direction of the shell are formed in the central area of the shell, and the nitrogen conveying pipeline penetrates through the nitrogen heating device and is fixed to the fixing grooves; the multiple heating pieces are arranged around the nitrogen conveying pipeline in the length direction of the shell in a penetrating mode so as to heat the nitrogen conveying pipeline. The nitrogen heating device can heat nitrogen entering the nitrogen purging device, so that the nitrogen purging device can be applied to process gas environments with different characteristics, and the problem of process gas condensation caused by low nitrogen temperature is solved; the risk of vacuum pump downtime caused by solid particles or powder process substances formed by condensation of the process gas is reduced, and the service life of the vacuum pump is prolonged.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of vacuum pumps, and particularly relates to a nitrogen heating device, a nitrogen purging system and a vacuum pump. BACKGROUND

[0002] The nitrogen purging function of the existing dry vacuum pump mainly functions to purge at a specific position of the pump body, dilute the process gas concentration in the pump body cavity, reduce the formation of process products on the surface of the stator and the rotor, and reduce the corrosion of the corrosive process gas on the stator and the rotor, thereby increasing the service life of the dry vacuum pump.

[0003] The existing nitrogen purging function of the dry vacuum pump has certain defects. In the semiconductor industry, the process gas contains NH4CL components. In order to prevent the NH4CL process gas from condensing into solid particles or powder process products under a certain pressure, in addition to the nitrogen purging function, the surface temperature of the stator and the rotor needs to be controlled to be greater than 160 DEG C at a certain pressure of the vacuum pump cavity, which can prevent the condensation of NH4CL.

[0004] The gas source of the existing nitrogen purging function is mainly transported from the factory side. The temperature of the transported nitrogen gas is room temperature, which can cause the temperature of the nitrogen gas entering the pump body to be too low during the nitrogen purging process. When the nitrogen gas mixes with the NH4CL process gas, condensation occurs due to the low temperature of the nitrogen gas, forming solid particles or powder process products, increasing the risk of downtime, and reducing the service life of the pump body.

[0005] The existing nitrogen purging device has the following problems: 1) the nitrogen purging function has no temperature control function, and the use scene has limitations; 2) the nitrogen purging function is prone to condensation to form solid particles or powder process products under the use condition of low temperature, which increases the risk of downtime and reduces the service life of the pump body.

[0006] In view of the above problems, it is necessary to provide a nitrogen heating device, a nitrogen purging system and a vacuum pump which are reasonable in design and can effectively improve the above problems. INVENTION CONTENTS

[0007] The application aims to at least solve one of the technical problems in the prior art, and provides a nitrogen heating device, a nitrogen purging system and a vacuum pump.

[0008] One aspect of the application provides a nitrogen heating device for a vacuum pump, which is used for heating nitrogen entering a purging position of the vacuum pump, wherein the nitrogen heating device comprises a shell and a plurality of heating pieces.

[0009] A central region of the shell is provided with a plurality of fixing grooves penetrating the length direction thereof, and a nitrogen gas conveying pipeline passes through the nitrogen heating device and is fixed in the fixing grooves.

[0010] A plurality of heating elements are arranged around the nitrogen conveying pipeline along the length direction of the shell to heat the nitrogen in the nitrogen conveying pipeline.

[0011] Optionally, the shell comprises a first shell and a second shell fixedly connected with the first shell.

[0012] The first shell is provided with a plurality of first grooves on the side facing the second shell, and the second shell is provided with a plurality of second grooves corresponding to the first grooves on the side facing the first shell.

[0013] The first grooves and the corresponding second grooves form the fixed grooves.

[0014] Optionally, the surfaces of the first grooves and the second grooves are provided with a heat-conducting layer.

[0015] Optionally, a plurality of first fasteners are further included.

[0016] The edge region of the first shell is provided with a plurality of through holes along the vertical direction thereof, and the edge region of the second shell is provided with a plurality of threaded holes corresponding to the through holes along the vertical direction thereof.

[0017] The first fasteners are inserted through the through holes and screwed into the threaded holes to fix the first shell and the second shell.

[0018] Optionally, the first shell is provided with a plurality of first mounting holes along the length direction thereof, and the second shell is provided with a plurality of second mounting holes along the length direction thereof.

[0019] The first mounting holes and the second mounting holes are each mounted with a corresponding heating element.

[0020] Optionally, a plurality of second fasteners are further included.

[0021] The edge region of each first mounting hole and the edge region of each second mounting hole are each provided with at least one heating element mounting threaded hole for fixing the heating element.

[0022] Optionally, a temperature sensor is further included.

[0023] The temperature sensor is mounted on the shell to measure the heating temperature of the shell, so as to monitor the temperature of the nitrogen flowing through the nitrogen conveying pipeline.

[0024] Optionally, the shell is made of aluminum alloy.

[0025] Another aspect of the present application provides a nitrogen purging system for a vacuum pump, comprising a nitrogen source, a plurality of nitrogen conveying pipelines, a nitrogen heating device, and a nitrogen purging device.

[0026] The inlet of the nitrogen purging device is connected to the nitrogen source, and the outlet of the nitrogen purging device is connected to the inlet of a plurality of nitrogen delivery pipes. The outlet of the plurality of nitrogen delivery pipes is used to connect to the vacuum pump purging position.

[0027] The nitrogen heating device is installed in the nitrogen delivery pipeline and is used to heat the nitrogen entering the vacuum pump purging position; wherein...

[0028] The nitrogen heating device mentioned above is the nitrogen heating device.

[0029] Another aspect of this application provides a vacuum pump employing the nitrogen purging system described above.

[0030] The nitrogen heating device, nitrogen purging system, and vacuum pump disclosed in this embodiment can heat the nitrogen entering the vacuum pump purging position. This heating allows the nitrogen purging device to be applied to process gas environments with different characteristics, avoiding the condensation problem of process gas under certain pressure due to temperature. It can be precisely matched to different scenarios, solving the problem of process gas condensation caused by low nitrogen temperature, reducing the risk of vacuum pump downtime due to the formation of solid particles or powdered process materials from condensed process gas, and improving the service life of vacuum pump. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of a nitrogen heating device according to one embodiment of the present disclosure;

[0032] Figure 2 This is a schematic diagram of the structure of the first housing in one embodiment of the present disclosure;

[0033] Figure 3 This is a schematic diagram of the structure of the second housing in one embodiment of the present disclosure. Detailed Implementation

[0034] To enable those skilled in the art to better understand the technical solutions of the embodiments of this disclosure, the embodiments of this disclosure will be further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0035] like Figure 1 As shown, one aspect of this application provides a nitrogen heating device 100 for a vacuum pump. The nitrogen heating device 100 is used to heat nitrogen entering the vacuum pump purging position. The nitrogen heating device 100 includes a housing 110 and a plurality of heating elements 120.

[0036] The central region of the shell 110 is provided with a plurality of fixing grooves penetrating the length direction thereof, and the nitrogen conveying pipe 200 penetrates the nitrogen heating device 100 and is fixed in the fixing grooves. The outer diameter of the fixing grooves matches the outer diameter of the nitrogen conveying pipe 200.

[0037] Specifically, the plurality of fixing grooves are arranged at equal intervals along the width direction of the shell 110, and the number of the fixing grooves is not specifically limited and can be set according to the number of the nitrogen conveying pipes 200.

[0038] It should be noted that the shell 110 can be made of aluminum alloy, which can well conduct heat. Of course, the shell 110 can also be made of other heat-conducting materials, and the material of the shell 110 is not specifically limited in the embodiment and can be selected according to actual needs.

[0039] The plurality of heating elements 120 are arranged around the nitrogen conveying pipe 200 along the length direction of the shell, and the plurality of heating elements 120 can heat the nitrogen flowing through the nitrogen conveying pipe 200.

[0040] Specifically, in the embodiment, the plurality of heating elements 120 are respectively located above and below the plurality of nitrogen conveying pipes 200. The plurality of heating elements 120 are arranged at equal intervals along the width direction of the shell 110. In the embodiment, the number of the heating elements 120 is not specifically limited and can be selected according to actual heating needs.

[0041] In use, the nitrogen conveying pipe 200 penetrates the nitrogen heating device and is fixed in the fixing grooves of the shell 110, and the plurality of heating elements 120 are arranged around the nitrogen conveying pipe 200 in the shell 110, and the heating elements 120 are turned on to heat the nitrogen flowing through the nitrogen conveying pipe 200, thereby heating the nitrogen entering the nitrogen purging device.

[0042] The nitrogen heating device of the application can heat the nitrogen entering the purging position of the vacuum pump, so that the nitrogen purging device can be applied to different process gas environments with different characteristics, thereby solving the problem of condensation of process gas due to low temperature of the nitrogen, reducing the risk of shutdown of the vacuum pump due to solid particles or powder process caused by condensation of process gas, and prolonging the service life of the vacuum pump.

[0043] It should be noted that in the embodiment, the heating element 120 can be a heating rod, the power of the heating rod is adjustable and is 500W-1200W, and the built-in heating wire of the heating rod can resist temperature >300℃. Of course, the heating element 120 can also adopt other structures, and the embodiment is not specifically limited and can be selected according to actual needs.

[0044] It needs to be further explained that in the embodiment, the length of the shell 110 can be set to 200 mm, of course, the length of the shell 110 is not specifically limited, and can be selected according to actual needs.

[0045] As shown in Figures 1 to 3 The shell 110 includes a first shell 111 and a second shell 112 fixedly connected with the first shell 111. The first shell 111 and the second shell 112 are basically the same in structure.

[0046] As shown in Figure 2 and Figure 3 The first shell 111 is provided with a plurality of first grooves 113 on the side facing the second shell 112, and the second shell 112 is provided with a plurality of second grooves 114 corresponding to the first grooves 113 on the side facing the first shell 111. The first grooves 113 and the corresponding second grooves 114 form a fixed groove.

[0047] In the embodiment, the shell 110 is composed of the first shell 111 and the second shell 112, and the first shell 111 and the second shell 112 are respectively provided with the first grooves 113 and the second grooves 114, which can more conveniently install the shell 110 on the nitrogen conveying pipeline 200.

[0048] Specifically, as shown in Figure 2 and Figure 3 In the embodiment, the first shell 111 is provided with six first grooves 113 equidistantly along the width direction thereof. The second shell 112 is provided with six second grooves 114 equidistantly along the width direction thereof.

[0049] Exemplarily, the surfaces of the first grooves 113 and the second grooves 114 are provided with a heat-conducting layer. The material of the heat-conducting layer can be heat-conducting silicone grease. Specifically, the surfaces of the first grooves 113 and the second grooves 114 and the outer surface of the nitrogen conveying pipeline 200 can be coated with a layer of heat-conducting silicone grease.

[0050] In the embodiment, the surfaces of the first grooves 113 and the second grooves 114 are provided with a heat-conducting layer, which can better transmit heat to the nitrogen in the nitrogen conveying pipeline 200, so as to better heat the nitrogen.

[0051] Exemplarily, as shown in Figure 1 The nitrogen heating device 100 further includes a plurality of first fasteners 130.

[0052] As shown in Figure 2 and Figure 3As shown, the edge region of the first shell 111 is provided with a plurality of through holes 115 along the vertical direction thereof, and the edge region of the second shell 112 is provided with a plurality of threaded holes 116 corresponding to the through holes 115 along the vertical direction thereof.

[0053] The first fastener 130 is inserted through the corresponding through hole 115 and screwed into the threaded hole 116 to fix the first shell 111 and the second shell 112.

[0054] Specifically, in the present embodiment, the first fastener 130 can be a bolt, which is inserted through the through hole 115 and the threaded hole 116 in sequence to fix the first shell 111 and the second shell 112.

[0055] It should be noted that the number of the first fastener 130 and the through holes 115 and the threaded holes 116 is not specifically limited and can be selected according to actual needs, as long as the first shell 111 and the second shell 112 can be fixedly connected.

[0056] It should be further noted that the type of the first fastener 130 is not specifically limited and can be selected according to actual needs.

[0057] Specifically, as shown in Figure 2 In the present embodiment, the two edge regions of the first shell 111 along the length direction are both provided with five through holes 115 at equal intervals, and correspondingly, as shown in Figure 3 the second shell 112 is provided with five threaded holes 116 at corresponding positions at equal intervals. The number of bolts is 20, each of which is inserted through the corresponding through hole 115 and screwed into the threaded hole 116 to fix the first shell 111 and the second shell 112.

[0058] For example, as shown in Figure 2 and Figure 3 The first shell 111 is provided with a plurality of first mounting holes 117 along the length direction thereof, and the second shell 112 is provided with a plurality of second mounting holes 118 along the length direction thereof. The first mounting holes 117 and the second mounting holes 118 are both provided with corresponding heating elements 120. In the present embodiment, the first mounting holes 117 and the second mounting holes 118 are both blind holes, and the depth of the first mounting holes 117 and the second mounting holes 118 can be 180 mm.

[0059] Specifically, in the embodiment, the first shell 111 is provided with four first mounting holes 117 at equal intervals along the width direction thereof, and the second shell 112 is provided with four second mounting holes 118 at equal intervals along the width direction thereof. The specific number of the first mounting holes 117 and the second mounting holes 118 is not limited specifically, and can be selected according to actual needs. In addition, in the embodiment, the diameter size of the first mounting holes 117 and the second mounting holes 118 is greater than the diameter size of the fixing groove. The diameter size of the first mounting holes 117 and the second mounting holes 118 matches the diameter size of the heating rod.

[0060] As shown in Figure 1 , the nitrogen heating device 100 further comprises a plurality of second fasteners 140. The heating element 120 is provided with at least one first fixing hole. As shown in Figure 2 and Figure 3 , the edge region of each first mounting hole 117 and the edge region of each second mounting hole 118 are provided with at least one heating element mounting threaded hole 119. The second fastener 140 is screwed into the heating element mounting threaded hole 119 through the corresponding first fixing hole, so as to fix the heating element 120 to the shell 110.

[0061] Specifically, as shown in Figure 2 and Figure 3 , in the embodiment, the edge region of each first mounting hole 117 and the edge region of each second mounting hole 118 are provided with two heating element mounting threaded holes 119 in opposite positions. Correspondingly, the heating element 120 is also provided with a first fixing hole at the corresponding position. The number of the second fasteners 140 and the first fixing holes and the heating element mounting threaded holes 119 is not limited specifically, and can be selected according to actual needs.

[0062] It should be noted that, in the embodiment, the second fastener 140 can be a screw, and correspondingly, the first fixing hole can be a threaded hole. The screw passes through the threaded hole corresponding thereto to fix the heating rod on the shell 110.

[0063] As shown in Figure 1 , the nitrogen heating device 100 further comprises a temperature sensor 150. The temperature sensor 150 is installed on the shell 110, and is used to measure the heating temperature of the shell 110, so as to monitor the temperature of the nitrogen flowing through the nitrogen conveying pipeline 200.

[0064] Specifically, when the detection temperature sensor 150 measures that the surface temperature of the shell 110 is lower than the set value, the heating member 120 starts the heating function, so that the nitrogen gas flowing in the nitrogen gas delivery pipeline 200 is heated by the heat conduction of the first shell 111 and the second shell 112, and when the detection temperature sensor 150 measures that the surface temperature of the shell 110 is higher than the set value, the heating member 120 stops the heating function.

[0065] Further specifically, as shown in the embodiment, the temperature sensor 150 can be arranged on the surface of the first shell 110, and of course, can also be arranged on the surface of the second shell 112. The temperature sensor 150 can be fixed on the shell 110 by the third fastener 160. The third fastener 160 can be a screw. Figure 1

[0066] In the embodiment, the temperature sensor is used to switch the heating member according to the real-time measured temperature, so as to realize the temperature control in the range of 40℃-200℃; and the temperature of the nitrogen gas entering the nitrogen gas purging device can be controlled according to the scene of the use of the process gas vacuum pump, so as to meet the purging requirement.

[0067] Another aspect of the present application provides a nitrogen gas purging system for a vacuum pump, which comprises a nitrogen gas source, a nitrogen gas delivery pipeline 200, a nitrogen gas heating device 100 and a nitrogen gas purging device.

[0068] The inlet of the nitrogen gas purging device is connected with the nitrogen gas source, the outlet of the nitrogen gas purging device is connected with the inlets of the plurality of nitrogen gas delivery pipelines 200, and the outlets of the plurality of nitrogen gas delivery pipelines 200 are used to be connected with the purging positions of the vacuum pump.

[0069] The nitrogen gas heating device 100 is arranged in the nitrogen gas delivery pipeline 200, and is used to heat the nitrogen gas entering the purging position of the vacuum pump.

[0070] The nitrogen gas heating device 100 adopts the nitrogen gas heating device 100 described above. The specific structure of the nitrogen gas heating device 100 has been described in detail above, and will not be described here again.

[0071] Specifically, the nitrogen gas in the nitrogen gas source enters the plurality of nitrogen gas delivery pipelines 200 through the nitrogen gas purging device, and the nitrogen gas heating device 100 is arranged in the nitrogen gas delivery pipeline 200 to heat the nitrogen gas flowing therein, so that the nitrogen gas entering the purging position of the vacuum pump reaches a preset temperature, and dilutes the concentration of the process gas in the cavity of the pump body.

[0072] ​The nitrogen purging system of the present application uses the nitrogen heating device described above to heat the nitrogen entering the purging position of the vacuum pump. The nitrogen purging device can be applied to different process gas environments with different characteristics. The problem of process gas condensation caused by low temperature nitrogen is solved. The risk of vacuum pump downtime caused by solid particles or powder process materials formed by process gas condensation is reduced. The service life of the vacuum pump is improved.

[0073] Another aspect of the present application provides a vacuum pump using the nitrogen purging system described above. The specific structural features of the nitrogen purging system have been described in detail above and will not be repeated here.

[0074] The vacuum pump of the present application uses the nitrogen purging system described above to reduce the risk of downtime and improve the service life of the pump body.

[0075] It can be understood that the above embodiments are only exemplary embodiments adopted to illustrate the principles of the disclosed embodiments, but the disclosed embodiments are not limited thereto. Various modifications and improvements can be made by those of ordinary skill in the art without departing from the spirit and essence of the disclosed embodiments, and these modifications and improvements are also considered within the protection scope of the disclosed embodiments.

Claims

1. A nitrogen heating device for a vacuum pump, characterized by, The nitrogen heating device is used for heating nitrogen entering a vacuum pump purging position, wherein the nitrogen heating device comprises a shell and a plurality of heating pieces; A central region of the shell is provided with a plurality of fixing grooves penetrating a length direction of the shell, and a nitrogen conveying pipeline passes through the nitrogen heating device and is fixed in the fixing grooves; The plurality of heating pieces are arranged around the nitrogen conveying pipeline along the length direction of the shell to heat nitrogen in the nitrogen conveying pipeline.

2. The nitrogen heating device of claim 1, wherein, The shell comprises a first shell and a second shell fixedly connected with the first shell; A side of the first shell facing the second shell is provided with a plurality of first grooves, and a side of the second shell facing the first shell is provided with a plurality of second grooves corresponding to the first grooves; wherein, The first grooves and the corresponding second grooves form the fixing grooves.

3. The nitrogen heating device of claim 2, wherein, Surfaces of the first grooves and the second grooves are provided with a heat conduction layer.

4. The nitrogen heating apparatus of claim 2, wherein, Further comprising a plurality of first fasteners; An edge region of the first shell is provided with a plurality of through holes along a vertical direction thereof, and an edge region of the second shell is provided with a plurality of threaded holes corresponding to the through holes along a vertical direction thereof; The first fasteners are inserted through the through holes and screwed into the threaded holes to fix the first shell and the second shell.

5. The nitrogen heating apparatus of claim 2, wherein, The first shell is provided with a plurality of first mounting holes along a length direction thereof, and the second shell is provided with a plurality of second mounting holes along a length direction thereof; The first mounting holes and the second mounting holes are each mounted with a corresponding heating piece.

6. The nitrogen heating device of claim 5, wherein, Further comprising a plurality of second fasteners; An edge region of each of the first mounting holes and an edge region of each of the second mounting holes are provided with at least one heating piece mounting threaded hole for fixing the heating piece.

7. The nitrogen heating device according to any one of claims 1 to 6, characterized in that Further comprising a temperature sensor; The temperature sensor is mounted on the shell to measure a heating temperature of the shell, so as to monitor a nitrogen temperature flowing through the nitrogen conveying pipeline.

8. The nitrogen heating device according to any one of claims 1 to 6, characterized in that The shell is made of aluminum alloy.

9. A nitrogen purge system for a vacuum pump, characterized by, The nitrogen purging system comprises a nitrogen source, a plurality of nitrogen conveying pipelines, a nitrogen heating device and a nitrogen purging device; An inlet of the nitrogen purging device is connected with the nitrogen source, an outlet of the nitrogen purging device is connected with inlets of the plurality of nitrogen conveying pipelines, and outlets of the plurality of nitrogen conveying pipelines are used for being connected with a vacuum pump purging position; The nitrogen heating device is arranged in the nitrogen conveying pipeline and is used for heating nitrogen entering the vacuum pump purging position; wherein, The nitrogen heating device is the nitrogen heating device according to any one of claims 1 to 8.

10. A vacuum pump, characterized by The nitrogen purging system according to claim 9.

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