Tail gas treatment device and boron diffusion equipment with same

Abstract

The utility model discloses a tail gas treatment device and boron diffusion equipment with the tail gas treatment device, the tail gas treatment device is used for tail gas treatment of the boron diffusion equipment, the tail gas treatment device comprises a first container, the first container is provided with a containing cavity suitable for containing dissolving liquid, and the first container is provided with an exhaust port communicated with the containing cavity; the exhaust port is used for exhausting the treated tail gas; one end of the gas inlet pipe extends into the accommodating cavity and extends below the liquid level of the dissolving solution, and the gas inlet pipe is configured to introduce tail gas into the dissolving solution; the one-way valve is arranged at one end of the air inlet pipe, and the one-way valve is in one-way conduction towards the containing cavity. According to the tail gas treatment device disclosed by the utility model, the operation stability and reliability of the boron diffusion equipment are better, the safety is higher, the tail gas treatment device is more convenient to arrange in the boron diffusion equipment, and the cost of the tail gas treatment device is well reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic equipment technical field especially is involved in a tail gas treatment device and boron diffusion equipment with it. BACKGROUND

[0002] The boron diffusion equipment needs to handle the tail gas to avoid boron oxide to block the gas pipeline, in the related art, the tail gas treatment adopts the way of liquid storage bottle filtration to handle, the tail gas is passed into the liquid storage bottle and reacts with the water liquid in the liquid storage bottle to dissolve boron oxide, the treatment device usually needs to set the safety bottle on the pipeline of the tail gas discharge, so that when the water liquid appears backflow in the tail gas discharge and treatment process, the safety bottle can store the backflow water liquid, thereby making the tail gas treatment device and the boron diffusion equipment operation keep stable.

[0003] The safety bottle is arranged in the tail gas treatment device, which increases the equipment cost, the safety bottle occupies larger space, makes the tail gas disposal device more inconvenient to arrange in the boron diffusion equipment, and the capacity of the safety bottle is fixed, the backflow water liquid still has the risk of backflowing into the discharged pipeline or even the reaction cavity of the boron diffusion equipment, so that the operation stability and reliability of the boron diffusion equipment are poor, and the safety is poor. SUMMARY

[0004] The utility model aims at at least solving one of the technical problems existing in the prior art. For this purpose, the utility model provides a tail gas treatment device, which can reduce the cost, is more convenient to arrange in the boron diffusion equipment, and makes the operation of the boron diffusion equipment more stable and reliable, and has higher safety.

[0005] The utility model further provides a boron diffusion equipment with the tail gas treatment device.

[0006] The tail gas treatment device according to the utility model can be used for the tail gas treatment of the boron diffusion equipment, and the tail gas treatment device comprises a first container, the first container has a containing cavity suitable for containing a dissolving liquid, the first container is provided with an exhaust port in communication with the containing cavity, and the exhaust port is used for discharging the treated tail gas, an air inlet pipe, one end of the air inlet pipe is inserted into the containing cavity and below the liquid level of the dissolving liquid, the air inlet pipe is configured to pass the tail gas into the dissolving liquid, and a one-way valve, the one-way valve is arranged at the one end of the air inlet pipe, and the one-way valve is unidirectional to the containing cavity.

[0007] According to the tail gas treatment device, the first container, the air inlet pipe and the one-way valve are arranged, one end of the air inlet pipe extends into the containing cavity of the first container and extends below the liquid level of the dissolving solution, the one-way valve is arranged at one end of the air inlet pipe and unidirectionally communicates with the containing cavity, the operation stability and reliability of the boron diffusion equipment are better, the safety is higher, the tail gas treatment device is more convenient to arrange in the boron diffusion equipment, and the cost of the tail gas treatment device is greatly reduced.

[0008] In some embodiments of the utility model, the one end of air inlet pipe is connected with a plurality of shunt pipes, a plurality of shunt pipes are equipped with one-way valve.

[0009] In an embodiment of the utility model, the air inlet pipe extends along the up-down direction, a plurality of shunt pipes extend along the horizontal direction and are arranged in the circumferential direction of the air inlet pipe.

[0010] In an embodiment of the utility model, the shunt pipe includes: horizontal pipe section and vertical pipe section, the horizontal pipe section extends along the horizontal direction and one end is connected with the air inlet pipe, the vertical pipe section extends along the vertical direction and the upper end is connected with the other end of the horizontal pipe section.

[0011] In some embodiments of the utility model, a plurality of baffle plates are arranged in the containing cavity, a plurality of baffle plates are arranged in the up-down direction, at least part of a plurality of baffle plates is suitable for being arranged below the liquid level of the dissolving solution, a plurality of baffle plates and the inner wall of the containing cavity cooperate to define a plurality of flow channels arranged in turn from top to bottom and sequentially communicated, wherein the one end of the air inlet pipe is located below the lowermost baffle plate.

[0012] In some embodiments of the utility model, the number of first container is multiple, a plurality of first containers are arranged in turn, the tail gas treatment device further includes first connecting pipe, the first connecting pipe is connected between two adjacent first containers, wherein one end of the first connecting pipe communicates with the air outlet and the other end extends below the liquid level of the dissolving solution.

[0013] In an embodiment of the utility model, the containing cavity is provided with a filter element, and the filter element is arranged between the air outlet and the liquid level.

[0014] In some embodiments of the utility model, the tail gas treatment device further includes: second container and second connecting pipe, the second container is arranged downstream of the first container in the fluid flow direction, the second container has a cavity, the second container has an air outlet communicating with the cavity, the cavity is provided with a filter element, one end of the second connecting pipe communicates with the air outlet of the first container, the other end of the second connecting pipe extends into the cavity, and the filter element is arranged between the other end and the air outlet.

[0015] In one embodiment of this utility model, the filter element is a hydrophobic element.

[0016] In some embodiments of this utility model, the exhaust gas treatment device further includes: an exhaust pipe and a main exhaust pipe, the exhaust pipe being connected between the exhaust port and the main exhaust pipe; and an airflow pipe, the airflow pipe being connected to the intake pipe and the main exhaust pipe, and the airflow pipe being provided with a switch valve.

[0017] In some embodiments of this utility model, the exhaust gas treatment device further includes a storage container having a storage cavity, and the first container is adapted to discharge liquid into the storage cavity.

[0018] The boron diffusion apparatus according to the second aspect of the present invention includes the exhaust gas treatment device according to the first aspect of the present invention.

[0019] According to the boron diffusion equipment of this utility model, by setting the exhaust gas treatment device of the first aspect, the exhaust gas treatment device is provided with a first container, an inlet pipe and a one-way valve. One end of the inlet pipe extends into the receiving cavity of the first container and extends below the liquid surface of the solution. The one-way valve is set at one end of the inlet pipe and unidirectionally opens toward the receiving cavity, which makes the operation stability and reliability of the boron diffusion equipment better and the safety higher. It also makes it more convenient to arrange the exhaust gas treatment device in the boron diffusion equipment and greatly reduces the cost of the exhaust gas treatment device.

[0020] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of an exhaust gas treatment device according to an embodiment of the present utility model;

[0022] Figure 2 This is a partially enlarged schematic diagram of the exhaust gas treatment device at the first container according to an embodiment of the present invention.

[0023] Figure label:

[0024] 10. First container; 11. Receiving cavity; 20. Second container; 21. Cavity;

[0025] 30. Storage container; 31. Storage cavity; 40. Air inlet pipe;

[0026] 50. Diversion pipe; 51. Horizontal pipe section; 52. Vertical pipe section;

[0027] 60. Filter element; 70. Baffle plate;

[0028] 81. Exhaust pipe; 82. First connecting pipe; 83. Second connecting pipe; 84. Third connecting pipe; 85. Air outlet pipe; 86. Airflow pipe; 87. Main exhaust pipe;

[0029] 91. Check valve; 92. On / off valve; 93. Drain valve; 94. Special gas valve;

[0030] 100. Exhaust gas treatment device. Detailed Implementation

[0031] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0032] First refer to Figure 1 A brief description of the boron diffusion apparatus according to a second aspect embodiment of the present invention is provided. The boron diffusion apparatus includes a tail gas treatment device 100 according to a first aspect embodiment of the present invention. The tail gas treatment device 100 is used to treat the tail gas discharged from the reaction chamber when the boron diffusion apparatus is in operation.

[0033] The following is for reference. Figure 1 and Figure 2 Describes an exhaust gas treatment device 100 according to a first aspect embodiment of the present invention.

[0034] like Figure 1 As shown, the exhaust gas treatment device 100 according to the first aspect embodiment of the present invention is used for exhaust gas treatment of a boron diffusion device. The exhaust gas treatment device 100 includes: a first container 10, an inlet pipe 40, and a one-way valve 91. The first container 10 has a receiving cavity 11 suitable for containing a dissolving liquid. The first container 10 is provided with an exhaust port communicating with the receiving cavity 11, and the exhaust port is used to discharge the treated exhaust gas. One end of the inlet pipe 40 extends into the receiving cavity 11 and extends below the liquid surface of the dissolving liquid. The inlet pipe 40 is configured to introduce exhaust gas into the dissolving liquid. The one-way valve 91 is provided at one end of the inlet pipe 40 and is unidirectionally open toward the receiving cavity 11.

[0035] In this embodiment, a first container 10 is provided in the exhaust gas treatment device 100. The first container 10 can be a bottle, canister, cylinder, barrel, box, etc. The first container 10 can be made of acid-resistant and high-temperature resistant material. The receiving cavity 11 of the first container 10 contains a dissolving liquid, which can be water or an aqueous solution. The dissolving liquid can be set according to the needs of exhaust gas treatment.

[0036] In this embodiment, an air inlet pipe 40 and a one-way valve 91 are also provided. The air inlet pipe 40 extends into the receiving cavity 11 and extends below the liquid surface of the solution. When the boron diffusion device is running, the exhaust gas generated is introduced into the solution in the receiving cavity 11 along the air inlet pipe 40. The exhaust gas reacts with the solution, causing the boron oxide and boron chloride contained in the exhaust gas to react with water and hydrolyze, thereby being filtered out from the exhaust gas. The treated exhaust gas is discharged from the exhaust port of the receiving cavity 11.

[0037] In this embodiment, one end of the air inlet pipe 40 extends into the receiving cavity 11 and below the liquid surface of the dissolving liquid. The structure is simple, which enables the exhaust gas treatment device 100 to stably treat the exhaust gas, thereby enabling the exhaust gas treatment device 100 to meet the usage requirements of exhaust gas treatment.

[0038] It is understandable that during the exhaust gas treatment process, there is a risk that the dissolved liquid in the containment chamber 11 may backflow into the pipeline or even the reaction chamber along the inlet pipe 40. Moreover, the hydrolysis reaction between the exhaust gas and the dissolved liquid is relatively violent, which makes the risk of backflow of the dissolved liquid greater. When the dissolved liquid backflows into the inlet pipe 40, the exhaust gas will react with the dissolved liquid in the inlet pipe 40. Since the temperature of the exhaust gas flowing in the inlet pipe 40 is high, the boric acid produced will dehydrate and turn into boron oxide, which will cause boron oxide powder to accumulate in the inlet pipe 40, thus causing pipeline blockage. When the dissolved liquid backflows into the reaction chamber, it will cause harm to the operation of the boron diffusion equipment, such as a decrease in production and processing quality.

[0039] In this embodiment, a one-way valve 91 is provided at the end of the air inlet pipe 40 that extends below the liquid surface. The one-way valve 91 is unidirectionally open to the receiving cavity 11. Specifically, the one-way valve 91 makes the air inlet pipe 40 unidirectionally open to the receiving cavity 11, so that the exhaust gas in the air inlet pipe 40 can flow stably and reliably into the receiving cavity 11, avoiding the backflow of the dissolved liquid into the air inlet pipe 40. This allows the exhaust gas treatment device 100 to perform exhaust gas treatment more stably and reliably, and the boron diffusion equipment to operate more stably and reliably.

[0040] In this embodiment, a one-way valve 91 is set to allow one-way flow through the air inlet pipe 40. The structure is simple and, compared with a safety bottle, it can more stably and reliably prevent backflow of the solution, making the boron diffusion equipment more stable, reliable, and safer. The one-way valve 91 has a low cost and is set at the end of the air inlet pipe 40 that extends into the solution, making it small in size and avoiding the occupation of extra space. This makes the cost of the exhaust gas treatment device 100 even lower and makes it more convenient to arrange the exhaust gas treatment device 100 in the boron diffusion equipment.

[0041] According to the embodiment of the present utility model, the exhaust gas treatment device 100 is provided with a first container 10, an air inlet pipe 40 and a one-way valve 91. One end of the air inlet pipe 40 extends into the receiving cavity 11 of the first container 10 and extends below the liquid surface of the solution. The one-way valve 91 is provided at one end of the air inlet pipe 40 and conducts unidirectionally toward the receiving cavity 11. This makes the operation stability and reliability of the boron diffusion equipment better and the safety higher. It also makes it more convenient to arrange the exhaust gas treatment device 100 in the boron diffusion equipment and greatly reduces the cost of the exhaust gas treatment device 100.

[0042] In some embodiments of this utility model, such as Figure 1 and Figure 2 As shown, one end of the intake pipe 40 can be connected to multiple branch pipes 50, and each branch pipe 50 is equipped with a one-way valve 91.

[0043] It is understandable that after the exhaust gas is introduced into the dissolving liquid through the inlet pipe 40, the exhaust gas flows into the dissolving liquid at a certain flow rate and reacts with the dissolving liquid. When the impact force of the exhaust gas is large, the dissolving liquid in the receiving cavity 11 fluctuates greatly and flows out of the receiving cavity 11. It also causes a certain impact on the first container 10, thereby adversely affecting the structural state of the first container 10. This makes the stability of the exhaust gas treatment process in the first container 10 poor, thus reducing the operational stability and reliability of the exhaust gas treatment device 100.

[0044] In this embodiment, multiple diversion pipes 50 are connected to one end of the intake pipe 40, which effectively diverts the exhaust gas into the receiving cavity 11. This significantly reduces the impact force of the exhaust gas exiting into the dissolving liquid, allowing the dissolving liquid to maintain a relatively stable storage state. This enables the first container 10 to reliably store the dissolving liquid and perform exhaust gas treatment operations, thus making the exhaust gas treatment device 100 operate more stably and reliably. The exhaust gas flowing out from the multiple diversion pipes 50 into the dissolving liquid allows for faster dispersion of the exhaust gas within the dissolving liquid, thereby significantly increasing the contact area between the exhaust gas and the dissolving liquid and improving the exhaust gas treatment effect.

[0045] In this embodiment, a one-way valve 91 is provided on each diversion pipe 50. The structure is simple and can reliably prevent the backflow of the solution, making the exhaust gas treatment device 100 operate more stably.

[0046] In one embodiment of this utility model, such as Figure 1 and Figure 2 As shown, the intake pipe 40 can be positioned vertically (e.g., ...). Figure 1 As shown in the vertical direction, multiple diverter pipes 50 extend horizontally and are arranged circumferentially in the intake pipe 40.

[0047] In this embodiment, the air inlet pipe 40 is designed to extend in the vertical direction, which is simple in structure and facilitates the rapid and efficient introduction of gas into the solution. It also avoids the accumulation of solid substances in the air inlet pipe 40, allowing the air inlet pipe 40 to maintain a stable and unobstructed airflow channel. In some extreme cases, such as when the one-way valve 91 fails and the solution backflows, it can significantly increase the difficulty of the solution backflowing into the reaction chamber, thereby improving the stability and reliability of the boron diffusion equipment.

[0048] In this embodiment, multiple diversion pipes 50 extend horizontally and are arranged circumferentially around the intake pipe 40. The structure is simple and the arrangement is convenient, which can make the exhaust gas pass into the solution more evenly, and make the exhaust gas and the solution react more efficiently and fully, thereby making the exhaust gas treatment device 100 more efficient and the treatment effect better.

[0049] In this embodiment, the intake pipe 40 extends vertically and the diversion pipe 50 extends horizontally. This can reduce the energy of the exhaust gas flowing through the intake pipe 40 and the diversion pipe 50, thereby reducing the impact force when the exhaust gas flows out into the solution. This allows the exhaust gas to flow into the solution more smoothly, and the exhaust gas treatment device 100 can perform exhaust gas treatment operations more stably.

[0050] In one embodiment of this utility model, such as Figure 1 and Figure 2 As shown, the diverter pipe 50 may include a horizontal pipe section 51 and a vertical pipe section 52. The horizontal pipe section 51 extends horizontally and one end is connected to the intake pipe 40. The vertical pipe section 52 extends vertically and its upper end is connected to the other end of the horizontal pipe section 51.

[0051] In this embodiment, the diversion pipe 50 includes a horizontal pipe section 51 and a vertical pipe section 52. The horizontal pipe section 51 extends horizontally and is connected to the air inlet pipe 40. The vertical pipe section 52 extends vertically and its upper end is connected to the other end of the horizontal pipe section 51. When the exhaust gas flows along the air inlet pipe 40 into the dissolving liquid in the receiving cavity 11, the exhaust gas flows vertically in the air inlet pipe 40. The exhaust gas is then diverted to the horizontal pipe section 51 of the multiple diversion pipes 50 and flows horizontally. The exhaust gas then flows vertically in the vertical pipe section 52 and flows out into the dissolving liquid. The horizontal pipe section 51 and the vertical pipe section 52, together with the air inlet pipe 40, further reduce the impact force of the exhaust gas discharged into the dissolving liquid, so that the exhaust gas can flow into the dissolving liquid more smoothly, and the exhaust gas can be better dispersed in the dissolving liquid and react with the dissolving liquid to carry out exhaust gas treatment. This makes the exhaust gas treatment device 100 operate more stably and reliably and has a better treatment effect.

[0052] In some embodiments of this utility model, such as Figure 1 and Figure 2As shown, multiple baffles 70 can be provided in the receiving cavity 11. The multiple baffles 70 are arranged at intervals in the vertical direction. At least a portion of the multiple baffles 70 is suitable for being arranged below the liquid surface of the solution. The multiple baffles 70 cooperate with the inner wall of the receiving cavity 11 to define multiple flow channels that are arranged sequentially from top to bottom and connected in sequence. One end of the air inlet pipe 40 is located below the lowermost baffle 70.

[0053] Understandably, after the gas enters the solution, it will flow upward and exit from the solution. In this embodiment, multiple baffles 70 are provided in the receiving cavity 11. The multiple baffles 70 are arranged at intervals in the vertical direction, and some baffles 70 are arranged below the liquid surface of the solution. In this embodiment, the baffles 70 are provided in the solution, which can effectively block the exhaust gas, thereby prolonging the flow time of the exhaust gas in the solution, allowing the exhaust gas to fully contact and react with the solution, and thus achieving more effective treatment of the exhaust gas.

[0054] In this embodiment, multiple baffles 70 cooperate with the inner wall of the containment chamber to define multiple flow channels arranged sequentially from top to bottom, thereby further increasing the flow path of the exhaust gas in the solution and the containment chamber 11. This increases the contact time between the exhaust gas and the solution, allowing the exhaust gas to react and hydrolyze more fully with the solution. At the same time, the longer flow path allows the temperature of the exhaust gas to be effectively reduced, thereby reducing the volatility of pollutants such as boron chloride, boron oxide, and boric acid produced by hydrolysis in the exhaust gas. This makes the exhaust gas cleaner after flowing out of the solution, resulting in more stable and reliable exhaust gas treatment and better exhaust gas treatment effect.

[0055] In this embodiment, at least some of the baffles 70 are arranged below the surface of the solution. Multiple baffles 70 can be partially or completely arranged in the solution. When multiple baffles 70 are partially arranged in the solution, the portion of the baffles 70 above the liquid surface can further guide the outflowing gas. Furthermore, the baffles 70 can block splashing of the solution, thereby better preventing the solution from splashing into the exhaust port or the exhaust gas from carrying water vapor. This makes the exhaust gas treatment device 100 operate more stably and improves the exhaust gas treatment effect. For example, the number of baffles 70 can be two, three, four, five, six, etc., and the number of baffles 70 can be reasonably set according to needs.

[0056] In some embodiments of this utility model, such as Figure 1 As shown, there can be multiple first containers 10, and multiple first containers 10 are arranged in sequence. The exhaust gas treatment device 100 may also include a first connecting pipe 82, which is connected between two adjacent first containers 10. One end of the first connecting pipe 82 is connected to the exhaust port and the other end extends below the liquid surface of the solution.

[0057] In this embodiment, multiple first containers 10 are arranged sequentially and connected by a first connecting pipe 82. One end of the first connecting pipe 82 is connected to the exhaust port, and the other end extends below the surface of the dissolving liquid. This allows the exhaust gas to undergo multiple treatments sequentially through the multiple first containers 10, resulting in cleaner exhaust gas and making the exhaust gas treatment device 100 more reliable and effective. For example, the number of first containers 10 can be two, three, four, etc. The number of first containers 10 can be reasonably set according to the exhaust gas treatment and layout requirements. The structural arrangement in each first container 10 can be the same or different. For example, each first container 10 can be provided with the same number of baffles 70, or the number of baffles 70 in each first container 10 can be flexibly set as needed, without specific limitations here.

[0058] In one embodiment of the present invention, a filter element 60 may be provided in the receiving cavity 11, and the filter element 60 is located between the exhaust port and the liquid surface.

[0059] In this embodiment, a filter element 60 is provided in the receiving cavity 11. The filter element 60 is located between the exhaust port and the liquid surface, so that the exhaust gas after being filtered by the solution can be filtered again by the filter element 60, thereby making the exhaust gas more stable and reliable to be treated, thus making the exhaust gas treatment device 100 better and the boron diffusion equipment more stable in operation.

[0060] In this embodiment, a filter element 60 is provided in the receiving cavity 11, which can reduce the additional space occupied when arranging the filter element 60, thereby making it more convenient and easier to arrange the exhaust gas treatment device 100 in the boron diffusion device.

[0061] In some embodiments of this utility model, such as Figure 1 As shown, the exhaust gas treatment device 100 may further include: a second container 20 and a second connecting pipe 83. The second container 20 is located downstream of the first container 10 in the fluid flow direction. The second container 20 has a cavity 21 and an outlet communicating with the cavity 21. A filter element 60 is provided inside the cavity 21. One end of the second connecting pipe 83 is connected to the exhaust port of the first container 10, and the other end of the second connecting pipe 83 extends into the cavity 21. The filter element 60 is located between the other end and the outlet.

[0062] In this embodiment, a second container 20 is provided, which has an air outlet. One end of the second connecting pipe 83 is connected to the exhaust port of the first container 10, and the other end extends into the cavity 21. After the exhaust gas is treated in the first container 10, it enters the cavity 21 along the second connecting pipe 83 and is then discharged from the air outlet. This can further increase the flow path of the exhaust gas, reduce the temperature of the exhaust gas to a certain extent, allow the water vapor contained in the exhaust gas to condense better, and allow the boric acid contained in the water vapor to precipitate, thereby further reducing the content of pollutants in the exhaust gas.

[0063] Specifically, when the exhaust gas is treated by reacting in the dissolving solution, boron chloride in the exhaust gas reacts with water to form boron oxide, which in turn reacts with water to form water-soluble boric acid. As the exhaust gas flows along the pipeline, some water vapor containing boric acid flows with it in the first container 10 and the second container 20. This results in the exhaust gas carrying pollutants such as boric acid when it exits the outlet. Boric acid is an acidic substance and can corrode and damage the pipeline and pump body. In this embodiment, a cavity 21 is provided, and a filter element 60 is installed inside the cavity 21. This allows for better purification and filtration of the exhaust gas, making the exhaust gas discharged from the outlet cleaner. This results in more stable operation of the exhaust gas treatment device 100 and facilitates the arrangement and replacement of the filter element 60.

[0064] In one embodiment of this utility model, the filter element 60 can be a hydrophobic element. By making the filter element 60 hydrophobic in this embodiment, the adsorption of water by the filter element 60 can be effectively avoided, allowing the filter element 60 to better adsorb and filter out pollutants in the exhaust gas, and preventing water from clogging the filter element 60. This ensures that the exhaust gas can flow stably and smoothly, and to a certain extent, makes the exhaust gas treatment device 100 operate more stably. Exemplarily, the filter element 60 can be filter cotton, and the filter cotton can have a layered structure to better filter and adsorb residual pollutants in the exhaust gas.

[0065] In some embodiments of this utility model, such as Figure 1 As shown, the exhaust gas treatment device 100 may further include: an exhaust pipe 85, a main exhaust pipe 87 and an airflow pipe 86. The exhaust pipe 85 is connected between the exhaust port and the main exhaust pipe 87. The airflow pipe 86 is connected to the intake pipe 40 and the main exhaust pipe 87. A switch valve 92 is provided on the airflow pipe 86.

[0066] In this embodiment, an exhaust pipe 85 is provided, which connects the exhaust port and the main discharge pipe 87. Specifically, when the exhaust gas treatment device 100 is provided with a first container 10 but not a second container 20, the exhaust gas can be treated in the dissolving liquid and then flow from the exhaust port along the exhaust pipe 85 to the main discharge pipe 87 for discharge. When the exhaust gas treatment device 100 is provided with a first container 10 and a second container 20, the exhaust pipe 85 can be connected to the exhaust port of the second container 20. After passing through the first container 10 and the second container 20, the exhaust gas is discharged into the main discharge pipe 87 along the exhaust pipe 85.

[0067] In this embodiment, an exhaust pipe 85 and a main discharge pipe 87 are provided. The structure is simple and facilitates the overall discharge operation after the exhaust gas is treated and merged with the other gas emissions in the boron diffusion equipment. This makes the pipeline layout of the exhaust gas treatment device 100 in the boron diffusion equipment more reasonable and convenient.

[0068] Understandably, during the operation of the boron diffusion equipment, the exhaust gas remaining in the tailpipe can cause pollution or corrosion to the pipeline, and some pollutants may accumulate and remain. Therefore, a purging pipeline is typically required to purge the gas flowing into the tailpipe, ensuring good flow and structural integrity, and enabling the boron diffusion equipment to perform stable exhaust operations. In this embodiment, an airflow pipe 86 is provided, connected to the inlet pipe 40 and the main exhaust pipe 87, providing a good exhaust channel for the purging gas and ensuring stable purging operations.

[0069] In one embodiment of this utility model, a water pump can be installed in the main drain pipe 87, and the water pump is located downstream of the air outlet pipe 85 and the airflow pipe 86 in the direction of fluid flow.

[0070] In this embodiment, the water pump effectively drives the flow of exhaust gas in the first container 10 and the second container 20, as well as the flow of purge gas in the airflow pipe 86. This ensures that the exhaust gas and purge gas flow stably and reliably to the main discharge pipe 87, thereby making the exhaust gas treatment device 100 operate more stably. The water pump is located downstream of the outlet pipe 85 in the fluid flow direction, allowing trace amounts of water vapor in the exhaust gas to enter the pump. This water vapor can carry away any pollutant particles, such as boron oxide, that may be present in the pump, enabling it to operate more efficiently and stably, and improving its performance to a certain extent.

[0071] In this embodiment, a switching valve 92 is provided on the airflow pipe 86, which can allow the airflow pipe 86 to connect the air inlet pipe 40 and the main exhaust pipe 87 as needed. This facilitates the switching of the purging operation of the purging gas and the treatment operation of the exhaust gas in the first container 10, making the exhaust gas treatment device 100 more convenient and flexible to use.

[0072] In one embodiment of this utility model, such as Figure 1 As shown, the exhaust gas treatment device 100 may also include an exhaust pipe 81, which is connected to the intake pipe 40. The exhaust gas flows into the intake pipe 40 along the exhaust pipe 81. The airflow pipe 86 is connected to the exhaust pipe 81. A special gas valve 94 is provided on the exhaust pipe 81.

[0073] In this embodiment, an exhaust pipe 81 is provided to meet the needs of exhaust gas discharge. The airflow pipe 86 is connected to the exhaust pipe 81, which facilitates the purging operation of the purging gas into the exhaust pipe 81 and the air inlet pipe 40. A special gas valve 94 is provided in the exhaust pipe 81. The special gas valve 94 has the characteristics of fast response, high control accuracy and remote control, which can facilitate stable, convenient and reliable control of exhaust gas discharge. This allows the exhaust gas treatment device 100 to better cooperate with the operation of the boron diffusion equipment to carry out exhaust gas treatment and discharge operations, and makes the exhaust gas treatment device 100 operate more stably and reliably.

[0074] In some embodiments of this utility model, such as Figure 1 As shown, the exhaust gas treatment device 100 may further include a storage container 30 having a storage cavity 31, and the first container 10 is adapted to discharge liquid into the storage cavity 31.

[0075] It is understandable that during the operation of the exhaust gas treatment device 100, the concentration of pollutants such as boric acid dissolved in the solution gradually increases, requiring replacement to maintain a stable exhaust gas treatment effect and efficiency. In this embodiment, a storage container 30 is provided. The first container 10 can discharge liquid into the storage chamber 31 of the storage container 30, so that when the solution needs to be replaced, the solution in the first container 10 can be discharged into the storage container 30 for liquid replacement. The structure is simple and can well meet the operation and use needs of the exhaust gas treatment device 100.

[0076] In one embodiment of this utility model, such as Figure 1 As shown, the exhaust gas treatment device 100 may further include a third connecting pipe 84, which connects the first container 10 and the storage container 30. A drain valve 93 is provided on the third connecting pipe 84. In this embodiment, the third connecting pipe 84 is connected to the first container 10 and the storage container 30, and a drain valve 93 is provided on the third connecting pipe 84. The structure is simple and facilitates the control of the discharge of the dissolved liquid.

[0077] The following is for reference. Figure 2 and Figure 1 A boron diffusion apparatus according to a second aspect embodiment of the present invention is described.

[0078] like Figure 2 and Figure 1As shown, the boron diffusion device according to an embodiment of the present invention includes a tail gas treatment device 100 according to a first aspect embodiment of the present invention.

[0079] Other configurations and operations of the boron diffusion apparatus according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0080] According to the boron diffusion device of the present invention, by setting the exhaust gas treatment device 100 of the first aspect embodiment, the exhaust gas treatment device 100 is provided with a first container 10, an air inlet pipe 40 and a one-way valve 91. One end of the air inlet pipe 40 extends into the receiving cavity 11 of the first container 10 and extends below the liquid surface of the solution. The one-way valve 91 is set at one end of the air inlet pipe 40 and unidirectionally opens toward the receiving cavity 11, which makes the operation stability and reliability of the boron diffusion device better and the safety higher. It also makes it more convenient to arrange the exhaust gas treatment device 100 in the boron diffusion device and greatly reduces the cost of the exhaust gas treatment device 100.

[0081] The following will refer to Figure 2 and Figure 1 This invention describes a boron diffusion apparatus according to a specific embodiment of the present invention.

[0082] like Figure 2 and Figure 1 As shown, the boron diffusion equipment includes an exhaust gas treatment device 100, which includes an exhaust pipe 81, an inlet pipe 40, a first container 10, a first connecting pipe 82, a second container 20, a second connecting pipe 83, an outlet pipe 85, an airflow pipe 86, a storage container 30, a third connecting pipe 84, a main exhaust pipe 87, a baffle plate 70, and a filter element 60.

[0083] The first container 10 is a bottle and there are two of them. The two first containers 10 are connected by a first connecting pipe 82. The exhaust pipe 81 is connected to the air inlet pipe 40. The air inlet pipe 40 extends into the receiving cavity 11 of the first container 10 and extends below the liquid surface of the solution in the receiving cavity 11. Five baffles 70 are arranged at intervals in the vertical direction in the receiving cavity 11. Two of the baffles 70 are located below the liquid surface. The baffles 70 cooperate with the inner wall of the receiving cavity 11 to define a connected flow channel. The extension end of the air inlet pipe 40 is located below the lowermost baffle 70. One end of the first connecting pipe 82 is connected to the exhaust port of the first container 10 and the other end extends into the receiving cavity 11 of the other first container 10. The other end of the first connecting pipe 82 extends below the liquid surface of the solution.

[0084] One end of the second connecting pipe 83 is connected to the exhaust port of the other first container 10, and the other end extends into the cavity 21 of the second container 20. The second container 20 is a bottle body. A filter element 60 is installed in the cavity 21 of the second container 20. The filter element 60 is a multi-layered hydrophobic filter cotton. The filter element 60 is positioned between the air outlet of the second container 20 and the end of the second connecting pipe 83 that extends into the cavity 21. Specifically, one end of the second connecting pipe 83 can be arranged close to the bottom wall of the cavity 21. The air outlet pipe 85 is connected to the air outlet and to the main drain pipe 87. A water pump is installed on the main drain pipe 87. The airflow pipe 86 is connected to the main drain pipe 87 and the exhaust pipe 81. A switch valve 92 is installed on the airflow pipe 86, and a special gas valve 94 is installed on the exhaust pipe 81.

[0085] The storage container 30 is a water tank. The storage container 30 is connected to each of the first containers 10 through a third connecting pipe 84, and a drain valve 93 is provided on the third connecting pipe 84. The air inlet pipe 40 extends vertically into the receiving cavity 11. One end of the air inlet pipe 40 extending into the receiving cavity 11 is connected to two branch pipes 50. The air inlet pipe 40 and the two branch pipes 50 can be connected and assembled through an adapter. The two branch pipes 50 extend horizontally away from the air inlet pipe 40. The branch pipe 50 includes a horizontal pipe section 51 and a vertical pipe section 52. One end of the horizontal pipe section 51 is connected to one end of the air inlet pipe 40. The vertical pipe section 52 extends vertically and its upper end is connected to the other end of the horizontal pipe section 51. The branch pipe 50 and the air inlet pipe 40 can be a single piece. A one-way valve 91 is provided on the horizontal pipe section 51. The one-way valve 91 controls the air inlet pipe 40 to unidirectionally flow towards the receiving cavity 11.

[0086] When the boron diffusion equipment is operating and performing exhaust operations, the special gas valve 94 is opened and the switch valve 92 is closed. The exhaust gas flows steadily into the inlet pipe 40 along the exhaust pipe 81, and then disperses into the two branch pipes 50 and flows from the branch pipes 50 into the dissolving liquid. The exhaust gas flows upward in the dissolving liquid along the flow channel, and the contact area between the exhaust gas and the dissolving liquid is larger and the contact time is longer, so that the exhaust gas and the dissolving liquid react and hydrolyze more fully. After the exhaust gas flows out above the liquid surface, it continues to flow along the flow channel. The water vapor contained in the exhaust gas falls back into the dissolving liquid under the obstruction of the baffle plate 70.

[0087] The exhaust gas continues to flow and enters the second first container 10 along the first connecting pipe 82 for further filtration. The exhaust gas then flows from the second first container 10 into the cavity 21 of the second container 20 along the second connecting pipe 83. After being filtered again by the filter element 60, the exhaust gas flows from the outlet of the second container 20 into the main discharge pipe 87 along the outlet pipe 85, thus completing the exhaust gas treatment. The exhaust gas has a relatively long flow path during its flow, which allows for a good reduction effect. This reduces the volatility of substances such as boron chloride and boron oxide contained in the exhaust gas during the exhaust gas treatment process, thereby improving the dissolving capacity of the solution and greatly enhancing the treatment effect and filtration efficiency of the exhaust gas treatment device 100, resulting in cleaner exhaust gas.

[0088] During the operation of the boron diffusion equipment, after each process is completed, the drain valve 93 is opened, and the dissolved liquid that has treated the tail gas is discharged into the storage container 30 along the third connecting pipe 84. After the dissolved liquid is drained, the drain valve 93 is closed, and the new dissolved liquid in the receiving cavity 11 is replaced for tail gas treatment.

[0089] When the boron diffusion equipment is running and the exhaust operation is stopped, the special gas valve 94 is closed and the switch valve 92 is opened. The purging gas is introduced into the downstream of the special gas valve 94 of the exhaust pipe 81 to purge the exhaust pipe 81 and the inlet pipe 40. The purging gas can flow along the airflow valve to maintain a stable purging state, so that the exhaust pipe 81 and the inlet pipe 40 can be cleaned well.

[0090] It is understandable that the water vapor carried by the exhaust gas will gradually accumulate in the cavity 21 within the second container 20. In this embodiment, a water removal pipeline can be provided, as shown in the reference. ​ As shown, the water removal pipeline is connected to the air outlet pipe 85 and is adapted to blow air along the air outlet pipe 85 toward the cavity 21, so that the water in the cavity 21 is guided along the second connecting pipe 83 to the first container 10 under the pressure of the gas, thereby enabling the second container 20 to stably carry out exhaust gas treatment operations.

[0091] In this embodiment, the exhaust gas passes through the filter element 60 and is discharged into the main discharge pipe 87. The filter element 60 can effectively filter the fine powder remaining in the exhaust gas, reducing the amount of powder entering the main discharge pipe 87 and the water pump. This allows the water pump to operate more stably and reliably, reducing the maintenance cycle of the water pump. Furthermore, the filter element 60 is a hydrophobic element, which can prevent pipe blockage and, to a certain extent, prevent abnormal pump operation, such as increased pump speed. In addition, trace amounts of water vapor can enter the water pump through the filter element 60. The water vapor can carry away the pollutant particles accumulated in the water pump, allowing the water pump to operate in a better state. This improves the operating performance of the water pump and makes its operation more stable, thereby enabling the boron diffusion equipment to operate more stably and reliably to a certain extent.

[0092] In this embodiment of the boron diffusion equipment, a first container 10, an inlet pipe 40, and a one-way valve 91 are provided through an exhaust gas treatment device 100. One end of the inlet pipe 40 extends into the receiving cavity 11 of the first container 10 and is below the liquid surface of the solution. The one-way valve 91 is provided at one end of the inlet pipe 40 and is unidirectionally open towards the receiving cavity 11. This improves the operational stability and reliability of the boron diffusion equipment, enhances its safety, and makes it more convenient to arrange the exhaust gas treatment device 100 in the boron diffusion equipment, thus significantly reducing the cost of the exhaust gas treatment device 100.

[0093] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0094] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0095] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0096] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0097] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A tail gas treatment device, characterized in that, For tail gas treatment of a boron diffusion device, the tail gas treatment device includes: A first container (10) has a receiving cavity (11) suitable for containing a solution, and the first container (10) is provided with an exhaust port communicating with the receiving cavity (11), the exhaust port being used to discharge the treated exhaust gas; An air inlet pipe (40) has one end extending into the receiving cavity (11) and below the liquid surface of the solution. The air inlet pipe (40) is configured to introduce exhaust gas into the solution. A one-way valve (91) is disposed at one end of the air intake pipe (40) and the one-way valve (91) is unidirectionally open toward the receiving cavity (11).

2. The exhaust gas treatment device according to claim 1, characterized in that, One end of the air intake pipe (40) is connected to a plurality of diverter pipes (50), and each of the plurality of diverter pipes (50) is provided with a one-way valve (91).

3. The exhaust gas treatment device according to claim 2, characterized in that, The intake pipe (40) extends vertically, and the plurality of the branch pipes (50) extend horizontally and are arranged circumferentially on the intake pipe (40).

4. The exhaust gas treatment device according to claim 2, characterized in that, The diverter pipe (50) includes a horizontal pipe section (51) and a vertical pipe section (52). The horizontal pipe section (51) extends horizontally and one end is connected to the air intake pipe (40). The vertical pipe section (52) extends vertically and its upper end is connected to the other end of the horizontal pipe section (51).

5. The exhaust gas treatment device according to claim 1, characterized in that, Multiple baffles (70) are provided in the receiving cavity (11). The multiple baffles (70) are arranged at intervals in the vertical direction. At least a portion of the multiple baffles (70) is adapted to be arranged below the liquid surface of the solution. The multiple baffles (70) cooperate with the inner wall of the receiving cavity (11) to define multiple flow channels arranged sequentially from top to bottom and connected in sequence. The end of the air inlet pipe (40) is located below the lowermost baffle (70).

6. The exhaust gas treatment device according to claim 1, characterized in that, The number of the first containers (10) is multiple, and the multiple first containers (10) are arranged in sequence. The exhaust gas treatment device also includes a first connecting pipe (82), which is connected between two adjacent first containers (10). One end of the first connecting pipe (82) is connected to the exhaust port and the other end extends below the liquid surface of the solution.

7. The exhaust gas treatment device according to any one of claims 1-6, characterized in that, Also includes: The second container (20) and the second connecting pipe (83) are located downstream of the first container (10) in the direction of fluid flow. The second container (20) has a cavity (21) and an outlet communicating with the cavity (21). A filter element (60) is provided in the cavity (21). One end of the second connecting pipe (83) is connected to the exhaust port of the first container (10), and the other end of the second connecting pipe (83) extends into the cavity (21). The filter element (60) is located between the other end and the outlet.

8. The exhaust gas treatment device according to claim 7, characterized in that, The filter element (60) is a hydrophobic element.

9. The exhaust gas treatment device according to any one of claims 1-6, characterized in that, Also includes: An exhaust pipe (85) and a main drain pipe (87), wherein the exhaust pipe (85) connects the exhaust port and the main drain pipe (87); An airflow pipe (86) is connected to the air inlet pipe (40) and the main exhaust pipe (87), and a switch valve (92) is provided on the airflow pipe (86).

10. The exhaust gas treatment device according to claim 1, characterized in that, It also includes a storage container (30) having a storage cavity (31), and the first container (10) is adapted to discharge liquid into the storage cavity (31).

11. A boron diffusion apparatus, characterized in that, Includes the exhaust gas treatment device according to any one of claims 1-10.

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