Clamp device for machining quartz ring on MC fourth rotating shaft

Abstract

The utility model discloses a clamp device for machining a quartz ring on an MC fourth rotating shaft. The clamp device comprises a vacuum suction cup, a plurality of fixing assemblies and a rotary air guide rod. Wherein a vacuum air passage is arranged on the upper surface of the vacuum chuck, a rotary air guide rod is mounted at the bottom of the vacuum chuck, and the rotary air guide rod is communicated with the vacuum air passage and is connected with an external vacuum generation system; the rotary air guide rod is connected with the fourth rotary shaft to drive the vacuum chuck to rotate; the plurality of fixing assemblies are arranged on the peripheral side of the vacuum chuck, each fixing assembly is formed by combining a positioning block and a chuck, the positioning block is fixedly mounted on the vacuum chuck, the chuck is connected with the positioning block through a pair of screws, the pair of screws is arranged above the chuck, and the chuck is controlled to move up and down, stretch and retract and is pressed on the periphery of the quartz ring by rotating the screws. The fixture device is simple in structure, stable clamping of the quartz ring on the MC fourth rotating shaft can be effectively guaranteed, the roundness of the machined quartz ring is controlled, and the machining efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of clamp device for MC fourth rotating shaft processing quartz ring, belong to the technical field of semiconductor quartz material processing. BACKGROUND

[0002] Quartz ring is widely used in semiconductor etching equipment, as important parts such as shielding ring, insulating ring, in wafer processing process, quartz material products will be consumed periodically. With the development of new computing era driven by Internet of Things, big data and artificial intelligence, the demand for semiconductor devices is increasing, and the development trend of semiconductor industry is continuously good, which also puts forward more requirements on the quality of quartz raw materials in semiconductor etching equipment, especially the inner and outer diameter true roundness control and processing efficiency of quartz ring.

[0003] In the process of MC (machining center) processing quartz ring, many need to grind the inner diameter of quartz ring, and if the XY axis precision of traditional three-axis XYZ machining center machine tool (gantry type, vertical type) is not high or the lead screw guide is aging, the inner diameter is machined by interpolation, which is easy to cause the product true roundness to be too large, and the diameter direction ridge line and other conditions, and the processing efficiency is not high. And the true roundness of quartz ring product is generally controlled below 30µm, and the true roundness can be effectively controlled by rotary machining method; therefore, by designing tooling, vacuum chuck is installed and used on three-axis machine tool of machining center, so that the machine tool is provided with a fourth rotating shaft, the quartz ring is fixed by the method, and the true roundness problem of the processed quartz ring is solved. However, due to the poor flatness of general processed quartz ring (more than 50µm), and the special shape of general quartz ring and the small area of the bottom for adsorption, it is not easy to adsorb on the chuck, and special method is needed for fixing in addition to chuck adsorption. SUMMARY

[0004] The utility model aims at providing a kind of clamp device for MC fourth rotating shaft processing quartz ring, solve the fixed clamping problem when quartz ring product is processed using MC fourth rotating shaft, effectively control the true roundness of processed quartz ring, improve processing efficiency.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0006] A kind of clamp device for MC fourth rotating shaft processing quartz ring, the clamp device includes vacuum chuck, multiple fixed components, rotating air guide rod;Wherein,

[0007] The upper surface of the vacuum chuck is provided with a vacuum air duct, a rotary air guide rod is installed at the bottom of the vacuum chuck, the rotary air guide rod is communicated with the vacuum air duct of the vacuum chuck, and a negative pressure is generated by connecting an external vacuum generating system to adsorb the quartz ring on the upper surface of the vacuum chuck; the rotary air guide rod is connected with the fourth rotating shaft, so that the vacuum chuck is driven to rotate;

[0008] A plurality of fixing assemblies are arranged on the outer circumferential side of the vacuum chuck, each fixing assembly is combined by a positioning block and a chuck, the positioning block is fixedly installed on the vacuum chuck, the chuck is connected with the positioning block through a pair of screws, the pair of screws are arranged above the chuck, and the chuck is controlled to move up and down, stretch and be pressed against the outer periphery of the quartz ring through rotating the screws.

[0009] Preferably, the number of the fixing assemblies is 4, and the fixing assemblies are symmetrically distributed in four directions of the vacuum chuck.

[0010] Preferably, the chuck is provided with a buffer pad at a contact part with the quartz ring.

[0011] Preferably, the lower end of the rotary air guide rod is installed on the bottom plate and connected with the external vacuum generating system through the air holes arranged on the bottom plate.

[0012] The utility model discloses the advantages are:

[0013] The utility model discloses the adsorption effect and the positioning block chuck clamping effect of vacuum chuck are cooperated with each other, realize the fixing of quartz ring on the rotating shaft, and the precision of positioning block guarantees the concentric precision of quartz ring in the rotation process, and the whole device can cooperate with the rotating shaft, and is installed on the gantry type, vertical three -axis MC machine tool, can realize quartz ring rotation function, thereby makes quartz ring carry out the processing of internal diameter under the rotation state, guarantees quartz ring roundness, improves the processing quality and processing efficiency of quartz ring. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the structure schematic view of the fixture device of the utility model.

[0015] Figure 2 It is the left isometric view of the fixture device under the fixed quartz ring product state.

[0016] Figure 3 It is the front view of the fixture device of the utility model.

[0017] Figure 4 It is the plan view of the fixture device of the utility model. DETAILED DESCRIPTION

[0018] The utility model will be further explained below by combining with the drawings and specific embodiment, but does not mean the limitation to the protection scope of the utility model.

[0019] AsFigure 1 As shown, the clamp device for MC fourth rotating shaft processing quartz ring of the utility model includes vacuum chuck 1, positioning block 2, chuck 3, rotating gas guide rod 4, air inlet hole 5, bottom plate 6, wherein a circle of vacuum air duct is arranged on the upper surface of the vacuum chuck according to the size of the bottom of the processed quartz ring, the quartz ring is placed on the corresponding position of the vacuum air duct, the quartz vacuum chuck 1 is connected with the rotating gas guide rod 4 through the vacuum air duct, the lower end of the rotating gas guide rod 4 is installed on the bottom plate 6, and the air hole 5 is opened on the bottom plate 6 and connected with the external vacuum generating system, such as vacuum generator, vacuum pump and other vacuum devices, and the vacuum air duct generates negative pressure adsorption of the bottom of the quartz ring through vacuumizing.

[0020] The number of positioning block 2 and chuck 3 is 4, and the four fixing assemblies formed by the combination of the two are uniformly distributed in the four directions of the vacuum chuck. The positioning block 2 is fixed on the vacuum chuck, and the chuck 3 is connected with the positioning block 2 through a pair of screws, the pair of screws are arranged above the chuck, the chuck is controlled to move up and down and be compressed by rotating the screw, so that the chuck is attached to the outer periphery of the product quartz ring. The chuck is compressed on the outer periphery of the quartz ring by tightening the screw, so as to clamp the quartz ring and ensure the concentricity. The contact surface of the chuck 3 and the quartz ring 7 is provided with a buffer pad made of Teflon material, so as to avoid scratching the surface of the quartz ring.

[0021] The rotating gas guide rod 4 is connected with the bottom fourth rotating shaft, plays a transmission role, so that the bottom direct drive motor drives the vacuum chuck to rotate, and the quartz ring is processed in the fixed state of the slot and the inner diameter.

[0022] The vacuum chuck is made of 2Cr13 material, which has higher hardness and corrosion resistance than 304 stainless steel, so that the chuck is not easy to deform.

[0023] The clamp device for MC fourth rotating shaft processing quartz ring of the utility model can ensure that the quartz ring is processed in the rotating state, ensure the roundness, and improve the processing efficiency. The utility model can be installed on the three-axis gantry type and vertical MC machine tool in cooperation with the rotating shaft, realize the workpiece rotating function, and greatly optimize the quartz product processing technology.

Claims

1. A clamping device for machining quartz rings on the fourth rotary axis of an MC machine, characterized in that, The clamping device includes a vacuum suction cup, multiple fixing components, and a rotating air guide rod; among which... The upper surface of the vacuum suction cup is provided with vacuum channels, and a rotating air guide rod is installed at the bottom of the vacuum suction cup. The rotating air guide rod is connected to the vacuum channels of the vacuum suction cup and generates negative pressure by connecting to an external vacuum generating system to adsorb the quartz ring onto the upper surface of the vacuum suction cup. The rotating air guide rod is connected to a fourth rotating shaft, thereby driving the vacuum suction cup to rotate. Multiple fixing components are set on the outer periphery of the vacuum suction cup. Each fixing component is composed of a positioning block and a clamp. The positioning block is fixedly installed on the vacuum suction cup. The clamp is connected to the positioning block by a pair of screws. The pair of screws are located above the clamp. By rotating the screws, the clamp can be controlled to move up and down, extend and retract, and press against the outer periphery of the quartz ring.

2. The clamping device for machining quartz rings on the fourth rotary axis of MC according to claim 1, characterized in that, The number of fixing components is four, symmetrically distributed in the four directions of the vacuum suction cup.

3. The clamping device for machining quartz rings on the fourth rotary axis of MC according to claim 1 or 2, characterized in that, The chuck has a buffer pad at the contact point with the quartz ring.

4. The clamping device for machining quartz rings on the fourth rotary axis of MC according to claim 1 or 2, characterized in that, The lower end of the rotating air guide rod is mounted on the base plate and connected to an external vacuum generating system through an air hole provided on the base plate.

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