Quartz tube transfer tool

Abstract

The utility model discloses a quartz tube transfer tool which comprises a main beam, a supporting assembly and a steering assembly. The supporting assembly is arranged between the main beams and is used for supporting the quartz tube; the steering assembly is arranged on the main beam in a foldable mode so as to be switched between an inclined state and a horizontal state. According to the utility model, quartz tubes can be safely and stably transferred, and state switching can be realized.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment manufacturing, and in particular to a quartz tube transfer tool. Background Technology

[0002] In semiconductor manufacturing, quartz tubes are crucial pieces of equipment. Before use, they require transfer and installation. Current methods typically involve manual lifting or simple flatbed trolleys. Manual lifting is prone to worker injuries and poses safety hazards. While simple flatbed trolleys reduce worker workload, the tubes are prone to slipping during transport and cannot be effectively secured. Furthermore, existing transport equipment struggles to switch the tubes from a horizontal to an inclined position for installation, increasing installation difficulty and safety risks. Additionally, the surface of quartz tubes is easily damaged, and existing transport equipment lacks effective protective structures, making them susceptible to damage during transport.

[0003] Therefore, there is an urgent need to propose a quartz tube transfer tool to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a quartz tube transfer tool that can safely and stably transfer quartz tubes and achieve state switching.

[0005] To solve the above-mentioned technical problems, this utility model provides a quartz tube transfer fixture, including a main beam, a support assembly, and a steering assembly; the support assembly is disposed between the main beams to support the quartz tube; the steering assembly is foldably disposed on the main beam to switch between an inclined state and a horizontal state.

[0006] Furthermore, the support assembly includes a connecting beam, a fixed seat, a pressure plate, and a bottom pad; the two ends of the connecting beam are respectively connected to the main beam; the fixed seat is installed on the connecting beam; the pressure plate is provided at both ends of the fixed seat; the bottom pad is disposed on the fixed seat, the bottom pad is located between the pressure plates, and abuts against the pressure plates.

[0007] Furthermore, the fixing base includes a first receiving plate and a plurality of second receiving plates; both ends of the first receiving plate are respectively connected to the plurality of second receiving plates; the second receiving plates are provided with adjustment grooves; the pressure plate is adjustablely mounted on the fixing base through the adjustment grooves.

[0008] Furthermore, the connecting beam, the fixing seat, the pressure plate, and the bottom pad are all arc-shaped structures that match the outer surface of the quartz tube.

[0009] Further, the two sides of the fixing seat are provided with limiting plates, and the limiting plates are matched with the pressing plate to fix the bottom pad.

[0010] Further, the turning assembly comprises a support, a roller and a baffle; the support is rotatably installed on the main beam through a hinge; one end of the support away from the main beam is connected with the roller; the roller is provided with a locking device; the baffle is fixed on the main beam and located on the rotating path of the support.

[0011] Further, the main beam comprises a top part, a middle part and a bottom part connected in sequence; the support assembly is arranged on the top part, the middle part and the bottom part; the bottom part is provided with an air cushion wheel; one side of the support assembly located at the bottom part and away from the quartz tube is connected with a device plate; the device plate is provided with a reinforcing rib.

[0012] Further, the main beam is a plurality of main beams arranged symmetrically; the top parts of the main beams are jointly connected with a curved height-raising rod; the height of the curved height-raising rod is greater than the radius of the air cushion wheel.

[0013] Further, the curved height-raising rod is covered with a collision-preventing pad.

[0014] Further, the safety belt with elasticity is further included; two ends of the safety belt are connected with the main beams respectively.

[0015] Through the above technical scheme, the quartz tube transfer tool has the following beneficial effects:

[0016] Through cooperation of the main beam, the support assembly and the turning assembly, the switching between the horizontal state and the inclined state of the quartz tube can be realized, and meanwhile, the support assembly can stably support the quartz tube, so that displacement or damage of the quartz tube in the transfer process is avoided.

[0017] In addition, through the bottom pad and the pressing plate structure of the support assembly, the surface of the quartz tube can be effectively protected; through the locking device of the turning assembly, the stability in the state switching process can be ensured; through the air cushion wheel, the labor intensity of workers can be reduced and the transfer efficiency can be improved; through the curved height-raising rod and the collision-preventing pad, the collision between the quartz tube and the outside can be effectively prevented. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 is a whole structure schematic view of the quartz tube transfer tool in the process of transferring the quartz tube according to an embodiment of the present application;

[0019] Figure 2 Fig. 2 is a side view of the quartz tube transfer tool in the process of transferring the quartz tube according to an embodiment of the present application;

[0020] Figure 3 Fig. 3 is a whole structure schematic view of the quartz tube transfer tool according to an embodiment of the present application.

[0021] Figure 4 For Figure 3 the local enlarged view at A in the middle;

[0022] Figure 5 For the front view of the quartz tube transfer tool in an embodiment of the utility model.

[0023] In the figure, 1, main beam; 2, support assembly; 21, connecting beam; 22, fixed seat; 223, adjusting groove; 23, pressing plate; 24, bottom pad; 25, limiting plate; 31, support; 32, roller; 33, baffle; 34, locking device; 4, air cushion wheel; 5, curved height-raising rod; 6, anti-collision pad; 7, safety belt; 8, handheld rod; 9, device plate; 91, reinforcing rib; 100, quartz tube. DETAILED DESCRIPTION

[0024] The quartz tube transfer tool of the utility model will be described in more detail below in conjunction with the drawings, wherein the preferred embodiment of the utility model is shown, and it should be understood that the utility model described herein can be modified by those skilled in the art, and the advantageous effects of the utility model can still be achieved. Therefore, the following description should be understood as extensive knowledge for those skilled in the art, and not as a limitation on the utility model.

[0025] The utility model will be described in more detail in the following paragraphs with reference to the drawings. The advantages and features of the utility model will be more apparent according to the following description. It should be noted that the drawings are very simplified and all use non-precise proportions, only to facilitate, clearly assist in the purpose of explaining the embodiment of the utility model.

[0026] As Figures 1-2 shown, the utility model embodiment proposes a kind of convenient and practical quartz tube 100 transfer tool, including main beam 1, support assembly 2 and steering assembly.

[0027] Specifically, the support assembly 2 is arranged between the main beam 1, for supporting quartz tube 100;The steering assembly is foldably arranged on the main beam 1, by its folding function makes the device can be switched between inclined state and horizontal state, facilitate the transfer and installation of quartz tube 100 in narrow space.

[0028] In the embodiment, in conjunction with Figures 3-4 shown, the support assembly 2 includes connecting beam 21, fixed seat 22, pressing plate 23 and bottom pad 24.

[0029] Specifically, the two ends of the connecting beam 21 are connected to the main beam 1 respectively; the fixing seat 22 is installed on the connecting beam 21; the two ends of the fixing seat 22 are provided with the pressing plate 23; the bottom pad 24 is arranged on the fixing seat 22, and the bottom pad 24 is located between the pressing plates 23 and abuts against the pressing plates 23.

[0030] As known by those skilled in the art, the connecting beam 21 can be a hollow steel pipe made of 304 stainless steel, the center distance of which can be adjusted within a predetermined range, and the length of which can be set according to actual needs. The multi-point support structure design improves the stability of the quartz tube 100 placement and effectively prevents shaking during transportation.

[0031] In a specific example, for example, the connecting beam 21 includes two identical concave steel pipes, i.e., a first connecting beam 21 and a second connecting beam 21. The two ends of the two connecting beams 21 are connected to the main beam 1, which is used to connect and strengthen the stability of the overall structure, and also enables the quartz tube 100 to be stably placed on the bottom pad 24 and fixed by the pressing plate 23.

[0032] In the embodiment, the fixing seat 22 includes a first receiving plate and a plurality of second receiving plates. Specifically, the two ends of the first receiving plate are connected to the plurality of second receiving plates respectively; the second receiving plate is provided with an adjusting groove 223; and the pressing plate 23 is adjustably installed on the fixing seat 22 through the adjusting groove 223. As known by those skilled in the art, the number of second receiving plates can be set according to actual needs. The adjusting groove 223 can be designed as a long strip-shaped through hole, and the width thereof can be adjusted according to actual needs. This adjustable design enables the device to adapt to quartz tubes 100 of different diameters, thereby enhancing the versatility of the equipment.

[0033] In a specific example, the pressing plate 23 is adjustably mounted on the fixing seat 22 through the adjusting groove 223, bolts and nuts. For example, the adjusting groove 223 can be a long strip-shaped through hole. When it is necessary to adjust the position of the pressing plate 23, the nuts are first loosened, and then the pressing plate 23 can be moved along the length direction of the adjusting groove 223. The position of the pressing plate 23 is adjusted to match the outer wall of the quartz tube 100 with different diameters, and then the nuts are tightened to fix the pressing plate 23 in the appropriate position. For example, for the quartz tube 100 with an outer diameter of 480 mm, the spacing of the pressing plate 23 can be adjusted to 490-500 mm; for the quartz tube 100 with an outer diameter of 500 mm, the spacing of the pressing plate 23 can be adjusted to 510-520 mm. Those skilled in the art can know that the bolts and nuts can be made of 304 stainless steel material to ensure sufficient mechanical strength and corrosion resistance. Therefore, through the setting of the adjusting groove 223, the position of the pressing plate 23 can be adjusted according to the quartz tube 100 with different diameters, thereby improving the adaptability of the device. Those skilled in the art can know that the size of the adjusting groove 223 can be set according to the diameter range of the actual quartz tube 100.

[0034] Preferably, the connecting beam 21, the fixing seat 22, the pressing plate 23 and the bottom pad 24 are all circular arc structures matching the outer surface of the quartz tube 100. The radius of curvature of the circular arc can be matched according to the outer diameter of the quartz tube 100, for example, for the quartz tube 100 with a diameter of 500 mm, the radius of the circular arc can be designed to be 250-260 mm. This matching design increases the contact area and provides better support effect.

[0035] Preferably, the bottom pad 24 is made of pearl wool or polystyrene material, and the center is excavated into a circular arc shape for receiving the lower surface of the quartz tube 100. This setting can increase the contact area and improve the support stability.

[0036] In an embodiment, the fixing seat 22 is provided with limiting plates 25 on both sides, and the limiting plates 25 cooperate with the pressing plate 23 to fix the bottom pad 24. More specifically, the upper and lower end faces of the first receiving plate of the fixing seat 22 are respectively welded with the same limiting plates 25 with circular arc faces, and the limiting plates 25 cooperate with the pressing plate 23 to fix the bottom pad 24. Through the cooperation of the limiting plates 25 and the pressing plate 23, multi-point fixing of the bottom pad 24 is formed to ensure the stable position of the bottom pad 24.

[0037] Further, the limiting plates 25 are made of stainless steel plates with a predetermined thickness and are connected to the fixing seat 22 by welding. This structure forms multi-directional limiting of the bottom pad 24 to prevent displacement of the bottom pad 24 during use.

[0038] In the embodiment, the turning assembly comprises a bracket 31, a roller 32 and a baffle 33. Specifically, the bracket 31 is pivotally mounted on the main beam 1 by a hinge; the end of the bracket 31 away from the main beam 1 is connected to the roller 32; and the roller 32 is provided with a locking device 34. The bracket 31 can be designed in an I-shaped structure and made of 304 stainless steel, the roller 32 can be an industrial universal wheel with a load capacity of more than 200 kg, and the locking device 34 can be a bidirectional locking mechanism. This design can ensure the reliability and safety of the turning function.

[0039] Further, the baffle 33 is welded and fixed on the main beam 1 and located on the turning path of the bracket 31, for limiting the turning angle of the bracket 31. Under the action of gravity and the shearing force of the hinge, the bracket 31 can be stably placed on the baffle 33 during inclined transportation.

[0040] In the embodiment, the main beam 1 comprises a top portion, a middle portion and a bottom portion connected in sequence. The length of the main beam 1 can be controlled at about 2000 mm, which is about half the height of the quartz tube 100. The support assembly 2 is arranged on the top portion, the middle portion and the bottom portion; the bottom portion is provided with an air cushion wheel 4; the side of the support assembly 2 in the bottom portion away from the quartz tube 100 is connected to a device plate 9; and the device plate 9 is provided with a reinforcing rib 91. Preferably, the air cushion wheel 4 is made of polyurethane, for example, with a diameter of 150-200 mm and a load capacity of not less than 100 kg, thereby providing a stable support effect, and the use of the air cushion wheel 4 reduces the vibration during transportation. In addition, the side of the support assembly 2 in the bottom portion away from the quartz tube 100 is connected to the device plate 9, and the back side (i.e. the side away from the quartz tube 100) of the device plate 9 can be welded with the reinforcing rib 91 as the main bearing surface, thereby enhancing the structural strength.

[0041] In the embodiment, the main beam 1 is a plurality of main beams 1 arranged symmetrically; the top portions of the main beams 1 are jointly connected to a curved height-raising rod 5; and the height of the curved height-raising rod 5 is greater than the radius of the air cushion wheel 4, so that the quartz tube 100 forms a predetermined inclination angle when placed horizontally, thereby preventing the quartz tube 100 from sliding when placed horizontally and improving the safety in use. The predetermined inclination angle can be set according to actual needs, for example, by increasing the height of the curved height-raising rod 5 to increase the inclination angle.

[0042] In a specific example, the main beam 1 is two main beams 1 arranged symmetrically, and the top portions of the two main beams 1 are jointly connected to a curved height-raising rod 5. The curved height-raising rod 5 can be covered with a bump stop 6 having anti-friction scratch and anti-shock functions. The height of the curved height-raising rod 5 is greater than the radius of the air cushion wheel 4, so that the quartz tube 100 can be tilted at an inclination angle of about 5° after the tooling is placed flat, and part of the weight is pressed on the device plate 9, thereby preventing sliding.

[0043] The anti-collision pad 6 can be made of EVA, rubber or other materials with good cushioning performance, and the thickness is between 10-20mm. This design effectively prevents collision damage with other equipment during transfer.

[0044] Preferably, the main beam 1 is provided with a hand-held rod 8. The height of the hand-held rod 8 from the ground is about 1100mm, which meets the ergonomic design.

[0045] In addition, the embodiment also includes an elastic safety belt 7, and the two ends of the safety belt 7 are connected with the plurality of main beams 1. In a specific example, the safety belt 7 includes a middle safety belt 7 and a bottom safety belt 7, which are connected with the middle lock and the bottom lock provided on the main beam 1 respectively, so as to facilitate disassembly or replacement.

[0046] Preferably, the safety belt 7 is made of wear-resistant nylon material, and the width can be set according to actual needs, and has a predetermined extension allowance. Through the fixation of the elastic safety belt 7, the stability of the quartz tube 100 during transfer is further ensured. Those skilled in the art can know that the specific number and installation position of the safety belt 7 can be appropriately adjusted according to the size of the quartz tube 100.

[0047] In use, the device can be switched between the inclined state and the horizontal state according to actual needs. When encountering a narrow corner, the tool is adjusted to the inclined state through the steering assembly to reduce the space requirement for transfer; when installing, the device can be adjusted to the horizontal state to facilitate operation. During the whole process, the cooperation of the multi-point support structure and the safety belt 7 ensures the safety and stability of the quartz tube 100 during transfer.

[0048] Those skilled in the art can know that the specific parameters of the hardware structure involved in the above embodiment can be appropriately adjusted according to the actual application scene, for example, the length of the main beam 1, the length of the safety belt 7, the inclination angle and other parameters can be set according to the specifications of the specific quartz tube 100.

[0049] In this embodiment, the combination of the multi-point support structure and the safety belt 7 can effectively ensure the stability of the quartz tube 100 during transfer. Figures 1-5 As shown in the figure, the quartz tube 100 is loaded: first, adjust the device to the horizontal state, at this time the support 31 of the steering assembly is in the retracted position. Place the bottom pad 24 on each fixing seat 22 and fix it through the limiting plate 25 and the pressing plate 23. According to the diameter of the quartz tube 100, the position of the pressing plate 23 can be adjusted through the adjusting groove 223 to ensure that it matches the outer diameter of the quartz tube 100. Place the quartz tube 100 gently on the bottom pad 24 so that it fits the arc-shaped structure. Then fix the quartz tube 100 through the middle safety belt 7 and the bottom safety belt 7, and adjust the tightness of the safety belt 7 to ensure the stability of the quartz tube 100.

[0050] Horizontal transportation: when transporting in a spacious site, keep the device horizontal. The operator holds the hand-held rod 8 and pushes the tool, and the air cushion wheel 4 is used to move stably. At this time, the quartz tube 100 is inclined at an angle of about 5° due to the design of the curved heightening rod 5, and part of the weight is pressed on the device plate 9 to prevent sliding.

[0051] Narrow space transportation: when encountering a limited space such as a narrow corner or a door opening, it is necessary to switch to an inclined state. The specific operation is as follows: first, loosen the locking device 34 on the roller 32; hold the hand-held rod 8 and gently tilt the tool backward. At this time, the support 31 of the steering assembly will automatically expand until it contacts the baffle 33 on the main beam 1. The support 31 is locked after the roller 32 is expanded. After the steering assembly is expanded, the device is kept in a stable inclined state with the roller 32 and the air cushion wheel 4 as the fulcrum.

[0052] State switching: when passing through the limited space, it is necessary to restore to the horizontal state: hold the hand-held rod 8; unlock the roller 32; slowly push forward to make the tool return to the horizontal state; the support 31 of the steering assembly is automatically retracted under the action of gravity; the whole switching process is stable and controllable, and the design of multiple support points and the safety belt 7 ensures that the quartz tube 100 is always stably fixed.

[0053] From the above use process, it can be seen that the device can realize flexible switching between the horizontal state and the inclined state during the transportation of the quartz tube 100, and solves the problem that the traditional transportation equipment is difficult to operate in a limited space. At the same time, the setting of multiple protection measures ensures the safety and reliability of the whole transportation process.

[0054] In summary, the quartz tube transportation tool has the following advantages:

[0055] Through the cooperation of the main beam, the support assembly and the steering assembly, the switching between the horizontal state and the inclined state of the quartz tube can be realized, and the support assembly can stably support the quartz tube to avoid displacement or damage of the quartz tube during transportation.

[0056] In addition, through the bottom pad and the pressing plate structure of the support assembly, the surface of the quartz tube can be effectively protected; through the locking device of the steering assembly, the stability of the state switching process can be ensured; through the setting of the air cushion wheel, the labor intensity of workers can be reduced and the transportation efficiency can be improved; through the setting of the curved heightening rod and the anti-collision pad, the collision between the quartz tube and the outside can be effectively prevented.

[0057] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. A quartz tube transfer tool, characterized by, The application relates to a quartz tube supporting device, which comprises main beams, supporting assemblies and turning assemblies; the supporting assemblies are arranged between the main beams and used for supporting quartz tubes; and the turning assemblies are arranged on the main beams in a foldable mode to switch between an inclined state and a horizontal state.

2. The quartz tube transfer tooling of claim 1, wherein, The supporting assembly comprises connecting beams, fixing bases, pressing plates and bottom pads; the two ends of the connecting beams are connected with the main beams respectively; the fixing bases are arranged on the connecting beams; the two ends of the fixing bases are provided with the pressing plates; and the bottom pads are arranged on the fixing bases and located between the pressing plates and abutted with the pressing plates.

3. The quartz tube transfer tooling of claim 2, wherein, The fixing base comprises a first receiving plate and a plurality of second receiving plates; the two ends of the first receiving plate are connected with the second receiving plates respectively; the second receiving plates are provided with adjusting grooves; and the pressing plates are adjustably arranged on the fixing base through the adjusting grooves.

4. The quartz tube transfer tooling of claim 2, wherein, The connecting beams, the fixing bases, the pressing plates and the bottom pads are all circular arc structures matched with the outer surface of the quartz tube.

5. The quartz tube transfer tool of claim 2, wherein, The two sides of the fixing base are provided with limiting plates, and the limiting plates and the pressing plates are used for fixing the bottom pads.

6. The quartz tube transfer tool of claim 1, wherein, The turning assembly comprises a support, a roller and a baffle; the support is arranged on the main beam through a hinge in a rotating mode; one end of the support away from the main beam is connected with the roller; the roller is provided with locking devices; and the baffle is fixed on the main beam and located on the rotating path of the support.

7. The quartz tube transfer tool of claim 1, wherein The main beam comprises a top part, a middle part and a bottom part connected in sequence; the supporting assemblies are arranged on the top part, the middle part and the bottom part; the bottom part is provided with air cushion wheels; one side of the supporting assembly in the bottom part away from the quartz tube is connected with a device plate; and the device plate is provided with reinforcing ribs.

8. The quartz tube transfer tool of claim 7, wherein, The main beam is a plurality of main beams arranged in a symmetrical mode; the top parts of the main beams are jointly connected with a curved height-raising rod; and the height of the curved height-raising rod is greater than the radius of the air cushion wheels.

9. The quartz tube transfer tool of claim 8, wherein, The curved height-raising rod is covered with an anti-collision pad.

10. The quartz tube transfer tool of claim 1, wherein, The application further relates to a safety belt with elasticity; and the two ends of the safety belt are connected with the main beams respectively. The application further relates to a safety belt with elasticity; and the two ends of the safety belt are connected with the main beams respectively.

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